• 제목/요약/키워드: Etching Damage

검색결과 176건 처리시간 0.02초

Al2O3 산화 피막의 내식성에 미치는 양극산화 전류밀도의 영향 (Effect of Anodizing Current Density on Anti-Corrosion Characteristics for Al2O3 Oxide Film)

  • 이승준;장석기;김성종
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2016년도 추계학술대회 논문집
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    • pp.153-153
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    • 2016
  • Aluminum alloys have poor corrosion resistance compared to the pure aluminum due to the additive elements. Thus, anodizing technology artificially generating thick oxide films are widely applied nowadays in order to improve corrosion resistance. Anodizing is one of the surface modification techniques, which is commercially applicable to a large surface at a low price. However, most studies up to now have focused on its commercialization with hardly any research on the assessment and improvement of the physical characteristics of the anodized films. Therefore, this study aims to select the optimum temperature of sulfuric electrolyte to perform excellent corrosion resistance in the harsh marine environment through electrochemical experiment in the sea water upon generating porous films by variating the temperatures of sulfuric electrolyte. To fabricate uniform porous film of 5083 aluminum alloy, we conducted electro-polishing under the 25 V at $5^{\circ}C$ condition for three minutes using mixed solution of ethanol (95 %) and perchloric (70 %) acid with volume ratio of 4:1. Afterward, the first step surface modification was performed using sulfuric acid as an electrolyte where the electrolyte concentration was maintained at 10 vol.% by using a jacketed beaker. For anode, 5083 aluminum alloy with thickness of 5 mm and size of $2cm{\times}2cm$ was used, while platinum electrode was used for cathode. The distance between the two was maintained at 3 cm. Afterward, the irregular oxide film that was created in the first step surface modification was removed. For the second step surface modification process (identical to the step 1), etching was performed using mixture of chromic acid (1.8 wt.%) and phosphoric acid (6 wt.%) at $60^{\circ}C$ temperature for 30 minutes. Anodic polarization test was performed at scan rate of 2 mV/s up to +3.0 V vs open circuit potential in natural seawater. Surface morphology was compared using 3D analysis microscope to observe the damage behavior. As a result, the case of surface modification presented a significantly lower corrosion current density than that without modification, indicating excellent corrosion resistance.

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Micro blaster를 이용한 태양전지용 재생웨이퍼의 표면 개선에 관한 연구 (A study on improving the surface morphology of recycled wafer forsolar cells using micro_blaster)

  • 이윤호;조준환;김상원;공대영;서창택;조찬섭;이종현
    • 센서학회지
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    • 제19권4호
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    • pp.291-296
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    • 2010
  • Recently, recycling method of waste wafer has been an area of solar cell to cut costs. Micro_blasting is one of the promising candidates for recycling of waste wafer due to their extremely simple and cost-effective process. In this paper, we attempt to explore the effect of micro_blasting and DRE(damage removal etching) process for solar cell. The optimal process conditions of micro_blasting are as follows: $10{\mu}m$ sized $Al_2O_3$ powder, jetting pressure of 400 kPa, and scan_speed of 30 cm/s. And the particles formed on micro_blasted wafer were removed by DRE precess which was performed by using HNA(HF/$HNO_3$/$CH_3COOH$) and TMAH(tetramethyl ammonium hydroxide). Structural analysis was done using a-step and the XRD patterns.

