• 제목/요약/키워드: Electrical Doping

검색결과 1,087건 처리시간 0.024초

플라즈마 도핑을 이용한 결정질 태양전지 에미터층 형성 연구 (A Study on Emitter layer by Plasma Doping for Crystalline Silicon Solar Cells)

  • 유동열;노시철;최정호;김정환;서화일;김영철
    • 반도체디스플레이기술학회지
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    • 제10권4호
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    • pp.61-64
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    • 2011
  • In order to grow the crystalline solar cells industry continuously, development of alternate low-cost manufacturing processes is required. Plasma doping system is the technique for introducing dopants into semiconductor wafers in CMOS devices. In photovoltaics, plasma doping system could be an interesting alternative to thermal furnace diffusion processes. In this paper, plasma doping system was applied for phosphorus doping in crystalline solar cells. The Plasma doping was carried out in 1~4 KV bias voltages for four minutes. For removing surface damage and formation of pn junction, annealing steps were carried out in the range of $800{\sim}900^{\circ}C$ with $O_2$ ambient using thermal furnace. The junction depth in about $0.35{\sim}0.6{\mu}m$ range have been achieved and the doping profiles were very similar to emitter by thermal diffusion. So, It could be confirmed that plasma doping technique can be used for emitter formation in crystalline solar cells.

대기압 플라즈마를 이용한 P타입 태양전지 웨이퍼 도핑 연구 (Study of P-type Wafer Doping for Solar Cell Using Atmospheric Pressure Plasma)

  • 윤명수;조태훈;박종인;김상훈;김인태;최은하;조광섭;권기청
    • Current Photovoltaic Research
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    • 제2권3호
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    • pp.120-123
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    • 2014
  • Thermal doping method using furnace is generally used for solar-cell wafer doping. It takes a lot of time and high cost and use toxic gas. Generally selective emitter doping using laser, but laser is very high equipment and induce the wafer's structure damage. In this study, we apply atmospheric pressure plasma for solar-cell wafer doping. We fabricated that the atmospheric pressure plasma jet injected Ar gas is inputted a low frequency (1 kHz ~ 100 kHz). We used shallow doping wafers existing PSG (Phosphorus Silicate Glass) on the shallow doping CZ P-type wafer (120 ohm/square). SIMS (Secondary Ion Mass Spectroscopy) are used for measuring wafer doping depth and concentration of phosphorus. We check that wafer's surface is not changed after plasma doping and atmospheric pressure doping width is broaden by increase of plasma treatment time and current.

In-situ $NH_3$ doping에 따른 $GaAs_{0.35}P_{0.65}$ 에피막의 특성 (The Characteristics of $GaAs_{0.35}P_{0.65}$ Epitaxial Layer According to in-situ doping of $NH_3$ gas)

  • 이은철;이철진
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1998년도 하계학술대회 논문집 D
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    • pp.1249-1251
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    • 1998
  • We have studied the properties of $GaAs_{0.35}P_{0.65}$ epitaxial films on the GaP according to doping of $NH_3$ gas using VPE method by CVD. The efficiency of $GaAs_{0.35}P_{0.65}$ epitaxial films found to be greatly enhanced by the according of nitrogen doping. The diodes were fabricated by means of Zn diffusion into vapor grown $GaAs_{0.35}P_{0.65}$ epitaxial films doped with N and Te. The effects of nitrogen doping on carrier density of epitaxial films, PL wavelength and the power out, forward voltage of diodes are discussed. In the end, The effect of electrical and optical properties is influenced by the deep level and deep level density of nitrogen doping.

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INFLUENCE OF ANTHRECENE DOPING ON ELECTRICAL AND LIGHT-EMITTING BEHAYIOR OF 8-HYDROXYQUINOLINE-ALUMINUM BESED ELECTROLUMINESCENT DEVICES

  • Kinoshita, Osamu;Yamaguchi, Ryuichi;Masui, Masayoshi;Takeuchi, Manabu
    • 한국표면공학회지
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    • 제29권5호
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    • pp.449-453
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    • 1996
  • In order to improve EL performance, anthracene was doped into the 8-hydroxyquinoline-aluminum (Alq$^3$) light-emitting layer of organic double layered EL cells. The EL cells were fabricated on ITO glass substrates by vacuum deposition. Doping of anthracene to the light-emitting $Alq^3$layer was performed by means of co-evaporation. The doping concentration was changed in the range of 5 to 30 wt.%. It was confirmed that anthracene doping of appropriate concentration increased the available current density and brightness of the EL cells. Carrier mobility of the $Alq^3$ layer was measured by time of flight method. The influence of anthracene doping on the cell performance was discussed.

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Mo 치환한 $BiNbO_{4}$ 세라믹 후막 모노폴 안테나의 전기적 특성 (The effects of Mo doping on Electrical Properties of $BiNbO_{4}$ Ceramic Thick Film Monopole Antenna)

  • 서원경;안성훈;정천석;이재신
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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    • pp.300-304
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    • 2002
  • We fabricated thick film monopole antennas using Mo-doped $BiNbO_{4}$ ceramics and investigated their electrical properties as a function of the Mo-doping concentration. Compared with undoped $BiNbO_{4}$ ceramics, 10 at.% Mo-doping improved microwave dielectric properties of ceramics by increased sintered density as well as decreased space charge density. Further increase in the Mo-doping concentration caused formation of $Bi_{2}MoO_{6}$ phases, resulting in deterioration of the microwave characteristics. The gain and bandwidth of the ceramic monopole antenna were also greatly affected by the Mo-doping concentration. When Mo-doping concentration was 10 at%, highest gain of ~0.7dBi with lowest bandwidth of 30% at 2.3GHz was obtained.

