• Journal of Sensor Science and Technology
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• v.13 no.1
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• pp.35-40
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• 2004

A thin-film multijunction thermal converter was fabricated through the process using 6 inch silicon wafer semiconductor process and bulk micromachining. Evanohm R alloy and chromel-constantan were used as a heater and thermocouple materials, respectively. The temperature coefficient of resistance of Evanohm R heater was about 75.12 ppm/$^{\circ}C$ and the voltage sensitivity of the thermal converter indicated about 5.75 mV/mW in air. The transfer differences, measured by FRDC-DC method in the frequency range from 20 Hz to 10 kHz, showed the value under about 1.36 ppm, 0.83 ppm for the film thickness of 500, 200 nm, respectively. And in case of a 200 nm-thick thermal converter, the AC-DC transfer differences seems to be stabilized below the value of 1 ppm in the frequency range from 1 kHz to 500 kHz.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.38 no.10
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• pp.699-705
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• 2001

Six types of planar thermal converters from TC 1 to TC 6 were designed and fabricated for the purpose of being used as practical standards to alternating current. The respective voltage responses in air and in a vacuum of TC 6, which has the smallest thermal loss, were about 4.03mV/mW and about 6.38 mV/mW. Thermal time constant of TC 6, which has also the smallest heater thermal inertia, was about 8 ms. The respective variations of AC-DC voltage and current transfer errors from sample to sample, which were measured by FRDC(fast reversed DC) method, were about $\pm$0.41 ~$\pm$0.85 ppm and about $\pm$0.15~$\pm$1.16 ppm in the frequent range of 40 Hz~10 KHz with appling 1 V and 5 mA rms sine waves to the converters. All converters investigated exhibited sufficiently low AC-DC transfer errors to be used as practical standards.