• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.118-118
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• 2008

The oxide CMP has been applied to interlayer dielectric(ILD) and shallow trench isolation (STI) in chip fabrication. Recently the slurry used in oxide CMP being changed from silica slurry to ceria (cerium dioxide) slurry particularly in STI CMP, because the material selectivity of ceria slurry is better than material selectivity of silica slurry. Moreover, the ceria slurry has good a planarization efficiency, compared with silica slurry. However ceria abrasives make a material removal rate too high at the region of wafer center. Then we focuses on why profile of material removal rate is convex. The material removal rate sharply increased to 3216 $\AA$/min by $4^{th}$ run without conditioning. After $4^{th}$ run, material removal rate converged. Furthermore, profile became more convex during 12 run. And average material removal rate decreased when conditioning process is added to end of CMP process. This is due to polishing mechanism of ceria. Then the ceria abrasive remains at the pad, in particular remains more at wafer center contacted region of pad. The field emission scanning electron microscopy (FE-SEM) images showed that the pad sample in the wafer center region has a more ceria abrasive than in wafer outer region. The energy dispersive X-ray spectrometer (EDX) verified the result that ceria abrasive is deposited and more at the region of wafer center. Therefore, this result may be expected as ceria abrasives on pad surface causing the convex profile of material removal rate.

• Journal of the Korean Chemical Society
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• v.61 no.6
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• pp.339-345
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• 2017

Carbonaceous adsorbent (CA-WTP) was prepared by heat treatment at $400^{\circ}C$ for 2 h in N2 atmosphere using waste tire powder (WTP). WTP and CA-WTP were first characterized by thermo-gravimetric analysis (TGA), energy dispersive X-ray spectrometer (EDS), scanning electron microscopy (SEM), specific surface area analysis (BET) and FT-IR spectroscopy. Then, they were tested as adsorbents for removal of Cd in water. CA-WTP exhibited much higher specific surface area and total pore volume than WTP itself and showed higher adsorption capacity for Cd. Equilibrium data of adsorption were analyzed using Freundlich and Langmuir isotherm models. It was seen that both Freundlich and Langmuir isotherms have correlation coefficient $R^2$ value larger than 0.95. The results of studies indicate that CA-WTP developed from WTP by heat treatment could be used as efficient adsorbent for the removal Cd from water.

• Nuclear Engineering and Technology
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• v.40 no.3
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• pp.225-232
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• 2008

To understand the effect of the cyclic strain rate on the environmentally assisted cracking behaviors of SA508 Gr.1a low alloy steel in deoxygenated water at $310^{\circ}C$, the fatigue surface and a sectioned area of specimens were observed after low cycle fatigue tests. On the fatigue surface of the specimen tested at a strain rate of 0.008 %/s, unclear ductile striations and a blunt crack tip were observed. Therefore, metal dissolution could be the main cracking mechanism of the material at this strain rate. On the other hand, on the fatigue surfaces of the specimens tested at strain rates of 0.04 and 0.4 %/s, brittle cracks and flat facets, which are evidences of the hydrogen induced cracking, were observed. In addition, a tendency of linkage between the main crack and the micro-cracks was observed on the sectioned area. Therefore, at higher strain rates, the main cracking mechanism could be hydrogen induced cracking. Additionally, evidence of the dissolved MnS inclusions was observed on the fatigue surface from energy dispersive x-ray spectrometer analyses. Thus, despite the low sulfur content of the test material, the sulfides seem to contribute to environmentally assisted cracking of SA508 Gr.1a low alloy steel in deoxygenated water at $310^{\circ}C$.

• Journal of the Korean Ceramic Society
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• v.51 no.6
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• pp.618-622
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• 2014

Oxide phosphorescent phosphor has an wide application in ceramic art and decoration due to its chemical and mechanical properties. Here, phosphorescent properties of strontium aluminate phosphor ($SrAl_2O_4:Eu^{2+}$, $Dy^{3+}$) emitting yellowish-green light was investigated with thermal treatment at $1250^{\circ}C$ under air and reducing atmosphere. The characterizations of thermally treated samples were analyzed using X-ray fluorescence (XRF), X-ray diffraction (XRD), scanning electron microscopy (SEM), energy-dispersive X-ray spectroscopy (EDX), fluorescence spectrometer. $SrAl_2O_4:Eu^{2+}$, $Dy^{3+}$ still showed a good phosphorescent properties after annealing process in reducing atmosphere, while phosphorescence of $SrAl_2O_4:Eu^{2+}$, $Dy^{3+}$ annealed in air seriously degraded, due to oxidation of $Eu^{2+}$ to $Eu^{3+}$ ions. It was also observed that $SrAl_2O_4:Eu^{2+}$, $Dy^{3+}$ annealed in reducing atmosphere emitted yellowish-green light during 3 h after being exposed to sunlight.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.261-261
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• 2010

