• 제목/요약/키워드: FGA

검색결과 69건 처리시간 0.026초

온도 Stress에 따른 High-k Gate Dielectric의 특성 연구

  • 이경수;한창훈;최병덕
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
    • /
    • pp.339-339
    • /
    • 2012
  • 현재 MOS 소자에 사용되고 있는 $SiO_2$ 산화막은 그 두께가 얇아짐에 따라 Gate Leakage current와 여러 가지 신뢰성 문제가 대두되고 있고, 이를 극복하고자 High-k물질을 사용하여 기존에 발생했던 Gate Leakage current와 신뢰성 문제를 해결하고자 하고 있다. 본 실험에서는 High-k(hafnium) Gate Material에 온도 변화를 주었을 때 여러 가지 전기적인 특성 변화를 보는 방향으로 연구를 진행하였다. 기본적인 P-Type Si기판을 가지고, 그 위에 있는 자연적으로 형성된 산화막을 제거한 후 Hafnium Gate Oxide를 Atomic Layer Deposition (ALD)를 이용하여 증착하고, Aluminium을 전극으로 하는 MOS-Cap 구조를 제작한 후 FGA 공정을 진행하였다. 마지막으로 $300^{\circ}C$, $450^{\circ}C$로 30분정도씩 Annealing을 하여, 온도 조건이 다른 3가지 종류의 샘플을 준비하였다. 3가지 샘플에 대해서 각각 I-V (Gate Leakage Current), C-V (Mobile Charge), Interface State Density를 분석하였다. 그 결과 Annealing 온도가 올라가면 Leakage Current와 Dit(Interface State Density)는 감소하고, Mobile Charge가 증가하는 것을 확인할 수가 있었다. 본 연구는 향후 High-k 물질에 대한 공정 과정에서의 다양한 열처리에 따른 전기적 특성의 변화 대한 정보를 제시하여, 향후 공정 과정의 열처리에 대한 방향을 잡는데 도움이 될 것이라 판단된다.

  • PDF

비마비측 팔다리를 이용한 몸통 운동이 뇌졸중 환자의 균형과 보행에 미치는 영향 (Effects of Trunk Exercise Using Less-affected Extremities on Gait and Balance in Stroke Patients)

  • 박근오;박규남;김수진;우영근
    • PNF and Movement
    • /
    • 제17권3호
    • /
    • pp.353-368
    • /
    • 2019
  • Purpose: This study investigated the effects of trunk exercise using less-affected extremities on gait and balance in chronic stroke patients. Methods: Thirty subjects with chronic stroke disease were divided into two groups: a trunk exercise group that used less-affected extremities (n=15) and a general trunk exercise group (n=15). All interventions were conducted 30 min a day, 6 times per week, for 3 weeks. Gait parameters were measured before and after the intervention using Zebris FDM-1.5. In addition, all subjects were evaluated using the Trunk Impairment Scale, the Berg Balance Scale, and the Functional Gait Assessment before and after the intervention. Results: Both groups showed improvements on all outcome measured pre- to post-intervention (p<0.05). The groups exhibited significant differences for TIS, BBS, FGA, gait speed, step length, and cadence at post-intervention (p<0.05). Conclusion: This study showed that trunk exercise using less-affected extremities has therapeutic benefits on gait and balance in individuals with chronic stroke disease.

운동 사슬에 따른 하지 저항운동이 뇌졸중 환자의 보행에 미치는 영향 (The Effect of Lower Limb Resistance Exercise Using a Kinetic Chain on Gait in Stroke Patients)

  • 오용섭;허영구
    • 대한통합의학회지
    • /
    • 제7권2호
    • /
    • pp.165-179
    • /
    • 2019
  • Purpose : The purpose of this study is to improve the stroke patient's gait ability by applying a closed or kinetic chain lower limb exercise Methods : The study subjects were 48 hospitalized hemiplegic patients who agreed to participate in the study. 48 subjects went through the intervention: 24 in the experimental group and 24 in the control group. One set consisted of 10 repeats of the exercise. The subjects performed three sets of the exercise once a day, 5 times a week, for 6 weeks. Results : TUG and FGA were significantly improved in the experimental group. The spatio-temporal gait variables in the experimental group all showed significant improvement. In the control group, velocity, cadence, and double limb support showed significant improvement, Trunk sway angle showed significant improvement in all three axes in both groups. Conclusion : The results of this study indicate that a more positive effect in terms of improvement of the stroke patient's gait ability will be seen for closed rather than open kinetic chain lower limb resistance exercise.

