• JSTS:Journal of Semiconductor Technology and Science
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• v.14 no.2
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• pp.252-261
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• 2014

A Bayesian network (BN) based fault diagnosis framework for semiconductor etching equipment is presented. Suggested framework contains data preprocessing, data synchronization, time series modeling, and BN inference, and the established BNs show the cause and effect relationship in the equipment module level. Statistically significant state variable identification (SVID) data of etch equipment are preselected using principal component analysis (PCA) and derivative dynamic time warping (DDTW) is employed for data synchronization. Elman's recurrent neural networks (ERNNs) for individual SVID parameters are constructed, and the predicted errors of ERNNs are then used for assigning prior conditional probability in BN inference of the fault diagnosis. For the demonstration of the proposed methodology, 300 mm etch equipment model is reconstructed in subsystem levels, and several fault diagnosis scenarios are considered. BNs for the equipment fault diagnosis consists of three layers of nodes, such as root cause (RC), module (M), and data parameter (DP), and the constructed BN illustrates how the observed fault is related with possible root causes. Four out of five different types of fault scenarios are successfully diagnosed with the proposed inference methodology.

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.18 no.4
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• pp.959-979
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• 2024

Rice pest identification is essential in modern agriculture for the health of rice crops. As global rice consumption rises, yields and quality must be maintained. Various methodologies were employed to identify pests, encompassing sensor-based technologies, deep learning, and remote sensing models. Visual inspection by professionals and farmers remains essential, but integrating technology such as satellites, IoT-based sensors, and drones enhances efficiency and accuracy. A computer vision system processes images to detect pests automatically. It gives real-time data for proactive and targeted pest management. With this motive in mind, this research provides a novel farmland fertility algorithm with a deep learning-based automated rice pest detection and classification (FFADL-ARPDC) technique. The FFADL-ARPDC approach classifies rice pests from rice plant images. Before processing, FFADL-ARPDC removes noise and enhances contrast using bilateral filtering (BF). Additionally, rice crop images are processed using the NASNetLarge deep learning architecture to extract image features. The FFA is used for hyperparameter tweaking to optimise the model performance of the NASNetLarge, which aids in enhancing classification performance. Using an Elman recurrent neural network (ERNN), the model accurately categorises 14 types of pests. The FFADL-ARPDC approach is thoroughly evaluated using a benchmark dataset available in the public repository. With an accuracy of 97.58, the FFADL-ARPDC model exceeds existing pest detection methods.