• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.647-648
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• 2011

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.10
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• pp.532-535
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• 2001

The sputtering condition of Cr thin film was established in order to get Cr gate electrode having a vertical wall structure for Mo-tip FEA. In case of Mo-tip FEA which had a vertically-etched Cr gate electrode, the field enhancement factor, was relatively increased and so the field emission performance in terms of turn-on voltage, emission current and trans-conductance could be improved when compared with the devices having a tapered gate wall.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1950-1953
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• 1996

A $1\;{\times}\;4$ micro mirror array is designed and fabricated. In contrast to other micro mirrors which utilize torsional flexure hinges or cantilevers for restoring torque and supporting purpose, we have placed a substrate hinge structure under each mirror. Each micro mirror consists of address electrode, substrate hinge consisting of pin and staple, supporter post, and mirror plate. Electrical connection between mirror plate and ground electrode is established by substrate hinge. Mirror undergoes a rotational motion due to electrostatic force when voltage difference is applied between address electrode and mirror plate. Micro mirrors with two different types of staple shape and two different pin sizes are designed and fabricated. Each mirror is designed to have ${\pm}\;10^{\circ}$ of deflection angle and have $100\;{\times}\;110\;{\mu}m^2$ of size.

• Journal of Electrical Engineering and Technology
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• v.6 no.3
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• pp.402-407
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• 2011

The current paper describes a simpler ground-type, single-plate electrowetting configuration for droplet transport in digital microfluidics without performance degradation. The simplified fabrication process is achieved with two photolithography steps. The first step simultaneously patterns both a control electrode array and a reference electrode on a substrate. The second step patterns a dielectric layer at the top to expose the reference electrode for grounding the liquid droplet. In the experiment, a $5{\mu}m$ thick photo-imageable polyimide, with a 3.3 dielectric constant, is used as the dielectric layer. A 10 nm Teflon-AF is coated to obtain a hydrophobic surface with a high water advancing angle of $116^{\circ}$ and a small contact angle hysteresis of $5^{\circ}$. The droplet movement of 1 mM methylene blue on this simplified device is successfully demonstrated at control voltages above the required 45 V to overcome the contact angle hysteresis.

• Journal of Semiconductor Engineering
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• v.1 no.3
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• pp.88-98
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• 2020

As biosensors are widely used in the medical field, flexible devices compatible with live animals have aroused great interest. Especially, significant research has been carried out to develop implantable or skin-attachable devices for real-time bio-signal sensing. From the device point of view, various biosensor types such as field-effect transistors (FETs) and multi-electrode arrays (MEAs) have been reported as diverse sensing strategies. In particular, the flexible FETs and MEAs allow semiconductor engineering to expand its application, which had been impossible with stiff devices and materials. This review summarizes the state-of-the-art research on flexible FET and MEA biosensors focusing on their materials, structures, sensing targets, and methods.

• Journal of Sensor Science and Technology
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• v.10 no.4
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• pp.259-265
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• 2001

FET-type dissolved oxygen sensor has the Pt working electrode around the pH-ISFET. Appling a voltage to the working electrode, the hydrogen ion which is proportional to the dissolved oxygen concentration occurs around the pH sensing gate and we can measure the dissolved oxygen concentration by detecting pH concentration through the pH-ISFET. In this paper, a dissolved oxygen measurement system using FET-type dissolved oxygen sensor array which adopt a specific algorithm to enhance the reliability has been developed and we compared its performance with the commercial dissolved oxygen measurement system.

