• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.5
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• pp.445-449
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• 2005

Aging phenomena of 0.2PMN-0.8PZT multilayered ceramic actuators(MCA) have been investigated at the room temperature. The piezoelectric materials were synthesized as conventional ceramic process, and MCA were fabricatedby tape casting methods. The crystalline structures and lattice parameters were investigated by X-ray diffraction analysis, showing the structure was tetragonal and c/a was about 1.01. And, the effective electromechanical coupling coefficient keff and pseudo-piezoelectric constant $d_{33}$were measured. Variable unipolar electric fields, $2{\sim}4kV/mm$, were applied to MCh to investigate the aging characteristics. After 2 kV/mm unipolar electric field, keff and $d_{33}$ were 0.454 and 4.44 respectively. The measured and simulated values using for aging phenomena analysis, had a good fit to the linear logarithmic stretched exponential law.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.51 no.9
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• pp.455-463
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• 2002

Ionic Polymer metal composite(IPMC), one of new actuation materials of EAPs is fabricated by electroless plating of platinum on both sides of the perfluorosulfonic acid film or Nafion film and its electromechanical characteristics are investigated. The IPMC strip bends towards anode under electrical field. As the number of plating cycle increases, the distance between plated platinum electrodes on both sides of Nafion membrane decreases and also the displacement is almost inversely proportional to the number of plating. The displacement of IPMC strip depends on voltage magnitude and applied signal frequency and its maximum deformation is observed at a critical frequency, resonant frequency. Low pressure sandblasting is used for surface treatment of Nafion membrane and at 8 times of plating cycle produced actuator with high displacement performance. For more efficiency of fabricated IPMC, it is useful to add one or two surface developing step which is the second reduction process using hydrazine.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.11a
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• pp.149-152
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• 1997

High-power piezoelectric materials are being developed for applications such as actuators and ultrasonic motors. In this paper, ferroelectric property of iron-doped 0.57 (Sc$_{1}$2//Nb$_{1}$2/)O$_3$-0.43 PbTiO$_3$. which is the morphotropic phase boundary composition for the PSN-PT system, was investigated. The maximum dielectric constant ( $\varepsilon$$_{33}$/$\varepsilon$$_{0}$ = 2551) and the minimum dielectric loss(tan $\delta$ = 0.51 %) at room temperature were obtained at 01. wt% and 0.3 wt% of iron additions. With additions of the Fe$_2$O$_3$ the electromechanical coupling factor of radial mode k$_{p}$ and the piezoelectric coefficient d$_{33}$ were slightly decreased, on the other hand the mechanical quality factor was increased significantly. The highest mechanical quality factor (Qm= 297) was obtained at 0.3 wt% Fe$_2$O$_3$, which is 4.4 times larger than that of pure 0.57 PSN-0.43PT ceramics. The temperature dependence of the dielectric constant and dielectic loss was observed between 2$0^{\circ}C$ and 35$0^{\circ}C$ .X> .X> .

• Journal of the Korean Society for Precision Engineering
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• v.16 no.3 s.96
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• pp.62-71
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• 1999

Integrating micro-machined sensors and actuators on the conventional devices with the copper power lines was incompatible to fabricate the mass produced micro electromechanical system (MEMS) devices. To achieve the compatibility of the wiring method between MEMS parts and devices, we developed the three-dimensional sputter-evaporation system that coats micropatterned thin copper films on the surface of the MEMS element. The system consists of a process chamber, two branch chambers, the substrate holder, and a linear-rotary motion feedthrough. Thin copper film was sputtered and evaporated on the biocompatible polymer, Pellethane$^{circed{R}}$ and silicone, catheter that is 2 mm in diameter and 700 mm in length. The metal film coating technique with three-dimensional thin film sputter-evaporation system was developed to apply the power and signal lines on the micro active endoscope. In this paper, we developed the three-dimensional metal film sputter-evaporation system operated on the low temperature for the biopolymeric substrates used in the medical MEMS devices.

