• IE interfaces
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• v.17 no.spc
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• pp.131-140
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• 2004

The purpose of this paper is to develop and show the efficiency of the URL(Unload Request Logic) and LRL(Load Request Logic) of the dispatcher in the Fab(Fabrication) Manufacturing Execution System. These logics are the core procedures which control the material(wafer and glass substrate) flow efficiently in the semiconductor and LCD fab considering inter-bay as well as intra-bay material flow. We use the present and future status information of the system by look-ahead and the information about the future transportation schedule of Automated Guided Vehicles. The simulation results show that the URL and LRL presented in this paper reduce the average lead time, average and maximum WIP level, and the average available AGV waiting time.

• Journal of the Korean Applied Science and Technology
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• v.23 no.2
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• pp.125-129
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• 2006

Benzoxazolo carbocyanine compounds were synthesized by condensation of a suitable ortho-ester with an appropriately substituted 2-methylbenzoxazole in the presence of triethylamine. This compounds used as green sensitizing dyes in photographic emulsions. The compounds are characterized by fast atom bombardment mass spectrometry. The values(m/z) of structurally significant ions observed in FAB spectra. It was showed tentative fragmentation pattern in FAB spectroscopy of $HN(C_2H_5)_3$ cations in glycerol/trifluoroacetic acid matrix.

• BMB Reports
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• v.30 no.4
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• pp.253-257
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• 1997

Negative ion fast atom bombardment (FAB) mass spectra were found to allow the determination of the linkage positions in a series of underivatized linkage-isomeric oligosaccharides. A previous work (Laine et al., 1988) reported that ion patterns of linkage-isomeric trisaccharides could be distinguished by a positive ion. Negative ion FAB collison-activated dissociation (CAD) mass spectrometry (MS) spectra of trisaccharides exhibited better sensitivity than the positive ion mode and provided specific fragmentation patterns according to the linkage positions. Especially, the fragmentations, m/z 205 in F6 and m/z 221 in G6, not occuring in 1-3 or 1-4 linkage. were an indication of 1-6 linkage, by changing collision energies from + 10 eV to +60 eV. The survival ratios of molecular ions in each collision energy set gave support to previous results in which the order of bond stability was 1-6>1-4>1-3 linkage.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.05a
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• pp.237-242
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• 2004

In design stage of high precision manufacture/inspection FAB building, it is necessary to investigate the vibration allowable limits of high precision equipment and to study a structure dynamic characteristics of C/R and Sub-structure in order to provide a structure vibration environment to satisfy thess allowable limits. The aim of this study is to investigate the dynamic characteristics of PC-Type mock-up structures designed for next TFT LCD FAB through vibration measurement and analysis procedure, therefore, to provide a proper dynamic structure design for high precision manufacture/inspection work process, which satisfy thess allowable limits.

• Annual Conference of KIPS
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• 2012.11a
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• pp.1245-1248
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• 2012

반도체와 LCD 산업분야, 나노급 공정 및 검사기술이 요구되는 산업분야의 수요증가에 따라 초정밀 가공/생산/검사 장비를 설치, 운용하는 FAB. 구조물의 설계요구가 증대되고 있으며, 건물의 환경진동 규제치도 강화되고 있는 실정이다. 이와 같은 대형 구조물에서의 서브 마이크로 수준의 미진동(微振動)을 제어하는 문제는 진동 응답을 결정하는 구조와 재료가 복잡하고 다양한 형태를 갖고 있는 반면, 다루어야 할 동적 응답은 극한적으로 작은 마이크로 이하의 값을 다루어야 하기 때문에 매우 어렵다. 따라서 기존에 이용되고 있는 해석과 실험의 결과만으로는 신모델 설계에 적용하기 어렵다. 따라서, 본 논문에서는 실험적 데이터와 경험적 데이터들을 기반으로 구축된 데이터베이스를 이용하여 새로운 초정밀 FAB. 동적 구조 설계 시스템을 구현한다.

