• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.123.2-123.2
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• 2013

Etching endpoint detection with plasma impedance monitoring (PIM) is demonstrated for small area dielectric layers inductive coupled plasma etching. The endpoint is determined by the impedance harmonic signals variation from the I-V monitoring system. Measuring plasma impedance has been examined as a relatively simple method of detecting variations in plasma and surface conditions without contamination at low cost. Cluster analysis algorithm is modified and applied to real-time endpoint detection for sensitivity enhancement in this work. For verification, the detected endpoint by PIM and real-time cluster analysis is compared with widely used optical emission spectroscopy (OES) signals. The proposed technique shows clear improvement of sensitivity with significant noise reduction when it is compared with OES signals. This technique is expected to be applied to various plasma monitoring applications including fault detections as well as end point detection.

• 제어로봇시스템학회:학술대회논문집
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• 1991.10b
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• pp.1705-1711
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• 1991

On-line fault detection and diagnosis has an increasing interest in a chemical process industry, especially for a process control and automation. The chemical process needs an intelligent operation-aided workstation which can do such tasks as process monitoring, fault detection, fault diagnosis and action guidance in semiautomatic mode. These tasks can increase the performance of a process operation and give merits in economics, safety and reliability. Aiming these tasks, series of researches have been done in our lab. Main results from these researches are building appropriate knowledge representation models and a diagnosis mechanism for fault detection and diagnosis in a chemical process. The knowledge representation schemes developed in our previous research, the symptom tree model and the fault-consequence digraph, showed the effectiveness and the usefulness in a real-time application, of the process diagnosis, especially in large and complex plants. However in our previous approach, the diagnosis speed is its demerit in spite of its merits of high resolution, mainly due to using two knowledge models complementarily. In our current study, new knowledge representation scheme is developed which integrates the previous two knowledge models, the symptom tree and the fault-consequence digraph, into one. This new model is constructed using a material balance, energy balance, momentum balance and equipment constraints. Controller related constraints are included in this new model, which possesses merits of the two previous models. This new integrated model will be tested and verified by the real-time application in a BTX process or a crude unit process. The reliability and flexibility will be greatly enhanced compared to the previous model in spite of the low diagnosis speed. Nexpert Object for the expert system shell and SUN4 workstation for the hardware platform are used. TCP/IP for a communication protocol and interfacing to a dynamic simulator, SPEEDUP, for a dynamic data generation are being studied.

• Journal of Institute of Control, Robotics and Systems
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• v.22 no.2
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• pp.147-152
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• 2016

This paper proposes a new TPC (Transmission Priority Change) algorithm which is used to diagnose failures of a CAN (Controller Area Network) based network system for the oil tank monitoring. The TPC algorithm is aimed to increase the total amount of data transmission and to minimize the latency for an urgent message by changing transmission priority. The urgency of the data transmission has been determined by the conditions of sensors. There are multiple sensors inside of the oil tank, such as temperature, valve, pressure and level sensors. When the sensors operate normally, the sensory data can be collected through the CAN network by the monitoring system. However when there is a dangerous situation or failure situation happened at a sensor, the data need to be handled quickly by the monitoring system, which is implemented by using the TPC algorithm. The effectiveness of the TPC algorithm has been verified by the real experiments. In addition, this paper introduces a method that people can figure out the condition of oil tanks and also can perform the fault diagnosis in real-time by using transmitted packet data. By applying this TPC algorithm to various industries, the convenience and reliability of multiple sensors network system can be improved.

• Journal of the Korean Society for Nondestructive Testing
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• v.30 no.2
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• pp.121-125
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• 2010

The infrared thermography technology rather than traditional nondestructive methods has benefits with non-contact and non-destructive testings in measuring for the fault diagnosis of the rotating machine. In this work, condition monitoring measurements using this advantage of thermography were proposed. From this study, the novel approach for the damage detection of a rotating machine was conducted based on the spectrum analysis. As results, by adopting the ball bearing used in the rotating machine applied extensively, an spectrum analysis with thermal imaging experiment was performed. Also, as analysing the temperature characteristics obtained from the infrared thermography for in-situ rotating ball bearing under the lubrication condition, it was concluded that infrared thermography for condition monitoring in the rotating machine at real time could be utilized in many industrial fields.

