• Title/Summary/Keyword: Electronic control type

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Real-time In-situ Plasma Etch Process Monitoring for Sensor Based-Advanced Process Control

  • Ahn, Jong-Hwan;Gu, Ja-Myong;Han, Seung-Soo;Hong, Sang-Jeen
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.11 no.1
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    • pp.1-5
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    • 2011
  • To enter next process control, numerous approaches, including run-to-run (R2R) process control and fault detection and classification (FDC) have been suggested in semiconductor manufacturing industry as a facilitation of advanced process control. This paper introduces a novel type of optical plasma process monitoring system, called plasma eyes chromatic system (PECSTM) and presents its potential for the purpose of fault detection. Qualitatively comparison of optically acquired signal levels vs. process parameter modifications are successfully demonstrated, and we expect that PECSTM signal can be a useful indication of onset of process change in real-time for advanced process control (APC).

Analysis of Optical Characteristics According to Electronic Ink Loading Method of Three-Electrode Type E-Paper Display (3전극형 전자종이 디스플레이의 전자잉크 주입 방법에 따른 광학 특성 분석)

  • Lee, Sang-Il;Hong, Youn-Chan;Kim, Young-Cho
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.31 no.3
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    • pp.171-176
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    • 2018
  • An electronic paper display was fabricated by injecting electronic ink, including white and black particles coated by positive and negative charge control agents (CCA), respectively, into closed cells surrounded by micro-barriers. These two types of charged, colored particles are easily damaged or their charging value can be changed by the injection process; therefore, the electrical and optical properties of the image panel fabricated by the injection method were estimated in this study. The active particle-loading method, proposed as a new electronic ink injection process, was applied, and the electro-optical properties of the resulting three-electrode-type e-paper image panel were analyzed. The reflection rate of the white image-panel fabricated with our new injection method was 24.7%, while that of the same panel fabricated with a previously reported injection method was 19.8%. In addition, the response time was improved by about five times compared to those reported in other publications.

INTELLIGENT CONTROL STRATEGY FOR A MOBILE VEHICLE WITH NEURCOMPUTER

  • Sugisaka, Masanori;Wang, Xin;Lee, Ju-Jang
    • 제어로봇시스템학회:학술대회논문집
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    • 1997.10a
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    • pp.815-818
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    • 1997
  • In this paper, an intelligent control strategy for a mobile vehicle, based on the technology of the artificial neural network in a Neurocomputer, is presented. The mobile vehicle learned recognizing and driving knowledge by a neurocomputer. Moment Invariants computation was used to extract the shape of objects. The technologies of both neurocomputer and Neumann-type computer are applied into the control system, and make the mobile vehicle be capable of tracking designated objects and avoiding obstacles.

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Control Characteristics of Boost input type active clamp DC-DC converter (Boost 입력형 능동 클램프 DC-DC 컨버터의 제어특성)

  • Ceong Cin-Beom;Kim Hee-Jun
    • Proceedings of the KIPE Conference
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    • 2001.07a
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    • pp.510-513
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    • 2001
  • In this paper, an application of asymmetrical duty control method to a boost input type active clamp DC-DC converter is discussed. In order to verify the discussed results, a 50W prototype converter is built and is tested. Through the experimental results an asymmetrical controlled boost input type active clamp converter is validated.

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Improvement of Field Uniformity in the Reverberation Chamber Using Diffusers Filled with Dielectric Material (유전체로 충진된 확산기를 이용한 전자파 잔향실 내의 전자기장 균일도 향상 연구)

  • Kim Hye-Kwang;Rhee Joong-Geun;Lim Wook-Chae
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.16 no.12 s.103
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    • pp.1222-1228
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    • 2005
  • Analysis on the field uniformity inside of a reverberation chamber was done at 2.45 GHz which is an operating frequency of MWO(Microwave Oven). The Schroeder's Quadratic Residue Diffuser was designed for the chamber, and 3 different types of diffusers have been investigated using the finite-difference time-domain(FDTD) method for the field characteristics of each type. Type 2 and 3 diffusers were filled with dielectric material, and the size of these could be designed smaller than Type 1, without degradation of field characteristic. Type 3 diffuser shows better results among the three types of diffusers in view of increased test region and better field uniformity.