• Annual Conference of KIPS
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• 2013.05a
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• pp.850-852
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• 2013

산업발전에 따라 초정밀 가공/생산/검사 장비를 설치, 운용하는 FAB. 구조물의 건축이 증대되고 있으며, 이에 따라 건물의 환경진동 규제치도 강화되고 있는 실정이다. 한국은 일본이나 동남아 국가들과는 달리 지진에 대한 피해가 직접적으로 보고되고 있지는 않지만, 동일본 지진에서와 같이 인접국가의 대규모 지진은 초정밀 장비의 작동에 심각한 영향을 준다. 따라서, 본 논문에서는 대규모 지진에 영향을 받는 일반 건물과 미세한 지반 진동에도 영향을 받는 정밀 FAB. 에서 운용이 가능한 범용적인 지진재해 대비 모니터링 시스템의 설계에 대해 서술한다.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2012.04a
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• pp.785-786
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• 2012

• Journal of Intelligence and Information Systems
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• v.9 no.1
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• pp.157-177
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• 2003

This paper presents a comprehensive and successful application of data mining methodologies to improve and predict wafer yield in a semiconductor wafer fabrication system. As the wafer fabrication process is getting more complex and the volume of technological data gathered continues to be vast, it is difficult to analyze the cause of yield deterioration effectively by means of statistical or heuristic approaches. To begin with this paper applies a clustering method to automatically identify AUF (Area Uniform Failure) phenomenon from data instead of naked eye that bad chips occurs in a specific area of wafer. Next, sequential pattern analysis and classification methods are applied to and out machines and parameters that are cause of low yield, respectively. Furthermore, radial bases function method is used to predict yield of wafers that are in process. Finally, this paper demonstrates an information system, Y2R-PLUS (Yield Rapid Ramp-up, Prediction, analysis & Up Support), that is developed in order to analyze and predict wafer yield in a korea semiconductor manufacturer.

• Molecules and Cells
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• v.27 no.3
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• pp.313-319
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• 2009

The dual-vector system-II (DVS-II), which allows efficient display of Fab antibodies on phage, has been reported previously, but its practical applicability in a phage-displayed antibody library has not been verified. To resolve this issue, we created two small combinatorial human Fab antibody libraries using the DVS-II, and isolation of target-specific antibodies was attempted. Biopanning of one antibody library, termed DVFAB-1L library, which has a $1.3{\times}10^7$ combinatorial antibody complexity, against fluorescein-BSA resulted in successful isolation of human Fab clones specific for the antigen despite the presence of only a single light chain in the library. By using the unique feature of the DVS-II, an antibody library of a larger size, named DVFAB-131L, which has a $1.5{\times}10^9$ combinatorial antibody complexity, was also generated in a rapid manner by combining $1.3{\times}10^7$ heavy chains and 131 light chains and more diverse anti-fluorescein-BSA Fab antibody clones were successfully obtained. Our results demonstrate that the DVS-II can be applied readily in creating phage-displayed antibody libraries with much less effort, and target-specific antibody clones can be isolated reliably via light chain promiscuity of antibody molecules.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.39 no.1
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• pp.73-80
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• 2016

This study focuses on the formation of input release lots in a semiconductor wafer fabrication facility. After the order-lot pegging process assigns lots in the fab to orders and calculates the required quantity of wafers for each product type to meet customers' orders, the decisions on the formation of input release lots should be made to minimize the production costs of the release lots. Since the number of lots being processed in the wafer fab directly is related to the productivity of the wafer fab, the input lot formation is crucial process to reduce the production costs as well as to improve the efficiency of the wafer fab. Here, the input lot formation occurs before every shift begins in the semiconductor wafer fab. When input quantities (of wafers) for product types are given from results of the order-lot pegging process, lots to be released into the wafer fab should be formed satisfying the lot size requirements. Here, the production cost of a homogeneous lot of the same type of product is less than that of a heterogeneous lot that will be split into the number of lots according to their product types after passing the branch point during the wafer fabrication process. Also, more production cost occurs if a lot becomes more heterogeneous. We developed a multi-dimensional dynamic programming algorithm for the input lot formation problem and showed how to apply the algorithm to solve the problem optimally with an example problem instance. It is necessary to reduce the number of states at each stage in the DP algorithm for practical use. Also, we can apply the proposed DP algorithm together with lot release rules such as CONWIP and UNIFORM.