• Journal of Korean Society on Water Environment
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• v.25 no.5
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• pp.792-802
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• 2009

The objective of this study is to construct the watershed management system with link of the non-point sources model and to estimate delivery ratio duration curves for various pollutants. For the total water pollution load management system, non-point source model should be performed with the study of the characteristic about non-point sources and loadings of non-point source and the allotment of pollutant in each area. In this study, daily flow rates and delivered pollutant loads of Nakdong river basin are simulated with modified TANK model and minimum variance unbiased estimator and SWAT model. Based on the simulation results, flow duration curves, load duration curves, and delivery ratio duration curves have been established. Then GIS analysis is performed to obtain several hydrological geomorphic characteristics such as watershed area, stream length, watershed slope and runoff curve number. As a result, the SWAT simulation results show good agreements in terms of discharge, BOD, TN, TP but for more exact simulation should be kept studying about variables and parameters which are needed for simulation. And as a result of the characteristic discharges, pollutants loading with the runoff and delivery ratios, non-point sources effects were higher than point sources effects in the small-scale test bed of Nakdong river basin.

• Journal of Korean Society on Water Environment
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• v.31 no.6
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• pp.732-738
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• 2015

Water quality in four major river basin in Korea was managed with Total Maximum Daily Load (TMDL) System. The unit watershed in TMDL system has been evaluated with Target Water Quality (TWQ) assessment using average water quality, without considering its volume of water quantity. As results, although unit watershed are obtained its TWQ, its allocated loads were not satisfied and vice versa. To solve these problems, a number of TWQ assessments with using Load Duration Curve (LDC) have been studied at other watersheds. The purpose of this study was to evaluate achievement of TWQ with Flow Duration Curve (FDC) and Load Duration Curve(LDC) at 26 unit watersheds in Han river basin. The results showed that achievement rates in TWQ assessment with current method and with LDC were 50~56 % and 69~73%, respectively. Because of increasing about 20% of achievement rates with using LDC, the number of exceeded unit watershed at Han river Basin was decreased about 4~6 unit watersheds.

• Journal of The Korean Society of Agricultural Engineers
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• v.60 no.6
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• pp.97-109
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• 2018

The LDC (Load Duration Curve) method can analyze river water quality changes according to flow rate and seasonal conditions. It is also possible to visually recognize whether the target water quality is exceeded or the size of the reduction load. For this reason, it is used for the optimal reduction of TPLCs and analysis of the cause of water pollution. At this time, the flow duration curve should be representative of the water body hydrologic curve, but if not, the uncertainty of the interpretation becomes big because the damaged flow condition is changed. The purpose of this study is to estimate the daily mean flow of the unit watershed using the HSPF model and to analyze the difference of the flow duration curves according to the cumulative daily mean flow rate using the NSE technique. The results show that it is desirable to construct the flow duration curve by using the daily average flow rate of at least 5 years although there is a difference by unit watershed. However, this is the result of the water bodies at the end of Han River basin watershed, so further study on various water bodies will be necessary in the future.

• Journal of Institute of Control, Robotics and Systems
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• v.21 no.9
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• pp.875-880
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• 2015

Traditional semiconductor process control has been performed through statistical process control techniques in a constant process-recipe conditions. However, the complexity of the interior of the etching apparatus plasma physics, quantitative modeling of process conditions due to the many difficult features constraints apply simple SISO control scheme. The introduction of the Advanced Process Control (APC) as a way to overcome the limits has been using the APC process control methodology run-to-run, wafer-to-wafer, or the yield of the semiconductor manufacturing process to the real-time process control, performance, it is possible to improve production. In addition, it is possible to establish a hierarchical structure of the process control made by the process control unit and associated algorithms and etching apparatus, the process unit, the overall process. In this study, the research focused on the methodology and monitoring improvements in performance needed to consider the process management of future developments in the semiconductor manufacturing process in accordance with the age of the APC analysis in real applications of the semiconductor manufacturing process and process fault diagnosis and control techniques in progress.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.82.2-82.2
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• 2013

