• Title/Summary/Keyword: End Point Detection

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Analysis on the defect and scratch of Chemical Mechanical Polishing process (CMP 공정의 Defect 및 Scratch의 유형분석)

  • 김형곤;김철복;정상용;이철인;김태형;장의구;서용진
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11a
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    • pp.189-192
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    • 2001
  • Recently, STI process is getting attention as a necessary technology for making high density of semiconductor by devices isolation method. However, it does have various problems caused by CMP process, such as torn oxide defects, nitride residues on oxide, damages of si active region, contaminations due to post-CMP cleaning, difficulty of accurate end point detection in CMP process, etc. In this work, the various defects induced by CMP process was introduced and the above mentioned Problems of CMP process was examined in detail. Finally, the guideline of future CMP process was presented to reduce the effects of these defects.

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LiDAR-based Mapping Considering Laser Reflectivity in Indoor Environments (실내 환경에서의 레이저 반사도를 고려한 라이다 기반 지도 작성)

  • Roun Lee;Jeonghong Park;Seonghun Hong
    • The Journal of Korea Robotics Society
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    • v.18 no.2
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    • pp.135-142
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    • 2023
  • Light detection and ranging (LiDAR) sensors have been most widely used in terrestrial robotic applications because they can provide dense and precise measurements of the surrounding environments. However, the reliability of LiDAR measurements can considerably vary due to the different reflectivities of laser beams to the reflecting surface materials. This study presents a robust LiDAR-based mapping method for the varying laser reflectivities in indoor environments using the framework of simultaneous localization and mapping (SLAM). The proposed method can minimize the performance degradations in the SLAM accuracy by checking and discarding potentially unreliable LiDAR measurements in the SLAM front-end process. The gaps in point-cloud maps created by the proposed approach are filled by a Gaussian process regression method. Experimental results with a mobile robot platform in an indoor environment are presented to validate the effectiveness of the proposed methodology.

Object Pose Estimation and Motion Planning for Service Automation System (서비스 자동화 시스템을 위한 물체 자세 인식 및 동작 계획)

  • Youngwoo Kwon;Dongyoung Lee;Hosun Kang;Jiwook Choi;Inho Lee
    • The Journal of Korea Robotics Society
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    • v.19 no.2
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    • pp.176-187
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    • 2024
  • Recently, automated solutions using collaborative robots have been emerging in various industries. Their primary functions include Pick & Place, Peg in the Hole, fastening and assembly, welding, and more, which are being utilized and researched in various fields. The application of these robots varies depending on the characteristics of the grippers attached to the end of the collaborative robots. To grasp a variety of objects, a gripper with a high degree of freedom is required. In this paper, we propose a service automation system using a multi-degree-of-freedom gripper, collaborative robots, and vision sensors. Assuming various products are placed at a checkout counter, we use three cameras to recognize the objects, estimate their pose, and create grasping points for grasping. The grasping points are grasped by the multi-degree-of-freedom gripper, and experiments are conducted to recognize barcodes, a key task in service automation. To recognize objects, we used a CNN (Convolutional Neural Network) based algorithm and point cloud to estimate the object's 6D pose. Using the recognized object's 6d pose information, we create grasping points for the multi-degree-of-freedom gripper and perform re-grasping in a direction that facilitates barcode scanning. The experiment was conducted with four selected objects, progressing through identification, 6D pose estimation, and grasping, recording the success and failure of barcode recognition to prove the effectiveness of the proposed system.

Forensic Classification of Median Filtering by Hough Transform of Digital Image (디지털 영상의 허프 변환에 의한 미디언 필터링 포렌식 분류)

  • RHEE, Kang Hyeon
    • Journal of the Institute of Electronics and Information Engineers
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    • v.54 no.5
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    • pp.42-47
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    • 2017
  • In the distribution of digital image, the median filtering is used for a forgery. This paper proposed the algorithm of a image forensics detection for the classification of median filtering. For the solution of this grave problem, the feature vector is composed of 42-Dim. The detected quantity 32, 64 and 128 of forgery image edges, respectively, which are processed by the Hough transform, then it extracted from the start-end point coordinates of the Hough Lines. Also, the Hough Peaks of the Angle-Distance plane are extracted. Subsequently, both of the feature vectors are composed of the proposed scheme. The defined 42-Dim. feature vector is trained in SVM (Support Vector Machine) classifier for the MF classification of the forged images. The experimental results of the proposed MF detection algorithm is compared between the 10-Dim. MFR and the 686-Dim. SPAM. It confirmed that the MF forensic classification ratio of the evaluated performance is 99% above with the whole test image types: the unaltered, the average filtering ($3{\times}3$), the JPEG (QF=90 and 70)) compression, the Gaussian filtered ($3{\times}3$ and $5{\times}5$) images, respectively.

