• 한국정밀공학회지
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• 제25권12호
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• pp.132-138
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• 2008

Recently, mastering processes for high density optical disc such as Blu-ray disc rely on electron beams, which are operable in only vacuum. In the mastering process, one of the most important tasks is to design precision stages for providing precise positioning of the works with respect to the source in a high vacuum environment. In this paper, we have developed a precision rotation table usable in the electron beam mastering. The rotation table adopted air bearings for a high positioning repeatability and velocity stability. The air leakage from the air bearings has been minimized by employing the differential exhaust scheme using three steps of air drain. The design parameters such as diameters of exhaust lines, seal lengths, and pumping speeds were decided according to the optimization method using genetic algorithm. The performance on the vacuum level of the rotation table was evaluated experimentally and theoretically. The results indicate that a vacuum level of $10^{-4}$ Pa is achieved with operation of air bearings in a vacuum chamber, which is sufficient for the electron beam mastering.

• 한국진공학회지
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• 제12권3호
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• pp.182-192
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• 2003

밀리미터파 대역용 고속 PHEMT 소자 제작 및 개발을 위하여 다층 리지스트 및 다원자 기판 구조에서 전자빔 리소그래피 공정을 분석할 수 있는 새로운 몬테 카를로 시뮬레이션 모델을 개발하였다. 전자빔에 의해 다층 다원자 타겟 기판 구조에 전이되는 에너지를 정확하고 효율적으로 계산하기 위하여 다층 리지스트 및 다층 다원자 기판 구조에서 시뮬레이션 가능하도록 새로이 모델링하였다. 본 논문에서 제안 개발된 모델을 사용하여 PHEMT 소자의 전자빔 리소그래피에 의한 T-게이트 형성 공정을 시뮬레이션하고 SEM측정 결과와 비교 분석하여 타당성을 검증하였다.

• 방사선산업학회지
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• 제5권2호
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• pp.107-112
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• 2011

Electron beam-induced crosslinking of polycaprolactone (PCL) films containing various crosslinking agents (CAs) was investigated in this study. PCL films containing various CAs prepared by a solution casting method were irradiated by electron beams at various absorption doses and the irradiated PCL films were investigated in terms of their crosslinking degree, thermal and mechanical properties, and biodegradability. Based on the results of the crosslinking degree measurement, triallyl isocyanurate was found to be most effective for the electron-beam induced crosslinking of PCL films. The results of the UTM, DMA, and TMA revealed that the thermal and mechanical properties of the crosslinked PCL films were greatly improved in comparison to those of the pure PCL. The results of the enzymatic degradation test revealed that the biodegradability of the crosslinked PCL films was reduced in comparison to that of the pure PCL.

• 방사선산업학회지
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• 제4권3호
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• pp.259-263
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• 2010

Carbon fibers are used as a reinforcement material in an epoxy matrix in advanced composites due to their high mechanical strength, rigidity and low specific density. An important aspect of the mechanical properties of composites is associated to the adhesion between the surface of the carbon fiber and the epoxy matrix. This paper aimed to evaluate the effects of electron beam irradiation on the physicochemical properties of carbon fibers to obtain better adhesion properties in resultant composite. Chemical structure and surface elements of carbon fiber were determined by FT-IR, elemental analysis and X-ray photoelectron spectroscopy, which indicated that the oxygen content increased significantly with increasing the radiation dose. Thermal stability of the carbon fibers was studied via the thermalgravimetric analysis. Surface morphology of carbon fiber was analyzed by scanning electron microscope. It was found that the degree of surface roughness was increased by electron beam irradiation.

• 방사선산업학회지
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• 제5권1호
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• pp.69-73
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• 2011

Polyamide 66 (PA66) nanofibers with Triallyl cyanurate (TAC) were obtained by electrospinning of formic acid and chloroform solution. Electron beam irradiation of PA66 nanofiber with and without TAC was carried out over a range of absorbed doses (20~100 kGy) in nitrogen. The characterization of the irradiated PA66 nanofibers and PA66 nanofibers with TAC was done by scanning electron microscopy (SEM), nuclear magnetic resonance (NMR), thermogravimetric analysis (TGA) and universal testing machine (UTM). The results of the SEM image analysis confirmed that the morphology of PA66 nanofibers was not altered by electron beam. The amount of TAC in PA66 nanofiber with TAC was identified by $^1H-NMR$ analysis. The degradation temperature of PA66 nanofibers with TAC at an absorbed dose of 20~100 kGy was higher than the irradiated PA66 nanofiber without TAC. On the other hand, the decreasing rate of modulus of irradiated PA66 nanofibers with TAC was less than PA66 nanofibers.