Mutation Cases in the Korean Population using 23 Autosomal STR Loci Analysis

  • Kim, Jeongyong;Kim, Hyojeong;Lee, Ja Hyun;Kim, Hyo Sook;Kim, Eungsoo
    • 대한의생명과학회지
    • /
    • 제27권2호
    • /
    • pp.105-110
    • /
    • 2021
  • Short Tandem Repeats (STR) analysis which characterized by genetic polymorphism has been widely used in the forensic genetic fields. Unfortunately, mutation occurred in various STR loci could make it difficult to interpret STR data. Thus, the mutation rate of STR loci plays an important role for the data interpretation in human identification and paternity test. To verify the mutation of the STR loci in the Korean population, 545 trio sets (father, mother, and child) were analyzed with two commercial STR kits that include the 23 autosomal STR loci (D1S1656, TPOX, D2S441, D2S1338, D3S1358, FGA, D5S818, CSF1PO, D7S820, D8S1179, D10S1248, TH01, D12S391, VWA D13S317, D16S539, D18S51, D19S433, D21S11, D22S1045, SE33, Penta E and Penta D). As a result, 36 mutations were observed in 14 STR loci. The types of mutation were also classified by the increase or decrease of the alleles. The overall mutation rate was 1.4×10-3, and the paternal mutation rate was four times higher than that of the maternal. This study will provide more detailed criterion for human identification by the mutation rate of STR loci in the Korean population.

Transparent Conductive Indium Zinc Tin Oxide Thin Films for Solar Cell Applications

  • ;이희영
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
    • /
    • pp.208-208
    • /
    • 2010
  • Indium zinc tin oxide (IZTO) thin films were studied as a possible alternative to indium tin oxide (ITO) films for providing low-cost transparent conducting oxide (TCO) for thin film photovoltaic devices. IZTO films were deposited onto glass substrates at room temperature. A dc/rf magnetron co-sputtering system equipped with a ceramic target of the same composition was used to deposit TCO films. Earlier studies showed that the resistivity value of $In_{0.6}Zn_{0.2}Sn_{0.2}O_{1.5}$ (IZTO20) films could be lowered to approximately $6{\times}10^{-4}ohm{\cdot}cm$ without sacrificing optical transparency and still maintaining amorphous structure through the optimization of process variables. The growth rate was kept at about 8 nm/min while the oxygen-to-argon pressure ratio varied from 0% to 7.5%. As-deposited films were always amorphous and showed strong oxygen pressure dependence of electrical resistivity and electron concentration values. Influence of forming gas anneal (FGA) at medium temperatures was also studied and proven effective in improving electrical properties. In this study, the chemical composition of the targets and the films varied around the $In_{0.6}Zn_{0.2}Sn_{0.2}O_{1.5}$ (IZTO20). It was the main objective of this paper to investigate how off-stoichiometry affected TCO characteristics including electrical resistivity and optical transmission. In addition to the composition effect, we have also studied how film properties changed with processing variables. IZTO thin films have shown their potential as a possible alternative to ITO thin films, in such way that they could be adopted in some applications where currently ITO and IZO thin films are being used. Our experimental results are compared to those obtained for commercial ITO thin films from solar cell application view point.

  • PDF

만성 뇌졸중 환자의 균형 및 보행 증진을 위한 체간 자가 훈련 프로그램 -예비연구- (Self-Training Trunk Program for Improving Balance and Walking Ability in People with Chronic Stroke -A Preliminary Study-)

  • 나은진;우영근
    • PNF and Movement
    • /
    • 제15권3호
    • /
    • pp.317-331
    • /
    • 2017
  • Purpose: Balance and walking ability are important elements of functional independence for people with stroke and are major goals in rehabilitation. These abilities require trunk performance, but most chronic stroke patients reach a plateau in their rehabilitation. Therefore, the purpose of this study was to investigate the effects of a self-training trunk program to improve balance and walking ability in people with stroke, and to suggest such a self-training program for integrated rehabilitation of people with stroke. Methods: The study recruited 7 people with stroke. The subjects performed trunk training for 30 min per day, 6 days per week, for 3 weeks. Participants were measured on the Trunk Impairment Scale (TIS), the Berg Balance Scale (BBS), the Korean Activities-specific Balance Confidence (K-ABC) scale, the Falls Efficacy Scale (FES), the Functional Gait Assessment (FGA), the 6 Minute Walk Test (6MWT) and a gait analysis to measure the training effects. Statistical analysis used the Wilcoxon signed-rank test as a non-parametric statistical test. Results: TIS was not significantly different after the self-training trunk program, but BBS (p>0.05), K-ABC, and FES were significantly improved after the training program (p<0.05). Furthermore, the 6MWT, stride/height %, and one-leg stance were significantly improved after the training program (p<0.05), but cadence, stance, and swing duration were not significantly different after the training (p>0.05). Conclusion: These results suggest that a self-training trunk program should be integrated into stroke rehabilitation to improve balance and walking ability, and further research is needed to develop the program to be more effective for chronic stroke patients.

