• 제목/요약/키워드: Fabry-Perot cavity

검색결과 53건 처리시간 0.03초

반사 스펙트럼을 이용한 VCSEL 에피층의 두께 오차 평가 (Estimating the Thickness Errors in Vertical-Cavity Surface-Emitting Laser Structures from Optical Reflection spectra)

  • 김남길;김상배
    • 대한전자공학회논문지SD
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    • 제40권8호
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    • pp.572-579
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    • 2003
  • vertical-cavity surface-emitting laser(VCSEL) 웨이퍼에서 측정한 반사 스펙트럼을 전달 매트릭스 방법으로 계산한 반사스펙트럼과 비교함으로써 비파괴적인 방법으로 구조적인 두께 오차가 발생한 층을 찾아 내고 오차의 크기를 추정하는 방법론을 제시하였다. DBR 층의 오차를 종합하여 나타낸 n-DBR 층의 두께 오차, 즉 유효 오차를 도입하면, 반사 스펙트럼의 모양은 유효 오차에만 의존한다는 사실에 이 방법의 근거를 두고 있다. 활성층 영역의 두께 오차는 Fabry-Perot 발진파장에만 영향을 주며, 랜덤 두께 오차의 표준 편차 값이 0.005 이하일 때에 측정과 계산된 반사 스펙트럼의 비교는 신뢰성을 갖는다. 이 방법론은 VCSEL 웨이퍼 제작시 측정되는 반사 스펙트럼을 이용하므로 비파괴적이며, 0.5 nm의 두께 오차를 찾아 낼 수 있을 정도로 정밀도가 높다.

Conceptual design and preliminary characterization of serial array system of high-resolution MEMS accelerometers with embedded optical detection

  • Perez, Maximilian;Shkel, Andrei
    • Smart Structures and Systems
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    • 제1권1호
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    • pp.63-82
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    • 2005
  • This paper introduces a technology for robust and low maintenance cost sensor network capable to detect accelerations below a micro-g in a wide frequency bandwidth (above 1,000 Hz). Sensor networks with such performance are critical for navigation, seismology, acoustic sensing, and for the health monitoring of civil structures. The approach is based on the fabrication of an array of high sensitivity accelerometers, each utilizing Fabry-Perot cavity with wavelength-dependent reflectivity to allow embedded optical detection and serialization. The unique feature of the approach is that no local power source is required for each individual sensor. Instead one global light source is used, providing an input optical signal which propagates through an optical fiber network from sensor-to-sensor. The information from each sensor is embedded onto the transmitted light as an intrinsic wavelength division multiplexed signal. This optical "rainbow" of data is then assessed providing real-time sensing information from each sensor node in the network. This paper introduces the Fabry-Perot based accelerometer and examines its critical features, including the effects of imperfections and resolution estimates. It then presents serialization techniques for the creation of systems of arrayed sensors and examines the effects of serialization on sensor response. Finally, a fabrication process is proposed to create test structures for the critical components of the device, which are dynamically characterized.

파장가변 광섬유 링 레이저를 이용한 아세틸렌(13C2H2) 분광 (Spectroscopy of acetylene (13C2H2) using a tunable erbium-doped fiber ring laser)

  • 유한영;오정미;이동한;문한섭;이원규;박갑동;서호성
    • 한국광학회지
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    • 제14권6호
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    • pp.674-679
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    • 2003
  • 본 연구에서는 C-밴드와 L-밴드 파장(1525 nm-1625 nm)에서 파장 변화가 가능한 광섬유 링 레이저를 제작하고, 이를 이용하여 아세틸렌 분자 전이선에 대한 분광연구를 수행하였다. 제작된 광섬유 링 레이저는 공진기 내부에 FFP-TF(Fiber Fabry-Perot Tunable Filter)를 이용하여 약 102 nm(1510.4-1612.6 nm)의 범위에서 파장을 연속 가변할 수 있었다. 광섬유 링 레이저의 파장가변특성을 이용하여 C-밴드(1525-1565 nm)에서 흡수선이 많은 아세틸렌($^{13}$C$_2$H$_2$)분자에서 50개 이상의 전이선에 대하여 높은 신호대 잡음비를 갖는 흡수 스펙트럼을 측정하였다.

Fabry-Perot Filter Constructed with Anisotropic Space Layer and Isotropic Mirrors

  • Qi, Hongji;Hou, Yongqiang;Yi, Kui;Shao, Jianda
    • Journal of the Optical Society of Korea
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    • 제17권1호
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    • pp.33-37
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    • 2013
  • In this study a new design concept of the Fabry-Perot filter, constructed with an anisotropic space layer and a couple of isotropic mirrors, was proposed based on the Maxwell equations and the characteristic matrix method. The single- and double-cavity Fabry-Perot filters were designed, and their optical properties were investigated with a developed software package. In addition, the dependence of the transmittance and phase shift for two orthogonal polarization states on the column angle of the anisotropic space layer and the incidence angle were discussed. We demonstrated that the polarization state of electromagnetic waves and phase shifts can be modulated by exploiting an anisotropic space layer in a polarization F-P filter. Birefringence of the anisotropic space layer provided a sophisticated phase modulation with varied incidence angles over a broad range, resulting in a wide-angle phase shift. This new concept would be useful for designing optical components with isotropic and anisotropic materials.

