• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.345-345
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• 2012

최근 의료산업에서는 고해상도 및 동영상 구현이 가능한 직접 방식의 X-선 검측센서에서 X-ray 흡수효율이 좋은 반도체 센서(CdTe, CdZnTe 등)와 성숙된 기술, 집적효율이 뛰어난 CMOS 공정을 이용한 제품을 출시하여 대면적화 및 고집적화가 가능하게 되어 응용분야가 점차 확대되고 있는 추세이다. 하지만 이 역시 고 성능의 X-선 동영상 구현을 위해서는 고 해상도 문제, 검출효율 문제, 대면적화의 어려움이 있다. 기존의 X-선 광 도전층의 증착은 증착 속도와 박막 품질에서 우수한 Evaporation 법이 사용되고 있다. 한편, 대면적에 균일한 박막형성이 가능하기 때문에 양산성에서 우월성을 가지는 sputtering법의 경우, 밀도가 높은 소결체 타겟의 제조가 힘들뿐만 아니라 증착 속도가 낮아 장시간 증착 시 낮은 소결밀도로 인한 타겟 Particle 영향으로 인해서 대 면적에 고품질의 박막을 형성하기가 어렵다. 하지만 최근 소결체 타겟 제조기술 발달과 함께, 대면적화와 장시간 증착에 대한 어려움이 해결되고 있어 sputtering 법을 이용한 고품질 박막 제조 기술의 연구가 시급한 실정이다. 본 연구에서는 $50{\times}50$ mm 크기의 non-alkali 유리기판(Corning E2000) 위에 Evaporation과 RF magnetron sputtering을 사용하여 다양한 기판온도 (RT, 100, 200, 300, $350^{\circ}C$)에서 $1{\mu}m$의 두께로 CdTe 박막을 증착하였다. RF magnetron sputtering의 경우 CdTe 단일 타겟(50：50 at%)을 사용하였으며 Base pressure는 약 $5{\times}10^{-6}$ Torr 이하까지 배기하였고, Working pressure는 약 $7.5{\times}10^{-3}$ Torr에서 증착하였다. 시편과 기판 사이의 거리는 70 mm이며 RF 파워는 150 W로 유지하였다. CdTe 박막의 미세구조는 X-ray diffraction (XRD, BRUKER GADDS) 및 Field Emission Scanning Electron Microscopy (FE-SEM, Hitachi)를 사용하여 측정하였다. 또한, 조건별 박막의 조성은 Energy Dispersive X-ray Spectroscopy (EDS, Horiba, 7395-H)을 사용하여 평가하였다. X-선 동영상 장치의 구현을 위해서는 CdTe 다결정 박막의 높은 흡수효율, 전하수집효율 및 SNR (Signal to Noise Ratio) 등의 물성이 요구된다. 이러한 물성을 나타내기 위해서는 CdTe 박막의 높은 결정성이 중요하다. Evaporation과 RF magnetron sputtering로 제작된 CdTe 박막은 공정 온도가 증가함에 따라 기판상에 도달하는 스퍼터 원자의 에너지 증가로 인해서 결정립이 성장한 것을 확인할 수 있었다. 따라서 CdTe 박막이 직접변환방식 고감도 X-ray 검출기 광도 전층 역할을 수행할 수 있을 것으로 기대된다.

• Journal of the Microelectronics and Packaging Society
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• v.24 no.3
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• pp.71-76
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• 2017

The electrical behavior and flexibility of the screen printed Ag circuits were investigated with infrared radiation sintering times and sintering temperatures. Electrical resistivity and radio frequency characteristics were evaluated by using the 4 point probe measurement and the network analyzer by using cascade's probe system, respectively. Electrical resistivity and radio frequency characteristics means that the direct current resistance and signal transmission properties of the printed Ag circuit. Flexibility of the screen printed Ag circuit was evaluated by measuring of electrical behavior during IPC sliding test. Failure mode of the Ag printed circuits was observed by using field emission scanning electron microscope and optical microscope. Electrical resistivity of the Ag circuits screen printed on Pl substrate was rapidly decreased with increasing sintering temperature and durations. The lowest electrical resistivity of Ag printed circuit was up to $3.8{\mu}{\Omega}{\cdot}cm$ at $250^{\circ}C$ for 45 min. The crack length arisen within the printed Ag circuit after $10{\times}10^4$ sliding numbers was 10 times longer than that of after $2.5{\times}10^4$ sliding numbers. Measured insertion loss and calculated insertion loss were in good agreements each other. Insertion loss of the printed Ag circuit was increased with increasing the number of sliding cycle.

