• 제목/요약/키워드: Fe-doping

검색결과 208건 처리시간 0.031초

Fe ion을 주입한 1.55$\mu\textrm{m}$ MQW 레이저 다이오드의 전기적 절연 특성

  • 강병권;김태곤;박윤호;우덕하;이석;김선호;강광남;송종한;황정남;박승한
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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    • pp.91-91
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    • 1999
  • 광소자 기술은 정보 전달 및 저장 기술의 지속적인 증가 요구에 따라 발전을 거듭하여 왔다. 특히 광통신 및 저장 기술에서 광원으로 사용되는 레이저 다이오드는 안정되면서 쉽게 제작할 수 있어야 한다. 이온 주입 방법은 반도체 공정에서 광범위하게 사용되는 공정이며 이미 소자측면에서 안정성이 확보되었다고 볼 수 있으나 대부분 메모리 등의 실리콘 반도체에서 이용되어 왔다. 최근에는 화합물 반도체 분야에서도 적용하는 예가 증가되고 있으나 광원으로 사용되는 레이저 다이오드의 경우는 우수한 품질의 반도체 층이 요구되며 따라서 damage가 큰 이온 주입 방법을 이용한 연구는 아직 많이 이루어져 있지 않다. 본 연구에서는 레이저 다이오드 구조의 성장측에 국부적으로 Fe 이온을 주입하여 도파로를 형성하여 광을 구속하여 도파시키는 동시에 전기적으로도 도파로 부분으로만 다이오드가 형성되도록 하고자 한다. 먼저 p층의 전기적 절연에 필요한 조건을 확보하기 위하여 CBE를 사용하여 Fe가 doping 된 SI-InP wafer 위에 p-InP (Be:5x1017 cm-3)층을 1.2$mu extrm{m}$ 성장한 후 ohmic 층으로 p-InGaAs (Be:1x1019 cm-3)을 0.1$\mu\textrm{m}$ 성장한 시료에 고에너지 이온 주입 장치를 사용하여 Fe 이온을 1MeV, 1.6meV의 에너지에 각각 1x1014cm-2, 2x1014cm-2 의 dose로 전면에 implant 하였다. 이 시료를 tube furnace에서 500, 600, $700^{\circ}C$각각 10분씩 annealing 한 후 재성장을 확인하기 위하여 DCXRD을 측정하였다. 그림 1은 DCXRD rocking curve로 annealing 하기 전 후의 In rich에서 side peak의 감소를 확인 할 수 있었는데 이는 damage가 어느 정도 복구되었음을 의미한다. 또한 절연 특성을 확인하기 위하여 ohmic metal을 증착하여 Hall 효과를 측정하였다. 그림 2에 보이는 것과 같이 annealing 온도가 증가함에 따라 면저항이 크게 증가함을 볼 수 있으며 이온 주입하기 전의 시료에 비해 104 이상의 저항을 갖을 수 있다. 향후 이러한 결과를 바탕으로 1.55$\mu\textrm{m}$ LD 구조에서 발진 특성을 관찰할 계획이다.

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Undoped and heavily MgO-doped $LiNbO_3$ 결정의 성장 및 결함구조 (Growth and defect structures of undoped and heavily MgO-doped LiNbO3 single crystals)

  • 김상수
    • 한국결정성장학회지
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    • 제9권5호
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    • pp.447-453
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    • 1999
  • Czochralski법으로 congruent한 조성(48.6 mol% $LiNbO_2$)과 $LiNbO_3$: Mg(4.5, 6.0, 10.0, 20.0mol%), $LiNbO_3$ : Mn(0.1 mol%), $LiNbO_3$: Fe(0.05 mol%), $LiNbO_3$ : (Mg(4.5)+Mn(0.1), Fe(0.05 mol%)), LiNbO3 : (Mg(20.0)+Mn(0.1), Fe(0.05 mol%))인 융액으로부터 결정을 c-축 방향으로 성장시켰다. 이 결정들은 상온에서의 XRD pattern과 상온~$1230^{\circ}C$의 온도영역과 100Hz~10MHz의 주파수영역에서의 유전상수, 상온에서의 UV_VIS, IR 스펙트럼, 결정내의 Mn2+, Fe3+ 이온에 대한 ESR 스펙트럼 등을 측정하였는데 XRD pattern과 상전이 온도, UV 흡수단, OH- 이온에 의한 스펙트럼, ESR 스펙트럼 등의 Mg첨가량 의존성으로부터 Mg가 첨가된 $LiNbO_3$ 결정의 결함구조에 대해서 논의하였다. congruent한 $LiNbO_3$결정과 Mg를 첨가한 $LiNbO_3$ 결정에서의 Mn2+ 이온은 Mg의 첨가량에 관계없이 Li+을 치환한다. 그러나 congruent한 $LiNbO_3$ 결정과 Mg를 첨가한 $LiNbO_3$ 결정에서의 Fe3+ 이온은 Mg가 4.5 mol% 첨가된 결정에서는 Li+ 자리를 Mg가 6.0 mol% 이상 첨가된 결정에서는 {{{{ { Nb}`_{Li } ^{5+ } }}}} 자리를 치환한다.

