• Journal of the Korean Vacuum Society
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• v.2 no.1
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• pp.109-112
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• 1993

• Journal of the Korean institute of surface engineering
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• v.23 no.4
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• pp.230-236
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• 1990

• Proceedings of the Korean Vacuum Society Conference
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• 2009.02a
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• pp.250.2-250.2
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• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.912-915
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• 2004

A vacuum environment is very important for NGL(Next Generation Lithography) apparatuses such as EUVL(Extreme Ultra Violet Lithography) or EPL(Electron Projection Lithography) and so on. The performance of these systems is dominated by vacuum level of processing and positioning accuracy of a stage. So, ultra-precision stage usable in a high vacuum level is needed for the improved performance of these devices. In contrast to atmospheric condition, a special attention must be paid to guide bearing, actuator and other elements. In this paper, air bearing is adopted because of its very high motional accuracy. So, air bearing is designed to be vacuum compatible using differential exhaust method, which prevents air from entering into vacuum chamber. For this, leakage analysis is performed theoretically and verified from experiment.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2001.06a
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• pp.327-333
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• 2001

DLC films due to their extreme properties have attracted a lot of attention. In this study, the films were prepared on High Speed Steel (SKH2) by microwave plasma assisted CVD method using CH4. Every friction test under the normal load 2,5N and sliding velocity of 20,25mm/s in high vacuum (5${\times}$10$\^$-5/ Torr). The films were analyzed with Raman spectroscopy. The films failed immediately in vacuum due to high friction. Wear volume of DLC coated disks decreased more than that of non-DLC coated disks. Also, hardness of the films is about 600HV.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.178.2-178.2
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• 2013

Conventional ultraviolets A,B,C are known to be very important factor of killing, changing surface properties of biological cells and materials. It is of great importance to investigate the influence of extreme ultraviolet (EUV) exposure on the biological cell. Here we have studied high density EUV plasma and its emission characteristics, which have been generated by plasma focus device with hypercycloidal pinch (HCP) electrode under various Ar gas pressures ranged from 30~500 mTorr in this experiment. We have also measured the plasma characteristics generated from the HCP plasma focus device such as electron temperature by the Boltzman plot, plasma density by the Stark broading method, discharge images by open-shuttered pin hole camera, and EUV emission signals by using the photodiode AXUV-100 Zr/C.

• Proceedings of the Korean Vacuum Society Conference
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• 2009.08a
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• pp.411-411
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• 2009

• Journal of Astronomy and Space Sciences
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• v.30 no.4
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• pp.335-344
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• 2013

TRiplet Ionospheric Observatory-CubeSat for Ion, Neutron, Electron & MAgnetic fields (TRIO-CINEMA) is a CubeSat with 3.14 kg in weight and 3-U ($10{\times}10{\times}30$ cm) in size, jointly developed by Kyung Hee University and UC Berkeley to measure magnetic fields of near Earth space and detect plasma particles. When a satellite is launched into orbit, it encounters ultra-high vacuum and extreme temperature. To verify the operation and survivability of the satellite in such an extreme space environment, experimental tests are conducted on the ground using thermal vacuum chamber. This paper describes the temperature control device and monitoring system suitable for CubeSat test environment using the thermal vacuum chamber of the School of Space Research, Kyung Hee University. To build the chamber, we use a general purpose thermal analysis program and NX 6.0 TMG program. We carry out thermal vacuum tests on the two flight models developed by Kyung Hee University based on the thermal model of the TRIO-CINEMA satellite. It is expected from this experiment that proper operation of the satellite in the space environment will be achieved.

• Applied Science and Convergence Technology
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• v.24 no.4
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• pp.84-89
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• 2015

The base pressure and outgassing rate of a mild steel chamber were measured and compared to those of a stainless steel chamber. A combined sputter-ion and non-evaporable getter pump with a nominal pumping speed of 490 l/s generated the base pressure of $2.7{\times}10^{-11}$ mbar in the mild steel chamber and $1.2{\times}10^{-10}$ mbar in the stainless steel chamber. The rate-of-rise measurements show that the mild steel has an extremely low outgassing rate of $2.6{\times}10^{-13}$ mbar $ls^{-1}cm^{-2}$, which is about one-order of magnitude smaller than the outgassing rate of the stainless steels. Vacuum annealing of the mild steel at $850^{\circ}C$ reduced the outgassing rate further to $8.8{\times}10^{-14}$ mbar $ls^{-1}cm^{-2}$, which was comparable to the outgassing rate of a heat treated stainless steel for extreme-high vacuum use.

• Journal of Mechanical Science and Technology
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• v.17 no.1
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• pp.1-10
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• 2003

This paper summarizes the results of the fatigue test of four composite bridge decks in extreme temperatures (-30$^{\circ}C$ and 50$^{\circ}C$ ). The work was performed as part of a research program to evaluate and install multiple FRP bridge deck systems in Dayton, Ohio. A two-span continuous concrete deck was also built on three steel girders for the benchmark tests. Simulated wheel loads were applied simultaneously at two points by two servo-controlled hydraulic actuators specially designed and fabricated to perform under extreme temperatures. Each deck was initially subjected to one million wheel load cycles at low temperature and another one million cycles at high temperature. The results presented in this paper correspond to the fatigue response of each deck for four million load cycles at low temperature and another four million cycles at high temperature. Thus, the deck was subjected to a total of ten million cycles. Quasi-static load-deflection and load-strain responses were determined at predetermined fatigue cycle levels. Except for the progressive reduction in stiffness, no significant distress was observed in any of the composite deck prototypes during ten million load cycles. The effects of extreme temperatures and accumulated load cycles on the load-deflection and load-strain response of FRP composite and FRP-concrete hybrid bridge decks are discussed based on the experimental results.