• Journal of the Korean Vacuum Society
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• v.21 no.5
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• pp.264-272
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• 2012

In this paper, we report THz generation and detection characteristics investigated by InGaAs semiconductor epilayers, as results of a basic study obtained from the InGaAs-based THz transmitter/receiver (Tx/Rx). High-temperature and low-temperature (LT) grown InGaAs epilayers were prepared by the molecular beam epitaxy technique for the characterization of THz generation and detection, respectively, and the surface emission based on the photo-Dember effect was tried for THz generation. THz wave was generated by irradiation of a Ti:Sapphire fs pulse laser (60 ps/83 MHz), and a LT-GaAs Rx was used for the THz detection. The frequency band shown in the spectral amplitudes Fourier-transformed from the measured current signals was ranging in 0.5~2 THz, and the signal currents were exponentially increased with the Tx beam power. The THz detection characteristics of LT-InGaAs were investigated by using an Rx with dipole (5/20 ${\mu}m$) antenna, and the cutoff frequency was ~2 THz.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.1
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• pp.17-21
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• 2011

Copper (Cu) had been attractive material due to its superior properties comparing to other metals such as aluminum or tungsten and considered as the best metal which can replace them as an interconnect metal in integrated circuits. CMP (Chemical Mechanical Polishing) technology enabled the production of excellent local and global planarization of microelectronic materials, which allow high resolution of photolithography process. Cu CMP is a complex removal process performed by chemical reaction and mechanical abrasion, which can make defects of its own such as a scratch, particle and dishing. The abrasive particles remain on the Cu surface, and become contaminations to make device yield and performance deteriorate. To remove the particle, buffing cleaning method used in post-CMP cleaning and buffing is the one of the most effective physical cleaning process. AE(Acoustic Emission) sensor was used to detect dynamic friction during the buffing process. When polishing is started, the sensor starts to be loaded and produces an electrical charge that is directly proportional to the applied force. Cleaning efficiency of Cu surface were measured by FE-SEM and AFM during the buffing process. The experimental result showed that particles removed with buffing process, it is possible to detect the particle removal efficiency through obtained signal by the AE sensor.

• Korean Journal of Optics and Photonics
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• v.15 no.3
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• pp.193-199
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• 2004

We present the double resonance optical pumping(DROP) spectra in the transition 5P$_{3}$2/-4D$_{3}$2/ and 5P$_{3}$2/-4D$_{5}$ 2/ of ($^{87}$ Rb) and the frequency stabilization in the $1.5mutextrm{m}$ region using those spectra. Those spectra have high signal-to-noise ratio and narrow spectral linewidth, which is about 10 MHz. We could account fur the relative intensities of the hyperfine states of those spectra by the spontaneous emission into the other state. When the frequency of the $1.5mutextrm{m}$ laser diode was stabilized to the DROP spectrum, the frequency fluctuation was about 0.2 MHz fDr sampling time of 0.1 s and the Allan deviation(or the square root of the Allan variance) was about 1${\times}$10$^{-11}$ for averaging time of l00s.

• The Journal of The Korea Institute of Intelligent Transport Systems
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• v.10 no.5
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• pp.105-112
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• 2011

Delay reduction of vehicles at the intersection is highly dependent on the signal operation method. Improper traffic operation causes the violation of the traffic regulations and increasing traffic congestion. Delay because of congestion has contributed to the increase in carbon dioxide in the atmosphere. The focus of this paper is to measure the amount of carbon dioxide when the intersection is changed to roundabout. Even though, Intergovernmental Panel on Climate Change(IPCC) recommends Tier 1 method to measure the amount of greenhouse gas from vehicles, this paper used Tier 3 method because we could use the data of average running distance per each vehicle model. Two signalized intersections were selected as the study area and the delay reductions of roundabout operation were estimated by VISSIM microscopic simulation tool. The control delay for boksu intersection reduced from 28.6 seconds to 4.4 seconds and the KRIBB intersection sharply reduced from 156.4 seconds to 23.6 seconds. In addition, carbon dioxide for two intersections reduced to 646.5 ton/year if the intersection is changed to roundabout. Future research tasks include testing the experiment for networks, as well as for various intersection types.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.237.1-237.1
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• 2014