Development of a High-Resolution Electrocardiography for the Detection of Late Potentials (Late Potential의 검출을 위한 고해상도 심전계의 개발)

  • 우응제;박승훈
    • Journal of Biomedical Engineering Research
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    • v.17 no.4
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    • pp.449-458
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    • 1996
  • Most of the conventional electrocardiowaphs foil to detect signals other than P-QRS-T due to the limited SNR and bandwidth. High-resolution electrocardiography(HRECG) provides better SNR and wider bandwidth for the detection of micro-potentials with higher frequency components such as vontricular late potentials(LP). We have developed a HRECG using uncorrected XYZ lead for the detection of LPs. The overall gain of the amplifier is 4000 and the bandwidth is 0.5-300Hz without using 60Hz notch filter. Three 16-bit A/D converters sample X, Y, and Z signals simultaneously with a sampling frequency of 2000Hz. Sampled data are transmitted to a PC via a DMA-controlled, optically-coupled serial communication channel. In order to further reduce the noise, we implemented a signal averaging algorithm that averaged many instances of aligned beats. The beat alignment was carried out through the use of a template matching technique that finds a location maximizing cross-correlation with a given beat tem- plate. Beat alignment error was reduced to $\pm$0.25ms. FIR high-pass filter with cut-off frequency of 40Hz was applied to remove the low frequency components of the averaged X, Y, and Z signals. QRS onset and end point were determined from the vector magnitude of the sigrlaIL and some parameters needed to detect the existence of LP were estimated. The entire system was designed for the easy application of the future research topics including the optimal lead system, filter design, new parameter extraction, etc. In the developed HRECG, without signal averaging, the noise level was less than 5$\mu$V$_rms RTI$. With signal averaging of at least 100 beats, the noise level was reduced to 0.5$\mu$V$_rms RTI$, which is low enough to detect LPs. The developed HRECG will provide a new advanced functionality to interpretive ECG analyzers.

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Deep Learning-Based Vehicle Anomaly Detection by Combining Vehicle Sensor Data (차량 센서 데이터 조합을 통한 딥러닝 기반 차량 이상탐지)

  • Kim, Songhee;Kim, Sunhye;Yoon, Byungun
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.22 no.3
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    • pp.20-29
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    • 2021
  • In the Industry 4.0 era, artificial intelligence has attracted considerable interest for learning mass data to improve the accuracy of forecasting and classification. On the other hand, the current method of detecting anomalies relies on traditional statistical methods for a limited amount of data, making it difficult to detect accurate anomalies. Therefore, this paper proposes an artificial intelligence-based anomaly detection methodology to improve the prediction accuracy and identify new data patterns. In particular, data were collected and analyzed from the point of view that sensor data collected at vehicle idle could be used to detect abnormalities. To this end, a sensor was designed to determine the appropriate time length of the data entered into the forecast model, compare the results of idling data with the overall driving data utilization, and make optimal predictions through a combination of various sensor data. In addition, the predictive accuracy of artificial intelligence techniques was presented by comparing Convolutional Neural Networks (CNN) and Long Short Term Memory (LSTM) as the predictive methodologies. According to the analysis, using idle data, using 1.5 times of the data for the idling periods, and using CNN over LSTM showed better prediction results.

Analysis of the Dead Layer Thickness effect and HPGe Detector by Penelope Simulation (Penelope Simulation에 의한 불감층 두께 효과 및 HPGe 검출기 분석)

  • Jang, Eun-Sung;Lee, Hyo-Yeong
    • Journal of the Korean Society of Radiology
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    • v.12 no.7
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    • pp.801-806
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    • 2018
  • Germanium crystals have a dead layer that causes efficiency deterioration because the layer is not useful for detection but strongly weakens the photons. Thus, when the data provided by the manufacturer is used in the detector simulation model, there is a slight difference between the calculated efficiency and the measured efficiency.The shape and dimensions of the high purity germanium (HPGe) detector were determined by CT scans to accurately characterize the shape for the Monte Carlo roll simulation. It is found that the adjustment of the dead layer is a good match with the relative deviation of ${\pm}3%$ between the measurement efficiency and the simulation efficiency at the energy range of 50 - 1500 keV. Simulation data were compared by varying the thickness of the dead layer. The new Monte Carlo simulations were compared with the experimental results to obtain new blank layer thicknesses. The difference in dead layer results for the 1.5 mm thick end cap simulation model in 1.4 and 1.6 mm thick End Cap simulation models was a systematic error due to the accuracy of the end cap dimensions. After considering all errors including statistical errors and systematic errors, the thickness of the detector was calculated as $1.02{\pm}0.14mm$. Therefore, it was confirmed that the increase in the thickness of the dead layer causes the effect to be effected on the efficiency reduction.

