• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.132-132
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• 2010

In the nano-scale Si processing, patterning processes based on multilevel resist structures becoming more critical due to continuously decreasing resist thickness and feature size. In particular, highly selective etching of the first dielectric layer with resist patterns are great importance. In this work, process window for the infinitely high etch selectivity of silicon oxynitride (SiON) layers and silicon nitride (Si3N4) with EUV resist was investigated during etching of SiON/EUV resist and Si3N4/EUV resist in a CH2F2/N2/Ar dual-frequency superimposed capacitive coupled plasma (DFS-CCP) by varying the process parameters, such as the CH2F2 and N2 flow ratio and low-frequency source power (PLF). It was found that the CH2F2/N2 flow ratio was found to play a critical role in determining the process window for ultra high etch selectivity, due to the differences in change of the degree of polymerization on SiON, Si3N4, and EUV resist. Control of N2 flow ratio gave the possibility of obtaining the ultra high etch selectivity by keeping the steady-state hydrofluorocarbon layer thickness thin on the SiON and Si3N4 surface due to effective formation of HCN etch by-products and, in turn, in continuous SiON and Si3N4 etching, while the hydrofluorocarbon layer is deposited on the EUV resist surface.

• Animal Systematics, Evolution and Diversity
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• 제31권1호
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• pp.31-41
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• 2015

A new species of the genus Farranula Wilson, 1942 (Cyclopoida, Corycaeidae) is described based on both sexes collected off Chuuk Island in Micronesia (West Central Pacific). The new species F. dahlae differs from its close congener F. gibbula (Giesbrecht, 1891) in the following combination of characters in both sexes: body length is longer, length to width ratio of caudal rami is larger, basal element of maxilliped is distinctly longer, and terminal spine to distal segment ratio of P4 is smaller; while in females, lateral margins of fourth pedigerous somite are extended to mid-region of second urosomal somite, maximum width of the second urosomal somite is located at middle region in dorsal and lateral views, and length ratio of caudal seta III to seta V is much larger; and in males, sharply contracted portion of second somite is located at two-thirds distance from anterior margin. Some additional morphological details of F. gibbula are given and a key to species of the genus Farranula is provided.

• 말소리와 음성과학
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• 제10권2호
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• pp.85-96
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• 2018

The purpose of this study was to investigate the effect of articulatory intervention using visual phonics to improve the speech intelligibility of children with impaired hearing. The subjects of the study were five hearing impaired children. As per the results of the UTAP articulation tests, five phonemes with the most frequent errors were selected for each child and a total of 10 sessions were provided. The methodology involved analyzing vowel space and related measures (vowel space area, vowel articulatory index, formant centralization ratio, and F2i/F2u ratio) before and after the visual phonics intervention. After the articulation intervention, every child's speech intelligibility improved, their vowel space area was widened, the FCR value decreased, and the F2ratio value increased. These results show that the use of visual phonics through symbolic images and hand clues has a positive effect in terms of improving the speech intelligibility of children with impaired hearing.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2007년도 제28회 춘계학술대회논문집
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• pp.148-151
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• 2007

동축 스월 인젝터 중에서 연료 인젝터의 스월 챔버 유무에 따른 인젝터 페이스의 냉각 특성을 알아보기 위해서 연료의 스월 챔버의 유무 조건만 다르고 모든 설계 조건이 같은 두 개의 인젝터를 만들었으며, 장시간 연소가 가능하도록 물을 이용한 재생 냉각 채널을 인젝터 페이스에 설치하였다. 두 개의 인젝터를 이용하여 연소 실험을 수행한 후 인젝터 페이스의 냉각 특성을 비교하였고, O/F ratio 2.0일 때와 O/F ratio 1.7일 때의 연소 특성 및 인젝터 페이스의 냉각 특성을 살펴보았다.

