• Tribology and Lubricants
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• 제37권6호
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• pp.213-223
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• 2021

Electrochemical mechanical planarization (ECMP) was developed to overcome the shortcomings of conventional chemical mechanical planarization (CMP). Because ECMP technology utilizes electrochemical reactions, it can have a higher efficiency than CMP even under low pressure conditions. Therefore, there is an advantage in that it is possible to reduce dicing and erosions, which are physical defects in semiconductor CMP. This paper summarizes the papers on ECMP published from 2003 to 2021 and analyzes research trends in ECMP technology. First, the material removal mechanisms and the configuration of the ECMP machine are dealt with, and then ECMP research trends are reviewed. For ECMP research trends, electrolyte, processing variables and pads, tribology, modeling, and application studies are investigated. In the past, research on ECMP was focused on basic research for the development of electrolytes, but it has recently developed into research on tribology and process variables and on new processing systems and applications. However, there is still a need to increase the processing efficiency, and to this end, the development of a hybrid ECMP processing method using another energy source is required. In addition, ECMP systems that can respond to the developing metal 3D printing technology must be researched, and ECMP equipment technology using CNC and robot technology must be developed.

• 대한환경공학회지
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• 제30권4호
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• pp.453-458
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• 2008

본 연구는 생활하수 최종처리수의 색도, 잔류 유기물질 제거 및 소독에 관한 연구를 Nb/Pt Anode 전극으로 구성된 전기분해장치를 이용하여 수행하였다. RNO는 OH$\cdot$에 의하여 빠르게 탈색시키며, 전류세기 5 A, 10 A, 15 A에서 RNO의 2차 분해속도는 각각 $\frac{0.223l}{mg{\cdot}min}$, $\frac{1.679l}{mg{\cdot}min}$, $\frac{2.322l}{mg{\cdot}min}$로 96% 이상의 r$^2$ 조사되었다. 회분식 전기분해장치에서 전류세기 15 A와 초기 pH 5, 7.5, 9일 때 15분 후 COD$_{Mn}$ 농도는 4 mg/L 미만, 색도는 5도 미만, 일반세균은 불검출로 먹는물 수질 기준값으로 조사되었다. 전기분해 연속 시스템의 HRT 3.7$\sim$49.2분에서 유리염소는 0.2$\sim$0.7 mg/L, 일반세균은 불검출, 색도는 5도 미만과 THMs는 0.017 mg/L이다. 그러므로 Nb/Pt anode 전기분해 공정은 소독뿐만 아니라 생물학적 처리수의 재이용 기술로 적용될 수 있다.

• 전기화학회지
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• 제20권1호
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• pp.1-6
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• 2017

본 연구에서는 구리 배선 공정에서 구리 씨앗층 표면에 형성되는 구리 자연산화물을 제거하는 표면 전처리가 후속 구리 전착에 미치는 영향을 살펴보았다. 구리 배선 공정의 화학적 기계적 연마 공정에서 사용하는 citric acid 기반의 용액을 구리 표면 전처리 과정에 적용하여 표면에 존재하는 구리 자연 산화물을 제거하였고, 용액 조성 변화를 통해 산화물 제거의 선택성을 높여 구리 씨앗층의 손실을 최소화하였다. 또한 표면 전처리 후 구리 전해 전착과 무전해 전착을 시도하여 전착한 박막의 비저항, 표면 거칠기 등의 성질을 비교하고, 이를 통해 선택적으로 구리 산화물을 제거한 이후에 전착된 박막의 비저항과 표면 거칠기가 가장 낮게 나타남을 확인하였다.

• Restorative Dentistry and Endodontics
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• 제19권2호
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• pp.611-620
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• 1994

The purpose of this study was to evaluate the effect of post space preparation on apical sealing according to the methods and time of gutta percha removal. Forty six extracted single rooted teeth were selected for this study. Forty teeth were used as experimental groups and six teeth as control groups. Forty teeth were routinely prepared by step-back method and obturated with gutta percha cones and zinc oxide-eugenol cement using lateral condensation. All obturated teeth were divided into 4 groups of 10 teeth each. In each group of 1, 2, 3, heated plugger, gate glidden drill and chloroform and K-file were used respectively for post space preparation by removing the gutta percha immediately after obturation. In group 4, post space were prepared with gate glidden drill one week after obturation. In all experimental groups, the post space were prepared so that 4mm of apical gutta percha remained. After post space preparation, apical leakage were measured with electrochemical method for 28 days and analyzed statistically. The following results were obtained ; 1. No statistically significant differences in apical leakage were occured among the experimental groups using heated plugger, gate glidden drill and chloroform and K-file to remove the gutta percha immediately after obturation. 2. No significant difference in apical leakage was found between the teeth prepared post space immediately after obturation and those prepared 1 week after obturation. 3. In all experimental groups, the apical leakage was increased with time passage regardless of the post space preparation time and the gutta percha removal techniques.