Integrated RT-PCR Microdevice with an Immunochromatographic Strip for Colorimetric Influenza H1N1 virus detection

  • Heo, Hyun Young;Kim, Yong Tae;Chen, Yuchao;Choi, Jong Young;Seo, Tae Seok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.273-273
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    • 2013
  • Recently, Point-of-care (POC) testing microdevices enable to do the patient monitoring, drug screening, pathogen detection in the outside of hospital. Immunochromatographic strip (ICS) is one of the diagnostic technologies which are widely applied to POC detection. Relatively low cost, simplicity to use, easy interpretations of the diagnostic results and high stability under any circumstances are representative advantages of POC diagnosis. It would provide colorimetric results more conveniently, if the genetic analysis microsystem incorporates the ICS as a detector part. In this work, we develop a reverse transcriptase-polymerase chain reaction (RT-PCR) microfluidic device integrated with a ROSGENE strip for colorimetric influenza H1N1 virus detection. The integrated RT-PCR- ROSGENE device is consist of four functional units which are a pneumatic micropump for sample loading, 2 ${\mu}L$ volume RT-PCR chamber for target gene amplification, a resistance temperature detector (RTD) electrode for temperature control, and a ROSGENE strip for target gene detection. The device was fabricated by combining four layers: First wafer is for RTD microfabrication, the second wafer is for PCR chamber at the bottom and micropump channel on the top, the third is the monolithic PDMS, and the fourth is the manifold for micropump operation. The RT-PCR was performed with subtype specific forward and reverse primers which were labeled with Texas-red, serving as a fluorescent hapten. A biotin-dUTP was used to insert biotin moieties in the PCR amplicons, during the RT-PCR. The RT-PCR amplicons were loaded in the sample application area, and they were conjugated with Au NP-labeled hapten-antibody. The test band embedded with streptavidins captures the biotin labeled amplicons and we can see violet colorimetric signals if the target gene was amplified with the control line. The off-chip RT-PCR amplicons of the influenza H1N1 virus were analyzed with a ROSGENE strip in comparison with an agarose gel electrophoresis. The intensities of test line was proportional to the template quantity and the detection sensitivity of the strip was better than that of the agarose gel. The test band of the ROSGENE strip could be observed with only 10 copies of a RNA template by the naked eyes. For the on-chip RT-PCR-ROSGENE experiments, a RT-PCR cocktail was injected into the chamber from the inlet reservoir to the waste outlet by the micro-pump actuation. After filling without bubbles inside the chamber, a RT-PCR thermal cycling was executed for 2 hours with all the microvalves closed to isolate the PCR chamber. After thermal cycling, the RT-PCR product was delivered to the attached ROSGENE strip through the outlet reservoir. After dropping 40 ${\mu}L$ of an eluant buffer at the end of the strip, the violet test line was detected as a H1N1 virus indicator, while the negative experiment only revealed a control line and while the positive experiment a control and a test line was appeared.

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Detection of video editing points using facial keypoints (얼굴 특징점을 활용한 영상 편집점 탐지)

  • Joshep Na;Jinho Kim;Jonghyuk Park
    • Journal of Intelligence and Information Systems
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    • v.29 no.4
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    • pp.15-30
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    • 2023
  • Recently, various services using artificial intelligence(AI) are emerging in the media field as well However, most of the video editing, which involves finding an editing point and attaching the video, is carried out in a passive manner, requiring a lot of time and human resources. Therefore, this study proposes a methodology that can detect the edit points of video according to whether person in video are spoken by using Video Swin Transformer. First, facial keypoints are detected through face alignment. To this end, the proposed structure first detects facial keypoints through face alignment. Through this process, the temporal and spatial changes of the face are reflected from the input video data. And, through the Video Swin Transformer-based model proposed in this study, the behavior of the person in the video is classified. Specifically, after combining the feature map generated through Video Swin Transformer from video data and the facial keypoints detected through Face Alignment, utterance is classified through convolution layers. In conclusion, the performance of the image editing point detection model using facial keypoints proposed in this paper improved from 87.46% to 89.17% compared to the model without facial keypoints.

Monthly Changes in Temperature Extremes over South Korea Based on Observations and RCP8.5 Scenario (관측 자료와 RCP8.5 시나리오를 이용한 우리나라 극한기온의 월별 변화)

  • Kim, Jin-Uk;Kwon, Won-Tae;Byun, Young-Hwa
    • Journal of Climate Change Research
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    • v.6 no.2
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    • pp.61-72
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    • 2015
  • In this study, we have investigated monthly changes in temperature extremes in South Korea for the past (1921~2010) and the future (2011~2100). We used seven stations' (Gangneung, Seoul, Incheon, Daegu, Jeonju, Busan, Mokpo) data from KMA (Korea Meteorological Administration) for the past. For the future we used the closest grid point values to observations from the RCP8.5 scenario of 1 km resolution. The Expert Team on Climate Change Detection and Indices (ETCCDI)'s climate extreme indices were employed to quantify the characteristics of temperature extremes change. Temperature extreme indices in summer have increased while those in winter have decreased in the past. The extreme indices are expected to change more rapidly in the future than in the past. The number of frost days (FD) is projected to decrease in the future, and the occurrence period will be shortened by two months at the end of the $21^{st}$ century (2071~2100) compared to the present (1981~2010). The number of hot days (HD) is projected to increase in the future, and the occurrence period is projected to lengthen by two months at the end of the $21^{st}$ century compared to the present. The annual highest temperature and its fluctuation is expected to increase. Accordingly, the heat damage is also expected to increase. The result of this study can be used as an information on damage prevention measures due to temperature extreme events.