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SrCo0.8Fe0.1Nb0.1O3-δ 세라믹 분리막의 산소투과 특성 및 이산화탄소에 대한 내성 (Oxygen Permeability and Resistance to Carbon Dioxide of SrCo0.8Fe0.1Nb0.1O3-δ Ceramic Membrane)

  • 김은주;박세형;박정훈;백일현
    • 멤브레인
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    • 제25권5호
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    • pp.415-421
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    • 2015
  • 고상반응법을 이용하여 $SrCo_{0.8}Fe_{0.1}Nb_{0.1}O_{3-{\delta}}$ 조성의 산화물을 합성하였으며, 합성된 분말은 압축 성형 후 $1250^{\circ}C$에서 소결하여 치밀한 세라믹 분리막을 제조하였다. XRD 분석을 통해 단일상의 페롭스카이트 구조를 확인하였다. 산소 분압이 0.21 atm, 측정 온도가 $800{\sim}950^{\circ}C$인 조건하에서 산소투과를 분석한 결과 온도가 증가할수록 산소투과량은 증가하였고, $950^{\circ}C$에서 $1.839mL/min{\cdot}cm^2$로 최대값을 나타내었다. 니오븀(Nb)을 포함한 세라믹 분리막의 상안정성 및 이산화탄소 내성을 확인하기 위하여 $900^{\circ}C$에서 이산화탄소가 500 ppm이 포함된 혼합공기를 이용하여 장기투과 실험을 수행하였다. 이산화탄소에 노출된 $SrCo_{0.8}Fe_{0.1}Nb_{0.1}O_{3-{\delta}}$의 상안정성은 XRD와 TG로 분석하였다. 분석 결과, 이산화탄소에 노출된 $SrCo_{0.8}Fe_{0.1}Nb_{0.1}O_{3-{\delta}}$ 조성의 경우 약 8%의 $SrCO_3$가 생성되었으나, 이 수준의 $SrCO_3$ 생성량은 분리막의 산소투과도에 큰 영향을 주지 않는 것을 확인하였다.

중.저온형 고체 산화물 연료전지의 공기극으로 사용되는 PSCF3737 물질의 특성에 관한 연구 (Characterization of PSCF3737 for intermediate temperature solid oxide fuel cell (IT-SOFC))

  • 박광진;배중면
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2008년도 춘계학술대회 논문집
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    • pp.61-64
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    • 2008
  • $Pr_{0.3}Sr_{0.7}Co_{0.3}Fe_{0.7}O_{3-\delta}$ (PSCF3737) was prepared and characterized as a cathode material for intermediate temperature-operating solid oxide fuel cell (IT-SOFC). X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), extended X-ray absorption fine structure (EXAFS), and electrical property measurement were carried out to study cathode performance of the material. XPS and EXAFS results proved that oxygen vacancy concentration was decreased and lattice constants of the perovskite structure material were increased by doping Fe up to 70 mol% at B-site of the crystal structure, which also extended the distance between oxygen and neighbor atoms. Thermal expansion coefficient (TEC) of PSCF3737 is smaller than that of $Pr_{0.3}Sr_{0.7}CoO_{3-\delta}$(PSC37) due to lower oxygen vacancy concentration. PSCF3737 showed better cathode performance than PSC37. It might be due good adhesion by a smaller difference of TEC between $Gd_{0.1}Ce_{0.9}O_2$ (CGO91) and electrode. Composite material PSCF3737-CGO91 showed better compatibility of TEC than PSCF3737. However, PSCF3737-CGO91 did not represent higher electrochemical property than PSCF3737 due to decreased reaction sites by CGO91.

