• Journal of the Semiconductor & Display Technology
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• v.7 no.1
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• pp.1-5
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• 2008

In this paper, we fabricated pressure difference type gas flow sensor using only dry etching technology by ICP-RIE(inductive coupled plasma reactive ion etching). The sensor's structure consists of a common shear stress type piezoresistive pressure sensor with an orifice fabricated in the middle of the sensor diaphragm. Generally, structure like diaphragm is fabricated by wet etching technology using TMAH, but we fabricated diaphragm by only dry etching using ICP-RIE. To equalize the thickness of diaphragm we applied insulator($SiO_2$) layer of SOI(Si/$SiO_2$/Si-sub) wafer as delay layer of dry etching. Size of fabricated diaphragm is $1000{\times}1000{\times}7\;{\mu}m^3$ and overall chip $3000{\times}3000{\times}7\;{\mu}m^3$. We measured the variation of output voltage toward the change of gas pressure to analyze characteristics of the fabricated sensor. Sensitivity of fabricated sensor was relatively high as about 1.5mV/V kPa at 1kPa full-scale. Nonlinearity was below 0.5%F.S. Over-pressure range of the fabricated sensor is 100kPa or more.

• Journal of Microbiology and Biotechnology
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• v.9 no.5
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• pp.529-533
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• 1999

In addition to catalyzing the synthesis of dextran from sucrose as a primary reaction, dextransucrase also catalyzes the transfer of glucose from sucrose to other carbohydrates that are present or are added to the reaction digest. We have synthesized new glucans having new structures and new characteristics, by transferring D-glucose of sucrose to $\alpha$-cellulose and by using the constitutive dextransucrase obtained from Leuconostoc mesenteroides B-742CBM. The final reaction products were composed of soluble- and insoluble-glucans. The yields of soluble- and insoluble-glucans were theoretically 21% $\pm$ 2.2 and 68% $\pm$ 5.1, respectively. The remainder of the reaction products was recovered as a mixture of olgiosaccharides that could not be precipitated by 67%(v/v) ethanol. Treating the modified glucans with endo-dextranase and/or cellulase, oligosaccharides were produced that were not formed from the hydrolysis of native cellulose or B-742CBM dextran. The modification of the cellulose was confirmed by methylation and acid hydrolysis of the soluble-and insoluble-glucan. Both (1->4) and(1->6) glycosidic linkages were found in both of the glucans.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.322-322
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• 2010

For boron doping on n-type silicon wafer, around $1,000^{\circ}C$ doping temperature is required, because of the relatively low solubility of boron in a crystalline silicon comparing to the phosphorus case. Boron doping by fiber laser annealing and lamp furnace heat treatment were carried out for the uniformly deposited p-a-Si:H layer. Since the uniformly deposited p-a-Si:H layer by cluster is highly needed to be doped with high temperature heat treatment. Amorphous silicon layer absorption range for fiber laser did not match well to be directly annealed. To improve the annealing effect, we introduce additional lamp furnace heat treatment. For p-a-Si:H layer with the ratio of $SiH_4:B_2H_6:H_2$=30:30:120, at $200^{\circ}C$, 50 W power, 0.2 Torr for 30 min. $20\;mm\;{\times}\;20\;mm$ size fiber laser cut wafers were activated by Q-switched fiber laser (1,064 nm) with different sets of power levels and periods, and for the lamp furnace annealing, $980^{\circ}C$ for 30 min heat treatment were implemented. To make the sheet resistance expectable and uniform as important processes for the $p^+$ layer on a polished n-type silicon wafer of (100) plane, the Q-switched fiber laser used. In consequence of comparing the results of lifetime measurement and sheet resistance relation, the fiber laser treatment showed the trade-offs between the lifetime and the sheet resistance as $100\;{\omega}/sq.$ and $11.8\;{\mu}s$ vs. $17\;{\omega}/sq.$ and $8.2\;{\mu}s$. Diode level device was made to confirm the electrical properties of these experimental results by measuring C-V(-F), I-V(-T) characteristics. Uniform and expectable boron heavy doped layers by fiber laser and lamp furnace are not only basic and essential conditions for the n-type crystalline silicon solar cell fabrication processes, but also the controllable doping concentration and depth can be established according to the deposition conditions of layers.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.475-475
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• 2010

