• Title/Summary/Keyword: Energy flux density

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Dry Etching of $Al_2O_3$ Thin Film in Inductively Coupled Plasma

  • Xue, Yang;Um, Doo-Seung;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.11a
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    • pp.67-67
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    • 2009
  • Due to the scaling down of the dielectrics thickness, the leakage currents arising from electron tunneling through the dielectrics has become the major technical barrier. Thus, much works has focused on the development of high k dielectrics in both cases of memories and CMOS fields. Among the high-k materials, $Al_2O_3$ considered as good candidate has been attracting much attentions, which own some good properties as high dielectric constant k value (~9), a high bandgap (~2eV) and elevated crystallization temperature, etc. Due to the easy control of ion energy and flux, low ownership and simple structure of the inductively coupled plasma (ICP), we chose it for high-density plasma in our study. And the $BCl_3$ was included in the gas due to the effective extraction of oxygen in the form of BClxOy compound. In this study, the etch characteristic of ALD deposited $Al_2O_3$ thin film was investigated in $BCl_3/N_2$ plasma. The experiment were performed by comparing etch rates and selectivity of $Al_2O_3$ over $SiO_2$ as functions of the input plasma parameters such as gas mixing ratio, DC-bias voltage and RF power and process pressure. The maximum etch rate was obtained under 15 mTorr process perssure, 700 W RF power, $BCl_3$(6 sccm)/$N_2$(14 sccm) plasma, and the highest etch selectivity was 1.9. We used the x-ray photoelectron spectroscopy (XPS) to investigate the chemical reactions on the etched surface. The Auger electron spectroscopy (AES) was used for elemental analysis of etched surface.

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Electromagnetic-structure Co-simulation Analysis of Aluminum Pipe with Electromagnetic Forming according to Temperature (전자기 성형 시 온도에 따른 알루미늄 파이프의 전자기-구조 연동해석)

  • Kang, Hanbin;Tak, Seungmin;Baek, Inseok;Choi, Jinkyu;Lee, Seoksoon
    • Journal of Aerospace System Engineering
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    • v.12 no.3
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    • pp.64-69
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    • 2018
  • The high-velocity electromagnetic forming (EMF) process is based on the Lorentz force and the energy of the magnetic field. The advantages of EMF include improved formability, wrinkle reduction, and non-contact forming. In this study, the electromagnetic-structural interlocking analysis was performed in order to analyze the moldability of aluminum pipe using electromagnetic molding. The magnetic flux density was decreased due to increasing electrical resistance as the temperature increased, and the stress-strain curve decreased. The higher the temperature, the lower the flow stress, increasing deformation.

Development of 1.2kW LED Light with Water-Air Circulation (수공냉 대류방식을 이용한 1.2kW급 LED 조명등 개발)

  • Yoon, Byung-Woo;Song, Jong-Kwan;Park, Jang-Sik;Kwon, Hong-Bae
    • The Journal of the Korea institute of electronic communication sciences
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    • v.10 no.5
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    • pp.615-622
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    • 2015
  • As the development of high efficiency and high flux density LEDs, the trend of illumination lamp industry transfers from conventional-lamps to the LED-lamps. For energy efficiencies, LED lamps are superior to the conventional lamps, but they have heat problems. Especially, the heat problems are severe for the high luminance lamps. They degrade the soldering point of the metal PCB, and shorten the life cycle of LEDs. So, the solution of the heat sinking is very important to develop high luminance LED lamps. This study suggested a new method to solve the heat problems for high luminance LED lamps, and developed a LED lamp which has 1200W power. In this study, a water jacket is installed to the LED lamp, and the cooing water is circulated by a water pump.

Design of Light Trapping System of Thin Film Solar Cell Using Phase Field Method (페이즈 필드법을 이용한 박막형 태양전지의 광포획층 설계)

  • Heo, Namjoon;Yoo, Jeonghoon
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.38 no.9
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    • pp.973-978
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    • 2014
  • This study focused on the design of the reflecting layer of a light trapping system fora thin film solar cell using topology optimization based on the phase field method. Therefore, incident light was caused to propagate in the desired direction by reflecting it from this layer, which is the design domain. The same method was applied to the conceptual design of an infrared stealth structure in near infrared range. The results using the phase field method were compared with those using the density method. The design objective was to maximize the Poynting vector value representing the energy flux, which was measured in a measuring domain to control the reflected wave direction. A finite element analysis and optimization process were performed using the commercial package COMSOL combined with the MATLAB programming.

