• 제어로봇시스템학회:학술대회논문집
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• 1997.10a
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• pp.1485-1488
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• 1997

The capacity of memory chip has increased vert quickly and 64MDRAM becomes main product in semiconductor manufacturing lines consists of many sequential processes, including etching process. although it needs direct sensing of wafer state for the accurae detching, it depends on indirect esnsing and sample test because of the complexity of the plasma etching. This equipment receives the inner light of etch chamber through the viewport and convets it to the voltage inetnsity. In this paper, EDP voltage signal has a new role to detect etching failure. First, we gathered data(EPD sigal, etching time and etchrate) and then analyzed the relationships between the signal variatin and the etch rate using two neural network modeling. These methods enable to predict whether ething state is good or not per wafer. For experiments, it is used High Density Inductive coupled Plasma(HDICP) ethcing equipment. Experiments and results proved to be abled to determine the etching state of wafer on-line and analyze the causes by modeling and EPD signal data.

• 제어로봇시스템학회:학술대회논문집
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• 1997.10a
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• pp.1643-1646
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• 1997

In this study, the method is proposed, which enable us to noninvasively assess baroreflex sensitivity through the closed-loop feedback modle between RR flucturarion and arterial blood pressure fluctuation. The proposed indexes of baroreflex sensitivity, BRS$_{LF}$와 BRS$_{HF}$ are calculated by the modulus (or gain) of the transfer function between fluctuatuons in blood pressure and RR interval in the LF band HF band, where the coherence is more than 0.5 to evaluate the performance of the proposed method, it is applied to various cardiovascular variability signals obtained form subjects under the submaximal ecericse on bicycle ergometner. In result it is concluded that the proposed method can noninvasively assess the baroreflex sensitivity.ty.

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.1239-1244
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• 2004

Precise positioning is an important problem facing motion control systems which usually use electric motor. A motor possesses a nonlinear property which degrades the positioning accuracy. Therefore, a compensator which linearizes the relationship between the angular velocity and input signal of the motor is required to enable precise positioning. In this paper, the design of a Model Reference Adaptive Control System (MRACS) for realizing the precise positioning for a system using a motor including the nonlinear property is described. The designed MRACS is applied to the attitude control problem on a satellite using a DC servomotor to drive its reaction wheel. Experimental results demonstrate the validity of a proposed control method for a positioning control system with an electric motor.

• Journal of Institute of Control, Robotics and Systems
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• v.9 no.4
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• pp.310-319
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• 2003

As the importance and the need for network security are increased, many organizations use the various security systems. They enable to construct the consistent integrated security environment by sharing the network vulnerable information among IDS (Intrusion Detection System), firewall and vulnerable scanner. The multiple IDSes coordinate by sharing attacker's information for the effective detection of the intrusion is the effective method for improving the intrusion detection performance. The system which uses BBA (Blackboard Architecture) for the information sharing can be easily expanded by adding new agents and increasing the number of BB (Blackboard) levels. Moreover the subdivided levels of blackboard enhance the sensitivity of the intrusion detection. For the simulation, security models are constructed based on the DEVS (Discrete Event system Specification) formalism. The intrusion detection agent uses the ES (Expert System). The intrusion detection system detects the intrusions using the blackboard and the firewall responses to these detection information.

• Journal of Institute of Control, Robotics and Systems
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• v.10 no.7
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• pp.604-610
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• 2004

Ultraviolet-nanoimprint lithography (UV-NIL) is a promising method for cost-effectively defining nanoscale structures at room temperature and low pressure. Since the resolution of transferred nanostructures depends strongly upon that of nanostamps, the nanostamp fabrication technology is a key technology to UV-NIL. In this paper, a $5\times5\times0.09$ in. quartz stamp whose critical dimension is 377 nm was fabricated using the etching process in which a Cr film was employed as a hard mask for transferring nanostructures onto the quartz plate. To effectively apply the fabricated 5-in. stamp to UV-NIL on a 4-in. Si wafer, we have proposed a new UV-NIL process using a multi-dispensing method as a way to supply resist on a wafer. Experiments have shown that the multi-dispensing method can enable UV-NIL using a large-area stamp.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.2235-2239
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• 2003