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리튬 2차 전지용 고용량 스피넬계 양극물질 연구 (A study on the Spinel phase cathode materials with high capacity for lithium secondary batteries)

  • 홍기주;선양국
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2001년도 추계학술대회 논문집 전력기술부문
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    • pp.106-108
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    • 2001
  • As 3V cathode material, a new doping spinel material, LiMn1.6Se0.4O4 powder with a phase-pure polycrystalline was synthesized by a sol-gel method. In spite of Jahn-teller distortion in 3V region($2.4{\sim}3.5V$), the LiMn1.6Se0.4O4 electrode shows no capacity loss. The material in the 3V region initially delivers a discharge capacity of 100mAh/g which increase with cycling to reach 105mAh/g after 90cycles. And 5V cathode material LiNi0.5-xMxMn1.5O4(M=Cr, V, Fe) compounds have been synthesized by sol-gel method. a series of electroactive spinel compounds, LiNi0.5-xMxMn1.5O4(M=Cr, V, Fe) has been studied by crystallographic and electrochemical methods. The material presents only one plateau at around 4.5 V vs. Li/Li+ with a large discharge capacity of 152mAh/g and fairly good cyclability.

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Structural and Magnetic Properties of Cr-Zn Nanoferrites Synthesized by Chemical Co-Precipitation Method

  • Powar, Rohit R.;Phadtare, Varsha D.;Parale, Vinayak G.;Pathak, Sachin;Piste, Pravina B.;Zambare, Dnyandevo N.
    • 한국세라믹학회지
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    • 제56권5호
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    • pp.474-482
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    • 2019
  • Chromium-doped zinc ferrite nanoparticles with the general formula CryZnFe2-yO4 (y = 0, 0.025, 0.05, 0.075, and 0.1) were synthesized by a surfactant-assisted chemical co-precipitation route using metal nitrate salt precursors. The phase purity and structural parameters were determined by powder X-ray diffraction. The concentration of Cr3+ doped into ZnFe2O4 (ZF) noticeably affected the crystallite size, which was in the range of 22 nm to 36 nm, and all samples showed a single cubic spinel structure without any secondary phase or impurities. The lattice parameter, X-ray density, and skeletal density increased with an increase in the Cr-doping concentration; on the other hand, a decreasing trend was observed for the particle size and porosity. The influence of Cr3+ substitution on ZF magnetic properties were studied under an applied field of 15 kOe. The overall results revealed that the incorporation of a small amount of Cr dopant changed the structural, electrical, and magnetic properties of ZF.

전이금속원소들이 첨가된 나노 티타니아 졸 및 코팅막 제조 (Preparation of Nano Titania Sols and Thin Films added with Transition Metal Elements)

  • 이강;이남희;신승한;이희균;김선재
    • 한국재료학회지
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    • 제14권9호
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    • pp.634-641
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    • 2004
  • The photocatalytic performance of $TiO_2$ thin films coated on porous alumina balls using various aqueous $TiOCl_2$ solutions as starting precursors, to which 1.0 $mol\%$ transition metal ($Ni^{2+},\;Cr^{3+},\;Fe^{3+},\;Nb^{3+},\;and\;V^{5+}$) chlorides had been already added, has been investigated, together with characterizations for $TiO_2$ sols synthesized simultaneously in the same autoclave through hydrothermal method. The synthesized $TiO_2$ sols were all formed with an anatase phase, and their particle size was between several nm and 30 nm showing ${\zeta}-potential$ of $-25{\sim}-35$ mV, being maintained stable for over 6 months. However, the $TiO_2$ sol added with Cr had a much lower value of -potential and larger particle sizes. The coated $TiO_2$ thin films had almost the same shape and size as those of the sol. The pure $TiO_2$ sol showed the highest optical absorption in the ultraviolet light region, and other $TiO_2$ sols containing $Cr^{3+},\;Fe^{3+}\;and\;Ni^{2+}$ showed higher optical absorption than pure sol in the visible light region. According to the experiments for removal of a gas-phase benzene, the pure $TiO_2$ film showed the highest photo dissociation rate in the ultraviolet light region, but in artificial sunlight the photo dissociation rate of $TiO_2$ coated films containing $Cr^{3+},\;Fe^{3+}\;and\;Ni^{2+}$ was measured higher together with the increase of optical absorption by doping.

