Study on the temperature distribution induced by the electron beam process (전자빔 공정 시 발생하는 온도 분포 해석 기초연구)

• Kim, J.S.;Park, H.W.
• • Proceedings of the Korean Society of Precision Engineering Conference
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  • 2013.05a
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  • pp.777-778
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  • 2013
• PDF

Study on the temperature distribution with varying polishing condition for the large electron beam process (대면적 전자빔 공정시 가공 변수에 따른 온도 분포 연구)

• Kim, J.;Ki, H.;Park, H.W.
• • Proceedings of the Korean Society of Precision Engineering Conference
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  • 2012.10a
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  • pp.153-154
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  • 2012
• PDF

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