• Korean Journal of Materials Research
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• v.27 no.10
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• pp.530-533
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• 2017

ZnO micro/nanocrystals with different morphologies were synthesized by thermal evaporation of various zinc source materials in an air atmosphere. Zinc acetate, zinc carbonate and zinc iodide were used as the source materials. No catalysts or substrates were used in the synthesis of the ZnO crystals. The scanning electron microscope(SEM) image showed that the morphology of ZnO crystals was strongly dependent on the source materials, which suggests that source material is one of the key factors in controlling the morphology of the obtained ZnO crystals. Tetrapods, nanogranular shaped crystals, spherical particles and crayon-shaped crystals were obtained using different source materials. The X-ray diffraction(XRD) pattern revealed that the all the ZnO crystals had hexagonal wurtzite crystalline structures. An ultraviolet emission was observed in the cathodoluminescence spectrum of the ZnO crystals prepared via thermal evaporation of Zn powder. However, a strong green emission centered at around 500 nm was observed in the cathodoluminescence spectra of the ZnO crystals prepared using zinc salts as the source materials.

• Progress in Superconductivity and Cryogenics
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• v.18 no.2
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• pp.25-29
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• 2016

High charge state electron cyclotron resonance (ECR) ion source is important on the performance of heavy ion accelerators. In this paper, a low temperature superconductor (LTS) was used to make a hexapole coil for an 18-GHz ECR ion source. Several hexapole structures, including racetrack, graded racetrack, and saddle were implemented and analyzed for the hexapole-in-solenoid ECR ion source system. Under the appropriate radial confinement field, the smaller outer radius of hexapole can be better for the solenoid design. Saddle hexapole was selected by comparing the wire length, maximum outer radius of the hexapole, the Lorentz force at the end part of the hexapole and the maximum magnetic field in the coil. Based on saddle hexapole, a new design for hexapoles, the snake hexapole, was developed in this paper. By comparative analysis of the Lorentz force at the end part of the saddle and snake hexapoles, the snake hexapole is much better in the ECR ion source system. The suggested design for the ECR ion source with the snake hexapole is presented in this paper.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.12
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• pp.132-138
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• 2008

Recently, mastering processes for high density optical disc such as Blu-ray disc rely on electron beams, which are operable in only vacuum. In the mastering process, one of the most important tasks is to design precision stages for providing precise positioning of the works with respect to the source in a high vacuum environment. In this paper, we have developed a precision rotation table usable in the electron beam mastering. The rotation table adopted air bearings for a high positioning repeatability and velocity stability. The air leakage from the air bearings has been minimized by employing the differential exhaust scheme using three steps of air drain. The design parameters such as diameters of exhaust lines, seal lengths, and pumping speeds were decided according to the optimization method using genetic algorithm. The performance on the vacuum level of the rotation table was evaluated experimentally and theoretically. The results indicate that a vacuum level of $10^{-4}$ Pa is achieved with operation of air bearings in a vacuum chamber, which is sufficient for the electron beam mastering.

• Journal of radiological science and technology
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• v.23 no.2
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• pp.75-79
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• 2000

This study was performed for the clinical applications applying the Monte Carlo methods. In this study we calculated the absorbed dose distributions for the 6 MeV electron beam in water phantom and compared the results with measured values. The energy data of electron beam used in Monte Carlo calculation is the energy distribution for 6 MeV electron beam which is assumed as a Gaussian form. We calculated percent depth doses and beam profiles for three field sizes of $10{\times}10,\;15{\times}15$, and $20{\times}20\;cm^2$ in water phantom using Monte Carlo methods and measured those data using a semiconductor detector and other devices. We found that the calculated percent depth doses and beam profiles agree with the measured values approximately. However, the calculated beam profiles at the edge of the fields were estimated to be lower than the measured values. The reason for that result is that we did not consider the angular distributions of the electrons in phantom surface and contamination of X-rays in our calculations. In conclusion, in order to apply the Monte Carlo methods to the clinical calculations we are to study the source models for electron beam of the linear accelerator beforehand.

• Applied Microscopy
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• v.39 no.1
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• pp.73-77
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• 2009

Contaminative artifacts such as carbonaceous materials on carbon-coated microgrids are unavoidable, which is induced by electron beam exposure inside electron microscopes. This phenomenon raise a source to produce confusing information to the samples investigated by analytical TEM, which should be alleviated as much as possible. As experimental precautions for reducing this unwanted effect, the use of $LN_2$ cooled anti-contaminator and pre-illumination of electron beam at low magnification can be helpful. Nevertheless, we should be cautious to set an illumination condition for microanalysis because the contaminative effect is dependent with the types of irradiation situations, which is well known to be a decisive factor for causing the carbonaceous artifacts. Accordingly, it is necessary that optimal illumination to minimize the contaminative effect should be selected for improving the accuracy of microanalysis. In this paper, we introduce the practical method to determine the optimal illumination condition by evaluating the contaminative effect as a function of instrumental spot size, which is directly linked with electron current density.