본 연구에서는 PBMS (Particle Beam Mass Spectrometer)와 ISPM (In-Situ Particle Monitor)을 연계하여 BPSG (Borophosphosilicate Glass) 및 PSG (Phosphosilicate Glass) 박막 증착을 위한 CVD (chemical vapor deposition) 공정 중 발생하는 오염입자 발생특성에 대해 비교 평가하였다. 소스는 TEB (Triethylborate), TEPO (Triethylphosphate) 및 TEOS (Tetraethoxysilane)를 사용하였고, 운반가스 및 반응가스로 He과 $O_2$ 및 $O_3$를 사용하였다. 증착온도와 압력은 각각 $450^{\circ}C$, 200 Torr 이었다. 반응기의 배기라인에 PBMS와 ISPM을 설치하고 500 nm 이하의 입자에 대해 공정단계별 시간에 따른 모니터링 결과 전 공정에 걸쳐 동일한 패턴의 입자발생분포를 보였으며, 특히 PBMS의 경우 ISPM의 입자측정한계인 260 nm 이하의 입자크기도 측정할 수 있었다. 입자발생이 안정적으로 일어나는 증착공정 중 PBMS를 통하여 입자크기를 측정한 결과 BPSG의 경우 약 110 nm, PSG의 경우 약 80 nm의 분포를 나타내었다. 이를 통해 TEB 소스가 배제된 PSG의 경우 BPSG의 경우보다 입자의 성장이 지체됨을 확인하였다. 측정에 대한 신뢰성을 확보하기 위해 PBMS 내의 TEM (Transmission Electron Microscopy) grid를 이용하여 입자를 샘플링 하였고, TEM 분석을 실시한 결과 PBMS 측정결과와 잘 일치하였다. 또한 EDS (Energy Dispersive Spectroscopy) 분석을 통하여 입자성분에 대해 검증하였다.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.22 no.3
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• pp.224-234
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• 2012

Objectives: To assess the hazard of Korea chrysotile and anthophylite, fibers were analyzed for their physicochemical properties by transmission electron microscope equipped with energy dispersive X-ray spectrometer (TEM-EDS). Methods: To evaluate the biopersistence of 2 domestic asbestos, Sprague-Dawely rats were exposed to 2 mg asbestos by intratracheal instillation. Each asbestos (chrysotile ; $8,814,244{\times}10^6$ fibers/mg, average size $0.08{\mu}m{\times}4.39{\mu}m$, anthophyllite ; $5,182{\times}10^6$ fibers/mg, average size $0.95{\mu}m{\times}7.29{\mu}m$) were evaluated after a single intratracheal instillation. At times from 1 week to 4 weeks after exposure, the numbers of asbestos fivers in the bronchoalveolar lavage fluid and in the lung were calculated. Results: Anthophyllite fivers continuously have retained for 4 weeks but chrysotile fivers were rarely found at 4 weeks after exposure in the bronchoalveolar lavage fluid. Chrysotile fivers at 4 weeks after treatment were not observed but anthophyllite was easily observed in the lung with phase contrast microscopy. According to electron microscopic observation of asbestos in the lung, within 1 week after the administration of chrysotile fivers were decreased rapidly but anthophyllite fivers were very little change for 4 weeks. When chrysotile fivers have been lost Fe in 1 week, there were no significant changes in anthophyllite fivers in the lung. Conclusions: These findings indicate that after a long time exposure to chrysotile, asbestos bodies can not be found in the bronchoalveolar lavage fluid.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.28 no.3
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• pp.273-282
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• 2018

Objectives: Dustiness of nanomaterials is considered as exposure index of essential material. Research on dustiness of nanomaterial is needed to control exposure in workplaces. Method: Dustiness measurement using vortex shaker were installed in the laboratory. Nanomaterials, 1 g, was put in the glass test tube and shaked using vortex shaker. Aerosol dispersed was measured using scanning mobility particle sizer(SMPS) and optical particle counter(OPC). Mass concentration using PVC filter and cassette was measured and TEM grid sampling was conducted. Total particle concentration and size distribution were calculated. Image and chemical composition of particles in the air were observed using transmission electron microscopy and energy dispersive X-ray spectrometer. Eleven different test nanomaterials were used in the study. Results: Rank of mass concentration and particle number concentration were coincided in most cases. Rank of nanomateirals with low concentration were not coincided. Two types of fumed silica had the highest mass concentration and particle number concentration. Indium tin oxide, a mixture of indium oxide and tin oxide, had high mass concentration and particle number concentration. Indium oxide had very low mass concentration and particle number concentration. Agglomeration of nanoparticles in the air were observed in TEM analysis and size distribution. In this study, mass concentration and particle number concentration were coincided and two index can be used together. The range of dustiness in particle number concentration were too wide to measure in one method. Conclusion: Particle number concentration ranged from low concentration to high concentration depend on type of nanomaterial, and varied by preparation and amount of nanomaterial used. Further study is needed to measure dustiness of all nanomaterial as one reference method.

