• Proceedings of the Korean Vacuum Society Conference
• /
• 2014.02a
• /
• pp.242.1-242.1
• /
• 2014

The electron cyclotron resonance plasma source with a belt-type magnet assembly (BMA) is designed for effective plasma confinements. For characterizing the plasma source, the plasma parameters are measured by Langmuir probe. However, the plasma parameters and the motion of charged particles near the ECR zone are not easy to diagnostics, because of the high plasma density and temperature. Thus, as an alternative method, the electromagnetic simulation of the plasma source has been performed by using three-dimensional particle-in-cell and Monte Carlo collisional (PIC-MCC) simulation codes. For considering the limitation of simulation resources and time, the periodic boundary condition is applied and the coulomb collision is neglected. In this paper, we present the results of 3D PIC simulations of ECR plasmas with BMA and we compare them with the experimental results.

• The Journal of Korean Society for Radiation Therapy
• /
• v.6 no.1
• /
• pp.89-93
• /
• 1994

Authors have measured virtual source distance of electron beam from CL/1800 medical linear accelerator, with newly designed method. Beam scanning was performed with the direction of beam axis in the air. Compared results between this study and well established in phantom measurement shows good agreement with in experimental error. And we have found that build-up cap plays very important role in air measurement because of charge build up. The method of in-air measurement of virtual source distance is very easy to set-up and generate accurate results.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.08a
• /
• pp.152-152
• /
• 2012

In this work we measured electron temperature and electron density of a microplasma by optical emission spectroscopy. The plasma is generated from a small discharge gap of a microwave parallel stripline resonator (MPSR) in Helium at atmospheric pressure. The microwave power supplied for this plasma source from 0.5 to 5 watts at a frequency close to 800 MHz. The electron temperature and electron density were estimated through Collisional-radiative model combined with Corona-equilibrium model. The results show that the electron density and temperature of this plasma in the case small discharge gap width are higher than that in larger gap width. The diagnostic techniques and associated challenges will be presented and discussed.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2015.08a
• /
• pp.171.1-171.1
• /
• 2015

Carbon nanotube emitters is very promising electron emitter for electron beam applications. We introduced the carbon nanotube electron beam (C-beam) exposure technic using triode structure. As a source, the electron beam emit from CNT emitters placed at the cathode by high electric field. Through the gate mesh, with high accelerating energy, the electron can be extracted easily and impact at the anode plate. For thin film modification, after the C-beam exposure on the amorphous silicon thin film, we found phase changes and it showed a high crystallinity from the Raman measurement. We expect that this crystallized film will be a good candidate as a new active layer of TFT.

• Journal of the Korean Vacuum Society
• /
• v.8 no.2
• /
• pp.148-152
• /
• 1999

the low temperature magnetoresistance effect, electron mobilities, and 2 Dimensional electron Gases (2DEG) properties were investigated in $Si/Si_{1-x}Ge_x$ quantum well devices. N-type $Si/Si_{1-x}Ge_x$ structures were fabricated by utilizing a gas source Molecular Beam Epitaxy (GSMBE). Thermal oxidation was carried out in a dry O atmosphere at $700^{\circ}C$ for 7 hours. Electron mobilities were measured by using a Hall effect and a magnetoresistant effect at low temperatures down to 0.4K. Pronounced Shubnikov-de Haas (SdH) oscillations were observed at a low temperature showing two dimensional electron gases (2DEG) in s tensile strained Si quantum well. The electron sheet density (ns) of $1.5\times10^{12}[\textrm{cm}^{-2}]$ and corresponding electron mobility of 14200 $[\textrm{cm}^2V^{-1}s^{-1}]$ were obtained at a low temperature of 0.4K from $Si/Si_{1-x}Ge_x$ structures with thermally grown oxides.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.30 no.12 s.255
• /
• pp.1557-1563
• /
• 2006

