Analysis of Electron Energy Distribution Function and Transport Characteristic in SiH$_4$ Gas Plasma by MCS-BE Method
(MCS-BE법을 이용한 SiH$_4$ 가스 프라즈마중의 전자에너지분포함수와 수송특성해석)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 1997.04a
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- pp.154-159
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- 1997