• Tribology and Lubricants
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• v.34 no.6
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• pp.217-225
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• 2018

In this study, we spray a Ni-Cr composite powder onto AISI 4340 steel using the high velocity oxygen fuel method. We subsequently subject the Ni-Cr coating (as-sprayed) to ultrasonic nanocrystal surface modification (UNSM) process to improve the tribological performance. This study aims at increasing the wear resistance and durability of the Ni-Cr coating by altering the surface integrity and microstructure via the UNSM process. The UNSM process reduces the surface roughness of the as-sprayed coating by about 64%, which is explained by observing the elimination of high peaks and valleys and filling up micro-pores. Furthermore, a change in the microstructure of the coating due to continuous high-frequency strikes to the surface by a tip can lead to an increase in hardness from about 48 to 60 HRC. Furthermore, we investigate the characterization of the friction and wear behavior of Ni-Cr coating by a ball-on-disc tribometer in the dry conditions. We determine that after the UNSM process, there is a significant reduction in the friction coefficient of the as-sprayed coating from approximately 1.1 to 0.75. This is owing to the increased hardness and smoothed surface roughness. In addition, we investigate the surface morphology and wear track of the coatings before and after the UNSM process using a scanning electron microscope, energy dispersive spectrometer, and three-dimensional laser scanning microscope. We observe that the wear track of the Ni-Cr coating after the UNSM process is lower than that of the as-sprayed one. Thus, we confirm that the UNSM process has a significant influence on the improvement of the tribological performance of the Ni-Cr composite coating.

• Geomechanics and Engineering
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• v.18 no.4
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• pp.427-437
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• 2019

Waste materials are being produced in huge quantities globally, and the usual practice is to dump them into legal or illegal landfills. Recycled tiles (RT) are being used in soil stabilisation which is considered as sustainable solution to reduce the amount of waste and solve the geotechnical problems. Although the stabilisation of soil using RT improved the soil properties, it could not achieve the standard values required for construction. Thus, this study uses 20% RT together with low cement content (2%) to stabilise soft soil. Series of consolidated undrained triaxial compression tests were conducted on untreated and RT-cement treated samples. Each test was performed at 7, 14, and 28 days curing period and 50, 100, and 200 kPa confining pressures. The results revealed an improvement in the undrained shear strength parameters (cohesion and internal frication angle) of treated specimens compared to the untreated ones. The cohesion and friction angle of the treated samples were increased with the increase in curing time and confining pressure. The peak deviator stress of treated samples increases with the increment of either the effective confining pressures or the curing period. Microstructural and chemical tests were performed on both untreated and RT-cement treated samples, which included field emission scanning electron microscopic (FESEM), Fourier transform infrared spectroscopy (FTIR), X-ray diffraction (XRD), and energy dispersive X-ray spectrometer (EDX). The results indicated the formation of cementation compounds such as calcium aluminium hydrate (C-A-H) within the treated samples. Consequently, the newly formed compounds were responsible for the improvement observed in the results of the triaxial tests. This research promotes the utilisation of RT to reduce the amount of cement used in soil stabilisation for cleaner planet and sustainable environment.

• Nuclear Engineering and Technology
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• v.53 no.1
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• pp.164-171
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• 2021

The europium sorption on Tamusu clay was investigated by batch sorption experiments and spectroscopic study under the condition of strong ionic strength. The results demonstrated that europium sorption on Tamusu clay increased rapidly with pH value, but decreased with the ionic strength of solution increased. The europium sorption also increased in the presence of humic acid, especially at low pH value. The sorption could be fitted by Freundlich isotherm model and the europium sorption on clay was spontaneous and endothermic reaction. Besides, the result indicates that ion exchange was the main process at low pH value, while inner-sphere surface complexation dominated the sorption process at high pH value. The Backscatter electron scanning/Energy Dispersive Spectrometer(BSE/EDS) and the effect of Na for europium sorption results further suggested that europium sorption on Tamusu clay mainly competed with Na at low pH value. Overall, the results in this research were of significance to understand the sorption behavior of europium on the geological media under high ionic strength.