An Analysis of the Reliability and Validity of a Korean Version of the Mobility and Gait Assessment Tools for Patients with Stroke

  • Jang, Ho Young;Lee, Jeong-Hoon;Oh, Jung Lim;Lee, Hyun Soo;Lee, Suk Min
    • The Journal of Korean Physical Therapy
    • /
    • 제30권1호
    • /
    • pp.29-34
    • /
    • 2018
  • Purpose: This study aimed to systematically analyze the reliability and validity of Korean versions of mobility and gait assessment tools for patients with stroke. Methods: Two reviewers conducted an independent literature search and systematically reviewed the literature. Literature published until June of 2017 was searched using search engines for electronic databases. The 2 reviewers reviewed the title and abstract of each article. Among the articles examined, we read the full text of those judged to be suitable for our study. We classified the selected data into research methods and results. The determination was made through mutual agreement. Results: The reviewers selected 5 articles related to the purpose of this study. The DGI was found to be moderately associated with BBS, 10MWT, and TUG in intra-rater reliability (ICC=0.92), inter-rater reliability (ICC=0.88), and concurrent validity tests. The FGA demonstrated a high level of reliability with intra-rater (ICC=0.92-0.95) and inter-rater reliability (ICC=0.91, 0.95). The intra-rater reliability of the RMI was high at ICC=0.98. Its concurrent validity showed a high association with STREAM and BI. The intra-rater reliability of the MAS was ICC=0.75-0.99. Its inter-rater reliability was very high, exceeding 0.99. The inter-rater reliability of the Tinetti-gait Scale was ICC=0.91, and its concurrent validity was moderately associated with the DGI, 10WMT, OLST, FM-L/E, and STS. Conclusion: The results of this study revealed that the reliability and validity of the Korean versions of the mobility and gait assessment tools were high.

Characteristics of Schottky Barrier Thin Film Transistors (SB-TFTs) with PtSi Source/Drain on glass substrate

  • 오준석;조원주
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
    • /
    • pp.199-199
    • /
    • 2010
  • 최근 평판 디스플레이 산업의 발전에 따라 능동행렬 액정 표시 소자 (AMOLED : Active Matrix Organic Liquid Crystral Display) 가 차세대 디스플레이 분야에서 각광을 받고있다. 기존의 TFT-LCD에 사용되는 a-Si:H는 균일도가 좋지만 전기적인 스트레스에 의해 쉽게 열화되고 낮은 이동도는 갖는 단점이 있으며, ELA (Eximer Laser Annealing) 결정화 poly-Si은 전기적인 특성은 좋지만 uniformity가 떨어지는 단점을 가지고 있어서 AMOLED 및 대면적 디스플레이에 적용하기 어렵다. 따라서 a-Si:H TFT보다 좋은 전기적인 특성을 보이며 ELA 결정화 poly-Si TFT보다 좋은 uniformity를 갖는 SPC (Solid Phase Crystallization) poly-Si TFT가 주목을 받고있다. 본 연구에서는 차세대 디스플레이 적용을 위해서 glass 기판위에 증착된 a-Si을 SPC 로 결정화 시킨 후 TFT를 제작하고 평가하였다. 또한 TFT 형성시에 저온공정을 실현하기 위해서 소스/드레인 영역에 실리사이드를 형성시켰다. 소자 제작시의 최고온도는 $500^{\circ}C$ 이하에서 공정을 진행하는 저온 공정을 실현하였다. Glass 기판위에 a-Si이 80 nm 증착된 기판을 퍼니스에서 24시간 동안 N2 분위기로 약 $600^{\circ}C$ 에서 결정화를 진행하였다. 노광공정을 통하여 Active 영역을 형성시키고 E-beam evaporator를 이용하여 약 70 nm 의 Pt를 증착시킨 후, 소스와 드레인 영역의 실리사이드 형성은 N2 분위기에서 $450^{\circ}C$, $500^{\circ}C$, $550^{\circ}C$에서 열처리를 통하여 형성하였다. 게이트 절연막은 스퍼터링을 이용하여 SiO2를 약 15 nm 의 두께로 증착하였다. 게이트 전극의 형성을 위하여 E-beam evaporator 을 이용하여 약 150 nm 두께의 알루미늄을 증착하고 노광공정을 통하여 게이트 영역을 형성 후 에 $450^{\circ}C$, H2/N2 분위기에서 약 30분 동안 forming gas annealing (FGA)을 실시하였다. 제작된 소자는 실리사이드 형성 온도에 따라서 각각 다른 특성을 보였으며 $450^{\circ}C$에서 실리사이드를 형성시킨 소자는 on currnet와 SS (Subthreshold Swing)이 가장 낮은것을 확인하였다. $500^{\circ}C$$550^{\circ}C$에서 실리사이드를 형성시킨 소자는 거의 동일한 on current와 SS값을 나타냈다. 이로써 glass 기판위의 SB-TFT 제작 시 실리사이드 형성의 최적온도는 $500^{\circ}C$로 생각되어 진다. 위의 결과를 토대로 본 연구에서는 SPC 결정화 방법을 이용하여 SB-TFT를 성공적으로 제작 및 평가하였고, 차세대 디스플레이에 적용할 경우 우수한 특성이 기대된다.

