Electrical properties improvement of PZT thin films etched into $CF_4/(Cl_2+Ar)$ plasma
(식각된 PZT 박막의 전기적 특성 개선에 관한 연구)
-
- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
- /
- 2004.04b
- /
- pp.13-17
- /
- 2004