• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.74-74
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• 2009

The ArF PR mask was. developed to overcome the limit. of sub 40nm patterning technology with KrF PR. But ArF PR difficult to meet the required PR selectivity by thin PR thickness. So need to the multi-stack mask such as amorphous carbon layer (ACL). Generally capacitively coupled plasma (CCP) etcher difficult to make the high density plasma and inductively coupled plasma (ICP) type etcher is more suitable for multi stack mask etching. Hybrid Coupled Plasma source (HCPs) etcher using the 13.56MHz RF power for ICP source and 2MHz and 27.12MHz for bias power was adopted to improve the process capability and controllability of ion density and energy independently. In the study, the oxide trench which has the multi stack layer process was investigated with the HCPs etcher (iGeminus-600 model DMS Corporation). The results were analyzed by scanning electron microscope (SEM) and it was found that etching characteristic of oxide trench profile depend on the multi-stack mask.

• Journal of the Korea Institute of Military Science and Technology
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• v.13 no.4
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• pp.528-533
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• 2010

This paper describes a calculation method of source level of a ship transient noise, which is one of the important elements for the ship detection. Aim of transient noise measurements is to evaluate of acoustic energy due to singular occurrence, which is therefore defined as non-periodic and short termed events like an attack periscope, a rudder and a torpedo door. In generally, in the case of randomly spaced impulse, the spectrum becomes a broadband random noise with no distinctive pattern. Therefore, frequency analysis is not particularly revealing for type of signal. In the paper, it is performed in time domain to analyze a transient noise. However, a source level of transient noise is required an investigation for multiple frequency band. So, in order to calculate a source level of transient noise, a design of exponential weighting function, convolution, band pass filtering, peak detection, root mean square, and parameter compensation are applied. The effectiveness of this calculation scheme is studied through computer simulations and a sea test. Furthermore, an application of the method is applied in a real case.

• Journal of the Architectural Institute of Korea Structure & Construction
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• v.34 no.3
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• pp.87-93
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• 2018

Ground source heat pump(GSHP) system is one of the high efficiency heat source systems which utilizes the constant geothermal energy of a underground water or soil. However, the design of conventional GSHP system in the domestic market is dependent on the experience of the designer and the installer, and it causes increase of initial installation cost or degradation of system performance. Therefore, it is necessary to develop a guideline and the optimal design method to maintain stable performance of the system and reduce installation cost. In this study, in order to optimize the GSHP system, design factors according to ground heat exchanger(GHX) type have been examine by simulation tool. Furthermore, the design factors and the correlation of a single U-tube and a double U-tube were analyzed quantitatively through sensitivity analysis. Results indicated that, the length of the ground heat exchanger was greatly influenced by grout thermal conductivity for single U-tube and pipe spacing for double U-tube.

• Journal of international Conference on Electrical Machines and Systems
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• v.1 no.2
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• pp.70-78
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• 2012

Due to the variable nature of renewable energy resources and power demand by consumers, it is difficult to operate a power system installed with only one type of renewable energy resource. Grid-based renewable generation may be the only solution to overcome this problem. The conventional approach based on a low-voltage converter with power frequency transformer is commonly employed for grid connection of offshore renewable energy systems. Because of the heavy weight and large size of the transformer, the system can be expensive and complex in terms of installation and maintenance. In this paper, an 11-kV series connected H-bridge (SCHB) multilevel voltage source converter (VSC) is proposed to achieve a compact and light direct grid connection of renewable energy systems. This paper presents the design, simulation and analysis of a five level (5L)-SCHB and an eleven level (11L)-SCHB VSC for 11-kV grid-based renewable energy systems. The performance, cost, modulation scheme and harmonic spectra of the converter are analyzed.

