• Journal of Sensor Science and Technology
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• v.13 no.2
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• pp.101-109
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• 2004

This paper presents a novel z-axis accelerometer with perfectly aligned vertical combs fabricated using the extended sacrificial bulk micromachining (extended SBM) process. The z-axis accelerometer is fabricated using only one (111) SOI wafer and two photo masks without wafer bonding or CMP processes as used by other research efforts that involve vertical combs. In our process, there is no misalignment in lateral gap between the upper and lower comb electrodes, because all critical dimensions including lateral gaps are defined using only one mask. The fabricated accelerometer has the structure thickness of $30{\mu}m$, the vertical offset of $12{\mu}m$, and lateral gap between electrodes of $4{\mu}m$. Torsional springs and asymmetric proof mass produce a vertical displacement when an external z-axis acceleration is applied, and capacitance change due to the vertical displacement of the comb is detected by charge-to-voltage converter. The signal-to-noise ratio of the modulated and demodulated output signal is 80 dB and 76.5 dB, respectively. The noise equivalent input acceleration resolution of the modulated and demodulated output signal is calculated to be $500{\mu}g$ and $748{\mu}g$. The scale factor and linearity of the accelerometer are measured to be 1.1 mV/g and 1.18% FSO, respectively.

• Environmental and Resource Economics Review
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• v.30 no.1
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• pp.79-105
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• 2021

In the circumstance of standing out the climate change issue, the purpose of this study is to compare the efficiency of offshore and coastal fisheries according to whether or not greenhouse gas (GHG) emissions are considered, and then to present policy alternatives based on the analysis results. For analysis, the traditional data envelopment analysis (DEA), the slacks-based measure (SBM) and the SBM-undesirable models were used, and robust analysis of variance (ANOVA) and Wilcoxon Signed-rank tests were performed. As a result, the study showed that the average efficiency of fisheries decreased as the traditional DEA extended to the SBM model considering the slack and the SBM-undesirable model including the GHG emissions. Specifically, the average efficiency of the traditional DEA model, SBM model, and SBM-undesirable model was analyzed as 0.7350, 0.5820 and 0.4976 respectively. In addition, the results of the robust ANOVA and Wilcoxon Signed-rank tests all showed that there are statistically significant differences in efficiency between offshore and coastal fisheries as well as among traditional DEA, SBM and SBM-undesirable models. As a policy alternative to the analysis, it was suggested that to improve the efficiency of coastal and offshore fisheries, it is necessary to actively implement the new fishing vessel project and develop smart and electric hybrid fishing vessels.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.1547-1552
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• 2003

In this paper, we present a planar single-crystalline silicon x-axis micro-gyroscope fabricated with a perfectly aligned vertical actuation combs on one silicon wafer, using the extended SBM technology. The fabricated x-axis micro-gyroscope has the resolution of 0.1 deg/sec, the bandwidth of 100 Hz. These research results allow integrating 6 axes inertial measurement (3 accelerations and 3 angular rates) on the same silicon substrate using the same process for the first time.