Development of High Flow MPI Gas Injector for Heavy Duty Natural Gas Engine (대형 천연가스 엔진의 고유량 MPI 분사기 개발)

  • Lee, Seok-Hwan;Lee, Jin-Wook;Jee, Kang-Hoon;Choi, Min-Ho;Roh, Yun-Hyun
    • Journal of the Korean Institute of Gas
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    • v.13 no.1
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    • pp.28-33
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    • 2009
  • Natural gas is the world's most plentiful combustible fuel, abundantly acailable in all continent. A fuel injector designed specifically for low energy density gaseous fuels has been developed. The injector incorporates design features that are necessary to optimize the performance for fuels such as CNG, LNG. Gaseous fuel injectors have a decisive influence upon starting performance, driveability, fuel consumption and exhaust emissions. A gaseous fuel injector has been developed to cope with the considerably larger volume flow rates and the developed gaseous fuel injector could be used at heavy duty natural gas engine. The static flow of injectors at various inlet pressure was directly proportional and the controllability showed great performance.

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Optimal Design of Interior Permanent Magnet Synchronous Machines Consideration of Magnet BH Characteristic with Different Rotor Type using Response Surface Methodology (반응표면분석법을 이용한 영구자석의 형상 및 특성에 따른 매입형 영구자석 동기기의 최적 설계)

  • Im, Young-Hun;Jang, Seok-Myoung
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.62 no.8
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    • pp.1080-1089
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    • 2013
  • Interior Permanent Magnet Synchronous Machines (IPMSMs) with rare earth magnet are widely used in electric vehicles and hybrid electric vehicles. IPMSMs having high efficiency, high torque, and a wide speed range are employed in propulsion system. And the rotor in an IPMSM is generally made of a rare earth magnet to achieve a large energy product and high torque. This paper discusses issues regarding design and performance of IPMSMs using different factors of BH magnetic characteristic. It is necessary to choose factors of magnetic material according to permanent magnet shape in rotor for high performance. Response Surface Methodology (RSM) is selected to obtain factors of magnetic material according to variety of rotor shapes. The RSM is a collection of mathematical and statistical techniques useful for the analysis of problems in which a response of interest in influenced by several variables and the objective is to optimize response. Therefore, it is necessary to analyze the torque characteristics of an IPMSM having magnet BH hysteresis curve with different rotor shape. Factors of residual flux density (Br) factor and intrinsic coercive force (Hc) are important parameters in RSM for rotor shape. The rotor shapes for IPMSMs having magnet BH characteristic were investigated using the RSM, and three shapes were analyzed in detail using FEA. The results lead to design consequence of IPMSMs in the various rare earth magnet materials.

Vortex dynamics in YBa$_2Cu_3O_7$ single crystals measured by micro Hall-probe array (Micro Hall probe array를 이용한 YBa$_2Cu_3O_7$ 단결정 내부의 자속 운동 측정)

  • Shim, Seong-Yeop;Hwang, Hyeon-Guk;Lee, Chang-Woo;Lee, Tae-Won;Kim, Dong-Ho
    • 한국초전도학회:학술대회논문집
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    • v.9
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    • pp.189-195
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    • 1999
  • We have studied the vortex dynamics in YBa$_2Cu_3O_7$ single crystals with columnar defects using micro Hall-probe array. The Hall-probe array technique allowed a simultaneous measurement of the time and spatial dependence of the vortex density so that more detailed information on flux dynamics could be obtained. We found that field profiles inside sample were similar to the Bean's critical state model from the magnetic hysteresis measurement. Normalized relaxation rates were maximum near the center and decreased toward the edge if applied field H$_{app}$ is greater than the penetration field H. But applied magnetic field H$_{app}$ is less than H, relaxation rates were minimum near the center and increased toward edge. We found that glassy exponent ${\mu}$ has the value of ${\sim}$ 1 whose corresponding vortex motion is half-loop excitation. However, single vortex creep, ${\mu}$ ${\sim}$ 1/7, was also found at 30 K and H$_{app}$ ${\cong}$ H'. Calculation of activation energy, U, was possible from direct analysis of the local relaxation data using the basic diffusion equation. From these results, we found that U increases logarithmically with time and U around center was lower than that at the edge.

