• 제목/요약/키워드: Electron diffusion

검색결과 629건 처리시간 0.029초

나노 스케일 확산 공정 모사를 위한 동력학적 몬테칼로 소개 (An Introduction to Kinetic Monte Carlo Methods for Nano-scale Diffusion Process Modeling)

  • 황치옥;서지현;권오섭;김기동;원태영
    • 대한전자공학회논문지SD
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    • 제41권6호
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    • pp.25-31
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    • 2004
  • 본 논문에서는 나노 스케일 확산 공정 모사를 위한 방법으로 동력학적 몬테칼로(kinetic Monte Carlo)를 소개하고자 한다. 먼저 동력학적 몬테칼로의 이론과 배경을 살펴보고 실제적인 이해를 돕기 위하여 실리콘 기판에 이온(전자) 주입 후 열처리과정에서 일어나는 점결함의 확산을 동력학적 몬테칼로를 이용하여 모사하는 간단한 예를 보여주고 있다. 동력학적 몬테칼로는 몬테칼로의 일종이지만 기존의 몬테칼로에서 구현하지 못하였던 물리적인 시간을 포아송 확률 과정을 통하여 구현하였다. 동력학적 몬테칼로 확산 공정 모사에서는 연속 확산 미분 방정식의 해를 구하는 기존의 유한 요소 수치 해석적 방법과 달리원자 상호간 혹은 원자와 결함 또는 결함들 간의 화학적 반응과 입자들의 확산 과정을 포아송 확률 과정에 따라 일어나는 화학적 반응, 입자들의 확산 사건의 연속으로 본다. 사건마다 고유의 사건 발생 확률을 갖고 이 사건 발생 확률에 따라 일어나는 확률적 사건의 연속적 발생으로 실제의 반도체 확산 공정을 시간에 따라 직접적으로 모사할 수 있다. 입자들 간의 화학적 반응 사건 확률과 입자들의 확산 공정에 필요한 확률적 인자들은 분자 동역학, 양자 역학적 계산, 흑은 실험으로 얻어진다.

$K_2O-SiO_2-TiO_2$ 계 유리의 결정화 (Crystallization of $K_2O-SiO_2-TiO_2$ Glasses)

  • 김성식;박현수
    • 한국세라믹학회지
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    • 제22권2호
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    • pp.44-50
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    • 1985
  • The crystallization behavior of $K_2O-SiO_2$ glasses with added $TiO_2$ and the effect of $TiO_2$ on internal nuleation at temperature in the range of 875 to 121$0^{\circ}C$ have been investigated by means of X-ray diffractometry optical microscopy and scanning electron microscopy. The crystalline phase of these glasses identified by X-ray diffractometry is cristbalite. The scanning electron microspcopy reveals a two-phase layer of dendritic crystals and intersitial melt which grow from the surface at a constant rate, The observed crystallization rates are consistent with a diffusion-controlled mechanism. An equation relating viscosity and undercooling to growth rate is presented.

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Investigation of carbon nanotube growth termination mechanism by in-situ transmission electron microscopy approaches

  • Kim, Seung Min;Jeong, Seojeong;Kim, Hwan Chul
    • Carbon letters
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    • 제14권4호
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    • pp.228-233
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    • 2013
  • In this work, we report in-situ observations of changes in catalyst morphology, and of growth termination of individual carbon nanotubes (CNTs), by complete loss of the catalyst particle attached to it. The observations strongly support the growth-termination mechanism of CNT forests or carpets by dynamic morphological evolution of catalyst particles induced by Ostwald ripening, and sub-surface diffusion. We show that in the tip-growth mode, as well as in the base-growth mode, the growth termination of CNT by dissolution of catalyst particles is plausible. This may allow the growth termination mechanism by evolution of catalyst morphology to be applicable to not only CNT forest growth, but also to other growth methods (for example, floating-catalyst chemical vapor deposition), which do not use any supporting layer or substrate beneath a catalyst layer.

$C_{3}F_{8}-Ar$혼합가스 상에서 $C_{3}F_{8}$분자가스의 비탄성단면적의 재결정 (Re-determination of inelastic collision cross sections for $C_{3}F_{8}$ molecular gas in $C_{3}F_{8}-Ar$ mixture gases)

  • 전병훈
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2005년도 추계학술대회 논문집 전기물성,응용부문
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    • pp.21-23
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    • 2005
  • The electron transport coefficients, the electron drift velocity W, the longitudinal diffusion coefficient $ND_L$ in $C_{3}F_{8}-Ar$ mixture gases were measured by Double shutter drift tube and calculated by multi-term approximation of the Boltzmann equation over the wide E/N range from 0.03 to 100 Td. And an inelastic collision cross sections for $C_{3}F_{8}$ molecular gas were redetermined for quantitative characteristic analysis.

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Numerical Modeling of an Inductively Coupled Plasma Sputter Sublimation Deposition System

  • Joo, Junghoon
    • Applied Science and Convergence Technology
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    • 제23권4호
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    • pp.179-186
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    • 2014
  • Fluid model based numerical simulation was carried out for an inductively coupled plasma assisted sputter deposition system. Power absorption, electron temperature and density distribution was modeled with drift diffusion approximation. Effect of an electrically conducting substrate was analyzed and showed confined plasma below the substrate. Part of the plasma was leaked around the substrate edge. Comparison between the quasi-neutrality based compact model and Poisson equation resolved model showed more broadened profile in inductively coupled plasma power absorption than quasi-neutrality case, but very similar Ar ion number density profile. Electric potential was calculated to be in the range of 50 V between a Cr rod source and a conductive substrate. A new model including Cr sputtering by Ar+was developed and used in simulating Cr deposition process. Cr was modeled to be ionized by direct electron impact and showed narrower distribution than Ar ions.

