• Title/Summary/Keyword: Electron swarm parameters

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Analysis of Electron Energy Distribution Function and Transport Characteristic in SiH$_4$ Gas Plasma by MCS-BE Method (MCS-BE법을 이용한 SiH$_4$가스 프라즈마중의 전자에너지분포함수와 수송특성해석)

  • 이형윤;하성철;유회영;김상남;임상원;문기석
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1997.04a
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    • pp.154-159
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    • 1997
  • This paper describes the electron transport characteristic in SiH$_4$ gas calculated for range of E/N values from 0.5~300(Td) by the Monte Calro simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters are obtained for TOF method. The results gained that the value of an electron swarm parameter such as the electron drift velocity, the electron ionization coefficients longitudinal and transverse diffusion coefficients, characteristics energy agree with thee experimental and theoretical for a range of E/N. The electron energy distributions function were analysed in monosilane at EN : 30, 50(Td) for a case of equilibrium region in the mean electron energy. The validity of the results obtained has been confirmed by a TOF method.

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A Study on the electron energy diffusion function of the sulphur hexaflouride (SF_6 가스의 전자에너지 분포함수에 관한 연구)

  • ;金相南
    • The Proceedings of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.13 no.2
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    • pp.227-227
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    • 1999
  • The electron energy distributions function were analysed in sulphur hexaflouride at E/N : 500~800(Td) for a case of non-equilibrium region in the mean electron energy. This paper describes the electron transport characteristics in $SF_6$ gas calculated for range of E/N values from 150~800(Td) by the Monte Carlo simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters. The results gained that the value of ane1ctron swarm parameter such as the e1ectron drift velocity, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients agree with the experimental and theoretical for a range of E/N. The properties of electron avalanches in an electron energy non-equilibrium region.

Simulation Technique for the Gas Discharges

  • Paek, Yong-Hyun;Lee, Bok-Heui
    • Proceedings of the KIEE Conference
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    • 1988.11a
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    • pp.263-265
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    • 1988
  • The electron swarm drift velocity for nitrogen gas is calculated in the range of 4 - 240 [Td] (1 Td = $10^{-17}V{\cdot}cm^2$). The result is in good agreement with the data measured by the time-of-flight method in the previous study. Also, an accurate and efficient method for solving the electron swarm parameters in gases is described.

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Analysis of electron swarm parameter in CH$_4$ gas (CH$_4$가스중에서의 전자군 파라미터의 해석)

  • 문기석;서상현;송병두;하성철;유회영;김상남
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1997.11a
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    • pp.167-172
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    • 1997
  • The electron swarm parameters and Energy distribution function have been calculated for electrons motion through CH$_4$ pure gas under the action of uniform electric field for 0.1$\leq$E/N(Td)$\leq$300, at the 300( $^{\circ}$K), using MCS method and Boltzmann transport equation. And then the resulting values of electron drift velocity were compared to experimental data and adjustment made in assumed cross sections until good agreement was obtained. The electron drift velocity is very useful in the fields of study relating to the conductive and dielectric phenomena of gas medium. The electron energy distribution in gas discharge are generally nonmaxwellian , and must be calculated by a numerical solution of the Boltzmann equation which takes in the elastic and inelastic collisions. To analyze the physical phenomena and properties (or electron swarm motion in a gas under the influence of an electric field, the energy distribution function of electrons and the theoretical deriveration of the electron drift velocity are calculated by the Backward Prolongation with respect to the Boltzmann transport equation as a parameter of E/N(Td).

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A Study on the Improvement of the Electron Transport Properties in $SF_{6+}Ar$ Mixtures Gas ($SF_{6+}Ar$혼합기체의 전자수송특성 개선에 관한 연구)

  • 하성철;김상남;유회영;서상현;임상원;전병훈
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.11 no.1
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    • pp.67-73
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    • 1998
  • In this paper, the electron swarm parameters in the 0.5% and 0.2% SF\ulcorner+Ar mixtures are measured by time of flight method over the E/N(Td) range from 30 to 300(Td). The measurements have been carried out by the double shutter drift tube with variable drift distance from the cathod. A two-term approximation of the boltzmann equation analysis and Monte Carlo simulation have been also used to study electron transport coefficients. We have calculated W, $ND_L,\;ND_T,\;\alpha,\;\eta,\;\alpha-\eta$, and the limiting breakdown electric field to gas mixtures ratio in pure $SF_6$+Ar mixtures. The electron energy distribution function has been analysed in $SF_6$+Ar mixtures at E/N : 200(Td) for a case of the equilibrium region in the mean electron energy. The measured results and the calculated results have been compared each other.