We have generated Ar plasma in dense plasma focus device with coaxial electrodes for extreme ultraviolet (EUV) lithography and investigated an emitted visible light for electro-optical plasma diagnostics. We have applied an input voltage 4.5 kV to the capacitor bank of 1.53 uF and the diode chamber has been filled with Ar gas of pressure 8 mTorr. The inner surface of the cylindrical cathode has been attatched by an acetal insulator. Also, the anode made of tin metal. If we assumed that the focused plasma regions satisfy the local thermodynamic equilibrium (LTE) conditions, the electron temperature and density of the coaxial plasma focus could be obtained by Stark broadening of optical emission spectroscopy (OES). The Lorentzian profile for emission lines of Ar I of 426.629 nm and Ar II of 487.99 nm were measured with a visible monochromator. And the electron density has been estimated by FWHM (Full Width Half Maximum) of its profile. To find the exact value of FWHM, we observed the instrument line broadening of the monochromator with a Hg-Ar reference lamp. The electron temperature has been calculated using the two relative electron density ratios of the Stark profiles. In case of electron density, it has been observed by the Stark broadening method. This experiment result shows the temporal behavior of the electron temperature and density characteristics for the focused plasma. The EUV emission signal whose wavelength is about 6 ~ 16 nm has been detected by using a photo-detector (AXUV-100 Zr/C, IRD). The result compared the electron temperature and density with the temporal EUV signal. The electron density and temperature were observed to be $10^{16}\;cm^{-3}$ and 20 ~ 30 eV, respectively.

• Journal of the Microelectronics and Packaging Society
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• v.26 no.3
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• pp.59-62
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• 2019

In this study, we have developed solution-processed, F-doped In-Ga-Zn-O semiconductors and investigated their applications to thin-film transistors. In order for forming the appropriate channel layer, precursor solutions were formulated by dissolving the metal salts in the designated solvent and an additive, ammonium fluoride, was incorporated additionally as a chemical modifier. We have studied thermal and chemical contributions by a thermal annealing and an incorporation of chemical modifier, from which it was revealed that electrical performances of the thin-film transistors comprising the channel layer annealed at a low temperature can be improved significantly along with an addition of ammonium fluoride. As a result, when the 20 mol% fluorine was incorporated into the semiconductor layer, electrical characteristics were accomplished with a field-effect mobility of $1.2cm^2/V{\cdot}sec$ and an $I_{on}/_{off}$ of $7{\times}10^6$.

• Korean Journal of Agricultural and Forest Meteorology
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• v.11 no.1
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• pp.3-12
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• 2009

Ozone tolerance of tree species was determined by standard index of physiological damages and biochemical defense responses under short-term ozone exposure. At the end of 150ppb $O_3$ fumigation, photosynthetic characteristics and antioxidative enzyme activities were analyzed in the leaves of five species(Koelreuteria paniculata, Firmiana simplex, Styrax japonica, Fraxinus rhynchophylla, Viburnum sargentii). Injury index was determined by the effect of ozone on photosynthetic parameters and malondialdehyde(MDA) content, and tolerance index was calculated using the rate of increase in superoxide dismutase(SOD), ascorbate-peroxidase(APX), glutathione reductase(GR) and catalase(CAT) activities. Apparent quantum yield(AQY), carboxylation efficiency(Ce) and photo-respiration rate(PR) decreased in the leaves of five species with increasing ozone exposure time. These parameters were considered as an appropriate indicator for stress evaluation. Antioxidative enzyme activities showed various results depending on the tree species, exposure time, and enzyme types. SOD activity of K. paniculata increased with ozone exposure time, and that of F. rhynchophylla increased only after 6 hours of ozone exposure. CAT activity of $O_3$-exposed F. simplex was lower than the control. Based on standard index, ozone tolerance ability of five species was determined as two tolerant species(F. rhynchophylla > K. paniculata) and three sensitive species(S. japonica > F. simplex > V. sargentii).

• Korean Journal of Optics and Photonics
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• v.25 no.4
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• pp.216-220
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• 2014

We have synthesized a $CaMgSi_2O_6:Eu^{2+}$ blue phosphor via a solid-state reaction method. The $CaMgSi_2O_6:Eu^{2+}$ phosphor has monoclinic structure with a space group of C2/c (15), and an emission band peaking at 450 nm (blue) due to the $4f^7-4f^65d$ transition of the $Eu^{2+}ion$. The emission intensity at $100^{\circ}C$ is 54% of the value at room temperature. A white LED was fabricated by integrating a UV LED (400 nm) with our blue phosphor plus two commercial green and red phosphors. The white LED shows a color temperature of 3500 K with a color rendering index of 87 (x = 0.3936, y = 0.3605), and a luminous efficiency of 18 lm/W. The white LED shows a luminance maintenance of 97% after operation at 350 mA for 400 hours at $85^{\circ}C$.

