• Title/Summary/Keyword: Electron Collision Cross Sections Set

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A study on the electron energy diffusion function of the sulphur hexaflouride ($SF_6$ 가스의 전자에너지 분포함수에 관한 연구)

  • 김상남;유회영;서상현;박동화;하성철
    • Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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    • 1996.11a
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    • pp.134-139
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    • 1996
  • The electron energy distributions function were analysed in sulphur hexaflouride at E/N : 500~800(Td) for a case of non-equilibrium ion in the mean electron energy. This paper describes the electron transport characteristics in SF$_{6}$ gas calculated for range of E/N values from 150~800(Td) by the Monte Carlo simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters. The results gained that the value of an electron swarm parameter such as the electron drift velocity, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients agree with the experimental and theoretical for a range of E/N. The properties of electron avalanches in an electron energy non-equilibrium region.n.

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The Study on the Electron ionization and Attachment Coefficients in $SF_6$+Ar Mixtures Gas ($SF_6$+Ar 혼합기체의 전리 및 부착계수에 관한 연구)

  • 김상남;하성철
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.11a
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    • pp.591-593
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    • 2000
  • In this paper, we describe the results of a combined experimental theoretical study designed to understand and predict the dielectric properties of SF$_{6}$ and SF$_{6}$+Ar mixtures. The electron transport, ionization, and attachment coefficients for pure SF$_{6}$ and gas mixtures containing SF$_{6}$ has been analysed over the E/N range 30~300[Td] by a two term Boltzmann equation and by a Monte Carlo Simulation using a set of electron cross sections determined by other authors, experimentally the electron swarm parameters for 0.2[%] and 0.5[%] SF$_{6}$+Ar mixtures were measured by time- of- flight method, The results show that the deduced electron drift velocities, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients and mean energy agree reasonably well with the experimental and theoretical for a rang of E/N values. Electron energy distribution functions computed from numerical solutions of the electron transport and reaction coefficients as functions of E/N. We have calculated $\alpha$,η and $\alpha$-η the ionization, attachment coefficients, effective ionization coefficients, and (E/N), the limiting breakdown electric-field to gas density ratio, in SF$_{6}$ and SF$_{6}$+Ar mixtures by numerically solving the Boltzmann equation for the electron energy distribution. The results obtained from Boltzmann equation method and Monte Carlo simulation have been compared with present and previously obtained data and respective set of electron collision cross sections of theections of the

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Characteristics of Electron Transport in $SiH_4$ Gas used by MCS-BEq Algorithm (MCS-BEq 알고리즘에 의한 $SiH_4$ 기체의 전자수송특성)

  • Kim, Sang-Nam;Seong, Nak-Jin
    • Proceedings of the KIEE Conference
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    • 2006.10b
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    • pp.159-162
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    • 2006
  • In this paper energy distribution function in $SiH_4$ has been analysed over the E/N range 0.5${\sim}$300Td and Pressure value 0.5, 1.0, 2.5 Torr by a two-term approximation Boltzmann equation method and by a Monte Carlo simulation. The motion has been calculated to give swarm parameters for the electron drift velocity, diffusion coefficient, electron ionization, mean energy and the electron energy distribution function. The electron energy distribution function has been analysed in $SiH_4$ at E/N=30, 50Td for a case of the equilibrium region in the mean electron energy and respective set of electron collision cross sections. The results show that the deduced electron drift velocities, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients and mean energy agree reasonably well with theoretical for a rang of E/N values.

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Analysis of Electron Energy Distribution Function and Transport Characteristic in SiH$_4$ Gas Plasma by MCS-BE Method (MCS-BE법을 이용한 SiH$_4$가스 프라즈마중의 전자에너지분포함수와 수송특성해석)

  • 이형윤;하성철;유회영;김상남;임상원;문기석
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1997.04a
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    • pp.154-159
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    • 1997
  • This paper describes the electron transport characteristic in SiH$_4$ gas calculated for range of E/N values from 0.5~300(Td) by the Monte Calro simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters are obtained for TOF method. The results gained that the value of an electron swarm parameter such as the electron drift velocity, the electron ionization coefficients longitudinal and transverse diffusion coefficients, characteristics energy agree with thee experimental and theoretical for a range of E/N. The electron energy distributions function were analysed in monosilane at EN : 30, 50(Td) for a case of equilibrium region in the mean electron energy. The validity of the results obtained has been confirmed by a TOF method.

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A Study on the electron energy diffusion function of the sulphur hexaflouride (SF_6 가스의 전자에너지 분포함수에 관한 연구)

  • ;金相南
    • The Proceedings of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.13 no.2
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    • pp.227-227
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    • 1999
  • The electron energy distributions function were analysed in sulphur hexaflouride at E/N : 500~800(Td) for a case of non-equilibrium region in the mean electron energy. This paper describes the electron transport characteristics in $SF_6$ gas calculated for range of E/N values from 150~800(Td) by the Monte Carlo simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters. The results gained that the value of ane1ctron swarm parameter such as the e1ectron drift velocity, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients agree with the experimental and theoretical for a range of E/N. The properties of electron avalanches in an electron energy non-equilibrium region.

