• Title/Summary/Keyword: Electron probe micro-analyzer

검색결과 69건 처리시간 0.026초

RF 마그네트론 스퍼터링법에 의해 증착된 SrBi$_2$$Nb_2$>$O_9$ 박막의 전기적 특성에 관한 연구 (Electrical Properties of SrBi$_2$$Nb_2$>$O_9$ Thin Films deposited by RF Magnetron Sputtering Method)

  • 조금석;최훈상;이관;최인훈
    • 한국재료학회지
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    • 제11권4호
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    • pp.290-293
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    • 2001
  • 세라믹 타겟인 Sr$_2$Nb$_2$O$_{7}$ (SNO)과 Bi$_2$O$_3$을 장착한 RF-마그네트론 스퍼터링을 이용하여 SrBi$_2$Nb$_2$O$_{9}$ (SBN) 박막을 p-type Si(100) 기판 위에 증착하였다. 증착시 두 타겟의 파워비를 조절하여 조성의 변화에 따른 SBN 박막의 구조적 및 전기적 특성을 조사하였다. 증착된 SBN 박막은 $700^{\circ}C$의 산소분위기에서 1시간 동안 열처리를 하였으며 상부전극으로 Pt를 증착한 후 산소분위기에서 30분 동안 $700^{\circ}C$에서 전극 후열처리를 실시하였다. 증착된 SBN 박막은 $700^{\circ}C$ 열터리 후에 페로브스카이트 상을 나타냈으며 SNO 타겟과 Bi$_2$O$_3$타겟의 파워가 120 W/100 W 일 때 가장 좋은 전기적 특성을 나타내었다. 이때의 조성은 EPMA(Electron Probe X-ray Micro Analyzer) 분석을 통하여 확인하였으며 Sr:Bi:Nb의 비가 약 1:3:2임을 나타내었다. 이러한 과잉의 Bi조성을 가진 SBN 박막은 3-9 V의 인가전압에서 1.8 V-6.3 V의 우수한 메모리 윈도우 값을 나타내었으며 누설전류 값은 인가전압 5 V에서 1.54$\times$$10^{-7}$ A/$\textrm{cm}^2$였다.

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Thermoelectric characteristics depend on compositions of $Bi_2Te_3$ in mixed alloy with PbTe

  • Jung, Kyoo-Ho;Yim, Ju-Hyuk;Kim, Jin-Sang
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 춘계학술회의 초록집
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    • pp.11-11
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    • 2010
  • In order to design for nano structured materials with enhanced thermoelectric properties, the alloys in the pseudo-binary $Bi_2Te_3$-PbTe system were investigated for their micro structure and thermal properties. For this synthesis the liquid alloys were cooled by water quenching method. The micro structure images were taken by using electron probe micro analyzer (EPMA). Dendritic and lamellar structures were clearly observed with the variation in the composition ratio between $Bi_2Te_3$ and PbTe. It was confirmed that a metastable compounds is $PbBi_2Te_4$ in the The $Bi_2Te_3$-PbTe system. The change in the composition increasing $Bi_2Te_3$ ratio causes to change structure from dendritic to lamellar. Seebeck coefficient of alloys 5 which the mixture rate of $Bi_2Te_3$ is 83% was measured as the highest value. In contrast, the others decreased by increasing $Bi_2Te_3$. n-type characteristics was observed at all condition except alloy 6 which $Bi_2Te_3$ ration is 91%. The power factors of all samples were calculated with Seebeck coefficient and resistivity. Also the thermal conductivity was measured by using laser flash analyzer (LFA). In this work, the microstructures and thermal properties have been measured as a function of ratio of $Bi_2Te_3$ in the $Bi_2Te_3$-PbTe system.

