• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.136-139
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• 2004

The requirement of planarity, such as with-in-wafer nonuniformity, post thickness range, have become increasingly stringent as critical dimensions of devices are decreased and a better control of a planarity become important. The key factors influencing the planarity capability of the CMP process have been well understood through numerous related experiments. These usually include parameters such as process pressures, relative velocities, slurry temperature, polishing pad materials and polishing head structure. Many study have been done about polishing pad and its groove structure because it's considered as one of the key factors which can decide wafer uniformity directly. But, not many study have been done about polisher head structure, especially about polisher head plate design. The purpose of this paper is to know how the plate structure can affect wafer uniformity and how to deteriorate wafer yield. Furthermore, we studied several new designed plate to improve wafer uniformity and also improve wafer yield.

• Journal of the Earthquake Engineering Society of Korea
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• v.3 no.1
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• pp.113-122
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• 1999

The importance of the vertical response of a structure was well recognized after the Hyogoken-Nanbu earthquake of Japan. However, most of the seismic design codes does not specified the site sail profiles, and the sail and foundations conditions were mostly neglected in the vertical seismic analyses of a structure. In this paper, the effects of foundation size, sail layer depth under the foundation, foundation embedment and pile foundation on the vertical seismic response spectra for both surface and embedded mat foundation were studied to investigate the effects of the soft soil layer on the vertical response of a structure excited with the vertical components of Taft and El Centro earthquakes, considering the sail profile types of $S_A,S_C,S_E$ in UBC-97, the medium and large size foundations, the soil layer depth under the foundation of 30 and 60m, the foundation embedment of 0 and 15m, and the precast reinforced concrete bearing piles installed in the soft soil deposit. According to the study results, the foundation size has a little effect on the vertical seismic response, However, the soil layer depth under the foundation of 60m has to be considered for the vertical seismic analysis of a structure as for the horizontal one. The embedded pile foundations as well as the surface ones built on the soft soil layer amplified the vertical seismic response of a structure very much.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.04a
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• pp.382-387
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• 2003

Many type of smart materials and control laws are available to actively adjust the structure from various external disturbances. Usually, a certain type of control law to activate a specific smart material is tell established, but the effectiveness of the control scheme is limited by the choice of the smart materials and the responses of the structure. ER fluid is adequate to provide small but arbitrary control forces at any point along the structure. It was found that active vibration control of the structure embedded with ER fluids fluidly to suppress the vibration excited with broad band frequency due to the limited change of the structure characteristics. To compensate this limited effect of the control scheme with ER fluid alone, PPF control using PZT as an actuator is added to construct a hybrid controller.

• Smart Structures and Systems
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• v.25 no.1
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• pp.37-45
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• 2020

This paper aims at enlightening the properties, computational and implementation issues related to Kalman filter based state estimation algorithms and sliding mode observers, by applying them for estimating the states of a smart structure system. The Kalman based estimators considered in this work are Kalman filter and information filter and, the sliding mode observers considered are Utkin observer and higher order sliding mode observer. A fourth order linear time invariant model of a piezo actuated beam is used in this work. This structure is embedded with four number of piezo patches, of which two act as sensors, one as disturbance actuator and the other as control actuator. The performance of the state estimation algorithms is evaluated through simulation, for the first two vibrating modes of the piezo actuated structure, when the structure is maintained at first mode and second mode resonance.

• Journal of the Institute of Electronics Engineers of Korea TC
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• v.48 no.12
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• pp.35-41
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• 2011

In this paper, an analysis for a new substrate shielding symmetric coupled MIS structure consisting of grounded crossbar at the interface between Si and SiO2 layer using the Finite-Difference Time-Domain(FDTD) method is presented. In order to reduce the substrate effects on the transmission line characteristics, a shielding structure consisting of grounded crossbar lines over time-domain signal has been examined. Parameters of symmetric coupled MIS transmission line with various gaps between crossbars for even- and odd-mode are investigated as the functions of frequency, and the extracted distributed frequency-dependent transmission line parameters and corresponding equivalent circuit parameters as well as quality factor for the new MIS crossbar embedded structure are also presented. It is shown that the quality factor of the symmetric coupled transmission line can be improved without significant change in the characteristic impedance and effective dielectric constant.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.40 no.8
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• pp.721-724
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• 2016