• Korean Journal of Materials Research
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• v.31 no.1
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• pp.43-53
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• 2021

Dynamic behavior of piezoelectric ZnO nanowires is investigated using finite element analyses (FEA) on FE models constructed based on previous experimental observations in which nanowires having aspect ratios of 1:2. 1:31, and 1:57 are obtained during a hydrothermal process. Modal analyses predict that nanowires will vibrate in lateral bending, uniaxial elongation/contraction, and twisting (torsion), respectively, for the three ratios. The natural frequency for each vibration mode varies depending on the aspect ratio, while the frequencies are in a range of 7.233 MHz to 3.393 GHz. Subsequent transient response analysis predicts that the nanowires will behave quasi-statically within the load frequency range below 10 MHz, implying that the ZnO nanowires have application potentials as structural members of electromechanical systems including nano piezoelectric generators and piezoelectric dynamic strain sensors. When an electric pulse signal is simulated, it is predicted that the nanowires will deform in accordance with the electric signal. Once the electric signal is removed, the nanowires exhibit a specific resonance-like vibration, with the frequency synchronized to the signal frequency. These predictions indicate that the nanowires have additional application potential as piezoelectric actuators and resonators.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.194-194
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• 2008

Lead oxide based ceramics, represented by PZT, are the most widely used materials for piezoelectric actuators, sensors, and transducers due to their excellent piezoelectric properties. In particular, high-performance multilayered piezoelectric ceramics for advanced electronic components have drawn great attention. In order to develop piezoelectric ceramics capable of being sintered at low temperature for multilayer piezoelectric device applications, the effect of CuO additions on the microstructures and electromechanical properties of the 0.4Pb$(Mg_{1/3}Nb_{2/3})O_3-0.25PbZrO_3-0.35PbTiO_3$ ceramics was investigated. The samples with CuO addition were synthesized by ordinary sintering technique. X-ray diffractions indicated that all samples formed a single phase perovskite structure. The addition of CuO improved the sinterability of the samples and caused an increase in the density and grain size at low temperature. The optimum sintering temperature was lowered by CuO additions. Excellent piezoelectric and electromechanical responses, $d_{33}$ ~ 663 pC/N, $k_p$ ~ 0.72, were obtained for the samples of high density with 0.1 wt% CuO addition sintered at $1050^{\circ}C$ for 4 h in air. These results show that the piezoelectric properties of PMNZT ceramics can be improved by controlling the microstructure and this system is potentially a good candidate as multilayer piezoelectric device for a wide range of electro-mechanical transducer applications.

• Composites Research
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• v.19 no.5
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• pp.7-11
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• 2006

The improved SWNTs/PANi composite actuator films applicable to an artificial muscle were fabricated successfully using a new process of manufacture that consists of 90% pure single-walled carbon nanotubes (SWNT) and chemical polymerization. PANi is electrically conducting polyaniline polymer. The conductivities of the composite SWNTs/PANi film-type actuators and the pure PANi films fabricated were measured as 56.15 S/cm and 17.38 S/cm, respectively, by the 4-prove method. The conductivity of the composite actuator is 3.2 times higher than the pure PANi film. The fabricated composite actuator showed higher conductivity than any other similar ones. The quality of samples was investigated by an electron scanning microscope (SEM). To measure the actuating strains, a specially designed beam balance apparatus was developed and strains of the composite actuators was measured by a laser displacement sensor subjected to electric currents. During the operation, the sample was soaked in the $NaNO_3$ solution and the sine-wave voltage in the range of $+1V{\sim}-1V$ was applied. The length of the composite actuator changed from $l_0=12.690$ mm to $l_1=12.733$ so that the change of length was l=0.043 mm and the strain was 0.34 %. This is a very high strain for this kind of a composite actuator. Other result reported by Tahhan showed 0.23 % strain, so that the present result is improved by 48%.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.12
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• pp.1077-1082
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• 2008

