• Journal of the Korean Institute of Gas
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• v.22 no.1
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• pp.78-85
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• 2018

In this study, we analyzed risks of the fabrication process equipment and cleanroom for semiconductor/flat panel display (FPD) manufacturing facilities and studied the fundamental safety measures for the risk factors. We examined the explosion proof design models considering the specificity of equipment and environment, and planned to utilize the findings to provide technical standards and grounds for designing and manufacturing related equipment. We believe that this study will contribute to the establishment of technical standards for semiconductor/FPD industry and businesses in many different ways by providing optimized modeling of high-risk explosion site detection, developing safety standards and hazard countermeasures and voluntary activation of safety certification system for operation of fabrication process equipment.

• Journal of Institute of Control, Robotics and Systems
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• v.17 no.6
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• pp.566-572
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• 2011

In recent semiconductor and FPD (Flat Panel Display) manufacturing processes, high clean-class delivery operation is required more and more for short working time and better product quality. Traditionally SLIM (Single-sided Linear Induction Motor) is widely used in the liner drive applications because of its simplicity in the rail structure. A magnetically levitated (Maglev) unmanned vehicle with SLIM traction, which is powered by a CPS (Contactless Power Supply) can be a high precision delivery solution for this industry. In this paper unmanned FPD-carrying vehicle, which can levitate without contacting the rail structure, is suggested for high clean-class FPD delivery applications. It can be more acceptable for the complex facilities composed with many processes which require longer rails, because of simple rail structure. The test setup consists of a test vehicle and a rounded rail, in which the vehicle can load and unload products at arbitrary position commanded through wireless communications of host computer. The experimental results show that the suggested vehicle and rail have reasonable traction servo and robust electromagnetic suspensions without any contact. The resolution of point servo errors in the SLIM traction system is accomplished under 1mm. The maximum gap error is ${\pm}0.25mm$ with nominal air gap length of 4.0mm in the electromagnetic suspensions. This type of automated delivery vehicle is expected to have significant role in the clean delivery like FPD glass delivery.

• The Journal of Information Systems
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• v.17 no.4
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• pp.301-319
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• 2008

The display market has been replaced by the FPD (Flat Panel Display) from the CRT (Cathode-Ray Tube) since the late 1990s. In the FPD production line, the most equipment has high price. Thus, when the equipment has multi-function, the repetitive process is arranged for the equipment. However, such disposition of equipment results in more complicated process flow owing to repetitive operations. This reduces the production capacity and increases lead-time in turn. In this paper, we develop an AutoMod simulation system that derives to information about the quantity, production lead-time, utilities of facilities, and occupation rates of racks. In this simulation system, we consider the situation where the equipment might be broken and suspended randomly. For the developed system, we first evaluate a production plan with current layout and then, propose a revised alternative plan. Using the same simulation scheme, we investigate comparing the production quantity and lead-time with the two plans. In addition, for a proposed alternative, we try to forecast the most adequate rule between the two job dispatching rules which are FOR (Fewest Operation Remaining) and FCFS (First Come First Serve) through simulation.