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GaAs Thin Films Grown on Conducting Glass by Hot Wall Epitaxy for Solar Cell

  • Tu, Jielei;Chen, Tingjin;Zhang, Chenjing;Shi, Zhaoshun;Wu, Changshu
    • Journal of Korean Vacuum Science & Technology
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    • 제6권2호
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    • pp.71-75
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    • 2002
  • GaAs polycrystalline thin films with good performance were prepared on conducting glass by hot wall epitaxy (HWE), which were used for solar cell. Electron probe micro-analyzer (EPMA) was applied for the composition, morphology of surface and cross-section of grown films, and X-ray diffraction (XRD) for their phase structure; Raman scattering spectum (RSS) and photoluminescence (PL) were used for evaluating their optical characteristics. The results show that, there is textured structure on the surface of grown GaAs polycrystalline films, which is greatly promised to be suitable for the candidate of solar cell with low cost and high efficiency. It is concluded that the source and substrate at temperature of 900 ~ 930 $\^{C}$ and 500 $\^{C}$ respectively would be beneficial for such films.

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EPMA를 이용한 증기발생기 내부 침적물 분석 (The analysis of the deposit on inner steam generator by EPMA)

  • 유병옥;정양홍;김도식;백승제;김기하;주용선;박남홍;이종헌
    • 한국방사성폐기물학회:학술대회논문집
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    • 한국방사성폐기물학회 2004년도 학술논문집
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    • pp.230-231
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    • 2004
  • 경수로형 원자로의 증기 발생기 내부에 방사화 된 침적물을 smear paper로 시료를 채취한여 핵종 분석 및 화학조성을 분석하였다. 상용발전소의 증기 발생기 외부에서 발견된 고 준위 방사성물질의 화학 조성 분석은 극미세 성분분석기(EPMA)를 이용하였다. 본 시험에 사용한 EPMA(Electron Probe Micro Analyzer, SX-50R, CAMECA, Paris, France)는 고 방사능을 띤 조사 핵연료 및 재료 시험을 수행할 수 있도록 기기의 시편 stage 주위를 납과 텅스텐으로 차폐하여 시편의 방사능 세기가 $3.7{\times}10^{10}$ Bq까지 시험 가능한 기기이다.(중략)

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세공구조 화상분석 및 수치해석에 의한 폴리머시멘트의 수화반응 및 막형성 프로세스 고찰 (A Case Study on Visualization and Quantification for Microstructure of Polymer-Modified Cement Waterproofing Membrane)

  • 미야우치 히로유키;김규용;이의배;남정수;구경모;이태규
    • 한국콘크리트학회:학술대회논문집
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    • 한국콘크리트학회 2010년도 춘계 학술대회 제22권1호
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    • pp.353-354
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    • 2010
  • 폴리머시멘트의 재료물성에 미치는 세공구조의 영향을 평가하기 위해 EPMA에 의한 원소분석과 본 연구에서 개발한 폴리머시멘트의 수화반응 및 막형성 프로세스의 시뮬레이션을 이용하여 검토하였다.

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AZ61 filler wire를 사용하여 Nd:YAG Laser 용접한 AZ31-H24합금의 미세조직과 기계적 특성 (Microstructure and mechanical properties of Nd:YAG Laser welded AZ31-H24 Magnesium alloy using AZ61 filler metal)

  • 류충선;이목영;방국수;장웅성
    • 대한용접접합학회:학술대회논문집
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    • 대한용접접합학회 2007년 추계학술발표대회 개요집
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    • pp.322-324
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    • 2007
  • Nd:YAG laser welding of AZ31B-H24 magnesium alloy was carried out using AZ61 filler wire(Mg-6wt%Al-1wt%Zn). Microstructure and mechanical properties of welded joint were examined by optical microscopy, scanning electronic microscopy(SEM), energy dispersive spectroscopy(EDS), electron probe micro analyzer(EPMA) and victors hardness, tensile test at the room and elevated temperature. Test results indicate that the specimens welded with AZ61 filler wire have better tensile strength, elongation and victors hardness at room temperature than those of welded without filler wire. However tensile strength are similar but elongation are quite different at elevated temperature.

