• 제목/요약/키워드: Electroplated Copper

검색결과 75건 처리시간 0.023초

전해액 온도에 의한 구리 박막의 표면형상과 물성 변화 (Property and Surface Morphology of Copper Foil on the Various Temperature of Electrolyte)

  • 우태규;이만형;박은광;배태성;이민호;박일송;정광희;설경원
    • 대한금속재료학회지
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    • 제47권4호
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    • pp.256-260
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    • 2009
  • This study examined the effects of plated temperature on the surface morphology and property of an electrodeposited copper foil. The morphology, crystal structure and electric characteristics of the electrodeposited copper foil were examined by scanning electron microscopy, X-ray diffraction, and a four-point probe, respectively. The surface roughness, crystal growth orientation and resistivity could be controlled using various temperature of electrolyte. Large particles were observed on the surface of the copper layer electroplated onto the $30^{\circ}C$. However, a uniform surface, lower resistivity and high flexibility were obtained when a $50^{\circ}C$ electrolyte was used.

첨가제에 의한 구리 박막의 표면형상과 물성변화 (Effect of Additives on the Physical Properties and Surface Morphology of Copper Foil)

  • 우태규;박일송;박은광;정광희;이현우;설경원
    • 대한금속재료학회지
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    • 제47권9호
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    • pp.586-590
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    • 2009
  • The effects of additives on the surface morphology and physical properties of copper electrodeposited on polyimide(PI) film were investigated here. Two kinds of additives, an activator(additive A) and a leveler(additive B),were used in this study. Electrochemical experiments, in conjunction with scanning electron microscopy(SEM), X-ray diffraction(XRD) and a four-point probe, were performed to characterize the morphology and mechanical characteristics of copper electrodeposited in the presence of the additives. The surface roughness, crystal growth orientation and resistivity could be controlled using various quantities of additive B. High resistivity and lower peel strength were observed on the surface of the copper layer electroplated onto the electrolyte with no additive B. However, a uniform surface, lower resistivity and high flexibility were obtained with a combination of 20 ppm of additive A and 100 ppm of additive B.

Preliminary studies for production of 61Cu using natural nickel target with RFT-30 cyclotron

  • Lee, Jun Young;Hur, Min Goo;Yang, Seung Dae;Park, Jeong Hoon
    • 대한방사성의약품학회지
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    • 제5권2호
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    • pp.79-82
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    • 2019
  • 61Cu is a promising PET radiometal having favorable nuclear decay characteristics with appropriate half-life of 3.3 h. Owing its promising capabilities in radiopharmaceutical chemistry and its chemical similarities with its isotopes 64Cu and 67Cu, in this work we have tried to optimize the production and separation conditions of 61Cu. 61Cu was produced via (p, x) reaction with natural nickel which was electroplated on the high purity silver coated copper backing target holder. The optimization of target electrodeposition, beam energy and current modulation, target dissolution and separation were optimized in this study. Preliminary studies show that 61Cu was successfully produced and separated which can be further extended for the production of 64Cu and 67Cu.

다층 PCB 빌드업 기판용 마이크로 범프 도금에 미치는 전해조건의 영향 (Effects of Electroplating Condition on Micro Bump of Multi-Layer Build-Up PCB)

  • 서민혜;홍현선;정운석
    • 한국재료학회지
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    • 제18권3호
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    • pp.117-122
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    • 2008
  • Micro-sized bumps on a multi-layered build-up PCB were fabricated by pulse-reverse copper electroplating. The values of the current density and brightener content for the electroplating were optimized for suitable performance with maximum efficiency. The micro-bumps thus electroplated were characterized using a range of analytical tools that included an optical microscope, a scanning electron microscope, an atomic force microscope and a hydraulic bulge tester. The optical microscope and scanning electron microscope analyses results showed that the uniformity of the electroplating was viable in the current density range of $2-4\;A/dm^2$; however, the uniformity was slightly degraded as the current density increased. To study the effect of the brightener concentration, the concentration was varied from zero to 1.2 ml/L. The optimum concentration for micro-bump electroplating was found to be 0.6 ml/L based on an examination of the electroplating properties, including the roughness, yield strength and grain size.

흑색 코발트 태양 선택흡수막의 광학적특성과 구조 (Optical Properties and Structure of Black Cobalt Solar Selective Coatings)

  • 이길동
    • 한국태양에너지학회 논문집
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    • 제31권4호
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    • pp.48-56
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    • 2011
  • Black cobalt solar selective coatings were prepared by thermal oxidation of electroplated cobalt metal on copper and nickel substrates. The optical properties and structure of the black cobalt selective coating for solar energy utilizations were characterized by glow discharge spectrometry (GDS), ultraviolet-visible-near infrared (UV-VIS-NIR) spectrometer, atom force microscopy(AFM) and X-ray photoelectron spectroscopy(XPS). The optical properties of optimum black cobalt selective coating prepared on copper substrate were a solar absorptance of 0.82 and a thermal emittance of 0.01. From the GDS depth profile analysis of these coatings, the concentration of cobalt particles near the interface was higher than at the surface, but oxygen concentration at the surface was higher than at the interface. These results suggest that the selective absorption was dominated by this chemical composition variation in the coating. The surface of this film exhibited morphology with root-mean-square(rms) roughness of about 144.3nm. XPS measurements data showed that several phases of Co coexist($Co_3O_4$,CoO) in the film.