Recent Progress in Flexible Perovskite Solar Cell Development

  • Ren, Xiaodong;Jung, Hyun Suk
    • 한국세라믹학회지
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    • 제55권4호
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    • pp.325-336
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    • 2018
  • Perovskite solar cells (PSCs) are a new class of photovoltaic devices, which have attracted significant attention due to their remarkable optoelectrical properties, including high absorption coefficients, high carrier mobilities, long carrier diffusion lengths, tunable bandgaps, low cost, and facile fabrication. PSCs have reached efficiencies of 22.70% and 18.36% on rigid fluorine-doped tin oxide and poly(ethylene terephthalate) substrates, respectively; these are comparable to those of single-crystal silicon and copper-indium-gallium-selenium solar cells. Over the past eight years, the photo conversion efficiency of PSCs has been significantly improved by device-architecture adjustments, and absorber and electron/hole transport layer optimization. Each layer is important for the performance of PSCs; hence, we discuss achievements in flexible perovskite solar cells (FPSCs), covering electron/hole-transport materials, electrode materials. We give a comprehensive overview of FPSCs and put forward suggestions for their further development.

AISI D2 Steel의 이온질화시 Multilayer의 생성에 의한 표면강화

  • 조균택;손석원;이영국;이원범
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.302-302
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    • 2013
  • 본 연구는 이온질화시 self-sputtering에 의한 AISI D2 소재의 표면경화에 대한 연구를 진행하였다. 이를 위해 이온질화시 질소가스와 아르곤 가스를 이용해 이온질화를 수행하였다. 이에 대한 결과는 optical micrograph (OM), scanning electron microscopy (SEM), X-ray diffraction(XRD), transmission electron microscopy (TEM)를 이용해 분석하였다. 실험결과, 소재의 경도는 570 HV에서 약 1470 HV까지 상승하였다. 극표면에 CrN-enriched layer의 형성 및 극표면 아래층에서 질소의 과포된 화합물층을 관찰할 수 있었다. 표면경화는, 극표면에 CrN-enriched layer의 형성과, 아래 N의 과포화에 의한 ${\gamma}$?autenite) phase, 그리고 diffusion layer의 형성에 의한 multi-layer의 형성으로 표면에 강화에 기여한것으로 사료된다.

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A Review on Fluorescent Lamps Having Noncircular Cross-sections

  • Ko, Jae-Hyeon
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.II
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    • pp.1165-1168
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    • 2005
  • We review discharge characteristics of fluorescent lamps having noncircular cross sections. The developmental and theoretical history of noncircular cross-section lamps is summarized chronologically. In particular, discharge characteristics of noncircular cross-section lamps will be summarized and analyzed including plasma contraction, electron temperature, and ambipolar diffusion loss, which might give us some insights into the way to develop more efficient and uniform flat fluorescent lamps, which have recently arisen as a new light source of large-size backlight units for LCD TV applications.

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Electron Beam Floating Zone Melting에 의한 니오븀의 정련 및 단결정 성장에 관한 연구 (Study on the Purification and Single Crystal Growth of Niobium Metal by Electron Beam Floating Zone Melting)

  • 최용삼;확준섭
    • 한국결정학회지
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    • 제3권2호
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    • pp.72-84
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    • 1992
  • EBFZM( Electron Beam Floating Zone Melting ) 법을 이용하여 니오븀에서의 침입형불순물 정련기구, 단결정 성장기구 및 유동현상을 연구하였다. EBFZM 은 산소와 질소의 제거에 효과적이었고,탄소의 경우 유확산펌프에서의 Backstream으로 인하여 약간 증가하는 경향성을 보였다. 원소재에 집합조직이 존재 하는 경우, EBFZM을 시행한 후의 결정성장 방위가 원소재의 집합조직과 일치하였으며,이로부터 2차 재결정에 의한 단결정 성장기구를 제안하였다. 또한,용 응대의 유동현상을 연구하여 낮은 Prandtl수인 니오븀에서도 Marangoni대류가 존재하여 결정내부의 striation을 유발시키고 산소와 질소에 대한 정련효과를 증대시킴을 밝혔다.

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ELECTRON TEMPERATURE ESTIMATION OF NON-THERMAL ATMOSPHERIC-PRESSURE NEON AND OXYGEN ADMIXTURE PLASMA JET BY CONVECTIVE WAVE PACKET MODEL

  • SORNSAKDANUPHAP, Jirapong;SUANPOOT, Pradoong;Hong, Young June;Ghimire, Bhagirath;CHO, Guangsup;CHOI, EunHa
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.207-207
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    • 2016
  • plasma group velocities of neon with oxygen admixture (ug) are obtained by intensified charge coupled device (ICCD) camera images at fixed gate width time of 5 ns. The propagation velocities outside interelectrode region are in the order of 104 m/s.The plasma ambipolar diffusion velocities are calculated to be in the order of 102 m/s. Plasma jet is generated by all fixed sinusoidal power supply, total gas flow and repetition frequency at 3 kV, 800 sccm and 40 kHz, respectively. The amount of oxygen admixture is varied from 0 to 2.75 %. By employing one dimensional convective wave packet model, the electron temperatures in non-thermal atmospheric-pressure plasma jet are estimated to be in a range from 1.65 to 1.95 eV.

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