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Bi계 초전도체의 도우핑 특성 (Doping Characteristics of Bi System Superconductor)

  • 양승호;정진인;박용필
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1999년도 추계학술대회 논문집 학회본부 C
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    • pp.915-917
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    • 1999
  • We investigated the effects of doping elements on the Bi system superconductor. The doping elements can be classified into two groups depending on their supeconducting characteristics in the Bi-Sr-Ca-Cu-O structure. The first group of doping elements(P and K) have a tendency to decompose the superconducting phase and reduce the optimal sintering temperature. The second group of doping elements(B, Si, Sn and Ba) almost uneffected the superconductivity of the 2223 and 2212 phase.

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Mo을 치환한 BiNbO4 세라믹 후막 모노폴 안테나의 전기적 특성 (The Electrical Properties of Mo-doped BiNbO4 Ceramic Thick Film Monopole Antenna)

  • 서원경;허대영;최문석;안성훈;정천석;이재신
    • 한국전기전자재료학회논문지
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    • 제16권11호
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    • pp.987-993
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    • 2003
  • We fabricated thick film monopole antennas using Mo-doped BiNbO$_4$ ceramics and investigated their electrical properties as a function of the Mo-doping concentration. Compared with undoped BiNbO$_4$ ceramics, 10 at.% Mo-doping improved microwave dielectric properties of ceramics by increased sintered density as well as decreased space charge density. Further increase in the Mo-doping concentration caused formation of Bi$_2$MoO$_{6}$ phases, resulting in deterioration of the microwave characteristics. The gain and bandwidth of the ceramic monopole antenna were also greatly affected by the Mo-doping concentration. When Mo-doping concentration was 10 at.%, highest gain of -0.7dBi with lowest bandwidth of 30% at 2.3GHz was obtained.

Effect of Doping State on Photoresponse Properties of Polypyrrole

  • Choi, Jongwan
    • Elastomers and Composites
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    • 제56권4호
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    • pp.250-253
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    • 2021
  • Polypyrrole is an organic thermoelectric material which has been receiving extensive attention in recent years. Polypyrrole is applicable in various fields because its electrical properties are controllable by its doping concentration. In this study, the effects of the polypyrrole doping state on its photoresponse were investigated. The degree of doping was controlled by ammonia solution treatment. Then, the chemical structure as a function of the doping states was observed by Raman analysis. Moreover, the photocurrent and photovoltage characteristics for various doping states were measured by an asymmetrically irradiated light source. As the degree of doping increased, the electrical conductivity increased, which affected the photocurrent. Meanwhile, the photovoltage was related to the temperature gradient caused by light irradiation.

p-n 접합 형성을 위한 반도체 실리콘 웨이퍼 대기압 플라즈마 붕소 확산 가능성 연구 (Study of Boron Doping Feasibility with Atmospheric Pressure Plasma for p-n Junction Formation on Silicon Wafer for Semiconductor)

  • 김우재;이환희;권희태;신기원;양창실;권기청
    • 반도체디스플레이기술학회지
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    • 제16권4호
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    • pp.20-24
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    • 2017
  • Currently, techniques mainly used in semiconductor impurity diffusion processes include furnace thermal diffusion, ion implantation, and vacuum plasma doping. However, there is a disadvantage that the process equipment and the unit cost are expensive. In this study, boron diffusion process using relatively inexpensive atmospheric plasma was conducted to solve this problem. With controlling parameters of Boron diffusion process, the doping characteristics were analyzed by using secondary ion mass spectrometry. As a result, the influence of each variable in the doping process was analyzed and the feasibility of atmospheric plasma doping was confirmed.

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Bi계 세라믹에서 초전도체 특성에 미치는 도우핑 원소의 영향 (Effect of Doping Elements on Superconducting Characteristics in Bi-system Ceramics)

  • 양승호;박용필;김용주
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 하계학술대회 논문집
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    • pp.198-203
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    • 2000
  • This paper investigated the effects of doping elements on the Bi-Sr-Ca-Cu-O ceramics. The doping elements can be classified into four groups depending on their superconducting characteristics in the Bi-Sr-Ca-Cu-O structure. The first group of doping elements(Co, Fe, Ni and Zn) substitute into the copper site and can reduce the critical temperatures of the 2223 and 2212 phases. The second group of doping elements(Y and La) substitute into the Ca site and cause the disappearance of the 2223 phase and increase the critical temperatures in the 2212 phase. The third group of doping elements(P and K) have a tendency to decompose the superconducting phase and reduce the optimal sintering temperature. The fourth group of doping elements(B, Si, Sn and Ba) almost unaffected the superconductivity of the 2223 and 2212 phase.

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