• Title/Summary/Keyword: Electrochemical Migration

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Study of defect characteristics by electrochemical plating thickness in copper CMP (Copper CMP에서 Electrochemical Plating 두께에 따른 Defect 특성 연구)

  • Kim, Tae-Gun;Kim, Nam-Hoon;Kim, Sang-Yong;Chang, Eui-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.125-126
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    • 2005
  • Recently semiconductor devices are required more smaller scale and more powerful performance. For smaller scale of device, multilayer structure is proposed. And, for the higher performance, interconnection material is change to copper, because copper has high EM(Electro-migration)and low resistivity. Then copper CMP process is a great role in a multilayer formation of semiconductor. Copper process is different from aluminum process. ECP process is one of the copper processes. In this paper, we focused on the defects tendency by copper thickness which filled using ECP process. we observed hump high and dishing. Conclusively, hump hight reduced at copper thickness increased Also dishing reduced.

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Mass Transport Properties and Influence of Natural Convection for Voltammetry at the Agarose Hydrogel Interface

  • Kim, Byung-Kwon;Park, Kyungsoon
    • Journal of Electrochemical Science and Technology
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    • v.13 no.3
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    • pp.347-353
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    • 2022
  • Agarose hydrogel, a solid electrolyte, was investigated voltammetrically in terms of transport properties and natural convection effects using a ferrocenyl compound as a redox probe. To confirm the diffusion properties of solute on the agarose interface, the diffusion coefficients (D) of ferrocenemethanol in agarose hydrogel were determined by cyclic voltammetry (CV) according to the concentration of agarose hydrogel. While the value of D on the agarose interface is smaller than that in the bulk solution, the square root of the scan rate-dependent peak current reveals that the mass transport behavior of the solute on the agarose surface shows negligible convection or migration effects. In order to confirm the reduced natural convection on the gel interface, scan rate-dependent CV was performed in the solution phase and on the agarose surface, respectively. Slow scan voltammetry at the gel interface can determine a conventional and reproducible diffusion-controlled current down to a scan rate of 0.3 mV/s without any complicated equipment.

Development of LiFePO4/FePO4 Electrode for Electro-Osmotic Pump using Li+ Migration

  • Baek, Jaewook;Kim, Kyeonghyeon;Shin, Woonsup
    • Journal of Electrochemical Science and Technology
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    • v.9 no.2
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    • pp.85-92
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    • 2018
  • Olivine structure of $LiFePO_4$ (LFP) is one of the most commonly used materials in aqueous rechargeable lithium batteries (ARLBs), and can store and release charge through the insertion/de-insertion of $Li^+$ between LFP and FP. We have fabricated LFP and LFP/FP electrodes on titanium paper and studied their electrochemical properties in 2 M $Li_2SO_4$. The LFP/FP electrode was determined to be a suitable electrode for electo-ostmotic pump (EOP) in terms of efficiency in water and 0.5 mM $Li_2SO_4$ solution. Experiments to determine the effect of cations and anions on the performance of EOP using LFP/FP electrode have shown that $Li^+$ is the best cation and that the anion does not significantly affect the performance of the EOP. As the concentration of $Li_2SO_4$ solution was increased, the current increased. The flow rate peaked at $4.8{\mu}L/30s$ in 1.0 mM $Li_2SO_4$ solution and then decreased. When the EOP was tested continuously in 1.0 mM $Li_2SO_4$ solution, the EOP transported approximately 35 mL of fluid while maintaining a stable flow rate and current for 144 h.

Electrochemical Synthesis of High Strength Nanotwin Copper Films (고강도 나노트윈 구리박막의 전기화학적 합성)

  • Wang, Geon;Seo, Seong-Ho;Jin, Sang-Hyeon;Lee, Jun-Gyun;Yu, Bong-Yeong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2014.11a
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    • pp.75-76
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    • 2014
  • Copper는 2차 전지 및 PCB 등 Electrical Device에 빠짐없이 들어가는 핵심 부품이다. 반도체 배선재료 또한 Aluminum에서 Copper로 대체되어 Electrical Conductivity 및 Electro-migration 문제를 해결할 수 있었다. 최근 배선의 미세화 및 전지용량 증가로 인해 보다 얇으면서, 동시에 높은 기계적 강도를 가지는 Copper Film의 필요성이 요구되고 있다.

