• 제목/요약/키워드: Electron energy loss spectroscopy

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Surface Defects States on a SiO2/Si Observed by REELS

  • Kim, Juhwan;Kim, Beomsik;Park, Soojeong;Park, Chanae;Denny, Yus Rama;Seo, Soonjoo;Chae, Hong Chol;Kang, Hee Jae
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.271-271
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    • 2013
  • The defect states of a Ar-sputtered SiO2 surface on Si (001) were investigated using Auger electron spectroscopy (AES) and reflection electron energy loss spectroscopy (REELS). The REELS spectra at the primary electron energy of 500 eV showedthat three peaks at 2.5, 5.1, and 7.2 eV were found within the band gap after sputtering. These peaks do not appear at the primary electron energies of 1,000 and 1,500 eV, which means that the defect states are located at the extreme surface of a SiO2/Si thin film. According to the calculations, two peaks at 7.2 and 5.1 eV are related to neutral oxygen vacancies. However, the third peak at 2.5 eV has never been previously reported and the theories proposed that this defect state may be due to Si-Si bonding. Our Auger data showed that a peak for Si-Si bonding at 89 eV appears after Ar ion sputtering on the surface of the sample, which is consistent with the theoretical models.

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Introduction to the standard reference data of electron energy loss spectra and their database: eel.geri.re.kr

  • Jeong Eun Chae;Ji-Soo Kim;Sang-Yeol Nam;Min Su Kim;Jucheol Park
    • Applied Microscopy
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    • 제50권
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    • pp.2.1-2.7
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    • 2020
  • Electron energy loss spectroscopy (EELS) is an analytical technique that can provide the structural, physical and chemical information of materials. The EELS spectra can be obtained by combining with TEM at sub-nanometer spatial resolution. However, EELS spectral information can't be obtained easily because in order to interpret EELS spectra, we need to refer to and/or compare many reference data with each other. And in addition to that, we should consider the different experimental variables used to produce each data. Therefore, reliable and easily interpretable EELS standard reference data are needed. Our Electron Energy Loss Data Center (EELDC) has been designated as National Standard Electron Energy Loss Data Center No. 34 to develop EELS standard reference (SR) data and to play a role in dissemination and diffusion of the SR data to users. EELDC has developed and collected EEL SR data for the materials required by major industries and has a total of 82 EEL SR data. Also, we have created an online platform that provides a one-stop-place to help users interpret quickly EELS spectra and get various spectral information. In this paper, we introduce EEL SR data, the homepage of EELDC and how to use them.

Analysis of BNNT(Boron Nitride Nano Tube) synthesis by using Ar/N2/H2 60KW RF ICP plasma in the difference of working pressure and H2 flow rate

  • Cho, I Hyun;Yoo, Hee Il;Kim, Ho Seok;Moon, Se Youn;Cho, Hyun Jin;Kim, Myung Jong
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.179-179
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    • 2016
  • A radio-frequency (RF) Inductively Coupled Plasma (ICP) torch system was used for boron-nitride nano-tube (BNNT) synthesis. Because of electrodeless plasma generation, no electrode pollution and effective heating transfer during nano-material synthesis can be realized. For stable plasma generation, argon and nitrogen gases were injected with 60 kW grid power in the difference pressure from 200 Torr to 630 Torr. Varying hydrogen gas flow rate from 0 to 20 slpm, the electrical and optical plasma properties were investigated. Through the spectroscopic analysis of atomic argon line, hydrogen line and nitrogen molecular band, we investigated the plasma electron excitation temperature, gas temperature and electron density. Based on the plasma characterization, we performed the synthesis of BNNT by inserting 0.5~1 um hexagonal-boron nitride (h-BN) powder into the plasma. We analysis the structure characterization of BNNT by SEM (Scanning Electron Microscopy) and TEM (Transmission Electron Microscopy), also grasp the ingredient of BNNT by EELS (Electron Energy Loss Spectroscopy) and Raman spectroscopy. We treated bundles of BNNT with the atmospheric pressure plasma, so that we grow the surface morphology in the water attachment of BNNT. We reduce the advancing contact angle to purity bundles of BNNT.

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전계방출 투과전자현미경 분석기술을 이용한 Cu 입자 표면산화층의 정밀평가 (Precise Analysis of the Surface Oxidation Layer on Cu Powders Using FE-TEM Techniques)

  • 이태훈;유정호;현문섭;양준모;성미린;권진형;이선영;김정선;백경호
    • 대한금속재료학회지
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    • 제48권1호
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    • pp.57-61
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    • 2010
  • Nanosized surface structures of Cu powders were investigated at the atomic scale by field-emission transmission electron microscope techniques. The nanoscale surface oxide layer on the Cu powder was analyzed to be the $CU_2O$ phase by electron diffraction pattern and electron energy-loss spectroscopy. In addition, it was found from high-resolution transmission electron microscopy study that there are formed no surface oxide layers on the surface of alkanethiol coated Cu powders.

주사 투과 전자현미경을 활용한 음극형광 분석법 (Introduction to Cathodoluminescence Spectroscopy Using Scanning Transmission Electron Microscopy)

  • 김성대
    • 한국전기전자재료학회논문지
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    • 제36권4호
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    • pp.326-331
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    • 2023
  • The utilization of scanning transmission electron microscopy (STEM) in conjunction with cathodoluminescence (CL) has emerged as a valuable tool for the investigation of material optical properties. In recent years, this technique has facilitated significant advancements in the fields of plasmonics and quantum emitters by surpassing prior technical restrictions. The review commences by providing an outline of the diverse STEM-CL operating modes and technical aspects of the instrumentation. The review explains the fundamental physics of light production under electron beam irradiation and the physical basis for interpreting STEM-CL experiments for different types of excitations. Additionally, the review compares STEM-CL to other related techniques such as scanning electron microscope CL, photoluminescence, and electron energy-loss spectroscopy.