Micro blaster를 이용한 태양전지용 재생웨이퍼의 표면 개선에 관한 연구

  • 이윤호;정동건;조준환;공대영;서창택;조찬섭;이종현
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.293-293
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    • 2010
  • 최근 태양전지 연구에서 저가격화를 실현하는 방법 중 하나로 폐 실리콘 웨이퍼를 재생하는 방법에 관하여 많은 연구가 진행되고 있다. 그러나 기존 웨이퍼 재생공정은 높은 재처리 비용과 복잡한 공정등의 많은 단점을 가지고 있다. 챔버 내에 압축된 공기나 가스에 의해 가속된 미세 파우더들이 재료와 충돌하면서 식각하는 기계적 건식 식각 공정 기술이라고 할 수 있는 micro blaster 공정을 이용하면 기존 재생공정보다 낮은 재처리 비용과 간단한 공정으로 재생웨이퍼를 제작할 수 있다. 하지만 이러한 micro blaster 공정은 식각 후 표면에 많은 particle과 crack을 형성시켜 태양전지용으로 사용하기에 단점을 가진다. 본 연구에서는 이러한 micro blaster를 이용한 태양전지용 재생 웨이퍼를 제작하기 위해 폐 실리콘 웨이퍼의 표면 물질을 식각하고, 식각 후 충돌에 의해 발생된 표면의 particle과 crack을 DRE(Damage Remove Etching)공정으로 제거하는 연구를 진행 하였다. 먼저 폐 실리콘 웨이퍼와 같은 표면을 형성하기 위하여 시편 표면에 각각 Al($2000{\AA}$), $Si_3N_4(3000{\AA})$, $SiO_2(1{\mu}m)$, AZ1512($1{\mu}m$)을 형성하고 micro blaster의 파우더 크기, 압력, 스캔 속도 등의 공정 조건에 따라 폐 실리콘 웨이퍼 표면 물질을 식각하였다. 식각 후 폐 실리콘 웨이퍼의 식각된 깊이와 표면 물질 잔량을 측정하고, 폐 실리콘 웨이퍼의 표면에 particle과 crack, 요철이 형성되어 있는지를 확인하였다. 그 결과 폐 실리콘 웨이퍼에 형성된 물질의 두께 이상으로 식각되었으며, 표면 물질의 잔량이 남아 있지 않았고, 표면에 많은 particle과 crack, 요철이 형성되었다. 표면에 형성된 요철은 유지하면서 많은 particle과 crack을 제거하기 위하여 micro blaster공정 후 DRE 공정으로 표면 개선이 필요하였다. 이때 남겨진 요철은 입사광량을 증가시키고, 표면 반사율을 감소시켜 태양전지내의 흡수하는 빛의 양을 증가시키는 태양전지 texturing 공정 효과로 작용하게 된다. 표면에 남은 particle과 crack을 완전히 제거하면서 요철은 유지할 수 있게 HNA 용액의 농도와 시간에 따른 식각 정도를 측정하였다. DRE 공정 후 표면 particle과 crack이 완전히 제거되어 표면이 개선됨을 확인하였다. Micro blaster를 이용하여 폐 실리콘 웨이퍼의 표면을 식각하고, DRE공정으로 표면을 개선함으로써 태양전지용 기판으로의 재생 가능성을 확인하였다.

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천마총 출토 철부(鐵釜)의 제작기법 및 보존처리 (Study on the Manufacturing techniques & Conservation of Iron Pot from Cheonmachong Ancient Tomb)

  • 이승렬;신용비;정원섭
    • 보존과학회지
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    • 제30권3호
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    • pp.263-275
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    • 2014
  • 천마총(황남동 제 155호 고분)에서 출토된 철부(鐵釜)의 제작기법 및 보존처리에 대하여 연구하고자 하였다. 철부의 제작기법을 조사하기 위하여 유물 중 일부를 채취하여 마운팅 후 연마하고, etching을 실시하여 금속조직을 관찰하였고, 비금속개재물부분은 SEM-EDS로 분석을 실시하였다. 금속학적 조직검사와 SEM-EDS분석 결과 철 솥은 백주철 조직이 관찰되었고, 주조 후 상온에서 서서히 건조시킨 것으로 보이며, 취성을 개선하기 위해 별다른 열처리를 시도한 흔적은 보이지 않는다. 몸통 중심부의 폭3cm 두께 1.5cm 전이 확인됨에 따라서 가로식 거푸집을 활용한 이분제작기법을 사용하여 주조한 것으로 추정된다. 이처럼 백주철 조직과 가로식 거푸집을 활용한 제작기법은 비슷한 시기인 식리총과 황남대총에서 출토 된 철 솥에서도 나타나는 것으로, 당시 주조품의 생산기술이 동일하였음을 알 수 있었다. 보존처리는 크게 처리전조사, 이물질제거, 탈염처리, 강화처리, 접합 복원, 색맞춤의 순서로 진행하였으며, 처리과정 중 필요에 따라 세척 및 건조를 실시하였다. 강화처리는 유물의 크기로 인하여 진공함침에 어려움이 있었으므로, 저농도의 Paraloid NAD-10을 2-3차례 붓으로 도포하였고, 보존처리가 완료된 후 15wt.% Paraloid NAD-10용액으로 표면을 재강화하였다. 파손부위의 복원은 섬유강화플라스틱 수지(POLYCOAT FH-245,몰드 적층용)를 사용하여 파손 부위와 유사한 형태의 모형을 만든 후 접합하여 복원하였다. 이번 연구를 통하여 철제유물의 보존처리뿐만 아니라 5-6세기 주조 철솥의 제작기법에 대한 자료를 축적함으로 향후 보다 나은 연구를 위한 발판으로 활용되었으면 한다.