• Smart Structures and Systems
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• v.29 no.1
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• pp.181-193
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• 2022

Data-driven structural health monitoring (SHM) of civil infrastructure can be used to continuously assess the state of a structure, allowing preemptive safety measures to be carried out. Long-term monitoring of large-scale civil infrastructure often involves data-collection using a network of numerous sensors of various types. Malfunctioning sensors in the network are common, which can disrupt the condition assessment and even lead to false-negative indications of damage. The overwhelming size of the data collected renders manual approaches to ensure data quality intractable. The task of detecting and classifying an anomaly in the raw data is non-trivial. We propose an approach to automate this task, improving upon the previously developed technique of image-based pre-processing on one-dimensional (1D) data by enriching the features of the neural network input data with multiple channels. In particular, feature engineering is employed to convert the measured time histories into a 3-channel image comprised of (i) the time history, (ii) the spectrogram, and (iii) the probability density function representation of the signal. To demonstrate this approach, a CNN model is designed and trained on a dataset consisting of acceleration records of sensors installed on a long-span bridge, with the goal of fault detection and classification. The effect of imbalance in anomaly patterns observed is studied to better account for unseen test cases. The proposed framework achieves high overall accuracy and recall even when tested on an unseen dataset that is much larger than the samples used for training, offering a viable solution for implementation on full-scale structures where limited labeled-training data is available.

• Journal of Korean Institute of Industrial Engineers
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• v.36 no.3
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• pp.154-163
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• 2010

Process monitoring of output variables affecting final performance have been mainly executed in semiconductor manufacturing process. However, even earlier detection of causes of output variation cannot completely prevent yield loss because a number of wafers after detecting them must be re-processed or cast away. Semiconductor manufacturers have put more attention toward monitoring process inputs to prevent yield loss by early detecting change-point of the process. In the paper, we propose the method to efficiently monitor functional input variables in multi-phase semiconductor manufacturing process. Measured input variables in the multi-phase process tend to be of functional structured form. After data pre-processing for these functional input data, change-point analysis is practiced to the pre-processed data set. If process variation occurs, key variables affecting process variation are selected using contribution plot for monitoring efficiency. To evaluate the propriety of proposed monitoring method, we used real data set in semiconductor manufacturing process. The experiment shows that the proposed method has better performance than previous output monitoring method in terms of fault detection and process monitoring.

• Proceedings of the KIPE Conference
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• 2013.11a
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• pp.63-64
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• 2013

Induction motors' faults detection is almost a popular topic among researchers. Monitoring the output of motors is a key factor in detecting these faults. (Short-time) Fourier, (continuous, discrete) wavelet, and extended Park vector transformations are among the methods for fault detection. One major deficiency of these methods is not being able to detect the severity of faults that carry low energy information, e.g. in ball bearing system failure, there is absolutely no way to detect the severity of fault using Fourier or wavelet transformations. In this paper, the authors have applied the Discrete Wavelet Transform (DWT) frequency-domain analysis to detect bearing faults in an induction motor. In other words, in discrete transform which the output signal is decomposed in several steps and frequency resolution increases considerably, the frequency-band analysis is performed and it will be verified that first of all, fault sidebands become more recognizable for detection in higher levels of decomposition, and secondly, the inner race bearing faults turn out easier in these levels; and all these matter because of eliminating the not-required high energy components in lower levels of decomposing.

• Journal of the Korean Society for Nondestructive Testing
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• v.31 no.2
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• pp.134-138
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• 2011

Fault detection for dynamic loading conditions of rotational machineries was considered from the contactless, non-destructive infrared thermographic method, rather than the traditional diagnosis method. In this paper, by applying a rotating deep-grooved ball bearing, passive thermographic experiment was performed as an alternative way proceeding the traditional fault monitoring. In addition, the thermographic experiments were compared with the vibration spectrum analysis to evaluate the efficiency of the proposed method. Based on the results, it was concluded the temperature characteristics of the ball bearing under dynamic loading conditions were analyzed thoroughly.

• Journal of the Korean Society for Nondestructive Testing
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• v.34 no.4
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• pp.305-310
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• 2014

In this study, a non-destructive evaluation (NDE) mothod is proposed for ball bearings contaminated with micro foreign substances, which were inserted into a ball bearing to create a defective specimen. The non-contact quantitative infrared thermographic technique was applied for NDE condition monitoring. Passive thermographic experiments were conducted to perform early fault diagnosis, for bearings operated at optimized torque status under a dynamic load condition. The temperature profiles for normal and defective specimens were quantitatively compared, and the thermographic data analyzed. Based on the NDE results, the temperature characteristics and abnormal fault detection of the ball bearing were quantitatively analyzed according to the rise in temperature.

• Journal of Electrical Engineering and Technology
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• v.10 no.6
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• pp.2326-2333
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• 2015

Stator turn faults in permanent magnet synchronous motors (PMSMs) are more dangerous than those in induction motors (IMs) because of the presence of spinning rotor magnets that can be turned off at will. Condition monitoring and fault detection and diagnosis of the PMSM have been receiving a growing amount of attention among scientists and engineers in the past few years. The aim of this study is to propose a new detection technique of stator winding faults in a three-phase PMSM. This technique is based on the image analysis and recognition of the stator current Concordia patterns, and will allow the identification of turn faults in the stator winding as well as its correspondent fault index severity. A test bench of a vector controlled PMSM motor behaviors under short circuited turn in two phases stator windings has been built. Some experimental results of the phase to phase short circuits have been performed for diagnosis purpose.