• 한국가스학회지
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• 제22권1호
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• pp.78-85
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• 2018

본 연구를 통하여 반도체 FPD 제조설비 및 클린룸에 관련한 설비의 위험성분석과 그에 대한 근원적인 안전대책을 연구하고, 설비 및 환경의 특수성을 고려한 방폭 설계 모델링화를 검토하여 관련 설비의 설계 및 제작에 기술적인 기준과 근거로 활용하고자 하며, 아래와 같은 성과로서 향후 반도체 FPD 산업의 기술적 기준 수립 및 관련 산업에 기여할 것으로 생각한다. 1) 관련 국제 기술규격과 법령, 설비의 특성을 반영한 FAB 장비의 최적화된 폭발위험장소의 모델링 도출 2) FAB 장비 및 클린 룸의 특성을 고려한 위험설비의 안전성 확보 (Fool-Proof와 Fail Safe)를 위한 안전시스템 구축방안과 안전기준 및 대책 도출 3) 향후 FAB 장비의 방폭 설계에 대한 가장 효율적인 기준 적용을 통한 신규 FAB 장비의 방폭 성능의 유연성 확보하고 수립된 안전기준을 통한 설비와 안전시스템의 신뢰성 검증 절차 운영을 위한 "안전인증제도"의 자율적 향상화.

• 제어로봇시스템학회논문지
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• 제17권6호
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• pp.566-572
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• 2011

In recent semiconductor and FPD (Flat Panel Display) manufacturing processes, high clean-class delivery operation is required more and more for short working time and better product quality. Traditionally SLIM (Single-sided Linear Induction Motor) is widely used in the liner drive applications because of its simplicity in the rail structure. A magnetically levitated (Maglev) unmanned vehicle with SLIM traction, which is powered by a CPS (Contactless Power Supply) can be a high precision delivery solution for this industry. In this paper unmanned FPD-carrying vehicle, which can levitate without contacting the rail structure, is suggested for high clean-class FPD delivery applications. It can be more acceptable for the complex facilities composed with many processes which require longer rails, because of simple rail structure. The test setup consists of a test vehicle and a rounded rail, in which the vehicle can load and unload products at arbitrary position commanded through wireless communications of host computer. The experimental results show that the suggested vehicle and rail have reasonable traction servo and robust electromagnetic suspensions without any contact. The resolution of point servo errors in the SLIM traction system is accomplished under 1mm. The maximum gap error is ${\pm}0.25mm$ with nominal air gap length of 4.0mm in the electromagnetic suspensions. This type of automated delivery vehicle is expected to have significant role in the clean delivery like FPD glass delivery.

• 한국정보시스템학회지:정보시스템연구
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• 제17권4호
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• pp.301-319
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• 2008

The display market has been replaced by the FPD (Flat Panel Display) from the CRT (Cathode-Ray Tube) since the late 1990s. In the FPD production line, the most equipment has high price. Thus, when the equipment has multi-function, the repetitive process is arranged for the equipment. However, such disposition of equipment results in more complicated process flow owing to repetitive operations. This reduces the production capacity and increases lead-time in turn. In this paper, we develop an AutoMod simulation system that derives to information about the quantity, production lead-time, utilities of facilities, and occupation rates of racks. In this simulation system, we consider the situation where the equipment might be broken and suspended randomly. For the developed system, we first evaluate a production plan with current layout and then, propose a revised alternative plan. Using the same simulation scheme, we investigate comparing the production quantity and lead-time with the two plans. In addition, for a proposed alternative, we try to forecast the most adequate rule between the two job dispatching rules which are FOR (Fewest Operation Remaining) and FCFS (First Come First Serve) through simulation.