To fabricate a multi-layered piezoelectrics/electrodes structure, the piezoelectrics should be sintered at the temperature lower than $950^{\circ}C$ to use the silver electrode, which is cheaper than the electrodes containing noble metals such as Pd and Pt. Therefore, in this study, we modified the composition of $Pb(Zr,Ti)O_3$-based material as $(Pb_{0.98}Cd_{0.02})(Ni_{1/3}Nb_{2/3})_{0.25}Zr_{0.35}Ti_{0.4}O_3$ to lower the sintering temperature and to improve the piezoelectric properties. Small amount of $MnCO_3$, $SiO_2$, and $Pb_3O_4$ were also added to lower the sintering temperature of the ceramic. The prepared raw powders were mixed by using a ball mill for 24 hours. And then the mixed powders were calcinated for 2 hours at $800^{\circ}C$. The calcinated powders were again crushed with the ball mill for 72 hours. The final powders were pressed for making the shape of ${\emptyset}15\;mm$ disk. The disk-type samples were sintered at temperature range of $850{\sim}950^{\circ}C$. The crystal phases of the sintered specimens were perovskite structure without secondary phases. All of the measured electrical properties such as electromechanical coupling coefficients ($k_p$), mechanical quality factors ($Q_m$), and piezoelectric charge constants ($d_{33}$) were decreased with decreasing the sintering temperatures. The electrical properties measured at the sample sintered at $950^{\circ}C$ were 54% of $k_p$, 503 of $Q_m$, and 390 pC/N of $d_{33}$, respectively. These properties were considered to be fairly good for the application of multi-layered piezoelectric generators or actuators.

• Korean Journal of Materials Research
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• v.25 no.10
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• pp.566-570
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• 2015

$Bi_{0.5}Na_{0.5}TiO_3$ (BNT) based ceramics are considered potential lead-free alternatives for $Pb(Zr,Ti)O_3$(PZT) based ceramics in various applications such as sensors, actuators and transducers. However, BNT-based ceramics have lower electromechanical performance as compared with PZT based ceramics. Therefore, in this work, lead-free bulk $0.99[(Bi_{0.5}Na_{0.5})_{0.935}Ba_{0.065}]_{(1-x)}La_xTiO_3-0.01SrZO_3$ (BNBTLax-SZ, with x = 0, 0.01, 0.02) ceramics were synthesized by a conventional solid state reaction The crystal structure, dielectric response, degree of diffuseness and electric-field-induced strain properties were investigated as a function of different La concentrations. All samples were crystallized into a single phase perovskite structure. The temperature dependent dielectric response of La-modified BNBT-SZ ceramics showed lower dielectric response and improved field-induced strain response. The field induced strain increased from 0.17%_for pure BNBT-SZ to 0.38 % for 1 mol.% La-modified BNBT-SZ ceramics at an applied electric field of 6 kV/mm. These results show that La-modified BNBT-SZ ceramic system is expected to be a new candidate material for lead-free electronic devices.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.280-280
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• 2007

Lead oxide-based ferroelectrics are the most widely used materials for piezoelectric actuators, sensors and transducers due to their excellent piezoelectric properties. Considering lead toxicity, there is great interest in developing lead-free piezoelectric materials, which are biocompatible and environmentally friendlier. Recently alkali oxide materials, including sodium - potassium niobate (NKN), have been given attention in view of their ultrasonic application and also as promising candidates for piezoelectric lead-free system. However, it is difficult to sinter such NKN-based materials via conventional sintering process. In this reason, many researchers have investigated hot press, hot isostatic press or spark-plasma sintering of NKN-based ceramics. In this study, as candidates for lead-free piezoelectric materials, dense (Na,K,Li)(Nb,Sb)$O_3$ systems were developed by conventional sintering process. The microstructures and piezoelectric properties of the (Na,K,Li)(Nb,Sb)$O_3$ systems were investigated as a function of variable compositions. The excellent piezoelectric and electromechanical properties indicate that this system is potentially good candidate as lead-free material for a wide range of electro-mechanical transducer applications.