Study on the electron transport properties in $SF_6$+He mixtures gas used by MCS-BE ($SF_6$+He 혼합기체의 MCS-BE에 의한 전자수송계수 연구)

  • Kim, Sang-Nam;Seo, Sang-Hyeon;Ha, Sung-Chul;Yu, Heoi-Young;Song, Byung-Doo
    • Proceedings of the KIEE Conference
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    • 1999.11a
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    • pp.16-19
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    • 1999
  • This paper describes the electron transport characteristics in $SF_6$+He gas calculated for range of E/N values from $50{\sim}700[Td]$ by the Monte Carlo simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters are obtained by TOF method. The results gained that the values of the electron swarm parameters such as the electron drift velocity, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients agree with the experimental and theoretical for a range of E/N.

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The Analysis of Electron Transport Characteristics in $SiH_4$ Plasma ($SiH_4$ 플라즈마중의 전자수송특성 해석)

  • Lee, Hyoung-Yoon;Ha, Sung-Chul;Kim, Dae-Yeon
    • Proceedings of the KIEE Conference
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    • 1998.11c
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    • pp.925-928
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    • 1998
  • In this paper, the electron transport characteristics in $SiH_4$ has been analysed over the E/N range $0.5{\sim}300[Td]$ and Pressure value 0.5, 1, 2.5 [Torr] by a two-term approximation Boltzmann equation method and by a Monte Carlo simulation. The motion has been calculated to give swarm parameters for the electron drift velocity. diffusion coefficient, electron ionization, mean energy and the electron energy distribution function. The electron energy distribution function has been analysed in $SiH_4$ at E/N=30, 50[Td] for a case of the equilibrium region in the mean electron energy and respective set of electron collision cross sections. The results of Boltzmann equation and Monte carlo simulation have been compared with experimental data by Pollock, Ohmori, cottrell and Walker.

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Analysis of electron transport properties in $SF_6$+He mixture gas used by MCS-BE (MCS-BE에 의한 $SF_6$+He 혼합기체의 전자수송특성 해석)

  • 하설철;송병두;유회영;김상남;백승권
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.4
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    • pp.359-364
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    • 2000
  • The paper describes the electron transport characteristics in SP$_{6}$+He gas calculated E/N values 0.1~700[Td] by the Monte Carlos simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters obtained by TOF method. This study gained the values of the electron swarm parameters such as the electron drift velocity the electron ionization or attachment coefficients longitudinal and transverse diffusion coefficients for SF$_{6}$+He gas at a range of E/N.E/N.

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Electron Swarm Parameter Characteristic in $SiH_4$ Plasma by TOF Method (TOF법을 이용한 $SiH_4$ 프라즈마중의 전자군파라미터특성)

  • Lee, Hyung-Yoon;Ha, Sung-Chul;Yu, Heoi-Young;Kim, Sang-Nam;Lim, Sang-Won;Moon, Ki-Seok
    • Proceedings of the KIEE Conference
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    • 1997.07e
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    • pp.1830-1833
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    • 1997
  • This paper describes the electron transport characteristic in $SiH_4$ gas calculated for range of E/N values from $0.5{\sim}300$(Td) using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters are obtained for TOF method. The results gained that the value of an electron swarm parameter such as the electron drift velocity, longitudinal and transverse diffusion coefficients with the experimental and theoretical for a range of E/N. The electron energy distributions function were analysed in monosilane at E/N : 30, 50(Td) for a case of equilibrium region in the mean electron energy. The validity of the results obtained has been confirmed by a TOF method.

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Electron Transport Characteristics in $SiH_4$ by MCS-BEq (MCS-BEq에 의한 $SiH_4$ 전자수송특성(電子輸送特性))

  • Seong, Nak-Jin;Kim, Sang-Nam
    • Proceedings of the KIEE Conference
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    • 2005.10a
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    • pp.97-100
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    • 2005
  • This paper describes the electron transport characteristics in SiH4 has been analysed over the E/N range 0.5${\sim}$300[Td] and Pressure value 0.5, 1, 2.5 [Torr] by a two-term approximation Boltzmann equation method and by a Monte Carlo simulation. The motion has been calculated to give swarm parameters for the electron drift velocity, diffusion coefficient, electron ionization, mean energy and the electron energy distribution function. The electron energy distribution function has been analysed in $SiH_4$ at E/N=30, 50[Td] for a case of the equilibrium region in the mean electron energy and respective set of electron collision cross sections. The results of Boltzmann equation and Monte carlo simulation have been compared with experimental data by Pollock, Ohmori, cottrell and Walker.

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