반도체 및 디스플레이 소자를 생산 하기 위하여 다양하고 많은 공정 기술이 사용 되며 그 중에서 플라즈마를 이용하는 제조공정이 차지 하는 부분은 상당한 부분을 차지 하고 있습니다. 전체 반도체 공정 중 48%가 진공공정이며, 진공공정 중 68% 이상이 플라즈마를 이용하고 있으며, 식각과 증착 장비 뿐만 아니라 세정과 이온증착 에 이르기 까지 다양하며 앞으로도 더욱 범위가 늘어 날 것으로 보입니다. 이러한 플라즈마를 이용한 제조 공정들은 제품의 생산성을 향상 하기 위하여 오염제어 기술을 비롯한 공정관리기술 그리고 고기능 센서기술을 이용한 공정 모니터링 및 제어 기술에 이르기 까지 다양한 기술들을 필요로 합니다. 플라즈마를 이용한 제조 장비는 RF파워모듈, 진공제어모듈, 공정가스제어모듈, 웨이퍼 및 글래스의 반송장치, 그리고 온도제어 모듈과 같이 다양한 장치의 집합체라 할 수 있습니다. 플라즈마의 생성과 이를 제어 하기 위한 기술은 제조장비의 국산화를 위한 부단한 노력의 결실로 많은 부분 기술이 축적되어 왔고 성과를 거두고 있습니다. 그러나 고기능 모니터링 센서 기술 개발은 그 동안 활발 하게 이루어져 오고 있지 않았으며 대부분 외산 기술에 의존해 왔습니다. 세계 반도체 시장은 현재 300 mm 웨이퍼 가공에서, 추후 450 mm 시장으로 패러다임이 변화될 예정이며, 미세화 공정이 더욱 진행 됨에 따라 반도체 제조사들의 관심사가 "성능 중심의 반도체 제조기술"로부터 "오류 최소를 통한 생산성 향상"에 더욱 주목 하고 있습니다. 공정미세화 및 웨이퍼 대구경화로 인해 실시간 복합 센서를 이용한 데이터 처리 알고리즘 및 자동화 소프트웨어의 기능이 탑재된 장비를 요구하고 있습니다. 주식회사 레인보우 코퍼레이션은 플라즈마 Chemistry상태를 정성 분석 가능한 OES (Optical Emission Spectroscopy)를 이용한 EPD System을 상용화 하여 고객사에 공급 중이며, 플라즈마의 광 신호를 실시간으로 고속 계측함과 동시에 최적화된 알고리즘을 이용하여 플라즈마의 이상 상태를 감지하며 이를 통하여 제조 공정 및 장비의 개선을 가능하게 하여 고객 제품의 생산성을 향상 하도록 하는 기술을 개발 하고 있습니다. 본 심포지엄에서는 주식회사 레인보우 코퍼레이션이 개발 중인 "실시간 고속 플라즈마 광 모니터링 기술" 의 개념을 소개하고, 제품의 응용 범위와 응용 방법에 대하여 설명을 하고자 합니다.

• Journal of Environmental Science International
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• v.21 no.1
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• pp.31-39
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• 2012

The objective of this study is to provide pollutant loads delivery ratio for flow duration in Oenam-cheon watershed, which is upstream watershed of Juam Lake. To calculate the delivery ratio by flow duration, rating curves and discharge-loads curves using measured data were established, then Flow Duration Curve(FDC) and pollutant loads delivery ratio curves were constructed. The results show that the delivery ratios for $BOD_5$ for abundant flow($Q_{95}$), ordinary flow($Q_{185}$), low flow($Q_{275}$), and drought flow($Q_{355}$) were 23.9, 12.7, 7.1, and 2.9%, respectively. The delivery ratios of same flow regime for T-N were 58.4, 31.2, 17.2 and 7.1%, respectively. While, the delivery ratios T-P were 17.3, 7.5, 3.4, and 1.1% respectively. In general, delivery ratio of high flow condition showed higher value due to the influence of nonpoint source pollution. Based on the study results, generalized equations were developed for delivery ratio and discharge per unit area, which could be used for ungaged watershed with similar pollution sources.

• Economic and Environmental Geology
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• v.56 no.2
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• pp.139-153
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• 2023

This study aimed to understand the spatiotemporal variations in nitrogen content in the Gyeongan stream along the main stream and at the discharge points of the sub-basins, and to identify the origin of the nitrogen. Field surveys and laboratory analyses, including chemical compositions and isotope ratios of nitrate and boron, were performed from November 2021 to November 2022. Based on the flow duration curve (FDC) derived for the Gyeongan stream, the dry season (mid-December 2021 to mid-June 2022) and wet season (mid-June to early November 2022) were established. In the dry season, most samples had the highest total nitrogen(T-N) concentrations, specifically in January and February, and the concentrations continued to decrease until May and June. However, after the flood season from July to September, the uppermost subbasin points (Group 1: MS-0, OS-0, GS-0) where T-N concentrations continually decreased were separated from the main stream and lower sub-basin points (Group 2: MS-1~8, OS-1, GS-1) where concentrations increased. Along the main stream, the T-N concentration showed an increasing trend from the upper to the lower reaches. However, it was affected by those of the Osan-cheon and Gonjiamcheon, the tributaries that flow into the main stream, resulting in respective increases or decreases in T-N concentration in the main stream. The nitrate and boron isotope ratios indicated that the nitrogen in all samples originated from manure. Mechanisms for nitrogen inflow from manure-related sources to the stream were suggested, including (1) manure from livestock wastes and rainfall runoff, (2) inflow through the discharge of wastewater treatment plants, and (3) inflow through the groundwater discharge (baseflow) of accumulated nitrogen during agricultural activities. Ultimately, water quality management of the Gyeongan stream basin requires pollution source management at the sub-basin level, including its tributaries, from a regional context. To manage the pollution load effectively, it is necessary to separate the hydrological components of the stream discharge and establish a monitoring system to track the flow and water quality of each component.