• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.45-48
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• 2003

The polishing mechanism of W-CMP process has been reported as the repeated process of passive layer formation by oxidizer and abrasion action by slurry abrasives. Thus, it is important to understand the effect of oxidizer on tungsten passivation layer in order to obtain higher removal rate (RR) and very low non-uniformity (NU%) during W-CMP process. In this paper, we investigated the effects of oxidizer on W-CMP process with three different kinds of oxidizers, such as $H_2O_2$, $Fe(NO_3)_3$, and $KIO_3$. In order to compare the removal rate and non-uniformity of three oxidizers, we used alumina-based slurry of pH 4. According to the CMP tests, three oxidizers showed different removal mechanism on tungsten surface. Also, the microstructures of surface layer by AFM image were greatly influenced by the slurry chemical, composition of oxidizers. The difference in removal rate and roughness of tungsten surface are believed to caused by modification in the mechanical behavior of $Al_2O_3$ abrasive particles in CMP slurry. Our stabilized slurries can be used a guideline and promising method for improved W-CMP process.

• Journal of Advanced Technology Convergence
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• v.1 no.2
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• pp.19-25
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• 2022

It is intended to evaluate the performance of the shield after manufacturing a shield with cheap and eco-friendly iron oxide and alumina instead of lead, which is a radiation shielding material. After manufacturing the shield by mixing iron oxide and alumina with gypsum, the performance is evaluated by comparing it with gypsum board and lead apron using an X-ray tube. As a result of the experiment, the shielding performance of alumina was lower than that of the gypsum board, and when 50% of alumina was contained, the shielding performance was similar to that of the gypsum board. Iron oxide became similar to the shielding performance of lead apron when it contained about 75%. A shielding material using alumina shows shielding performance similar to that of gypsum, so it is not suitable as a substitute for lead. However, since iron oxide exhibits similar shielding performance to lead, it can be used as an X-ray shielding material to replace lead in the future, so further research is needed.

• The Korean Journal of Ceramics
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• v.1 no.2
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• pp.91-95
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• 1995

Polycrystalline bismuth- and aluminum- substituted dysporsium and yttrium iron garnet (Bi2R3-xAlyFe5-yO12, R=Dy or Y, $0\leqx\leq3, \; 0\leqy\leq3$) films have been prepared by pyrolysis. The crystallization temperatures, the solubility limit of bismuth ions into the garnet phase, and magnetic and magneto-optic properties of the films have been investigated as a function of bismuth and aluminum concentration. It was found that the crystallization temperatures as a function of bismuth and aluminum concentration. It was found that the crystallization temperatures of these films rapidly decreased as bismuth concentration. It was found that the crystallization temperatures of these films rapidly decreased as bismuth concentration (x) increased up to x=1.5 and then remained temperatures of these films rapidly decreased as bismuth concentration (x) increased up to x=1.5 and then remained unchanged at x>1.5, whereas, showed no changes as aluminum concentration (y) increased up to y=1.0 and then gradually increased at y>1.0. The solubility limit of bismuth ions was x=1.8 when y=0 but increased to x=2.3 when y=1.0. It was demonstrated that the magnetic and magneto-optic properties of the dysprosium iron garnet films could be tailored by bismuth and aluminum substitution suitable for magneto-optic recording as follows. The saturation magnetization and coercivity data obtained for the films indicated that the film composition at which the magnetic compensation temperature became room temperature was y=1.2 when x=1.0. Near this composition the coercivity and the squareness of the magnetic hysteresis loop of the films were several kOe and unit, respectively. The Curie temperatures of the films increased with the increase of x but decreaed with the increase of y, and was 150-$250^{\circ}C$ when x=1.0 and y=0.6-1.4. The Faraday rotation at 633 nm of the films increased as x increased but decreased as y increased, and was 1 deg/$\mu\textrm{m}$ when x=1.0 and y=1.0. Based on the data obtained, the appropriate film composition for magneto-optic recording was estimated as near x=1.0 and y=1.0 or $BiDy_2AlFe_4O_{12}$.

• Korean Journal of Soil Science and Fertilizer
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• v.28 no.3
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• pp.270-277
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• 1995

The phosphate fractions and their relationships with other soil characteristics in greenhouse soils located on the southwest region in Korea were studied to demonstrate the possibility of the application of phosphate solubilizing microorganisms. The average contents of organic matter of 4.0% and exchangeable K, Ca, Mg of 1.16, 3.4, and $1.2cmol\;kg^{-1}$ respectively were higher than the aiming level for improvement of low fertile soil. Especially, available $P_2O_5$ of $1,193mg\;kg^{-1}$ was far more than the aiming level. The distribution of greenhouse soils classified by their total P contents was 46.1% for the range of $1,000{\sim}2,000mg\;kg^{-1}$, 29.6% for $2,000{\sim}3,000mg\;kg^{-1}$, and 12.9% for $3,000{\sim}4,000mg\;kg^{-1}$. And the soils containing more than $1,000mg\;kg^{-1}$, available $P_2O_5$ occupied 63.0% of the examined soils. The main forms of inorganic phosphates in greenhouse soils were Ca-P and Fe-P. The P fractions compared to total P were significantly correlated to soil pH, while available P was not so. Available phosphate was significantly correlated with the contents of organic matter and nitrogen, which are closely related to soil microbial activity, at the probability level of less than 1%.