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The alignment of Sr-ferrite magnetic powder in anisotropic Sr-ferrite/resin-bonded magnets (이방성 Sr-페라이트/ 레진본드 영구자석에서 Sr-페라이트 자성분말의 방향성)

  • 정원용;조태식;문탁진
    • Journal of the Korean Magnetics Society
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    • v.4 no.3
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    • pp.219-225
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    • 1994
  • The alignment of Sr-ferrite magnetic powders, which is usually related to the fluidity and the applied magnetic field, is investicated in the anisotropic Sr-ferrite / resin-bonded permanent magnets. The magnetic powder alignment is observed to increase with the applied magnetic field and the fluidity which is a function of molding temperature and powder packing ratio. The best magnetic powder alignment is achieved at the following conditions; Sr-ferrite packing ratio of 56vol%, apparent viscosity of about 3000 poise in $1000sec^{-1}$ shear rate, and applied magnetic field of about 5kOe. The degree of preferred orientation of the magnetic powders in the field direction, as determined by the dc hysterisis graphs, is 84~85% (0.84~0.85). This result is in agreement with the value of 0.85 obtained by the X-ray experiments in the $2{\theta}$ range of ${23~40}^0$. The best magnetic properties obtained are:2.2kG of remanent flux density, 2.2MGOe of maximum energy product.

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Cerebral Infarction Mimicking Brain Tumor on Tc-99m Tetrofosmin Brain SPECT imaging (뇌경색 환자에서 뇌종양과 유사한 Tc-99m tetrofosmin의 섭취)

  • Kim, Soon;Zeon, Seok-Kil;Won, Kyoung-Sook
    • The Korean Journal of Nuclear Medicine
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    • v.38 no.3
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    • pp.268-271
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    • 2004
  • A 43-year-old man was presented with persistent headache for two weeks. 72 weighted MR imaging showed high signal intensity with surrounding edema in the left frontal lobe. These findings were considered with intracranial tumor such as glioma or metastasis. Tc-99m tetrofosmin SPECT showed focal radiotracer accumulation in the left frontal lobe. The operative specimen contained cerebral infarction with organizing leptomeningeal hematoma by pathologist. Another 73-year-old man was hospitalized for chronic headache. Initial CT showed ill-defined hypodensity with mass effect in the right parietal lobe. Tc-99m tetrofosmin SPECT showed focal radiotracer uptake in the right parietal lobe. These findings were considered with low-grade glioma or infarction. Follow-up CT after 5 months showed slightly decreased in size of low density in the right parietal lobe, and cerebral infarction is more likely than others. Tc-99m tetrofosmin has been proposed as a cardiotracer of myocardial perfusion imaging and an oncotropic radiotracer. Tc-99m tetrofosmin SPECT image provides a better attractive alternative agent than T1-201 as a tumor-imaging agent, with characteristics such as high-energy flux, short half-life, favorable biodistribution, dosimetry and lower background radioactivity. We have keep in mind on the analysis of Tc-99m tetrofomin imaging when cerebral infarction is being differentiated from brain tumor.

R & D Trends on Direct Formic Acid Fuel Cells (직접 개미산 연료전지의 연구동향)

  • Kwon, Yongchai;Han, Jonghee;Kim, Jinsoo
    • Applied Chemistry for Engineering
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    • v.19 no.6
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    • pp.583-591
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    • 2008
  • Recently, as a demand for the portable device is surged, there are needs to develop a new fuel cell system for replacing the conventionally used secondary battery. For this purpose, it becomes important to develop direct formic acid fuel cell (DFAFC) that uses formic acid as a fuel. The formic acid can offer typical advantages such as excellent non-toxicity of the level to be used as food additive, smaller crossover flux through electrolyte, and high reaction capability caused by high theoretical electromotive force (EMF). With the typical merits of formic acid, the efforts for optimizing reaction catalyst and cell design are being made to enhance performance and long term stability of DFAFC. As a result, to date, the DFAFC having the power density of more than $300mW/cm^2$ was developed. In this paper, basic performing theory and configuration of DFAFC are initially introduced and future opportunities of DFAFC including the development of catalyst for the anode electrode and electrolyte, and design for the optimization of cell structure are discussed.