Because of the inherent uncertainties caused by the manufacturing process variations, future loading conditions, and incomplete damage models, the lifetimes of mechanical structures under field conditions are significantly different from the results obtained in the laboratories. In this study, a dual sensor was developed to prognosticate the fatigue failure of structures under these uncertain conditions, and its effectiveness was demonstrated on a rectangular columnar structure under repeated uni-axial loading. The dual sensor is a slightly weaker structure embedded in the target structure, so that failure occurs in the sensor earlier than in the target structure. From the signal differences in the strain gauges in the embedded dual sensor, it is possible to differentiate between the normal status and warning status, even under variable loads.

• Journal of Sensor Science and Technology
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• v.8 no.3
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• pp.232-238
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• 1999

Single mode fiber optic interferometers using the Fabry-Perot configuration were embedded in a reinforced concrete structure. These interferometers investigated the character of phase shift and strain for internal loads. The 10 mm length of FFPI in the continuous length of single mode fiber (SMF) were produced with two pieces of SMF coated were $TiO_2$ dielectric film utilizing the fusion splicing technique. The fabricated fiber optic Fabry-Perot interferometer(FFPI) and the 6 mm length of steel bar were buried with specimen ($100{\times}100{\times}50\;mm^3$) which was made of concrete structure. The resin protects FFPI and fiber leads from squeezed concrete. Sensors at different point in the structure were multiplexed by TDM (Time Division Multiplexing) method and the deformation to the external loads at each point could be monitored simultaneously. The output signals were proportional to the external loads applied to the structure and the sensitivity of the sensors were $1.03^{\circ}/kg$ and $0.76^{\circ}/kg$ respectively.

• Geomechanics and Engineering
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• v.5 no.4
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• pp.283-297
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• 2013

The aim of this paper is to investigate how the soil-structure interaction affects sloshing response of the elevated tanks. For this purpose, the elevated tanks with two different types of supporting systems which are built on six different soil profiles are analyzed for both embedded and surface foundation cases. Thus, considering these six different profiles described in well-known earthquake codes as supporting medium, a series of transient analysis have been performed to assess the effect of both fluid sloshing and soil-structure interaction (SSI). Fluid-Elevated Tank-Soil/Foundation systems are modeled with the finite element (FE) technique. In these models fluid-structure interaction is taken into account by implementing Lagrangian fluid FE approximation into the general purpose structural analysis computer code ANSYS. A 3-D FE model with viscous boundary is used in the analyses of elevated tanks-soil/foundation interaction. Formed models are analyzed for embedment and no embedment cases. Finally results from analyses showed that the soil-structure interaction and the structural properties of supporting system for the elevated tanks affected the sloshing response of the fluid inside the vessel.

• Proceedings of the IEEK Conference
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• 1998.10a
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• pp.479-482
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• 1998

Whether a given tree is a subgraph of the interconnection network topology is one of the important problem in parallel computing. Trees are used as the underlying structure for divide and conquer algorithms and provide the solution spaces for NP-complete problems. Complete binary trees are the basic structure among those trees. Binomial trees play an important role in broadcasting messages in parallel networks. If binomial trees can be efficiently embedded in complex binary trees, broadcasting algorithms can be effeciently performed on the interconnection networks. In this paper, we present average dilation 2 embedding of binomial trees in complete binary trees.

• Bulletin of the Korean Mathematical Society
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• v.36 no.1
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• pp.209-216
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• 1999

Let X be a minimal symplectic four-manifold with ${b_2}^{+}$=1 and $c_1(K)^2\;\geq\;0$. Then we show that there are no symple tic structures $\omega$ such that $$c_1(K)$\cdot\omega$ > 0, if X contains an embedded symplectic submanifold $\Sigma$ satisfying $\int_\Sigmac_1$(K)<0.