• Journal of the Korean Vacuum Society
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• v.20 no.2
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• pp.155-163
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• 2011

Carbon nanotubes (CNT) have been attracted much attention since they have been expected to be used in various areas by virtue of their outstanding physical, electrical, and chemical properties. In order to make full use of their prominent electric conductivity in some areas such as electron emission sources, device interconnects, and electrodes in energy storage devices, direct growth of CNT with vertical alignment is definitely beneficial issue because they can maintain mechanical stability and high conductivity at the interface between substrates. Here, we report direct growth of vertically aligned CNT (VCNT) on Cu foils using thermal chemical vapor deposition and characterize the field emission property of the VCNT. The VCNT's height was controlled by changing the growth temperature, growth time, and catalytic layer thickness. Optimum growth condition was found to be $800^{\circ}C$ for 20 min with acetylene and hydrogen mixtures on Fe catalytic layer of 1 nm thick. The diameter of VCNT grown was smaller than that of usual multi walled CNT. Based on the result of field emission characterization, we concluded that the VCNT on Cu foils can be useful in various potential applications where high conductivity through the interface between CNT and substrate is required.

• Asian Journal of Atmospheric Environment
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• v.6 no.2
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• pp.83-95
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• 2012

China has been a top producer and exporter of refined lead products in the world since the year 2000. After the phasing-out of leaded gasoline in the late 1990s, non-ferrous metallurgy and coal combustion have been identified as potential major sources of aerosol lead in China. This paper presents the single particle analytical results of ambient aerosol particles collected near a lead smelter using a scanning electron microscopy- energy dispersive x-ray spectroscopy (SEM-EDX). Aerosol particle samples were collected over a 24-hour period, starting from 8 pm on 31 May 2002, using a high volume TSP sampler. For this near source sample, 73 particles among 377 particles analyzed (accounting for 19.4%) were lead-containing particles mixed with other species (S, Cl, K, Ca, and/or C), which probably appeared to be from a nearby lead smelter. Lead-containing particles of less than $2{\mu}m$ size in the near source sample were most frequently encountered with the relative abundances of 42%. SEM-EDX analysis of individual standard particles, such as PbO, PbS, $PbSO_4$, $PbCl_2$, and $PbCO_3$, was also performed to assist in the clear identification of lead-containing aerosol particles. Lead-containing particles were frequently associated with arsenic and zinc, indicating that the smelter had emitted those species during the non-ferrous metallurgical process. The frequently encountered particles following the lead-containing particles were mineral dust particles, such as aluminosilicates (denoted as AlSi), $SiO_2$, and $CaCO_3$. Nitrate- and sulfate-containing particles were encountered frequently in $2-4{\mu}m$ size range, and existed mostly in the forms of $Ca(NO_3,SO_4)/C$, $(Mg,Ca)SO_4/C$, and $AlSi+(NO_3,SO_4)$. Particles containing metals (e.g., Fe, Cu, and As) in this near source sample had relative abundances of approximately 10%. Although the airborne particles collected near the lead smelter contained elevated levels of lead, other types of particles, such as $CaCO_3$-containing, carbonaceous, metal-containing, nitrates, sulfates, and fly-ash particles, showed the unique signatures of samples influenced by emissions from the lead smelter.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.20 no.3
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• pp.107-112
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• 2010

The Cu$(In_{1-x}Ga_x)Se_2$ is the absorber material for thin film solar cell with high absorption coefficient of $1{\times}10^5cm^{-1}$. In the case of CIGS, the movable energy band gap from $CuInSe_2$ (1.00 eV) to $CuGaSe_2$ (1.68 eV) can be acquired while controlling Ga contain ratio. Generally, the co-evaporator method have used for development and fabrication of the CIGS absorption layer. However, this method should need many steps and lengthy deposition time with high temperature. For these reasons, in this paper, a new growth method of CIGS layer was attempted to hydride vapor transport (HVT) method. The CIGS mixed-source material reacted for HCl gas in the source zone was deposited on the substrate after transporting to growth zone. c-plane $Al_2O_3$ and undoped GaN were used as substrates for growth. The characteristics of grown samples were measured from SEM and EDS.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.454-454
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• 2014