  • PDF

Identification of Gene-based Potential Biomarkers for Cephalexin-induced Nephrotoxicity in Mice

  • Park, Han-Jin;Oh, Jung-Hwa;Hwang, Ji-Yoon;Lim, Jung-Sun;Jeong, Sun-Young;Kim, Yong-Bum;Yoon, Seok-Joo
    • Molecular & Cellular Toxicology
    • /
    • 제2권3호
    • /
    • pp.193-201
    • /
    • 2006
  • Cephalexin, one of most widely prescribed cephalosporin, has been reported to cause acute renal failure as a side effect in human and experimental animals. Although numerous animal studies have been reported for the cephalosporin nephrotoxicity, the molecular and cellular nephrotoxic mechanisms of cephalexin are still unknown. This investigation evaluated the time-dependent gene expression profile of kidney in mouse during cephalexin induced nephrotoxicity. C57BL/6 female mice were administered either saline or 1,000 mg/kg cephalexin intraperitoneally. Mice were sacrificed at 3, 6, and 24 hr after administration. Blood biochemical and histopathological results indicated cephalexin induced nephrotoxicity. Microarray experiment carried out using Affymetrix $GeneChip^{(R)}$. There were 198 informative genes that were significantly expressed >5-fold versus control at 3, 6, and 24 hr (p<0.01), of which 156 and 42 were up-and down-regulated, respectively. Major classes of up-regulated genes at 3, 6 hr included those involved in MAPK/Jak-STAT signaling pathway and immune response such as cytokine-cytokine receptor interaction and complement and coagulation cascades. At 24 hr, up-regulated genes were mainly involved in regeneration/repair and immune response; down-regulated genes were generally associated with transporters and intermediary metabolism. Among the up-regulated genes at 24 hr, several potential biomarkers on nephrotoxicity such as Kim-1, Fga, Timp1, and Slc34a2 were clustered in a same category. In addition, Tnfrsf12a and Lcn2 which were consistently up-regulated (>5 fold) were also included as potential biomarkers. These results may provide clues for elucidating the mechanism of cephalexin induced nephrotoxicity and evaluating potential biomarkers to assess nephrotoxicity.

Wii-FitTM을 이용한 가상현실 운동프로그램이 뇌졸중 환자의 균형 및 보행능력에 미치는 영향 (The Effects of Virtual Reality Exercise Program with Wii-FitTM on Dynamic Balance and Walking Ability in Patients with Stroke)

  • 김정희;이종수;이수현;김성식;이병희
    • 한방재활의학과학회지
    • /
    • 제21권2호
    • /
    • pp.227-238
    • /
    • 2011
  • Objectives : This study was to investigate the effects on using Virtual reality exercise program($Wii-Fit^{TM}$) for dynamic balance and walking ability in patients with stroke. Methods : The 22 subjects were randomly selected from the patients of the S hospital who met the study conditions. They were divided into a $Wii-Fit^{TM}$ balance game group of 12 patients and a conventional physical therapy group of 10 patients. The $Wii-Fit^{TM}$ balance game group received $Wii-Fit^{TM}$ balance game group general physiotherapy for 5 days a weeks, 30 minutes a day, for a 4 weeks and the conventional physical therapy group received general physiotherapy for the same period. The subjects were measured and compared for Brunel balance assessment, functional gait assessment, 6 minute walk test, GAITRite system before and after the program. Results : The experimental group tend to improve more than control group in shifting the weight to the affected side(p=0.040) and tap test(p<0.001). The experimental group tend to improve more than control group in FGA(p=0.016). The experimental group improved significantly more than control group in 6MWT(p=0.008). The experimental group improved significantly more than control group in gait speed, cadence, stride length. Conclusions : Virtual Reality program($Wii-Fit^{TM}$) with conventional physical therapy shows the benefits on dynamic balance and gait parameters in patients with stroke.