• Journal of Sensor Science and Technology
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• v.23 no.1
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• pp.42-45
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• 2014

Recently, tremendous application utilizing electrospun nanofibers have been actively reported due to its several advantages, such as high surface to volume ratio, simple fabrication and high-throughput manufacturing. In this paper, we developed highly sensitive and consistent nanofiber humidity sensor by electrospinning. The humidity sensor was fabricated by rapid electrospinning (~2 sec) $TiO_2$/PVP/LiCl mixed solution on the micro-interdigitated electrode. In order to evaluate the humidity sensing performances, we measured current response using DC bias voltage under various relative humidity levels. The results show fast response / recovery time and marginal hysteresis as well as long-term stability. In addition, with the aid of micro-interdigitated electrode, we can reduce a total resistance of the sensor and increase the total reaction area of nanofibers across the electrodes resulting in high sensitivity and enhanced current level. Therefore, we expect that the electrospun nanofiber array for humidity sensor can be feasible and promising for diverse humidity sensing application.

• Smart Structures and Systems
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• v.28 no.6
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• pp.737-744
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• 2021

In this study, structural health monitoring (SHM) methods of carbon fiber reinforced plastics (CFRPs) were investigated using electrical resistance. The developed sensing technique monitored electrical resistance in accordance with the impact damage of a CFRP. The changes in electrical resistances with multiple electrode sets enabled SHM without extra sensors so that this technique can be called self-sensing. Moreover, this study proposed electrodes only at peripheral side of a structure to minimize the number of electrodes compared to those in an array which has square number of sensors as the sensing area increases. For the intensive investigation, electromechanical sensitivity in terms of electrode distance was analyzed and optimized under drop weight impact testing. Then, SHM methods with electrodes in an array and electrodes in peripheral edges were comparatively investigated. The developed methods successfully localized impact damages into 2D coordinates. Furthermore, damage severity can be shown with a damage map by calculating electrical resistance change ratio. Therefore, structural health self-sensing system using electrical resistance was successfully developed with the minimum number of electrodes.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.36 no.3
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• pp.241-249
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• 2012

This paper presents the lateral displacement of a particle passing over a planar interdigitated electrode array at an angle as a function of particle size. The lateral displacement was also measured as a function of the angle between the electrode and the direction of flow. A simplified line charge model was used for numerical estimation of the lateral displacement of fluorescent polystyrene (PS) beads with three different diameters. Using the lateral displacement as a function of particle size, we developed a lateral dielectrophoretic (DEP) microseparator, which enables the continuous discrimination of particles by size. The experiment using an admixture of 3-, 5-, and $10-{\mu}m$ PS beads showed that the lateral DEP microseparator could continuously separate out 99.86% of the $3-{\mu}m$ beads, 98.82% of the $5-{\mu}m$ beads, and 99.69% of the $10-{\mu}m$ beads. The lateral DEP microseparator is thus a practical device for the simultaneous separation of particles according to size from a heterogeneous admixture.

• Journal of Radiation Protection and Research
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• v.45 no.1
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• pp.35-44
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• 2020

Background: Cadmium zinc telluride (CZT) is a promising material because of a high detection efficiency, good energy resolution, and operability at room temperature. However, the cost of CZT dramatically increases as its size increases. In this study, to achieve a large effective volume with relatively low cost, an array structure comprised of individual virtual Frisch-grid CZT detectors was proposed. Materials and Methods: The prototype consisted of 2 × 2 CZTs, a holder, anode and cathode printed circuit boards (PCBs), and an application-specific integrated circuit (ASIC). CZTs were used and the non-contacting shielding electrode method was applied for virtual Frisch-grid effect. An ASIC was used, and the holder and the PCBs were fabricated. In the current system, because the CZTs formed a common cathode, a total of 5 channels were assigned for data processing. Results and Discussion: An experiment using ¹³⁷Cs at room temperature was conducted for 10 minutes. Energy and timing information was acquired and the depth of interaction was calculated by the timing difference between the signals of both electrodes. Based on obtained three-dimensional position information, the energy correction was carried out, and as a result the energy spectra showed the improvements. In addition, a Compton image was reconstructed using the iterative method. Conclusion: The virtual Frisch-grid CZT detector based on the array structure was developed and the energy spectra and the Compton image were successfully acquired.