• Journal of the Microelectronics and Packaging Society
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• v.13 no.3 s.40
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• pp.9-12
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• 2006

We have designed and fabricated micro power generators by electroplating which is important in MEMS(micro electro mechanical system) technique. We have electroplated MEMS coils on the glass substrates and have chosen one of these coils for experiments. The thickness, width, and length of the coil are $7{\mu}m,\;20{\mu}m$, and 1.6 m, respectively. We have analyzed the structure of MEMS coil by SEM. We have made a vibrating system for reproducible results in measurement. With reciprocating a magnet on the surface of a fabricated winding coil, the micro power generator produce an alternating voltage. We have changed the vibrational frequency from 0.5 Hz to 8 Hz. The generated voltage was 106 mV at 3 Hz and 198 mV at 6 Hz. We aim at the micro power generator which can change vibration energy to useful electric energy.

• Korean Journal of Optics and Photonics
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• v.33 no.2
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• pp.74-83
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• 2022

The entire process, from the raw material to the final system qualification test, has been developed to fabricate a large-diameter, lightweight reflective-telescope system for a satellite observation. The telescope with 3 anastigmatic mirrors has an aperture of 700 mm and a total mass of 66 kg. We baked a silicon carbide substrate body from a carbon preform using a reaction sintering method, and tested the structural and chemical properties, surface conditions, and crystal structure of the body. We developed the polishing and coating methods considering the mechanical and chemical properties of the silicon carbide (SiC) body, and we utilized a chemical-vapor-deposition method to deposit a dense SiC thin film more than 170 ㎛ thick on the mirror's surface, to preserve a highly reflective surface with excellent optical performance. After we made the SiC mirrors, we measured the wave-front error for various optical fields by assembling and aligning three mirrors and support structures. We conducted major space-environment tests for the components and final assembly by temperature-cycling tests and vibration-shock tests, in accordance with the qualifications for the space and launch environment. We confirmed that the final telescope achieves all of the target performance criteria.

• Journal of Korean Society of Steel Construction
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• v.22 no.5
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• pp.477-485
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• 2010

Various monitoring sensors are used to predict and detect structural damage. Smart sensors, such as glass-fiber sensors, PZT, and MEMS, among others, have replaced traditional sensors. They are now being used in many areas. This study aims to predict the damage by measuring the PZT voltage attached on the specimen by the applied impact load. In the experiment to detect damages in beam connection, simple $H-400{\times}200{\times}8{\times}13$ beams were spliced with bolts. The results of FFT between PZT sensor and accelrometer were compared to measure the sensitivity of the PZT sensor. The damage to the beam was presumed by loosening the bolt, and then the damage measurement was accompanied. Secondly, a steel $PL600{\times}65{\times}5.8$ plate beam was fabricated for the purpose of experimenting on damage measurement. Impact loading test on three different locations was carried out. Damage width varied between 6~42mm on both sides by cutting, using a steel saw. The ratio of frequencies before and after the damage was computed to quantify the damage level by using FFT, and the change in mode pattern with the increased damage was investigated to measure the damage.

• Journal of the Microelectronics and Packaging Society
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• v.14 no.4
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• pp.57-61
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• 2007

We designed and fabricated square coils of 4 layered structure on a PCB board. The size of the coils were $1{\times}1cm^2\;and\;$2{\times}2cm^2$. The line width of the fabricated coils was $100{\mu}m$. By reciprocating a magnet on the surface of a fabricated square coil which is composed of 4 layers, an alternating output voltage was obtained. We changed the vibrational frequency from 0.5 to 7 Hz. The generated voltages were 62 mV at $1{\times}1cm^2$ and 245 mV at $2{\times}2cm^2$ when 5.5 Hz frequency. We rectified and stepped up the output voltage using a quadrupler circuit and $2{\times}2cm^2$ coil. Before using the step up circuit, the measured voltage was 320 mV at 7 Hz. After using the step up circuit, the measured voltage was 400 mV at 7 Hz.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.194-194
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• 2008

Lead oxide based ceramics, represented by PZT, are the most widely used materials for piezoelectric actuators, sensors, and transducers due to their excellent piezoelectric properties. In particular, high-performance multilayered piezoelectric ceramics for advanced electronic components have drawn great attention. In order to develop piezoelectric ceramics capable of being sintered at low temperature for multilayer piezoelectric device applications, the effect of CuO additions on the microstructures and electromechanical properties of the 0.4Pb$(Mg_{1/3}Nb_{2/3})O_3-0.25PbZrO_3-0.35PbTiO_3$ ceramics was investigated. The samples with CuO addition were synthesized by ordinary sintering technique. X-ray diffractions indicated that all samples formed a single phase perovskite structure. The addition of CuO improved the sinterability of the samples and caused an increase in the density and grain size at low temperature. The optimum sintering temperature was lowered by CuO additions. Excellent piezoelectric and electromechanical responses, $d_{33}$ ~ 663 pC/N, $k_p$ ~ 0.72, were obtained for the samples of high density with 0.1 wt% CuO addition sintered at $1050^{\circ}C$ for 4 h in air. These results show that the piezoelectric properties of PMNZT ceramics can be improved by controlling the microstructure and this system is potentially a good candidate as multilayer piezoelectric device for a wide range of electro-mechanical transducer applications.