패브리 패롯 공진기형 안테나에서 뮤츄얼 커플링에 의한 스캔특성 분석 (Scan Performance Analysis by Mutual Coupling Effects in Fabry-Perot Cavity Antennas)

  • 김종성
    • 전자공학회논문지
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    • 제51권10호
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    • pp.21-25
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    • 2014
  • 패브리 패롯형 공진기 안테나의 스캔특성에 대하여 공진기내에 위치하는 $4{\times}1$ thinned 배열 급전에 대하여 분석하였다. FPC 배열 안테나는 높은 이득과 낮은 부엽 레벨을 갖는다. 그러나 스캔각도는 유사 구조의 패치 배열 안테나보다 약 14-17% 작은 값을 나타낸다. 이는 FPC 구조에서 존재하는 상호 커플링 특성 때문이다. 개방형 배열과는 달리 FPC 배열 구조는 1.0 파장 간격이상의 요소간의 거리에서도 그레이팅 로브가 생성되지 않는 장점을 나타내었다.

광섬유 패치코드를 이용한 Fabry-Perot 간섭계 온도센서 (Temperature Sensor Based on Fabry-Perot Interferometer Using a Fiber Optic Patch Cord)

  • 김주하;정은주;김명진;황성환;이우진;김계원;안종배;최은서;노병섭
    • 센서학회지
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    • 제23권2호
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    • pp.110-113
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    • 2014
  • In this paper, we propose and demonstrate a Fabry-Perot interferometer (FPI) optical fiber tip sensor fabricated by a blade-sawing technique using a fiber optic patch cord for high-resolution temperature measurement. The sensor head consists of a short air FP cavity near the tip of a single-mode fiber patch cord tip. The temperature which we can measure is determined through a phase variation of the interference fringes in the reflective spectrum of the sensor. The fiber optic FPI sensor in this work can monitor the environmental temperature very accurately from 40 to $120^{\circ}C$. As a result, the temperature sensitivity is obtained as $38.2pm/^{\circ}C$.

비분산적외선 CO2 센서를 위한 DBR기반의 패브리 페로-필터 설계 및 성능 연구 (Design and performance study of fabry-perot filter based on DBR for a non-dispersive infrared carbon dioxide sensor)

  • 도남곤;이준엽;정동건;공성호;정대웅
    • 센서학회지
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    • 제30권4호
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    • pp.250-254
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    • 2021
  • A highly sensitive and selective non-dispersive infrared (NDIR) carbon dioxide gas sensor requires achieving high transmittance and narrow full width at half maximum (FWHM), which depends on the interface of the optical filter for precise measurement of carbon dioxide concentration. This paper presents the design, simulation, and fabrication of a Fabry-Perot filter based on a distributed Bragg reflector (DBR) for a low-cost NDIR carbon dioxide sensor. The Fabry-Perot filter consists of upper and lower DBR pairs, which comprise multilayered stacks of alternating high- and low-index thin films, and a cavity layer for the resonance of incident light. As the number of DBR pairs inside the reflector increases, the FWHM of the transmitted light becomes narrower, but the transmittance of light decreases substantially. Therefore, it is essential to analyze the relationship between the FWHM and transmittance according to the number of DBR pairs. The DBR is made of silicon and silicon dioxide by RF magnetron sputtering on a glass wafer. After the optimal conditions based on simulation results were realized, the DBR exhibited a light transmittance of 38.5% at 4.26 ㎛ and an FWHM of 158 nm. The improved results substantiate the advantages of the low-cost and minimized process compared to expensive commercial filters.

갈륨의 고정점을 이용한 정밀 온도제어 (Precise Temperature Control by Locking on the Fixed point of Gallium)

  • 김태호;김승우
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2002년도 추계학술대회 논문집
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    • pp.351-354
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    • 2002
  • The new enhanced method of temperature control need not any reference temperature, the system itself can find the melting temperature of gallium as a reference point by dithering input heat flux. If gallium is in melting state, the latent heat of fusion works, so gallium temperature does not change on dithering input heat flux. Also, the control method can determine the state of gallium; solid, liquid, or melting state by investigating the temperature in gallium. We apply this new temperature stabilization method to stabilize a Fabry-Perot cavity, which serves as a ultimate length measurement technique. We achieved 1 mK-temperature stability and 1.5426 nm/ 95 mm-length stability over 10 hours.

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The Gain Estimation of a Fabry-Perot Cavity (FPC) Antenna with a Finite Dimension

  • Kwon, Taek-Sun;Lee, Jae-Gon;Lee, Jeong-Hae
    • Journal of electromagnetic engineering and science
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    • 제17권4호
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    • pp.241-243
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    • 2017
  • In this paper, we have presented an equation for estimating the gain of a Fabry-Perot cavity (FPC) antenna with a finite dimension. When an FPC antenna has an infinite dimension and its height is half of a wavelength, the maximum gain of that FPC antenna can be obtained theoretically. If the FPC antenna does not have a dimension sufficient for multiple reflections between a partially reflective surface (PRS) and the ground, its gain must be less than that of an FPC antenna that has an infinite dimension. In addition, the gain of an FPC antenna increases as the dimension of a PRS increases and becomes saturated from a specific dimension. The specific dimension where the gain starts to saturate also gets larger as the reflection magnitude of the PRS becomes closer to one. Thus, it would be convenient to have a gain equation when considering the dimension of an FPC antenna in order to estimate the exact gain of the FPC antenna with a specific dimension. A gain versus the dimension of the FPC antenna for various reflection magnitudes of PRS has been simulated, and the modified gain equation is produced through the curve fitting of the full-wave simulation results. The resulting empirical gain equation of an FPC antenna whose PRS dimension is larger than $1.5{\lambda}_0$ has been obtained.