Silicon microwire array is one of the promising platforms as a means for developing highly efficient solar cells thanks to the enhanced light trapping efficiency. Among the various fabrication methods of microstructures, deep reactive ion etching (DRIE) process has been extensively used in fabrication of high aspect ratio microwire arrays. In this presentation, we show precisely controlled Si microwire arrays by tuning the DRIE process conditions. A periodic microdisk arrays were patterned on 4-inch Si wafer (p-type, $1{\sim}10{\Omega}cm$) using photolithography. After developing the pattern, 150-nm-thick Al was deposited and lifted-off to leave Al microdisk arrays on the starting Si wafer. Periodic Al microdisk arrays (diameter of $2{\mu}m$ and periodic distance of $2{\mu}m$) were used as an etch mask. A DRIE process (Tegal 200) is used for anisotropic deep silicon etching at room temperature. During the process, $SF_6$ and $C_4F_8$ gases were used for the etching and surface passivation, respectively. The length and shape of microwire arrays were controlled by etching time and $SF_6/C_4F_8$ ratio. By adjusting $SF_6/C_4F_8$ gas ratio, the shape of Si microwire can be controlled, resulting in the formation of tapered or vertical microwires. After DRIE process, the residual polymer and etching damage on the surface of the microwires were removed using piranha solution ($H_2SO_4:H_2O_2=4:1$) followed by thermal oxidation ($900^{\circ}C$, 40 min). The oxide layer formed through the thermal oxidation was etched by diluted hydrofluoric acid (1 wt% HF). The surface morphology of a Si microwire arrays was characterized by field-emission scanning electron microscopy (FE-SEM, Hitachi S-4800). Optical reflection measurements were performed over 300~1100 nm wavelengths using a UV-Vis/NIR spectrophotometer (Cary 5000, Agilent) in which a 60 mm integrating sphere (Labsphere) is equipped to account for total light (diffuse and specular) reflected from the samples. The total reflection by the microwire arrays sample was reduced from 20 % to 10 % of the incident light over the visible region when the length of the microwire was increased from $10{\mu}m$ to $30{\mu}m$.

• The Journal of the Petrological Society of Korea
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• v.11 no.1
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• pp.1-16
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• 2002

The study area is mostly composed of Precambrian Gyeonggi gneiss complex, Jurassic Daebo granites, Cretaceous tonalite and dykes, and so on. On the basis of field survey and mineral assemblage, the granites can be divided into three types; biotite granite (Gb), garnet biotite granite (Ggb) and two mica granite (Gtm). They predominantly belong to monzo-granites from the modes. Field relationship and K-Ar mica age data in the surrounding area suggest that intrusive sequences are older in order of Gtm, Ggb and Gb. Gb and Ggb, major study targets, occur as medium-coarse grained rocks, and show light grey and light grey-light pink colors, respectively. Mineral constituents are almost similar except for opaque in Gb and garmet in Ggb. Gb and Ggb have felsic, peraluminous, subalkaline and calc alkaline natures. In Harker diagram, both rocks show moderately negative trends of $TiO_2$, MgO, CaO, $Al_2O_3$, $Fe_2O_3$(t), $K_2O$ and $P_2O_5$ as $SiO_2$ contents increase. Among them, $TiO_2$, MgO and CaO show two linear trends. From the trends and the linear patterns in AFM, Sr-Ba and Rb-Ba-Sr relations, it is likely that they were originated from the same granitic magma and Ggb was differentiated later than Gb. REE concentrations normalized to chondrite value have trends of parallel LREE enrichment and HREE depletion. One data of Ggb showing a gradually enriched HREE trend may be caused by garnet accompaniment. Ggb have more negative Eu anomalies than Gb, suggesting that plagioclase fractionation in Ggb have occurred much stronger than that in Gb. In modal (Qz+Af) vs. Op, Gb and Ggb belong to magnetite-series and ilmenite-series, respectively. From the EPMA results, opaques of Gb are magnetite and ilmenite, and those of Ggb are magnetite-free ilmenite or not observed. Bimodal distribution of magnetic susceptibility reveals two different granites of Gb (332.6 ${mu}SI$) and Ggb (2.3 ${mu}SI$). Based on the paleomagnetic analysis as well as modal analysis, the main susceptibilities of Gb and Ggb reside in magnetite and mafic minerals, respectively. They belong to S-type granite of non-magnetic granite by susceptibility value. In addition, $SiO_2$ contents, $K_2O/Na_2O$, A/CNK molar ratio and ACF diagram support that they all belong to S-type granites.

• Journal of the Korean Ceramic Society
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• v.41 no.6
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• pp.450-455
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• 2004

NiCr thin films were fabricated by thermal evaporation method using NiCr alloy as evaporating source. NiCr thin films were annealed at various temperatures in air atmosphere in order to investigate effects of annealing conditions on phase change, composition, and microstructures of NiCr films. Typical multilayer was formed after annealing in air atmosphere. This results from the diffusion and oxidation of Cr toward surface during annealing. In the case of annealing at 700$^{\circ}C$, large columnar grains of NiO were formed on Cr-oxide layer through the diffusion and oxidation of Ni over Cr-oxide layer. Especially, NiO layer was formed additionally on surface, sustaining the underlayer structure with the formation of porous Ni layer.