• Korean Journal of Optics and Photonics
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• v.15 no.4
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• pp.385-390
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• 2004

In this paper, we designed a 4-bit optical true time-delay(TTD) for phased array antennas(PAAs), which is composed of a wavelength-fixed optical source, 2 ${\times}$ 2 optical MEMS switches, and fiber-optic delay lines. A 4-bit TTD with a unit time delay difference of 6 ps for 10-GHz PAAs has been implemented. Measurement results on time delay show an error of -0.4 ps at maximum, corresponding to a radiation angle error of less than 1.63$^{\circ}$. Thus, the TTD implemented in this research performs in excellent agreement with theory. Each TTD line, composed of MEMS switches and fiber-optic delay lines, connected to the corresponding antenna element has insertion loss in between 1.36 ㏈ and 2.40 ㏈ depending upon the setup of the switches. On the other hand, the insertion loss difference between TTD lines was 0.32 ㏈ at maximum for a fixed radiation angle. The TTD structure proposed in this paper might be more reliable and economical than those previously proposed using tunable wavelength sources if proper power equalization either with gain control of RF amplifiers or variable attenuators is achieved.

• Journal of the Korean Society for Nondestructive Testing
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• v.24 no.6
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• pp.573-580
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• 2004

The main goal of this study was to develop a micro-fabrication process for the capacitive micromachined ultrasonic transducer (cMUT). In order to achieve this goal, the former research results of the micro-electro-mechanical system (MEMS) process for the cMUT were analyzed. The membrane deposition, sacrificial layer deposition and etching were found to be a main process of fabricating the cMUT. The optimal conditions for those microfabrication were determined by the experiment. The thickness, uniformity, and residual stress of the $Si_3N_3$ deposition which forms the membrane of the cMUT were characterized after growing the $Si_3N_3$ on Si-wafer under various process conditions. As a sacrificial layer, the growth rate of the $SiO_2$ deposition was analyzed under several process conditions. The optimal etching conditions of the sacrificial layer were analyzed. The microfabrication process developed in this study will be used to fabricate the cMUT.

• Korean Journal of Optics and Photonics
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• v.16 no.3
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• pp.287-294
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• 2005

In this paper, an optical true time-delay (TTD) for two-dimensional (2-D) phased array antennas (PAAs), composed of a multi-wavelength optical source and a fiber optic delay line matrix consisting of $2\times2$ optical switches with optical fiber connected between cross ports, has been proposed. A 2-bit $\times4-bit$ optical TTD for 10-GHz 2-D PAAs has been implemented by cascading a wavelength dependent TTD (WD-TTD) and a wavelength independent TTD (WI-TTD). The unit time delay for WD-TTD and WI-TTD have been chosen as ${\Delta}T=12ps$ and $\Delta\tau=6ps$, respectively. Time delay have been measured at all radiation angles. The maximum delay error for WD-TTD was measured to be 3 ps due to jitter incurred from gain switching. For the case of WI-TTD, error was within ${\pm}\;1\;ps$. The proposed optical TTD for a 2-D PAA has the following advantages: 1) higher gain compared to one-dimensional linear PAAs, 2) stabilization of optical power and wavelength by using a multi-wavelength optical source, and 3) fast beam scan and simple operation due to electronic control of the $2\times2$ optical switches matrix on a column-by-column basis.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.40 no.2
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• pp.397-407
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• 2015

In this paper, we designed 1 chip IC for 3-axis gyroscope and 3-axis accelerometer used for various IoT/M2M mobile devices such as smartphone, wearable device and etc. We especially focused on analysis of gyroscope noise and proposed new architecture for removing various noise generated by gyroscope MEMS and IC. Gyroscope, accelerometer and geo-magnetic sensors are usually used to detect user motion or to estimate moving distance, direction and relative position. It is very important element to designing a low noise IC because very small amount of noise may be accumulated and affect the estimated position or direction. We made a mathematical model of a gyroscope sensor, analyzed the frequency characteristics of MEMS and circuit, designed a low noise, compact and low power 1 chip 6-axis inertial sensor IC including 3-axis gyroscope and 3-axis accelerometer. As a result, designed IC has 0.01dps/${\sqrt{Hz}}$ of gyroscope sensor noise density.

• Geophysics and Geophysical Exploration
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• v.25 no.4
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• pp.167-176
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• 2022

We designed a borehole deviation survey tool applicable for steel-cased holes, K-DEV, and developed a prototype for a depth of 500 m aiming to development of own equipment required to secure deep subsurface characterization technologies. K-DEV is equipped with sensors that provide digital output with verified high performance; moreover, it is also compatible with logging winch systems used in Korea. The K-DEV prototype has a nonmagnetic stainless steel housing with an outer diameter of 48.3 mm, which has been tested in the laboratory for water resistance up to 20 MPa and for durability by running into a 1-km deep borehole. We confirmed the operational stability and data repeatability of the prototype by constantly logging up and down to the depth of 600 m. A high-precision micro-electro-mechanical system (MEMS) gyroscope was used for the K-DEV prototype as the gyro sensor, which is crucial for azimuth determination in cased holes. Additionally, we devised an accurate trajectory survey algorithm by employing Unscented Kalman filtering and data fusion for optimization. The borehole test with K-DEV and a commercial logging tool produced sufficiently similar results. Furthermore, the issue of error accumulation due to drift over time of the MEMS gyro was successfully overcome by compensating with stationary measurements for the same attitude at the wellhead before and after logging, as demonstrated by the nearly identical result to the open hole. We believe that the methodology of K-DEV development and operational stability, as well as the data reliability of the prototype, were confirmed through these test applications.