• 통합자연과학논문집
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• 제1권2호
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• pp.79-83
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• 2008

As a new standard for performance measurement, NEMA NU2-2001 was presented recently. In this study, I investigated the spatial resolution, sensitivity, scatter fraction, and noise equivalent count ratio (NECR) in order to know the information of physical characteristics and system performance of GE discovery ST using this new standard. Bismuth germinate crystals ($6{\times}6$ array, $6.3mm{\times}6.3mm{\times}30mm$) were used in discovery ST (energy window:375-650 keV, coincidence window:11.7 nsec). To measure the sensitivity, five aluminum sleeves (Data Spectrum Corp., Chapel Hill, NC., USA, thickness:1.25 mm)-NEMA sensitivity phantom- filled with F-18 solution were used. Successive measurements in 2D and 3D acquisition mode were made with a line source at the center of transaxial field of view and 10 cm off from the center until the count was over 500,000. Spatial resolution was estimated using a point source (F-18, 0.1 mCi) at different locations in the FOV. Scatter fraction and NECR was tested using a NEMA scatter phantom. Dynamic data were acquired for 7 half-lives using F-18 solution. And true to background ratio was averaged at last three frames when the random rate was as small as ignorable for the calculation of scatter fraction. We anticipate this overall evaluated results could be used for the quality assurance and optimized image acquisition for clinical research.

• 한국태양에너지학회 논문집
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• 제33권5호
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• pp.41-50
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• 2013

Economic feasibility study using weighted average variable Jeju System Marginal Price, SMP, was conducted for Gasiri wind farm of Jeju Island. To predict the variable Jeju SMP, generator share ratio for SMP was calculated from the real time wind power production and the power demand data for years. Also, sensitivity analysis on Net Present Value, NPV, and Benefit/Cost Ratio, B/C ratio, were performed to clarify which factors are more important in assessing economic feasibility. The result shows that the Gasiri wind farm has a minimum of 110 billion won and a maximum of 132 billion won difference between fixed and variable SMP. Also, Capacity Factor, C.F., had the highest sensitivity for NPV, followed by SMP. Accordingly, when economic analysis for a potential wind farm site is carried out, the variable SMP as well as C.F. should be considered for more accurate assessment of the wind farm.

• 한국정밀공학회지
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• 제17권1호
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• pp.145-152
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• 2000

X-ray diffraction method detects change of crystal lattice distance under material surface using diffraction angle 2$\theta$. This technique can be applied to the behavior on slip band and micro crack due to material degradation. The relation between half-value breadth and number of cycle has three stages which constitute rapid decrease in initial number of cycles, slight decrease in middle number of cycles and rapid decrease in final number of cycles. The ratio of half-value breadth takes a constant value on B/B$_{0}$-N diagram with loading condition except early part of fatigue life. The ratio of half-value breadth B/B$_{0}$ with respect to number of cycle to failure N$_{f}$ has linear behavior on B/B$_{0}$-log N$_{f}$ diagram. Therefore, in this paper the estimation of fatigue life by average gradient method has much less estimated mean error than the estimation of fatigue life by log B/B$_{0}$-log N/N$_{f}$ relation.elation.ation.

• 핵의학기술
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• 제18권2호
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• pp.68-72
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• 2014