• Journal of the Korean Society of Radiology
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• v.14 no.5
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• pp.563-575
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• 2020

The purpose of this study is to evaluate the activation characteristics that occur in a linear accelerator for container security inspection. In the computer simulation design, first, the targets consisted of a tungsten (Z=74) single material target and a tungsten (Z=74) and copper (Z=29) composite target. Second, the fan beam collimator was composed of a single material of lead (Z=82) and a composite material of tungsten (Z-74) and lead (Z=82) depending on the material. Final, the concrete in the room where the linear accelerator was located contained magnetite type and impurities. In the research method, first, the optical neutron flux was calculated using the MCNP6 code as a F4 Tally for the linear accelerator and structure. Second, the photoneutron flux calculated from the MCNP6 code was applied to FISPACT-II to evaluate the activation product. Final, the decommissioning evaluation was conducted through the specific activity of the activation product. As a result, first, it was the most common in photoneutron targets, followed by a collimator and a concrete 10 cm deep. Second, activation products were produced as by-products of W-181 in tungsten targets and collimator, and Co-60, Ni-63, Cs-134, Eu-152, Eu-154 nuclides in impurity-containing concrete. Final, it was found that the tungsten target satisfies the permissible concentration for self-disposal after 90 days upon decommissioning. These results could be confirmed that the photoneutron yield and degree of activation at 9 MeV energy were insignificant. However, it is thought that W-181 generated from the tungsten target and collimator of the linear accelerator may affect the exposure when disassembled for repair. Therefore, this study presents basic data on the management of activated parts of a linear accelerator for container security inspection. In addition, When decommissioning the linear accelerator for container security inspection, it is expected that it can be used to prove the standard that permissible concentration of self-disposal.

• Journal of the Korean Society of Fisheries and Ocean Technology
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• v.34 no.1
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• pp.85-95
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• 1998

The broadband ultrasonic transducers have been designed to use in obtaining the broadband echo signals from fish schools in relation to the identification of fish species. The broadening of bandwidth was achieved by attaching double acoustic matching layers on the front face of a Tonpilz transducer consisted of an aluminum head, a piezoelectric ring, a brass tail and to evaluate the performance characteristics, such as the transmitting voltage response(TVR) of transducers. The constructed transducers were tested experimentally and numerically by changing the parameters such as impedances and thicknesses of the head, tail and matching layers, in the water tank. Also, the developed transducer was excited by a chirp signal and the received chirp waveforms were analyzed. According to the measured TVR results, the available 3 dB bandwidth of the transducer with double matching layers of an $Al_O_3/epoxy$ composite of 7 mm thick and a polyurethane window of 18 mm thick was 7.3 kHz with a center frequency of 38.8 kHz, and the maximum and the minimum values of the TVR in this frequency region were 135.7 dB and 132.7 dB re $1\;{\mu}Pa/V$ at 1 m, respectively. Also, the available 3 dB bandwidth of the transducer with double matching layers of an $Al_O_3/epoxy$ composite of 11 mm thick and a polyurethane window of 15 mm thick was 6.2 kHz with a center frequency of 38.6 kHz, and the maximum TVR value in the frequency region was 136.3 dB re $1\;{\mu}Pa/V$ at 1 m. Reasonable agreement between the experimental results and the numerical results for the TVR of the developed transducers was achieved. The frequency dependant characteristics of experimentally observed chirp signals closely matched to the measured TVR results. These results suggest that there is potential for increasing the bandwidth by varying other parameters in the transducer design and the material of the acoustic matching layers.

• Asian-Australasian Journal of Animal Sciences
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• v.5 no.3
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• pp.449-454
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• 1992

Eight healthy Holstein bulls, 4-6 years old were used to study the effect of season of the year on the incidence of the morphologically abnormal spermatozoa. Semen was collected twice a week by A. V. over one-year period. The percentage of total abnormal spermatozoa was $14.1{\pm}0.5$. Ejaculates collected during hot summer season had significantly higher incidence of abnormal spermatozoa than those collected during winter time. Warm spring had moderate semen abnormality. In addition to its effect on the total number of morphologically abnormal spermatozoa, season affected significantly the primary as well as the secondary types of abnormalities. The differences between incidence of primary and secondary types of abnormalities were not significant for all seasons and seasons pooled together. The ratio between the total forms of abnormality in the head, mid-piece and tail of spermatozoa was as 1:1.5:1. Head and mid-piece had defected more during summer compared with both winter and spring. There was no variation in tail abnormalities due to season. The significant effect of season on head was observed by large, pyriform, free and detached heads, while that on mid-piece was by swollen, coiled mid-pieces and protoplasmic droplets.