• 제어로봇시스템학회:학술대회논문집
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• 1989.10a
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• pp.421-426
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• 1989

Many of semiconductor manufacturing companies persuit automation of wafer fabrication to improve the yields and quality of their products. Development of real-time control system for wafer fabrication and wafer/cassette automatic transfer-system is the most important part to achieve the purpose. In this paper, SECS protocol proposed by SEMI is briefly reviewed and an implementation method of real-time monitoring and control system is suggested as one of the possible ways for wafer fabrication automation. The system consists of process equipments supporting SECS.

• Proceedings of the IEEK Conference
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• 2002.06e
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• pp.91-94
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• 2002

SFFS(Solid Freeform Fabrication System) is commercializing to rapid prototyping concept in foreign some corporations including the U.S.A, have much technological problems yet and need new mode for agile prototyping. In this paper, we design algorithm that the cutting path of laser beam, on the SFFS(Solid Freeform Fabrication System), is controlled with constant speed. The designed algorithm for constant-speed path control is implemented and experimented in the CAFL$\^$VM/ (Computer Aided Fabrication of Lamination for Various Material) system, the new SFFS which was developed in this paper.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.904-909
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• 2004

In this paper a web-based micro fabrication system is discussed. A commercial CAD and a web browser were used as its user interfaces. In these user interfaces the concepts of Design for Manufacturing (DFM) was implemented providing the fabrication knowledge of micro machining to the designers. Simple databases were constructed to store the fabrication knowledge of materials, tools, and micro machining know-how. The part geometry was uploaded to the web server of this system as an STL (Stereo Lithography) format with process parameters for 3-axis micro milling. A Slice-based process planner automatically provides NC codes for controlling micro stages. A couple of micro parts were fabricated using the system with micro endmills. This design and manufacturing system enables network users to obtain micro-scale prototypes in a rapid manner.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.170-173
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• 2004

In this paper a web-based micro fabrication system is discussed. A commercial CAD and a web browser were used as its user interfaces. For the user interfaces, the concepts of Design for Manufacturing (DFM) were implemented providing the fabrication knowledge of micro machining to the designers. Simple databases were constructed to store the fabrication knowledge of materials, tools, and micro machining know-how. The part geometry was uploaded to the web server of this system as an STL (Stereo Lithography) format with process parameters for 3-axis micro milling. A Slice-based process planner automatically provides NC codes for controlling micro stages. A couple of micro parts were fabricated using the system with micro endmills. This design and manufacturing system enables network users to obtain micro-scale prototypes in a rapid manner.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.6
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• pp.686-692
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• 2012

Solid free-form fabrication (SFF) technology was developed to fabricate three-dimensional (3D) scaffolds for tissue engineering (TE) applications. In this study, we developed a polymer deposition system (PDS) and created 3D microstructures using a bioresorbable polycaprolactone (PCL) polymer. Fabrication of 3D scaffolds by PDS requires a combination of several devices, including a heating system, dispenser, and motion controller. The system can process a polymer with extremely high precision by using a 200 ${\mu}m$ nozzle. Based on scanning electron microscope (SEM) images, both the line width and the piled line height were fine and uniform. Several 3D micro-structures, including the ANU pattern (a pattern named after Andong National University), $45^{\circ}$ pattern square, frame, cylindrical, triangular, cross-shaped, and hexagon, have been fabricated using the polymer deposition system.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.8 s.197
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• pp.138-143
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• 2007

Microstereolithography technology is similar to the conventional stereolithography process and enables to fabricate a complex 3D microstructure. This is divided into scanning and projection type according to aiming at precision and fabrication speed. The scanning MSL fabricates each layer using position control of laser spot on the resin surface, whereas the projection MSL fabricates one layer with one exposure using a mask. In the projection MSL, DMD used to generate dynamic pattern consists of $1024{\times}768$ micromirrors which have $13.68{\mu}m$ per side. The fabrication range and resolution are determined by the field of view of the DMD and the magnification of the projection lens. If using the projection lens with high power, very fine microstructures can be fabricated. In this paper, the projection MSL system adapted to a large surface for array-type fabrication is presented. This system covers the meso range, which is defined as the intermediate range between micro and macro, with a resolution of a few ${\mu}m$. The fabrication of array-type microstructures has been demonstrated to verify the performance of implemented system.

• Proceedings of the KIEE Conference
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• 2002.11c
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• pp.75-78
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• 2002

SFFS(Solid Freeform Fabrication System) is commercializing to rapid prototyping concept in world-wide some corporations including the States, have much technological problems yet and need new mode for agile solid freeform fabrication as well as prototyping. In this paper, we design an automatic control algorithm that the cutting path of laser beam, on the SFFS, is controlled with constant speed. The designed algorithm for constant-speed path control is implemented and experimented in the $CAFL^{VM}$ (Computer Aided Fabrication of Lamination for Various Material) system, the new SFFS which is developed in this paper. Its process is an automated fabrication method in which a 3D object is constructed from STL(SToreoLithography) 2D data, derived from CAD 3D image, by sequentially laminating the part cross-sections. The constant-speed path control is started from the STL data. After STL file is modified in data format to be available for control. The fabrication of the 2D part is, with constant speed, conducted from the 23 position data by laser beam. we confirm its high-performance through experiment results from the application into $CAFL^{VM}$ system.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1415-1418
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• 2008

Scaffold fabrication for regenerating functional human tissues has an important role in tissue engineering, and there has been much progress in research on scaffold fabrication. However, current methods are limited by the mechanical properties of existing biodegradable materials and the irregular structures that they produce. Recently, Solid freeform fabrication (SFF) technology was remarked by fabricating 3D free-form micro-structures. Among SFF technologies, we tried to fabricate scaffolds using micro-stereolithography which contain the highest resolution of all SFF technologies and precision deposition system which can use various biomaterials. And we developed the CAD/CAM system to automate the process of scaffold fabrication and fabricate the patient customized scaffolds. These results showed the unlimited possibilities of our SFF technologies in tissue engineering.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.73-77
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• 2004

This paper presents a PC-based controller of industrial SFFS(Solid Freeform Fabrication System). The SFFS has multiple sub-controllers for the building room, the powder room, the temperature, and the density of oxygen in the chambers. Hence the main PC-based controller should effectively and timely send commands to the sub-controllers, and monitor the overall SLS process. The required actuators and sensors are selected to optimize the overall performance of the SFFS.

• IE interfaces
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• v.12 no.3
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• pp.437-447
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• 1999

Modeling and system development for the fabrication process in the semiconductor manufacturing is presented in this paper. Maximization of wafer production can be achieved by the wafer flow balance under high utilization of bottleneck machines. Relatively simpler model is developed for the fabrication line by considering main characteristics of logistics. Simulation system is developed to evaluate the line performance such as balance rate, utilization, WIP amount and wafer production. Scheduling rules and input rules are suggested, and tested on the simulation system. We have shown that there exists good combination of scheduling and input rules.