A scanning electron microscope (SEM) is well known as a measurement and analysis equipment in nano technology, being widely used as a crucial one in measuring objects or analyzing chemical components. It is equipped with an electron optical system that consists of an electron beam source, electromagnetic lenses, and a detector. The present work concerns numerical analysis for the electron optical system so as to facilitate design of each component. Through the numerical analysis, we investigate trajectories of electron beams emitted from a nano-scale field emission tip, and compare the result with that of experimental observations. Effects of various components such as electromagnetic lenses and an aperture are also discussed.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.17 no.4
• /
• pp.145-150
• /
• 2007

The $SiO_2$ and $TiO_2$ thin films for the multilayer interference filter application were manufactured by electron beam process. In case of electron beam process with ion source, the anode current was controlled by gas volume ratio of $O_2$ and Ar. Substrate temperature of electron beam deposition without ion source was increased from 100 to $250^{\circ}C$ with $50^{\circ}C$ increment. The surface roughness values of $SiO_2$ thin films was most low value at $200^{\circ}C$ substrate temperature and 0.2 A anode current respectively. And the surface roughness values of $TiO_2$ thin films was most low value at room temperature and 0.2 A anode current repectively. The refractive index of $SiO_2$ and $TiO_2$ thin films to be deposited with ion source was usually lower than that of thin films without ion source.

• Journal of Korean Society on Water Environment
• /
• v.21 no.4
• /
• pp.403-409
• /
• 2005

Methyl tert-butyl ether (MTBE) contamination in groundwater often coexists with benzene, toluene, ethylbenzene, and xylene (BTEX) near the source of the plume. Then, groundwater contamination problems have been developed in areas where the chemical is used. Common sources of water contamination by BTEX and MTBE include leaking underground gasoline storage tanks and leaks and spills from above ground fuel storage tanks, etc. In oil-contaminated environments, anaerobic biodegradation of BTEX and MTBE depended on the concentration and distribution of terminal electron acceptor. In this study, effect of electron acceptor on the anaerobic biodegradation for BTEX and MTBE-contaminated soil was investigated. This study showed the anaerobic biodegradation of BTEX and MTBE in two different soils by using nitrate reduction, ferric iron reduction and sulfate reduction. The soil samples from the two fields were enriched for 65 days by providing BTEX and MTBE as a sole carbon source and nitrate, sulfate or iron as a terminal electron acceptor. This study clearly shows that degradation rate of BTEX and MTBE with electron acceptors is higher than that without electron acceptors. Degradation rate of Ethylbenzene and Xylene is higher than that of Benxene, Toluene, and MTBE. In case of Benzene, Ethylbenzene, and MTBE, nitrate has more activation. In case of Toluene and Xylene, sulfate has more activation.

• The Journal of Korean Institute of Information Technology
• /
• v.16 no.11
• /
• pp.43-49
• /
• 2018

Computer simulation was performed using the SIMION program to develop an electron gun for MCP cleaning. The target, MCP, is located 180mm from the source of the electron gun, and the diameter of the MCP is approximately 20mm. Therefore, we tried to find the condition that the beam diameter of electrons reaching the MCP is to be 20mm using four variables such as E, ${\phi}$, d1, d2, where the E is the energy of the electron reaching the MCP, the ${\phi}$ is the diameter of the extractor, and the d1 and the d2 are the distance from the electron source to the end of the extractor tube, and to the wall of chamber, respectively. As a result of simulation, we figuried out that the E and the d2 have little effect on the beam diameter. On the other hand, we also found that the beam diameters were very sensitive to the d1 and varied relatively large with respect to the ${\phi}$, and the d1 was the secondary order function of the ${\phi}$. Therefore we found that this function will allow us to design electron guns that are suitable for the purposes of this study.

• Korean Journal of Optics and Photonics
• /
• v.17 no.4
• /
• pp.354-358
• /
• 2006

A silicon lens and an insulator of pyrex, components of a micro-electron column, should be assembled by aligning and stacking simultaneously. An optical alignment of a diffraction beam and a laser welding were employed for the assembly of a source lens and an Einzel lens with precision within $\pm$4% for the maximum aperture size. The experimental condition for optical alignment and laser welding are explained. Anodic bonding was used to assist in stacking lenses. A micro-electron column of smaller apertures assembled with precise alignment and fabrication was tested with a current image of a Cu grid of 9$\mu$m in linewidth, and showed a higher resolution in acceleration mode.