The Preparation of Alumina Particles Wrapped in Few-layer Graphene Sheets and Their Application to Dye-sensitized Solar Cells

  • Ahn, Kwang-Soon;Seo, Sang-Won;Park, Jeong-Hyun;Min, Bong-Ki;Jung, Woo-Sik
    • Bulletin of the Korean Chemical Society
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    • 제32권5호
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    • pp.1579-1582
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    • 2011
  • Alumina particles wrapped in few-layer graphene sheets were prepared by calcining aluminum nitride powders under a mixed gas flow of carbon monoxide and argon. The graphene sheets were characterized by powder X-ray diffraction (XRD), Raman spectroscopy, electron energy loss spectroscopy, and high-resolution transmission electron microscopy. The few-layer graphene sheets, which wrapped around the alumina particles, did not exhibit any diffraction peaks in the XRD patterns but did show three characteristic bands (D, G, and 2D bands) in the Raman spectra. The dye-sensitized solar cell (DSSC) with the alumina particles wrapped in few-layer graphene sheets exhibited significantly improved overall energy-conversion efficiency, compared to conventional DSSC, due to longer electron lifetime.

전자에너지 손실분광 분석법을 이용한 광물에서의 정량적 철 산화수 측정과 분석 (Electron Energy Loss Spectroscopy (EELS) Application to Mineral Formation)

  • 양기호;김진욱
    • 한국광물학회지
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    • 제29권2호
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    • pp.73-78
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    • 2016
  • 점토 광물의 구조 내에 들어 있는 철의 산화수는 퇴적환경의 산화/환원 조건에 대한 정보를 제공하여 준다. 이러한 광물형성의 메커니즘을 밝히기 위해서는 고해상도를 가진 전자현미경을 이용한 나노 스케일 분석이 불가피하다. 투과전자현미경에 장착되어있는 전자에너지 손실분광 분석법(EELS)을 이용하여 정량적 철 산화수 분석을 논트로나이트 점토광물 구조 내 철의 환원으로 인한 K-논트로나이트의 형성의 예를 들어 설명하고자 한다. 철 산화/환원의 정량적 분석을 통하여 퇴적물의 위치에 따른 철 산화도 측정은 광물변화에 대한 연구를 용이하게 해준다. 따라서 본 논문은 전자에너지 손실분광의 분석방법 및 장점을 소개함을 목적으로 한다.

생지구화학적 광물변이작용 연구에서 전자에너지 손실 분광 분석 - 스펙트럼 영상법의 활용 (Application of Electron Energy Loss Spectroscopy - Spectrum Imaging (EELS-SI) for Microbe-mineral Interaction)

  • 양기호;박한범;김진욱
    • 한국광물학회지
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    • 제32권1호
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    • pp.63-69
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    • 2019
  • 광물 구조에 분포하는 철의 산화수 정보는 유 무기적 퇴적광물형성 시 산화환원 조건 등 과거 퇴적 환경에 대한 정보를 제공한다. 특히, 생광물화작용에서 미생물의 역할을 규명하기 위해서는 고분해능 투과 전자현미경(HRTEM) 및 전자에너지 손실 분광기(EELS)를 활용한 나노스케일 분석이 필요하다. HRTEM-EELS를 이용한 광물구조 내 철의 산화수 및 탄소 결합 구조 분석, Fe(II)/Fe(III) 및 탄소 기원 분포영상으로부터 광물생성의 생물학적 요소를 판별할 수 있다. 이와 같은 나노스케일 분석을 통하여 지질미생물학자들은 미생물-광물작용의 증거를 직접적으로 얻을 수 있다.

Electronic and Optical Properties of amorphous and crystalline Tantalum Oxide Thin Films on Si (100)

  • Kim, K.R.;Tahir, D.;Seul, Son-Lee;Choi, E.H.;Oh, S.K.;Kang, H.J.;Yang, D.S.;Heo, S.;Park, J.C.;Chung, J.G.;Lee, J.C.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.382-382
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    • 2010
  • $TaO_2$ thin films as gate dielectrics have been proposed to overcome the problems of tunneling current and degradation mobility in achieving a thin equivalent oxide thickness. An extremely thin $SiO_2$ layer is used in order to separate the carrier in MOSFETchannel from the dielectric field fluctuation caused by phonons in the dielectric which decreases the carrier mobility. The electronic and optical properties influenced the device performance to a great extent. The atomic structure of amorphous and crystalline Tantalum oxide ($TaO_2$) gate dielectrics thin film on Si (100) were grown by utilizing atomic layer deposition method was examined using Ta-K edge x-ray absorption spectroscopy. By using X-ray photoelectron spectroscopy and reflection electron energy loss spectroscopy (REELS) the electronic and optical properties was obtained. In this study, the band gap (3.400.1 eV) and the optical properties of $TaO_2$ thin films were obtained from the experimental inelastic scattering cross section of reflection electron energy loss spectroscopy (REELS) spectra. EXAFS spectra show that the ordered bonding of Ta-Ta for c-$TaO_2$ which is not for c-$TaO_2$ thin film. The optical properties' e.g., index refractive (n), extinction coefficient (k) and dielectric function ($\varepsilon$) were obtained from REELS spectra by using QUEELS-$\varepsilon$(k, $\omega$)-REELS software shows good agreement with other results. The energy-dependent behaviors of reflection, absorption or transparency in $TaO_2$ thin films also have been determined from the optical properties.

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