• Korean Chemical Engineering Research
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• 제46권5호
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• pp.1013-1016
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• 2008

본 연구에서는 폐수 내 존재하는 질산성 질소를 제거하기 위해 캐소드물질로 철(Fe), 구리(Cu), 니켈(Ni), 아연(Zn)을 선택하여 전기화학적 환원반응 특성을 조사하였다. $NO_3^-$로부터 $NH_3$로의 변환반응에 있어서 Zn이 가장 우수한 촉매 특성을 가지고있으며, pH 8.5에서 가장 높은 질산성 질소 제거 효율을 나타내었다. 전극표면에서 질산성 질소는 아질산성 질소로 환원된 후, 암모니아성 질소로 전환되는 것을 확인하였으며 암모니아성 질소는 HOCl과의 화학반응을 통하여 질소 형태로 완전히 제거할 수 있었다.

• 환경위생공학
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• 제11권2호
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• pp.53-58
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• 1996

This study was performed to measure and evaluate the characteristics of removal efficiency and kinetics in the electrolytic decolorizing process of dye wastewater containing acid dye Red 114 by using Fe anode. The synthetic wastewater samples of 500, 1000, $2000mg/{\ell}$ concentration were tested and as an attempt to assess the feasibility of the present system for the industrial application, a sample of wastewater collected by J textile factory in Eujungbu city was also treated. It was found that the optimum conditions were pH 7, 8Volt and removal efficiency in synthetic wastewater containing $2000mg/{\ell}$ of dye and 0.2% of electrolyte (NaCl) was 99.68% after 20minutes of reaction time. In this condition, overall rate constant was $4.77{\times}10^{-5}mmol/cm^{3}hr$. The Decolorizing efficiency and COD removal efficiency of J textile factory wastewater were 99% and 86% respectively at pH 7, 8Volt for 40minutes of reaction time.

• 한국환경보건학회:학술대회논문집
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• 한국환경보건학회 2003년도 Challenges and Achievements in Environmental Health
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• pp.98-101
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• 2003

The pilot scale experiment was performed to investigate phosphorus and nitrogen removal from sewage by intermittently activated sludge process combined with the electrochemical interaction (Localized Corrosion) of aluminum and silver. The average T-N removal rate for HRT of 24hr was 57.4%. It was possible to remove P in sewage to under 1 mg/L with a short HRT of 12 hr using Al and Ag plate but often required additional A1 plate supplement during the operation.

• 상하수도학회지
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• 제25권6호
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• pp.989-994
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• 2011

Nitrate contamination of groundwater is a common problem throughout intensive agriculture areas (non-point source pollution). Current processes (e.g. ion exchange and membrane separation) for nitrate removal have various disadvantages. The objective of this study was to evaluate electrochemical method such as electroreduction using bipolar ZVI packed bed electrolytic cell to remove nitrate from groundwater at field pilot. In addition ammonia stripping tower continuously removed up to 77.0% of ammonia. Bipolar ZVI packed bed electrolytic cell also removed E.coli. In the field pilot experiment for groundwater in 'I' city (average nitrate 30~35 mg N/L, pH 6.4), maximum 99.9% removal of nitrate was achieved in the applied 600 V.

• 환경위생공학
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• 제12권3호
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• pp.131-138
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• 1997

In this study, the effect of the various operating conditions on the removal of $Cr^{6+}$ from $Cr^{6+}$ containing wastewater which has strong toxicity by using electrolysis with iron electrode as anode and aluminum electrode as cathode was investigated. The removal efficiency of $Cr^{6+}$ was increased as the pH was decreased, as the distance of electrode was decreased and the voltage was increased. The reaction temperature slightly affected the removal efficiency. The optimum conditions for the treatment of $Cr^{6+}$ containing wastewater were initial pH 3, 5 volt and the distance of electrode was 1cm. The feasibility of the electrochemical treatment to the $Cr^{6+}$ containing industrial wastewater was verified from this study.

• 한국물환경학회지
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• 제23권2호
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• pp.244-250
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• 2007

This study was carried out to obtain the optimum design factors for an eletrolytric flotation reactor. When the effluent of the leachate treatment facility was treated under the condition of 10 volts, 30 minutes, at the Al-Al electrode system; COD removal efficiency was 45%, and total phosphorus removal efficiency was 98%. The high removal efficiency was caused by the fact that phosphate was removed by leaching $Al^{3+}$ from two electrodes. The leachate containing high ammonium nitrogen concentration was treated by a batch test under the condition of 60 minutes reaction time and added chloride ion; ammonium nitrogen removal efficiency was 89%. This high efficiency was affected by added chloride ion to wastewater. To find the optimum current density and voltage of the leachate containing chloride ion (ratio of $Cl^-/NH_4-N$ is 11) a electrochemical polarization curve was used. These values were found to be $4.5mA/cm^2$ and about 2.1 V, respectively. When C-Al electrode system was used at a batch test, the total nitrogen removal efficiency was increased by 1.8 to 3.3 times, compared to Al-Al electrode system due to high $Cl_2$ gas production.