The aim of this research is to study and develop enabling technologies for home healthcare device with ubiquitous network. The motivation of this paper is to enable healthcare in home, to development the device for smart home health care. To achieve the aim, we must develop the prototype platform based on home gateways, distributed context user interface based on UPnP and support for information sharing with high speed power line communication and mobile infra-structures. And IPv6 is the base technology of this platform. In this paper, we concern that physical health, mental health and medical emergencies is all of home healthcare. With the smart device, we evaluate the connectivity, automatic information extraction and private data exchange and event driven message. The result of this paper is demonstration of smart device for ubiquitous communication in a healthcare application such as patient monitoring device and several information services. In conclusion, home healthcare will support more healthy and easy living for a human.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.1093-1098
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• 2003

In this paper, a practical methodology of hand-manipulator motion coordination for indoor service robot is introduced. This paper describes the procedures of opening door performed by service robot as a noticeable example of motion coordination. This paper presents well-structured framework for hand-manipulator motion coordination, which includes intelligent sensor data interpretation, object shape estimation, optimal grasping, on-line motion planning and behavior-based task execution. This proposed approach is focused on how to integrate the respective functions in harmony and enable the robot to complete its operation under the limitation of usable resources. As a practical example of implementation, the successful experimental results in opening door whose geometric parameters are unknown beforehand are provided.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.1917-1920
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• 2003

Automatic tracking of a moving object such as a person is a demanding technique especially in surveillance. This paper describes an experimental system for tracking a moving object on the ground by using a visually controlled aerial robot. A blimp is used as the aerial robot in the proposed system because of its locality in motion and its silent nature. The developed blimp is equipped with a camera for taking downward images and four rotors for controlling the progression. Once a camera takes an image of a specified moving object on the ground, the blimp is controlled so that it follows the object by the employment of the visual information. Experimental results show satisfactory performance of the system. Advantages of the present system include that images from the air often enable us to avoid occlusion among objects on the ground and that blimp’s progression is much less restricted in the air than, e.g., a mobile robot running on the ground.

• Journal of Institute of Control, Robotics and Systems
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• v.17 no.7
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• pp.720-729
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• 2011

The demand for wireless technology in home automation systems has recently been increasing due to several advantages such as installation cost reduction, easy placement, easy extension, aesthetic benefits, and mobile device connectivity. Among the many wireless technologies, ZigBee is one of the most useful for home automation; a wireless home networking system can be configured using ZigBee alone. Compatibility with conventional home networking systems that are based on wired media, however, is not supported. KNX is a mature protocol for wired media that is recognized as an international standard. This paper proposes a KNX-ZigBee gateway to interface between KNX and ZigBee systems and thereby enable integration of wired and wireless home automation systems.

• Journal of Distribution Science
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• v.12 no.7
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• pp.89-101
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• 2014

Purpose - This study aims to show that consignments can enable supply chain collaboration, based on the review of selected studies, and aims to investigate its potential to be a better collaboration program, through an analytical comparison with other collaboration initiatives. Research design, data, and methodology - This study uses a literature review on selected studies that researched consignments. In addition, based on the proposed framework, the current consignment process and other well-known collaboration programs are analyzed in terms of three key collaboration aspects. Results - Most studies employ simple research in terms of their purpose and methodology. An analysis with the proposed framework indicates the potential of consignments to foster supply chain collaboration. Conclusions - Based on the literature review, this study suggests that future research needs to aim for diverse research goals and conduct sophisticated research on consignments. An analysis with the proposed framework shows that consignments would be more effective for supply chain collaboration if active information sharing and joint decision-making are implemented.