Etching is one of the most important steps in semiconductor manufacturing. In etch process control a critical task is to stop the etch process when the layer to be etched has been removed. If the etch process is allowed to continue beyond this time, the material gets over-etched and the lower layer is partially removed. On the other hand if the etch process is stopped too early, part of the layer to be etched still remains, called under-etched. Endpoint detection (EPD) is used to detect the most accurate time to stop the etch process in order to avoid over or under etch. The goal of this research is to develop a hardware and software system for EPD. The hardware consists of an Optical Plasma Monitor (OPM) sensor which is used to continuously monitor the plasma optical emission intensity during the etch process. The OPM software was developed to acquire and analyze the data to perform EPD. Our EPD algorithm is based on the following theory. As the etch process starts the plasma generated in the vacuum is added with the by-products from the etch reactions on the layer being etched. As the endpoint reaches and the layer gets completely removed the plasma constituents change gradually changing the optical intensity of the plasma. Although the change in optical intensity is not apparent, the difference in the plasma constituents when the endpoint has reached leaves a unique signature in the data gathered. Though not detectable in time domain, this signature could be obscured in the frequency spectrum of the data. By filtering and analysis of the changes in the frequency spectrum before and after the endpoint we could extract this signature. In order to do that, first, the EPD algorithm converts the time series signal into frequency domain. Next the noise in the frequency spectrum is removed to look for the useful frequency constituents of the data. Once these useful frequencies have been selected, they are monitored continuously in time and using a sub-algorithm the endpoint is detected when significant changes are observed in those signals. The experiment consisted of three kinds of etch processes; ashing, SiO2 on Si etch and metal on Si etch to develop and evaluate the EPD system.

• The Korean Journal of Nuclear Medicine
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• v.28 no.3
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• pp.307-312
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• 1994

Interictal single photon emission computed tomography of regional cerebral blood flow (rCBF SPECT) in 18 intractable temporal lobe epilepsy patients(8 male and 10 female patients: average 23.5 years old) were compared with 2.0 T magnetic resonance imaging (MRI). And surgical outcome was analysed with the findings, symptom duration and lateralization of temporal lobe. Preoperatively rCBF SPECT was done in all 18 patients with intravenous injection of 740 MBq 99mTc-HMPAO. MRI was also done preoperatively in 13 patients. Surgical outcome was classified by Engel's outcome classification(four-part classification recommended at the first Palm Desert conference). rCBF SPECT detected correctly lateralising abnormality of temporal lobe hypoperfusion in 13/18(72.2%), contralateral temporal lobe hypoperfusion in 2/18(11.1%) and showed no def-inite abnormality in 3/18(16.7%). The positive predictive value of unilateral temporal lobe hypoperfusion was 87%. MRI detected correct localising abnormality in 8/13(61.5%), such as hippocampal atrophy(7/13), asymmetric temporal horn(6/13), anterior temporal lobe atrophy(1/13), increased signal intensity from hippocampus(1/13) and calcific density(1/13), and no abnormal finding was noted in 5/13(38.5%). There was no false positive findings and the positive predictive value of MRI was 100%. Only 2 cases showed same lateralization findings in rCBF SPECT and MRI. There was no significant correlation between symptom duration and no abnormal findings on SPECT or MRI. Surgical outcome showed class I in 15/18(83.3%), and class II in 2/18(11.1%). One case of no abnormal finding in both SPECT and MRI showed class III surgical outcome. No class IV surgical outcome was noted. Surgical outcome, lateralization of epileptic focus in temporal lobe and abnormal findings in rCBR SPECT or MRI were not significantly correlated.

• Korean Journal of Optics and Photonics
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• v.28 no.4
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• pp.166-171
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• 2017

Hydrogen gas is a green energy sources because it features no emission of pollutants during combustion. But hydrogen gas is very dangerous, being flammable and very explosive. Hydrogen gas detection is very important for the safety of a nuclear power plant. Hydrogen gas is generated by oxidation of nuclear fuel cladding during a critical accident, and leads to serious secondary damage in the containment building. This paper discusses the development of a Raman lidar system for remote detection and measurement of hydrogen gas. A small, portable Raman lidar system was designed, and a measurement algorithm was developed to quantitatively measure hydrogen gas concentration. To verify the capability of measuring hydrogen gas with the developed Raman lidar system, experiments were carried out under daytime outdoor conditions by using a gas chamber that can adjust the hydrogen gas density. As results, our Raman lidar system is able to measure a minimum density of 0.67 vol. % hydrogen gas at a distance of 20 m.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.37 no.1C
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• pp.1-7
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• 2012

At the industrial work site, the manufacturing process is being automated to improve work efficiency. However, it is often difficult to automate the entire manufacturing process, and there are spaces in which workers there are constantly exposed to danger. To protect such workers from the danger, this paper studied a worker safety management system for the industrial work site which uses a location recognition system and which is based on the Ubiquitous-Wireless Sensor Network (U-WSN). Using wireless signals, the distance between two devices can be measured and the location of a worker can be calculated using triangularization in 3-D. But at the industrial work sites where there are a lot of steel and structures, errors occur due to signal reflection and multi-path, etc., which makes it difficult to get the accurate location. To address this problem the following was done: first, a circular polarization patch antenna appropriate to the work site was used to reduce the degree of error that may occur from the antenna emission pattern and the particular Line of Sight (LOS); second, a 3-D localization technique and a filtering algorithm were used to improve the accuracy of location determination. The developed system was tested by using it on a wharf crane to validate its accuracy and effectiveness. The proposed location recognition system is expected to contribute greatly in ensuring the safety of workers at industrial work sites.