• Proceedings of the KIEE Conference
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• 1998.07e
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• pp.1767-1769
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• 1998

We have established a pulsed electron beam generation system with an energy of 200[keV], pulse repetition rate of 200[Hz], and several tens of [${\mu}s$] pulse width. The system is characterized by a cold cathode that is simpler than the hot cathode. Target object does not need to be scanned because of large aperture electron beam of 300[$cm^2$]. Electron source is secondary electrons that are generated when the ions from the glow discharge collide on the cathode surface. In this paper, the discharge current characteristics are investigated experimentally as a function of He gas pressure in order to obtain stable glow discharge. And computer simulations are carried out as a preliminary study for the development of low energy large aperture electron beam generator. The variation of electon beam current is investigated as a function of rising time of high voltage when 20[kV] potential is applied in 20[mTorr] pressure.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.30A no.11
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• pp.99-104
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• 1993

We analyzed the D.I. water used in wet cleaning process of semiconductor device manufacturing both at the D.I. water plant and at the wafer cleaning bath to detect the impurity source of D.I. water contamination. This shows that the quantity of impurity is related to the resistivity of D.I. water, and we found that the cleanliness of the wafer surface processed in D.I. water bath was affected by the degree of the ionic impurity contamination. So we evaluated the cleaning effect as different method for Fe ion, having the best adsoptivity on wafer surface. Moreover the temperature effect of the D.I. water is investigated in case of anion in order to remove the chemical residue after wet process. In addition to the control of D.I. water resistivity, chemical analysis of impurity control in D.I. water should be included and a suitable cleaning an drinsing method needs to be investigated for a high yielding semiconductor device.

• Progress in Medical Physics
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• v.31 no.4
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• pp.163-171
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• 2020

Purpose: In this study, the accuracies of electron Monte Carlo (eMC) calculation algorithms were evaluated to determine whether electron beams were modeled by optional air profiles (APs) designed for each applicator size. Methods: Electron beams with the energies of 6, 9, 12, and 16 MeV for VitalBeam (Varian Medical System, Palo Alto, CA, USA) and 6, 9, 12, 16, and 20 MeV for Clinac iX (Varian Medical System) were used. Optional APs were measured at the source-to-detector distance of 95 cm with jaw openings appropriate for each machine, electron beam energy, and applicator size. The measured optional APs were postprocessed and converted into the w2CAD format. Then, the electron beams were modeled and calculated with and without optional APs. Measured profiles, percentage depth doses, penumbras with respect to each machine, and energy were compared to calculated dose distributions. Results: For VitalBeam, the profile differences between the measurement and calculation were reduced by 0.35%, 0.15%, 0.14%, and 0.38% at 6, 9, 12, and 16 MeV, respectively, when the beams were modeled with APs. For Clinac iX, the differences were decreased by 0.16%, -0.31%, 0.94%, 0.42%, and 0.74%, at 6, 9, 12, 16, and 20 MeV, respectively, with the insertion of APs. Of note, no significant improvements in penumbra and percentage depth dose were observed, although the beam models were configured with APs. Conclusions: The accuracy of the eMC calculation can be improved in profiles when electron beams are modeled with optional APs.

• Progress in Medical Physics
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• v.31 no.4
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• pp.145-152
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• 2020

Purpose: In ionization-chamber dosimetry for high-dose-rate electron beams-above 20 mGy/pulse-the ion-recombination correction methods recommended by the International Atomic Energy Agency (IAEA) and the American Association of Physicists in Medicine (AAPM) are not appropriate, because they overestimate the correction factor. In this study, we suggest a practical ion-recombination correction method, based on Boag's improved model, and apply it to reference dosimetry for electron beams of about 100 mGy/pulse generated from an electron linear accelerator (LINAC). Methods: This study employed a theoretical model of the ion-collection efficiency developed by Boag and physical parameters used by Laitano et al. We recalculated the ion-recombination correction factors using two-voltage analysis and obtained an empirical fitting formula to represent the results. Next, we compared the calculated correction factors with published results for the same calculation conditions. Additionally, we performed dosimetry for electron beams from a 6 MeV electron LINAC using an Advanced Markus^® ionization chamber to determine the reference dose in water at the source-to-surface distance (SSD)=100 cm, using the correction factors obtained in this study. Results: The values of the correction factors obtained in this work are in good agreement with the published data. The measured dose-per-pulse for electron beams at the depth of maximum dose for SSD=100 cm was 115 mGy/pulse, with a standard uncertainty of 2.4%. In contrast, the k_s values determined using the IAEA and AAPM methods are, respectively, 8.9% and 8.2% higher than our results. Conclusions: The new method based on Boag's improved model provides a practical method of determining the ion-recombination correction factors for high dose-per-pulse radiation beams up to about 120 mGy/pulse. This method can be applied to electron beams with even higher dose-per-pulse, subject to independent verification.

• The Bulletin of The Korean Astronomical Society
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• v.40 no.1
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• pp.69.1-69.1
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• 2015

Classical T Tauri star DG Tau is suggested as the driving source of parsec-scale jet which expands up to 650" (0.4 pc). To investigate the kinematics and physical properties of the jet, we have obtained the optical emission lines of $H{\alpha}$, [O I] ${\lambda}{\lambda}$6300, 6363, [N II] ${\lambda}{\lambda}$6548,6584, and [S II] ${\lambda}{\lambda}$6716, 6731 from HH 158 ad HH 702. The radial velocity of HH 158 is in the range of -50 to $-250km\;s^{-1}$. For HH 702, located at 650" from the source, it shows ~ $-80km\;s^{-1}$. In HH 158, the electron density ($n_e$) close to the star is ${\sim}10^4cm^{-3}$ and it decreases to ${\sim}10^2cm^{-3}$ at 14" away from the star. Electron temperature ($T_e$) is decreasing from >15,000 K to ~5,000 K with distance. Ionization fraction ($x_e$) is increasing from almost zero to > 0.4 along the distance. In HH 702, the values of $n_e$, $T_e$, and $x_e$ are similar to those estimated at 14" from source, where knot C of HH 158 is located. This may imply that the physical properties of the knot could persist through such a long distance in the space, and the gas could be re-excited by the shock during propagation of the jet. On the other hand, we cannot avoid the possibility that HH 702 is driven by another source rather than DG Tau because HH 158 and HH 702 show somewhat large difference in their inclination angles (${\Delta}i=21-35^{\circ}$).