• Journal of Power System Engineering
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• v.13 no.3
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• pp.65-71
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• 2009

This paper presents the energy harvesting technique which is carried out by vibration system with a piezoelectric element. In this study, low frequency characteristics of the piezoelectric element bonded to the aluminum cantilever were experimentally investigated. The piezoelectric element of size of $45L{\times}11W{\times}0.6H$ and piezoelectric constant($d_{31}$ ) of $-180{\times}10^{-12}C/N$ was used. The material of cantilever is an aluminum and two kinds of cantilever of which dimensions are (150, 190)$[mm]{\times}13[mm]{\times}1.5[mm]$ were experimented, respectively. The cantilever was fixed on the magnetic type vibrator and the vibrator was operated by power input with a sine wave. The characteristics of requency and mass variation of cantilever end part such as 0, 2.22, 4.34, 5.87, 8.66, 11.01 [g] were investigated. Finally, this paper suggests a method of generating electrical energy with a piezoelectric element using wind, an energy source that is easily applied and from which we can obtain "clean" energy.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2017.10a
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• pp.705-707
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• 2017

Stereo-based spatial radiation detection devices can obtain not only spatial distribution information about the radiation source but also distance information from the detection device to the source. And it provides more efficient information on the source than the existing radiation imaging device. In order to provide high-speed information on the spectrum and type of gamma-ray source, a high-sensitivity detection sensor with high sensitivity is required, and a technique capable of solving the saturation phenomenon at a high dose is needed. In this paper, we constructed a high sensitivity sensor for the measurement of multiple gamma - ray spatial distributions using improved function of detection module to solve saturation to high dose and conducted research to increase the scope of a single detector. The result of this paper improves the performance of gamma ray.

• 한국신재생에너지학회:학술대회논문집
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• 2010.06a
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• pp.197.1-197.1
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• 2010

This study was carried out to evaluate the operating performances of the evaporation desalination system with solar energy. This system was designed to use evacuated solar collector as the heat source, supplying the required heat energy and photovoltaic power as the electric source, supplying required power to pumps in the desalination system. The 5kW photovoltaic power generation system to make the electricity, the single-stage fresh water generator with plate heat exchanger, and remote control and monitoring system. Solar desalination system was designed and installed in Jeju-island, Korea in 2006, after about 4 years of operation, usability and stability of solar desalination system was guaranteed. The system comprises of the desalination unit which was designed to have daily fresh water capacity of $2m^3$, a $120m^2$ evacuated tubular solar collector to supply the heat, a $6m^3$ heat storage tank, and a 5.2kW photovoltaic power generation to supply the electricity to hydraulic pumps for the heat medium fluids. On a clear day, average daily solar irradiance in Jeju-island was measured to be $500W/m^2$ and the daily fresh water yield showed to be more than 500 liters under this condition. After around three years of a long term operation of the system from January 2007 to August 2009, average daily freshwater yield was analyzed to be around $330{\ell}$. The relationship equation between solar irradiance and freshwater yield was found to be y=1.1806x - 107.89.

• Journal of Korean Society for Atmospheric Environment
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• v.16 no.4
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• pp.373-380
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• 2000

A new type of photocatalyst plasma air purification filter for decomposition of some VOCs has been developed. The photocatalyst plasma air purification filter employs the pulsed discharge plasma as an energy source of TiO2. photocatalyst instead of UV light. In closed room(2m3) test removal efficiency of some VOCs was 80∼100% in 15∼24 hours. In the initial step of phptocatalyst plasma reaction. Acetone and Nitromethane etc were detected. But they were completely oxidized to CO2 and H2O.

• Proceedings of the SAREK Conference
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• 2005.06a
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• pp.64-64
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• 2005

• Proceedings of the KIEE Conference
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• 1987.11a
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• pp.21-24
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• 1987

A novel type of the sinusoidal dc-to-ac converter is presented, where a pair of switches is placed in each side of the primary and the secondary of the isolation transformer. This converter is controlled by the phase difference between the two pairs of switches. As a result, the transformer is miniaturized by making the switching frequency high and the reactive energy can be easily recovered to the dc-source. This converter is especially suitable for small UPS systems.