• Journal of the Semiconductor & Display Technology
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• v.20 no.4
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• pp.146-150
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• 2021

Plasma information based virtual metrology (PI-VM) that predicts wafer-to-wafer etch rate variation after wet cleaning of plasma facing parts was developed. As input parameters, plasma information (PI) variables such as electron temperature, fluorine density and hydrogen density were extracted from optical emission spectroscopy (OES) data for etch plasma. The PI-VM model was trained by stepwise variable selection method and multi-linear regression method. The expected etch rate by PI-VM showed high correlation coefficient with measured etch rate from SEM image analysis. The PI-VM model revealed that the root cause of etch rate variation after the wet cleaning was desorption of hydrogen from the cleaned parts as hydrogen combined with fluorine and decreased etchant density and etch rate.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.63 no.8
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• pp.1159-1163
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• 2014

This paper have been dealt with the analysis for energy efficiency improvement effect of unity storage capacity as a part of the energy storage application study to improve energy efficiency in the electric railway systems. Especially, in order to estimate the amount of energy saving according to the variation of power capacity of each storage, the current limit module was mounted on an existing DC electric railway loadflow program which is based on the analysis model for railway system and storages, and combined optimization algorithm to determine optimal voltage boundary.

• Transactions of the Korean hydrogen and new energy society
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• v.12 no.3
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• pp.191-199
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• 2001

In this paper molecular dynamics simulations have been carried out to investigate energy and momentum transfer of hydrogen ions impacted on the Ni (100) surface with $45^{\circ}$ and $90^{\circ}$ incident angles. The initial kinetic energies of the hydrogen ion were ranged from 100 eV to 1,600 eV to study the layer-by-layer energy variation as a dependence of incident energies and angles. At low incident energies, the scattering energy transfer is dominated by the normal motion of surface layers due to thermal vibrations and multiple collision effects. For higher incident energies, the scattering energy transfer in a normal direction is greater than that in a parallel direction. In the case of penetration, the amount of transferred energies do not affect much on Ni layers at low incident energy. It was found channeling effects through Ni layers with increasing incident energies.

• 한국신재생에너지학회:학술대회논문집
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• 2006.11a
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• pp.507-510
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• 2006

본 논문은 신재생에너지의 한 분야로서 청정에너지인 소수력 발전시스템 운영시 수용가 부하의 변동에 따른 발전기의 특성변화를 해석한 것이다. 모의에 사용된 동기발전기-전동기가 부하의 변동에 따라 토크, 속도, 전류 등이 어떤 영향을 받는지 전자계 과도해석 프로그램을 사용하여 나타내었다.

• Proceedings of the Korean Society of Agricultural Engineers Conference
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• 2000.10a
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• pp.308-314
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• 2000

Objects of this study were to find the cooling effect of solar-heated greenhouse with rock bed storage in summer season and to suggest operation method of cooling energy saving in summer cropping greenhouse. Experiments were performed to analyze inside environment variation of solar-heated greenhouse. When we took account of different shading and ground conditions of greenhouse, we could conclude that inside average daytime temperature of the solar-heated greenhouse was 2.0∼2.4$^{\circ}C$ lower than the general greenhouse in summer season.

• Journal of Astronomy and Space Sciences
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• v.7 no.1
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• pp.57-69
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• 1990

The eighteen ultraviolet light curves of Epsilon Aurigae have been plotted using the integrated fluxes reduced from the 233 IUE low dispersion spectra taken between 1978 and 1986. The times of contacts and depth of eclipse have been determined from the light curves at the wavelength from 2550 $AA$ to 3050 $AA$. The UV light curves show two brightenings during the totality, the downward slope of the variation from the second to the third contacts, and asymmetry of the eclipse light curve. The two selected spectra note that the energy density distribution is not changed between the totality of the eclipse and out-of-eclipse.

• Journal of the korean Society of Automotive Engineers
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• v.9 no.1
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• pp.69-76
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• 1987

This paper deals with the theoretical prediction and cyclic variation of combustion characteristics in a four stroke, single0cylinder, diesel engine. Theoretical calculations employed a simple empirical model of analysis of energy equation for the thermodynamic system of engine cylinder. The cyclic variation of combustion characteristics is investigated, in term of frequency distribution and standard deviation of peak characteristics, as obtained by combustion analyzer system. The results of theoretical prediction are shown to be in close agreement with the experimental data. The effect of fuel injection timing, engine speed, cooling water temperature, and the compression ratio on the cyclic variations of combustion characteristics were discussed.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2003.11a
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• pp.233-235
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• 2003

The voltage and current of fluoescent lamp has been successfully calculated in the case of frequency variation. Energy states of mercury atom in the discharge process are regarded as six levels. These calculations have been accurately solved by numerically employing mixed the FDM and the 2nd Runge-Kutta method. The theoretical calculation results and experimental results were presented to verify the feasibility of the modeling. Calculation and experimental results were presented to verify the feasibility of the calculation.

• 한국신재생에너지학회:학술대회논문집
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• 2006.06a
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• pp.233-236
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• 2006

In this paper, I try to measure characteristic transmission-reflection by environmental change or solar cell. I keep my eye on the characteristics variation of solar cell as environmental change. As a result, A variation caused by voltage by an effect on the efficiency of solar PV cell. Hence, it is an important variable when a designer plan to make a solar cell.

• Bulletin of the Korean Chemical Society
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• v.3 no.3
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• pp.92-98
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• 1982

Solvolysis reactions of some substituted benzoyl chlorides were studied in ethanol-water, ethanol-trifluoroethanol and methanol-acetonitrile mixtures. Results showed that the reaction proceeds via an $S_N2$ process in which bond formation is more advanced than bond cleavage. Comparison of the two models for predicting transition state variation indicated superior nature of the quantum mechanical model relative to the potential energy surface model.