Pulsed Nd:YAG 레이저 조사와 불소화합물 도포가 치아 내산성에 미치는 영향 (Effects of Pulsed Nd:YAG Laser Irradiation and Fluoride Compound Applicatin on Acid Resistance of Bovine Teeth)

  • An-Hee Lee;Woo-Cheon Kee
    • Journal of Oral Medicine and Pain
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    • 제20권2호
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    • pp.429-447
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    • 1995
  • This study was designed to determine the most effective concentration of fluoride and levels of laser irradiation for the remineralization of decayed teeth. After irradiation with a pulsed Nd:YAG laser and the topical application of fluoride, phosphate and fluoride concentration in enamel were measured. And then the changes on surface enamel using an scanning electron microscope were observed. Samples by extraction healthy, permanent, mandibular bovine teeth with no caries were obtained. Among them 371 healthy samples were selected and artificial carious lesions were made. 20 samples were assigned to each experimental group. After irradiation with a pulsed Nd:YAG laser with total energy densities of 10J/$\textrm{cm}^2$, 20J/$\textrm{cm}^2$ for each group. On the teeth, 2% NaF, 1.9% NH4F, 1.6% TiF4 Elmex gel(amine fluoride) and 1.23% APF gel were applied. After pH circulatory procedures, concentrations of fluoride with and Ionalyzer (Orion Research, Model 901, USA) and phosphates with an Uv/V is spectrophotometer (Uvikon 860, Kontrom Co, Switzerland) were measured. By etching the teeth in layers and measuring fluoride concentrations, a profile of fluoride penetration according to depth could be developed. And also the changes on the surface of the enamel using an electron scanning microscope were observed. The comparative analysis yielded the following results : 1. Phosphate concentration was low in all groups compared with the control group except for teeth treated Elmex gel, irradiated with 10J/$\textrm{cm}^2$ and 30J/$\textrm{cm}^2$ energy densities. Teeth treated with APF gel and 30J/$\textrm{cm}^2$ irradiation gad the lowest phosphate concentration. 2. Among all groups, fluoride concentrations in tooth enamel were highest in APF gel and NaF groups irradiated at 30J/$\textrm{cm}^2$. The APF gel group had the highest fluoride concentrations across all energy densities. 3. In the APF gel group, and the NaF group, the greater the energy density of the laser, the higher the fluoride concentrations in the enamel. 4. In all groups, the concentration of fluoride in the enamel by depth tended to decrease with depth. 5. Under the scanning electron microscope, under the condition of irradiation with 20J/$\textrm{cm}^2$, enamel crack was detected for the first time. In the NH4F group, spherical deposits were found on the surface of the enamel, and in the TiF4 group the surface of enamel was covered with an irregular, thin membranous mass in places. In the APF gel and NaF groups irradiated with 10J/$\textrm{cm}^2$, spherical and irregular particles covered the teeth. When these groups were irradiated at 20J/cm2, they were covered with amorphous crystals. These results suggest that one could obtain more effective anticariogenic effects without damage to teeth when less than 20J/$\textrm{cm}^2$ energy densities and APF gel are used.

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Pulsed Nd : YAG 레이저 조사와 불소 화합물 도포가 초기 우식 법랑질의 표면 경도에 미치는 영향 (Effects of Pulsed Nd:YAG Laser Irradiation and Fluoride Compound Application on Surface Hardness of Incipient Carious Lesion in Enamel of Bovine Teeth)

  • Jun-Bong Kwag;Woo-Cheon Kee
    • Journal of Oral Medicine and Pain
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    • 제21권2호
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    • pp.207-224
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    • 1996
  • This study was designed to determine the most effective concentration of fluoride and energy density of laser irradiation for the anticarious effect. For this study surface hardness in enamel was measured before and after irradiation with pulsed Nd;YAG laser and the topical application of fluoride. Of the permanent mandibular anterior hovine teeth, healthy, carious free ones were used. Three hundred specimens were made. Specimens within 25~45 Vickers hardness numbers were assigned to 20 control and experimental stoops ; each containing 15 specimens. After forming artificial carious lesions, 10 J/$\textrm{cm}^2$, 20 J/$\textrm{cm}^2$, and 30 J/$\textrm{cm}^2$ energies were irradiated on the enamel surface of each experimental group. Also NaF, NH4F, Elmex gel(amine fluoride) and APF gel fluoride compounds were applied topically. Next, all the specimens were placed into the pH circulatory procedures for eight days. Vickers hardness numbers were measured using a microhardness tester. Surface changes of the enamel were observed using an scanning electron microscope. The comparative ana1ysis yielded the following results : 1. The reduction of surface hardness of the enamel surface was less in all groups with fluoride application than in the group without fluoride application. 2. The APF gel croup with 10 J/$\textrm{cm}^2$ irradiation showed the lowest reduction of surface hardness. 3. The reduction of surface hardness of the enamel surface in the group of laser irradiation without fluoride application not showed any significant difference according to the energy density of the laser. 4. Under the scanning electron microscope, in enamel irradiated with 10J/$\textrm{cm}^2$ showed appearance similar to acid etching surface. In enamel irradiated with 20 J/$\textrm{cm}^2$, line enamel crack was detected. In enamel irradiated with 30j/$\textrm{cm}^2$, severe enamel crack and fusion of enamel were detected. These results suggest that one could obtain the best anticariogenic effects without damage to teeth in the group of application of APF gel after laser irradiation with 10 J/$\textrm{cm}^2$.

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