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A Study on the Reliability Prediction about ECM of Packaging Substrate PCB by Using Accelerated Life Test (가속수명시험을 이용한 Packaging Substrate PCB의 ECM에 대한 신뢰성 예측에 관한 연구)

  • Kang, Dae-Joong;Lee, Hwa-Ki
    • Journal of the Korea Safety Management & Science
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    • v.15 no.1
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    • pp.109-120
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    • 2013
  • As information-oriented industry has been developed and electronic devices has come to be smaller, lighter, multifunctional, and high speed, the components used to the devices need to be much high density and should have find pattern due to high integration. Also, diverse reliability problems happen as user environment is getting harsher. For this reasons, establishing and securing products and components reliability comes to key factor in company's competitiveness. It makes accelerated test important to check product reliability in fast way. Out of fine pattern failure modes, failure of Electrochemical Migration(ECM) is kind of degradation of insulation resistance by electro-chemical reaction, which it comes to be accelerated by biased voltage in high temperature and high humidity environment. In this thesis, the accelerated life test for failure caused by ECM on fine pattern substrate, $20/20{\mu}m$ pattern width/space applied by Semi Additive Process, was performed, and through this test, the investigation of failure mechanism and the life-time prediction evaluation under actual user environment was implemented. The result of accelerated test has been compared and estimated with life distribution and life stress relatively by using Minitab software and its acceleration rate was also tested. Through estimated weibull distribution, B10 life has been estimated under 95% confidence level of failure data happened in each test conditions. And the life in actual usage environment has been predicted by using generalized Eyring model considering temperature and humidity by developing Arrhenius reaction rate theory, and acceleration factors by test conditions have been calculated.

Study of the Calendar Aging of Lithium-Ion Batteries Using SEI Growth Models (SEI 성장 모델을 이용한 리튬 이온 배터리의 캘린더 노화 연구)

  • Dong Hyup Jeon;Byungman Chae;Sangwoo Lee
    • Applied Chemistry for Engineering
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    • v.35 no.1
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    • pp.48-53
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    • 2024
  • We predicted the calendar aging and long-term lifetime of lithium-ion batteries using an electrochemical-based SEI growth model. Numerical simulation was carried out employing the four different long-term SEI growth models (i.e., solvent diffusion limited model, electron migration limited model, Li-interstitial diffusion limited model, reaction limited model), and we calculated the capacity fade and loss of lithium inventory during calendar aging. The result showed that the electron migration limited model and Li-interstitial diffusion limited model showed lower capacity fade, while the solvent diffusion limited model and reaction limited model reached 80% of capacity fade within 10 years. During calendar aging, the lower storage temperature showed less capacity fade due to the hindrance of SEI growth rate. During cycling, the higher C-rate showed a shorter life cycle; however, the differences were not significant.

Effect of Support on the Performance and Electrochemical Durability of Membrane in PEMFC (PEMFC의 고분자막에서 지지체가 고분자전해질 막 성능 및 전기화학적 내구성에 미치는 영향)

  • Oh, Sohyung;Lim, Dae Hyun;Lee, Daewoong;Park, Kwonpil
    • Korean Chemical Engineering Research
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    • v.58 no.4
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    • pp.524-529
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    • 2020
  • To increase the mechanical durability of the proton exchange membrane fuel cells, a reinforced membrane in which a support is placed in the polymer membrane is used. The support mainly uses e-PTFE, which is hydrophobic and does not transfer ions, which may cause performance degradation. In this study, we investigated the effect of e-PTFE support on PEMFC performance and electrochemical durability. In this study, the reinforced membrane with the support was compared with the single membrane (non-reinforced membrane). Due to the hydrophobicity of the support, the water diffusion coefficient of the reinforced membrane was lower than that of the single membrane. The reinforced membrane had a lower water diffusion coefficient, resulting in higher HFR, which is the membrane migration resistance of ions, than that of a single membrane. Due to the low hydrogen permeability of the support, the OCV of the reinforced membrane was higher than that of the single membrane. The support was shown to reduce the hydrogen permeability, thereby reducing the rate of radical generation, thereby improving the electrochemical durability of the reinforced membrane.