전기 도금 공정을 활용한 양자점 감응 태양전지 CuS 상대 전극 제작 (Preparation of CuS Counter Electrodes Using Electroplating for Quantum Dot-sensitized Solar Cells)

  • 하승범;최인희;김재엽
    • 한국수소및신에너지학회논문집
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    • 제34권6호
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    • pp.785-791
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    • 2023
  • Copper sulfide (CuxS) has been extensively utilized as a counter electrode (CE) material for quantum dot solar cells (QDSCs) due to its exceptional catalytic activity for polysulfide electrolytes. The typical fabrication method of Cu2S CEs based on brass substrate is dangerous, involving the use of a highly concentrated hydrochloric acid solution in a relatively high temperature. In contrast, electroplating presents a safer alternative by employing a less acidic solution at a room temperature. In addition, the electroplating method increases the probability of obtaining CEs of consistent quality compared to the brass method. In this study, the optimized electroplating cycle for CuS CEs in QDSCs has been studied for the highly efficient photovoltaic performances. The QDSCs, featuring electroplated CuS CEs, achieved an impressive efficiency of 7.18%, surpassing the conventional method employing brass CEs, which yielded an efficiency of 6.62%.

3차원 실장을 위한 Non-PR 직접범핑법 (Non-PR direct bumping for 3D wafer stacking)

  • 전지헌;홍성준;이기주;이희열;정재필
    • 대한용접접합학회:학술대회논문집
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    • 대한용접접합학회 2007년 추계학술발표대회 개요집
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    • pp.229-231
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    • 2007
  • Recently, 3D-electronic packaging by TSV is in interest. TSV(Through Silicon Via) is a interconnection hole on Si-wafer filled with conducting metal such as Copper. In this research, chips with TSV are connected by electroplated Sn bump without PR. Then chips with TSV are put together and stacked by the methode of Reflow soldering. The stacking was successfully done and had no noticeable defects. By eliminating PR process, entire process can be reduced and makes it easier to apply on commercial production.

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The fabrication of electrodes with low resistance and fine pattern for PDP

  • Cho, Soo-Je;Ryu, Byung-Gil;Park, Myung-Ho
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2000년도 제1회 학술대회 논문집
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    • pp.107-108
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    • 2000
  • We propose the method which is possible to fabricate the electrodes with the fine pattern and low resistance by photolithography and electroplating. The widths of pattern fabricated were 30, 50, 70 and 100um and the thickness could be up to $10{\mu}m$. The resistivity of the copper electrode electroplated was below $2.0{\mu}{\Omega}$ cm which is about half of photosensitive silver electrode. Dielectric layer was coated on the electrodes by screen printing and the pores harmful to the discharge were not formed after heat treatment. In the viewpoint of resistance and patterning, this method has much higher potential for large area display than other methods like screen printing, photosensitive conductive paste method and sputtering.

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구리 나노배선에서의 전해 구리도금막과 피복층 계면 결함에 관한 연구 (A study on the defect of electroplated Copper/diffusion barrier interface for Cu nano-interconnect)

  • 이민형;이홍기;이호년;허진영
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2011년도 춘계학술대회 및 Fine pattern PCB 표면 처리 기술 워크샵
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    • pp.51-52
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    • 2011
  • 본 연구에서는 전해 구리도금막과 SiN 피복층 사이의 힐락 (Hillock) 및 보이드 (Void) 결함에 미치는 전해 구리도금 공정 및 CVD SiN 피복층 증착 전 NH3 플라즈마 처리 효과에 대해 연구하였다. SiN 피복층 증착전 NH3 플라즈마 효과를 정량화하기 위해 실험계획법을 이용해 NH3 플라즈마 공정 인자가 힐락 결함의 밀도에 미치는 영향에 대해 고찰하였다. 실험결과, 힐락 결함의 밀도는 NH3 플라즈마 인가 시간에 비례한다는 것을 알았다. 보이드 결함의 경우, 구리 씨앗층 및 NH3 플라즈마 조건의 최적화를 통해 구리 씨앗층의 표면 조도를 최소화할 경우 보이드 결함이 최소화된다는 것을 알 수 있었다. 이는 구리 씨앗층의 표면 조도를 최소화함에 따라 전해 구리도금막의 결정립 크기가 커져 결정립 계면에 존재하는 불순물 양이 줄어들었기 때문인 것으로 사료된다.

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스퍼터링 및 전기 도금으로 제조된 구리 박막에서의 표면 결함에 미치는 결정립계의 영향 (Grain Boundary Characteristics and Stress-induced Damage Morphologies in Sputtered and Electroplated Copper Films)

  • 박현;황수정;주영창
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2003년도 춘계학술발표회 초록집
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    • pp.4-4
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    • 2003
  • Various Cu films were fabricated using sputtering and electroplating with and without additive, and their surface damages after annealing were investigated. After annealing at 43SoC, the difference between damage morphologies of the films was observed. In some films stress-induced grooves along the grain boundaries were observed, while in the others voids at the grain boundary triple junctions were observed. It was also observed that the stress-induced groove was formed along the high energy grain boundaries. It was found out that the difference of the morphologies of surface damages in Cu films depends on not process type but grain boundary characteristics. To explain the morphological difference of surface damages, a simple parameter considering the contributions of grain structures and grain boundary characteristics to surface and grain boundary diffusions is suggested. The effective grain boundary area, which is a function of grain size, film thickness and the fraction of high energy grain boundaries, played a key role in the morphological difference.

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