$C_4H_6O_5$ 도핑된 $MgB_2/Fe$ 선재의 임계특성에 대한 열처리 온도의 영향 (Influence of the Heat-treatment Temperature on the Critical Properties of $C_4H_6O_5$-doped $MgB_2/Fe$ Wire)

  • 전병혁;김정호;;김찬중
    • Progress in Superconductivity
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    • 제9권1호
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    • pp.62-67
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    • 2007
  • The effects of the heat-treatment temperature on the carbon (C) substitution amount, full width at half maximum (FWHM) value, critical temperature ($T_c$), critical current density ($J_c$) have been investigated for 10 wt % malic acid ($C_4H_6O_5$)-doped $MgB_2/Fe$ wires. All the samples were fabricated by the in-situ powder-in-tube (PIT) method and heat-treated within a temperature range of $650^{\circ}C$ to $1000^{\circ}C$. As the heat-treatment temperature increased, it seemed that the lattice distortion was increased by a more active C substitution into the boron sites from the malic acid addition. These increased electron scattering defects seemed to enhance the $J_c-H$ properties in spite of an improvement in the crystallinity, such as a decrease of the FWHM value and an increase of the $T_c$. Compared to the un-doped wire heat-treated at $650^{\circ}C$ for 30 min, the $J_c$ was enhanced by the C doping in a high-field regime. The wire heat-treated at $900^{\circ}C$ resulted in a higher magnetic $J_c$ of approximately $10^4\;A/cm^2$ at 5 K and 8 T.

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Fabrication and Characterization of MFIS-FET using Au/SBT/LZO/Si structure

  • Im, Jong-Hyun;Lee, Gwang-Geun;Kang, Hang-Sik;Jeon, Ho-Seung;Park, Byung-Eun;Kim, Chul-Ju
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.174-174
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    • 2008
  • Non-volatile memories using ferroelectric-gate field-effect transistors (Fe-FETs) with a metal/ferroelectric/semiconductor gate stack (MFS-FETs) make non-destructive read operation possible. In addition, they also have features such as high switching speed, non-volatility, radiation tolerance, and high density. However, the interface reaction between ferroelectric materials and Si substrates, i.e. generation of mobile ions and short retention, make it difficult to obtain a good ferroelectric/Si interface in an MFS-FET's gate. To overcome these difficulties, Fe-FETs with a metal/ferroelectric/insulator/semiconductor gate stack (MFIS-FETs) have been proposed, where insulator as a buffer layer is inserted between ferroelectric materials and Si substrates. We prepared $SrBi_2Ta_2O_9$ (SBT) film as a ferroelectric layer and $LaZrO_x$ (LZO) film as a buffer layer on p-type (100) silicon wafer for making the MFIS-FET devices. For definition of source and drain region, phosphosilicate glass (PSG) thin film was used as a doping source of phosphorus (P). Ultimately, the n-channel ferroelectric-gate FET using the SBT/LZO/Si Structure is fabricated. To examine the ferroelectric effect of the fabricated Fe-FETs, drain current ($I_d$) versus gate voltage ($V_g$) characteristics in logarithmic scale was measured. Also, drain current ($I_d$) versus drain voltage ($V_d$) characteristics of the fabricated SBT/LZO/Si MFIS-FETs was measured according to the gate voltage variation.

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Electrical Transport Properties and Magnetoresistance of (1-x)La0.7Sr0.3MnO3/xZnFe2O4 Composites

  • Seo, Yong-Jun;Kim, Geun-Woo;Sung, Chang-Hoon;Lee, Chan-Gyu;Koo, Bon-Heun
    • 한국재료학회지
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    • 제20권3호
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    • pp.137-141
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    • 2010
  • The $(1-x)La_{0.7}Sr_{0.3}MnO_3(LSMO)/xZnFe_2O_4$(ZFO) (x = 0, 0.01, 0.03, 0.06 and 0.09) composites were prepared by a conventional solid-state reaction method. We investigated the structural properties, magnetic properties and electrical transport properties of (1-x)LSMO/xZFO composites using X-ray diffraction (XRD), scanning electron microscopy (SEM), field-cooled dc magnetization and magnetoresistance (MR) measurements. The XRD and SEM results indicate that LSMO and ZFO coexist in the composites and the ZFO mostly segregates at the grain boundaries of LSMO, which agreed well with the results of the magnetic measurements. The resistivity of the samples increased by the increase of the ZFO doping level. A clear metal-to-insulator (M-I) transition was observed at 360K in pure LSMO. The introduction of ZFO further downshifted the transition temperature (350K-160K) while the transition disappeared in the sample (x = 0.09) and it presented insulating/semiconducting behavior in the measured temperature range (100K to 400K). The MR was measured in the presence of the 10kOe field. Compared with pure LSMO, the enhancement of low-field magnetoresistance (LFMR) was observed in the composites. It was clearly observed that the magnetoresistance effect of x = 0.03 was enhanced at room temperature range. These phenomena can be explained using the double-exchange (DE) mechanism, the grain boundary effect and the intrinsic transport properties together.