The Hydraulic System Modeling and Analysis of the Clutch Direct Control of an Automatic Transmission for a Forklift Truck (지게차 자동변속기의 클러치 직접 제어 유압 시스템 모델링 및 해석)

  • Oh, Joo-Young;Lee, Guen-Ho;Song, Chang-Sub
    • Journal of the Korean Society for Precision Engineering
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    • v.26 no.1
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    • pp.112-119
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    • 2009
  • An automatic transmission of construction equipment is controlled by hydraulic and electronic system for doing in various functions like as shifting and operation. The shifting is operated by the engaged and disengaged clutch motion from hydraulic power. On the shifting process, suitable pressure control to the clutch is required for smooth shifting. Hydraulic control system in the automatic transmission is divided by the pilot control type and the direct control type greatly. The direct control type has an advantage than the pilot control type. Because the structure is simple, the design and the manufacture are having less troubles and the system can be maximized precision pressure control. However, the excellent performance proportional control valve should be used to achieve proper control-ability. In this study, the dynamic analysis model composing the automatic transmission and hydraulic system for forklift truck is presented to simulate the characteristics of hydraulic system about the direct control type. That model is verified the validity compared the results of the testing examination. Parameters of input signal are analyzed to reduce the output torque according to input control signal is affected in shifting characteristic.

Development of Practical Semi-active Suspension Control System

  • Takahashi, Hideaki;Zhang, Feifei;Mishima, Kiyoshi;Ito, Masanori
    • 제어로봇시스템학회:학술대회논문집
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    • 2003.10a
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    • pp.278-281
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    • 2003
  • The focus of this research is to realize the function which is equivalent to the active suspension system, with controlling semi-active suspension through the attenuation of power variable damper in lower cost and smaller energy. Actually some semi-active suspension systems have been adopted, but they are not sufficient in performance. The authors intended to develop more effective and practical system and applied the optimal control technique. The results of experiments with practical suspension system showed a degree of improvement of comfortableness.

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Response Characteristics of Metal Belt CVT Vehicle with Electronic Controlled Line Pressure (라인압력제어 전자화 CVT 차량의 응답 특성)

  • 송한림;김정철;김현수
    • Transactions of the Korean Society of Automotive Engineers
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    • v.6 no.2
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    • pp.191-202
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    • 1998
  • An electronic-hydraulic controlled line pressure system was suggested based on the mechanical controlled CVT base model. As a high level control strategy, a 3-D optimal line pressure map was obtained considering the driver's desire, driving conditions. Also, PID type low level controller was designed. Using the high level control strategy and the dynamic models of the base model CVT with electronic controlled line pressure system, performance simulations were carried out. It is seen from the simulation results that fuel economy of the electronic controlled strategy keeps the line pressure low, which results in the improved efficiency of the hydraulic system.

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Levitation Control Experiment at Standstill in PM LSM Controlled-Repulsive Maglev Vehicle

  • Yoshida, Kinjiro;Takami, Hiroshi;Jozaki, Chiyuki;Kinoshita, Shiauo
    • Proceedings of the KIPE Conference
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    • 1998.10a
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    • pp.119-124
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    • 1998
  • This paper proposes a new repulsive-Maglev vehicle in which a vertical type PM linear synchronous motor (LSM) can levitate and propel simultaneously, independently of the vehicle speeds. A compact control method is developed which is based on the concept of controlling individually the levitation system by armature-current and the propulsion system by mechanical load-angle. The levitation-motion control experiments have carried out successfully together with positioning at standstill. The pitching motion has been compensated for very well by using the zero-phase-current control method proposed here.

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