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EFFECT OF METAL CONTACT ON THE CZT DETECTOR PERFORMANCE

  • Park, Se-Hwan;Park, Hyung-Sik;Lee, Jae-Hyung;Kin, Han-Soo;Ha, Jang-Ho
    • Journal of Radiation Protection and Research
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    • 제34권2호
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    • pp.65-68
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    • 2009
  • Metal-semiconductor contact is very important for the operating property of semiconductor detector. $Cd_{0.96}$ $Zn_{0.04}$ Te semiconductor crystal was grown with Bridgman method, and the crystal was cut and polished. EPMA (Electron Probe Micro Analyzer) and ICP-MS (Inductively Coupled Plasma Mass Spectrometry) analysis were done to obtain the chemical composition and impurity of the crystal. Metal contact was deposited with thermal evaporator on both sides of the crystal. Detectors with Au/CZT/Au and In/CZT/Au structure were made, and I-V curve and the energy spectrum were measured with the detectors. It could be seen that the detector with the In/CZT/Au structure has superior property than the detector with Au/CZT/Au structure when the crystal resistivity was low. However, the metal contact structure effect becomes low when the crystal resistivity was high.

아르곤 이온 레이저를 이용한 CU의 직접 쓰기 기술 (Laser dissect writing from copper(II) formate using Ar+ laser)

  • 이홍규;이천
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 하계학술대회 논문집
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    • pp.663-666
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    • 2000
  • Laser direct writing of micro-patterned copper lines has been achieved by pyrolytic decomposition of copper formate films (Cu(HCOO)$_2$$.$4H$_2$O), as a precursor, using a focused Ar$\^$+/ laser beam ($\lambda$= 514 nm) on PCB boards and glass substrates. The linewidth and thickness of the lines were investigated as a function of laser power and scan speed. The profiles of the lines were measured by scanning electron microscope (SEM), surface profiler (${\alpha}$-step) and atomic force microscopy (AFM). The electrical resistivities of the patterned lines were also investigated as a function of laser parameter using probe station and semiconductor analyzer. we compared resistivities of the patterned lines with that of the Cu bulk, respectively.

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스테인리스강 솔리드와이어를 이용한 구조용 강재의 레이저-GMA 하이브리드 용접에서 크롬 분포의 해석적 분석 (Numerical Analysis of Chromium Distributions in Laser-Arc Hybrid Welding of Structural Steel Using Stainless Steel Solid Wire)

  • 조원익;나석주;조민현;이종섭
    • 대한용접접합학회:학술대회논문집
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    • 대한용접접합학회 2009년 추계학술발표대회
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    • pp.110-110
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    • 2009
  • 본 연구에서는 전산유체역학적 방법을 이용하여 레이저-GMA 하이브리드 용접에서 용융풀 거동에 대한 3차원 과도해석을 수행하였다. 철강재의 주요 합금원소 중 하나인 크롬의 용융풀에서의 거동을 구현하기 위해 크롬에 대해 추가적인 보전 방정식을 도입하였다. 이를 이용하여 합금원소 분포에 대한 용접 변수별 영향을 해석적으로 분석하였으며 이를 EPMA(Electron Probe Micro Analyzer)를 통해 분석한 시험결과와도 비교하였다. 결과적으로 용접변수 중 선행 조건이 합금원소 분포에 구별할만한 영향을 미침을 알 수 있었고 이는 용융풀의 거동을 지배하는 주요 유동 패턴의 상이함에 기인한 것으로 보여진다.

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무전해 도금법에 의한 전자파 차단 의류소재의 제조 (Preparation of Electromagnetic Wave Shielding Fabrics by Electroless Plating)

  • 김수미;송화순
    • 한국의류학회지
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    • 제29권1호
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    • pp.149-156
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    • 2005
  • The purpose of this study was to produce the high quality of electromagnetic wave shielding fabrics. In this study, we have produced polyester fabrics by electroless Ag plating. The untreated polyester was etched with $4\%$ NaOH solution added accelerant(Benzyl Dimethyl Dodecyl Ammonium Chloride) then it was catalyzed by $SnCl_2$ solution and activated by $PdCl_2$ solution. Electroless Ag plating was carried out by changing conditions such as temperature. time, weight loss rate of polyester and kind of reducing agents. The electromagnetic wave shielding effectiveness of polyester fabric by electroless Ag plating was measured by RF Impedance Analyzer and element of electromagnetic wave shielding substance was measured using Electron probe micro analyzer. The results were as follows; The plating bath using potassium sodium tartrate by reducing agent was excellent electromagnetic wave shielding effectiveness. Element of electromagnetic wave shielding substance was silver. Electromagnetic wave shielding effectiveness was shown over 64dB at the temperature of $40^{\circ}C$, treating time 30min., weight loss rate $20\%$.