• 방사선산업학회지
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• 제9권2호
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• pp.57-62
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• 2015

In this study, we fabricated effect of storage conditions on graft of polypropylene (PP) non-woven fabric induced by electron beam. The electron beam irradiations on PP non-woven fabric were carried out over a range of irradiation doses from 25 to 100 kGy to make free radicals on fabric surface. The radical measurement was established by electron spin resonance (ESR) for confirming the changes of the alkyl radical and peroxy radical according to effect of storage time, storage temperature and atmosphere. It was observed that the free radicals were increased with irradiation dose and decreased with storage time due to the continuous oxidation. However, the radical extinction was significantly delayed due to reduced mobility of radicals at extremely low temperature. The degree of graft based on the analysis of ESR was investigated. The conditions of graft reaction were set at a temperature: $60^{\circ}C$, reaction time: 6 hours and styrene monomer concentration: 20 wt%.

• 한국레이저가공학회지
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• 제17권3호
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• pp.19-23
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• 2014

To directly engrave circuit-line patterns as wide as $6{\mu}m$ in a buildup film to be used as an IC substrate, we applied a projection ablation technique in which an 8 inch dielectric ($ZrO_2/SiO_2$) mask, a DPSS 355nm laser instead of an excimer laser, a ${\pi}$-shaper and a galvo scanner are used. With the ${\pi}$-shaper and a square aperture, the Gaussian beam from the laser is shaped into a square flap-top beam. The galvo scanner before the $f-{\theta}$ lens moves the flat-top beam ($115{\mu}m{\times}105{\mu}m$) across the 8 inch dielectric mask whose patterned area is $120mm{\times}120mm$. Based on the results of the previous research by the authors, the projection ratio was set at 3:1. Experiments showed that the average width and depth of the engraved patterns are $5.41{\mu}m$ and $7.30{\mu}m$, respectively.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권2호
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• pp.1380-1383
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• 2007

The secondary electron emission coefficient (${\gamma}$) of the cathode is an important factor for improving the discharge characteristics of AC-PDP, because of its close relationship to discharge voltage. In this experiment, we have investigated the electronic structure of the energy band in the MgO layer responsible for the high ${\gamma}$. We used three kinds of MgO pellet that have another component, and each MgO layers have been deposited by electron beam evaporation method. The work-functions of MgO layer have been investigated from their ion-induced secondary electron emission coefficient (${\gamma}$), respectively, using various ions with different ionization energies in a ${\gamma}-FIB$ (Focused Ion Beam) system. We have compared work-function with ${\gamma}-FIB$ system current signal for measurement defect energy level in MgO layer. MgO-A in the three types has lowest work-function value (4.12eV) and there are two defect energy levels.

• 한국광학회지
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• 제13권3호
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• pp.209-214
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• 2002

기판의 표면거칠기가 반사경의 산란에 미치는 영향을 조사하였다. 기판의 표면거칠기가 다른 다섯 종류의 기판에 이온빔 스퍼터링 방법과 전자총 증착 방법으로 각각 반사율이 1에 가까운 고반사율 박막을 증착하고 산란을 TIS 방법으로 측정하였다. 기판의 표면거칠기가 2$\AA$ 이상인 경우의 기판의 산란에 대한 반사경 산란 비율은 표면거칠기가 2$\AA$ 미만인 경우의 산란 비율에 비하여 급격한 증가를 나타냄을 알 수 있었으며, 기판의 표면거칠기가 낮은 경우 반사경의 산란은 기판의 표면거칠기보다 반사경을 구성하는 박막의 미세구조에 의존하는 것으로 판단되었다. 한편 반사경 중에서 가장 작은 산란은 2.1 ppm이었고, 이것은 표면거칠기 0.23$\AA$인 기판에 이온빔 스퍼터링 방법으로 제작되었다.

• Carbon letters
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• 제15권2호
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• pp.129-135
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• 2014

Spinnable pitch for melt-electrospinning was obtained from pyrolized fuel oil by electron beam (E-beam) radiation treatment. The modified pitch was characterized by measuring its elemental composition, softening point, viscosity, molecular weight, and spinnability. The softening point and viscosity properties of the modified pitch were influenced by reforming types (heat or E-beam radiation treatment) and the use of a catalyst. The softening point and molecular weight were increased in proportion to absorbed doses of E-beam radiation and added $AlCl_3$ due to the formation of pitch by free radical polymerization. The range of the molecular weight distribution of the modified pitch becomes narrow with better spinning owing to the generated aromatic compounds with similar molecular weight. The diameter of melt-electrospun pitch fibers under applied power of 20 kV decreased 53% ($4.7{\pm}0.9{\mu}m$) compared to that of melt-spun pitch fibers ($10.2{\pm}2.8{\mu}m$). It is found that E-beam treatment for reforming could be a promising method in terms of time-savings and cost-effectiveness, and the melt-electrospinning method is suitable for the preparation of thinner fibers than those obtained with the conventional melt-spinning method.