핵의학 검사는 반감기로 인한 동위원소의 잔류로 당일에 두 가지 검사를 시행하는데 어려움이 있다. 본 연구는 $^{18}F$-FDG와 $^{99m}TcO_4{^-}$의 상호 영향을 연구함으로써 당일 검사를 진행할 경우 고려될 사항에 대해 알아보고자 한다. NEMA-1994 Phantom을 이용하여 세 번의 실험을 진행했다. 첫 실험은 $^{99m}TcO_4{^-}$을 HOT과 BKG 비 4:1로 만들어 GE사의 INFINIA 장비로 SPECT를 시행하였고, BKG 영역에 $^{18}F$-FDG 37 MBq을 주입 후 동일 조건으로 60분에 1회씩 13회 Scan 했다. 두 번째는 $^{18}F$-FDG를 HOT과 BKG 비 4:1 로 만들어 GE사의 PET/CT Discovery 600 에서 Scan 하였고, BKG 영역에 $^{99m}TcO_4{^-}$을 148 MBq 주입 후 동일 조건으로 60분에 1회씩 6회 Scan 했다. 마지막 실험은 $^{18}F$-FDG를 HOT과 BKG 비 4 : 1로 만들고 1 Bed Scan 후 $^{99m}TcO_4{^-}$을 148 MBq 및 296 MBq씩 증가 시키며 같은 조건으로 1 Bed Scan했다. HOT과 BKG 영역의 비, CNR 혹은 SNR 그리고 총 획득 계수를 측정 후 비교 했다. $^{18}F$-FDG는 SPECT 시행 시 비율 및 CNR에 유의한 차이를 보였다(p>0.05). $^{99m}TcO_4{^-}$는 PET/CT 시행 시 비율 및 SNR이 유의한 차이를 보이지 않았다(p<0.05). $^{99m}TcO_4{^-}$이 PET/CT 검사의 Total Counts를 감소시킨다는 결과를 획득했다. PET/CT 검사를 한 경우 12시간 까지도 $^{99m}TcO_4{^-}$을 이용한 검사에 영향을 미칠 수 있으며, $^{99m}TcO_4{^-}$를 먼저 시행한 경우에는 PET/CT 검사에 SUV 및 SNR에 영향은 없지만 검출 효율을 감소시켰다. 당일 검사 시에는 $^{99m}TcO_4{^-}$을 이용한 검사를 먼저 진행하고 PET/CT의 검사 시간을 늘려 검출 효율을 보완하는 방법을 권장하고자 한다.

• 한국잠사곤충학회지
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• 제31권2호
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• pp.91-101
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• 1989

가잠육종의 선발에 대한 유전적 Parameter를 추적학 ldnl해 누에 일본종계통 3, 중국종계통 4 모두 7개 품종을 이면교배하여 주요 견성과 사질의 유전력과 유전상관을, 그리고 유전상관의 값을 이용하여 여러 형질이 직접 또는 간접적으로 견사량에 미치는 영향을 구명하기 위한 경로계수를 추정하였다. 원잠종을 재료로 한 각 형질의 유전력은 F1, F2세대에서 5령경과, 단견중, 견층중, 견층비율, fibroin량, 견층연감율, 견사량 등이 모두 76.65% 이상이었다. 형질상호간의 상관관계를 F1, F2 세대에서 자웅별로 보면 표현형상관과 유전상관의 값은 대체로 정의 방향이었고, 유전상관의 값이 표현형상관의 값보다 일반적으로 높았다. 견사량과의 형질상호간의 상관관계에서 단견중, 견층중, 견층비율, fibroin량 등은 F1, F2세대의 자웅이 모두 0.727 이상의 높은 유전상관 값을 보였다. 주요 형질들의 유전력이 대체로 높고 유전상관의 값이 정의 방향이므로 이들 형질은 선발이 용이할 것으로 기대된다. 경로계수는 견사량에 관여하는 직접효과가 F1세대에서 자의 견층중이 0.991, 웅의 단견중이 0.803이고, F2세대에서 웅의 견층비율이 0.938, 웅의 fibroin량이 0.930으로서 정의 방향으로 그 효과가 크게 표현되었다. 경로계수에서 견사량에 관여하는 직·간접효과가 세대간과 자웅간에 차이는 있으나 주로 증량적 형질인 단견중, 견층중 등의 영향이 컸을 것으로 평가된다.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2001년도 하계종합학술대회 논문집(2)
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• pp.197-200
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• 2001

Novel Enhanced Inductively Coupled Plasma is applied to etch $SiO_2$. Effect of $O_2$ or Ar addition to $C_{4}F_{8}$ gas is monitored by Optical Emission Spectroscopy and Quadrupole Mass Spectrometer. It is fund that Ar or $O_2$ dilution to $C_{4}F_{8}$ increases F emission intensity and decreases $CF_2$ intensity. However, the ac frequency to the Helmholtz coil decreases the F intensity and thus increases $CF_2$/F ratio. By adjusting the ac frequency, the optimum etch rate and PR to $SiO_2$ selectivity can be obtained in E-lCP.