Structural and Electrochemical Properties of Doped LiFe0.48Mn0.48Mg0.04PO4 as Cathode Material for Lithium ion Batteries

  • Jang, Donghyuk;Palanisamy, Kowsalya;Kim, Yunok;Yoon, Won-Sub
    • Journal of Electrochemical Science and Technology
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    • v.4 no.3
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    • pp.102-107
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    • 2013
  • The electrochemical properties of Mg-doped $LiFe_{0.48}Mn_{0.48}Mg_{0.04}PO_4$ and pure $LiFe_{0.5}Mn_{0.5}PO_4$ olivine cathodes are examined and the lattice parameters are refined by Rietveld analysis. The calculated atomic parameters from the refinement show that $Mg^{2+}$ doping has a significant effect in the olivine $LiFeMnPO_4$ structure. The unit cell volume is 297.053(2) ${\AA}^3$ for pure $LiFe_{0.5}Mn_{0.5}PO_4$ and is decreased to 296.177(1) ${\AA}^3$ for Mg-doped $LiFe_{0.48}Mn_{0.48}Mg_{0.04}PO_4$ sample. The doping of $Mg^{2+}$ cation with atomic radius smaller than $Mn^{2+}$ and $Fe^{2+}$ ion induces longer Li-O bond length in $LiO_6$ octahedra of the olivine structure. The larger interstitial sites in $LiO_6$ octahedra facilitate the lithium ion migration and also enhance the diffusion kinetics of olivine cathode material. The $LiFe_{0.48}Mn_{0.48}Mg_{0.04}PO_4$ sample with larger Li-O bond length delivers higher discharge capacities and also notably increases the rate capability of the electrode.

Rapid Chloride Penetration Test for Concrete Based on the Electrochemical Method (전기 영동법에 기초한 콘크리트의 급속 염소이온 확산 특성 평가)

  • Oh, Sang-Gyun;Park, Dong-Cheon
    • Journal of Navigation and Port Research
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    • v.34 no.10
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    • pp.787-792
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    • 2010
  • It is necessary to predict the penetration of chloride ions for designing RC construction in marine environments. However, it takes a long time to obtain chloride migration coefficients. Therefore, the rapid chloride penetration test (RCPT) is generally used to shorten the test time. But there is a difference between chloride migration coefficients determined by rapid chloride penetration tests and those based on exposure in marine environments. In this study, we evaluated the effect on the chloride ion migration coefficient caused by a change in voltage and NaCl concentration. We also compared the relationship between the chloride ion migration coefficient by RCPT and that by exposure in marine environments. As a result of the experiments, we found that there is only a small change in the experimental factors based on changes in voltage and NaCl concentration and since they are so small, we can conclude that they are in the range of experimental error and test results from chloride ion migration coefficients by RCPT and exposure were very different from each other. In the exposure experiments, when the water-cement ratio was increased, the smaller fine air gaps in concrete affected the chloride ion migration coefficient.

Study of physical simulation of electrochemical modification of clayey rock

  • Chai, Zhaoyun;Zhang, Yatiao;Scheuermann, Alexander
    • Geomechanics and Engineering
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    • v.11 no.2
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    • pp.197-209
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    • 2016
  • Clayey rock has large clay mineral content. When in contact with water, this expands considerably and may present a significant hazard to the stability of the rock in geotechnical engineering applications. This is particularly important in the present work, which focused on mitigating some unwelcomed properties of clayey rock. Changes in its physical properties were simulated by subjecting the rock to a low voltage direct current (DC) using copper, steel and aluminum electrodes. The modified mechanism of the coupled electrical and chemical fields acting on the clayey rock was analyzed. It was concluded that the essence of clayey rock electrochemical modification is the electrokinetic effect of the DC field, together with the coupled hydraulic and electrical potential gradients in fine-grained clayey rock, including ion migration, electrophoresis and electro-osmosis. The aluminum cathodes were corroded and generated gibbsite at the anode; the steel and copper cathodes showed no obvious change. The electrical resistivity and uniaxial compressive strength (UCS) of the modified specimens from the anode, intermediate and cathode zones tended to decrease. Samples taken from these zones showed a positive correlation between electric resistivity and UCS.