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Electron Swarm Drift Velocity and Characteristic Energy in e$^{[-10]}$ -CF$_4$Scattering (e ̄-CF$_4$산란의 전자이동속도 및 특성에너지 연구)

  • 임상원;유회영;김상남;하성철
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1996.11a
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    • pp.169-174
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    • 1996
  • In this paper, the electron transport characteristic in CF$_4$has been analysed over the E/N range 1~300(Td) by a two-term approximation Boltzmann equation method and by a Monte Carlo simulation. The alteration of cross sections from the literature is avoided as much as possible in the analysis. The motion has been calculated to give swarm parameters for the electron drift velocity(W), diffusion coefficient(D$_{L}$), the ratio of the diffusion coefficient to the mobility(D$_{L}$/$\mu$), mean energy($\varepsilon$), the electron energy distribution function. The electron energy distribution function has been analysed in CF$_4$at E/N=50, 100 and 200(Td) for a case of the equilibrium region in the mean electron energy. The results of Boltzmann equation and Monte Carlo simulation have been compared with experimental data by Y. Nakamura and M. Hayashi.shi.

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Analysis of Electron Transport Coefficients in Low Voltage Air Circuit Breaker Using MCS and BE (몬테칼로 시뮬레이션과 볼츠만 방정식을 이용한 저전압 기중차단기의 전자수송계수 특성파악)

  • 하성철;서상현
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.2
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    • pp.168-172
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    • 2003
  • The electron transport coefficients in Air is analysed in range of E/Nvalues from 100~1000(Td) by a MCS and BE method. This paper have calculated W, ND$\sub$L/, ND$\sub$T/, Mean energy mixtures by N$_2$+O$_2$. The results gained that the values of the electron swarm parameters such as the electron drift velocity, longitudinal and transverse diffusion coefficients.

Characteristics of Electron Transport in $SiH_4$ Gas used by MCS-BEq Algorithm (MCS-BEq 알고리즘에 의한 $SiH_4$ 기체의 전자수송특성)

  • Kim, Sang-Nam;Seong, Nak-Jin
    • Proceedings of the KIEE Conference
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    • 2006.10b
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    • pp.159-162
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    • 2006
  • In this paper energy distribution function in $SiH_4$ has been analysed over the E/N range 0.5${\sim}$300Td and Pressure value 0.5, 1.0, 2.5 Torr by a two-term approximation Boltzmann equation method and by a Monte Carlo simulation. The motion has been calculated to give swarm parameters for the electron drift velocity, diffusion coefficient, electron ionization, mean energy and the electron energy distribution function. The electron energy distribution function has been analysed in $SiH_4$ at E/N=30, 50Td for a case of the equilibrium region in the mean electron energy and respective set of electron collision cross sections. The results show that the deduced electron drift velocities, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients and mean energy agree reasonably well with theoretical for a rang of E/N values.

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The Analysis of Electron Transport Characteristics in $SiH_4$ Plasma ($SiH_4$ 플라즈마중의 전자수송특성 해석)

  • Lee, Hyoung-Yoon;Ha, Sung-Chul;Kim, Dae-Yeon
    • Proceedings of the KIEE Conference
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    • 1998.11c
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    • pp.925-928
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    • 1998
  • In this paper, the electron transport characteristics in $SiH_4$ has been analysed over the E/N range $0.5{\sim}300[Td]$ and Pressure value 0.5, 1, 2.5 [Torr] by a two-term approximation Boltzmann equation method and by a Monte Carlo simulation. The motion has been calculated to give swarm parameters for the electron drift velocity. diffusion coefficient, electron ionization, mean energy and the electron energy distribution function. The electron energy distribution function has been analysed in $SiH_4$ at E/N=30, 50[Td] for a case of the equilibrium region in the mean electron energy and respective set of electron collision cross sections. The results of Boltzmann equation and Monte carlo simulation have been compared with experimental data by Pollock, Ohmori, cottrell and Walker.

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Electron Transport Characteristics in $SiH_4$ by MCS-BEq (MCS-BEq에 의한 $SiH_4$ 전자수송특성(電子輸送特性))

  • Seong, Nak-Jin;Kim, Sang-Nam
    • Proceedings of the KIEE Conference
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    • 2005.10a
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    • pp.97-100
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    • 2005
  • This paper describes the electron transport characteristics in SiH4 has been analysed over the E/N range 0.5${\sim}$300[Td] and Pressure value 0.5, 1, 2.5 [Torr] by a two-term approximation Boltzmann equation method and by a Monte Carlo simulation. The motion has been calculated to give swarm parameters for the electron drift velocity, diffusion coefficient, electron ionization, mean energy and the electron energy distribution function. The electron energy distribution function has been analysed in $SiH_4$ at E/N=30, 50[Td] for a case of the equilibrium region in the mean electron energy and respective set of electron collision cross sections. The results of Boltzmann equation and Monte carlo simulation have been compared with experimental data by Pollock, Ohmori, cottrell and Walker.

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