• 한국재료학회지
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• 제27권6호
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• pp.295-300
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• 2017

Aluminum-oxide($Al_2O_3$) thin films were deposited by electron cyclotron resonance plasma-enhanced atomic layer deposition at room temperature using trimethylaluminum(TMA) as the Al source and $O_2$ plasma as the oxidant. In order to compare our results with those obtained using the conventional thermal ALD method, $Al_2O_3$ films were also deposited with TMA and $H_2O$ as reactants at $280^{\circ}C$. The chemical composition and microstructure of the as-deposited $Al_2O_3$ films were characterized by X-ray diffraction(XRD), X-ray photo-electric spectroscopy(XPS), atomic force microscopy(AFM) and transmission electron microscopy(TEM). Optical properties of the $Al_2O_3$ films were characterized using UV-vis and ellipsometry measurements. Electrical properties were characterized by capacitance-frequency and current-voltage measurements. Using the ECR method, a growth rate of 0.18 nm/cycle was achieved, which is much higher than the growth rate of 0.14 nm/cycle obtained using thermal ALD. Excellent dielectric and insulating properties were demonstrated for both $Al_2O_3$ films.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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• pp.60-60
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• 2000

The adhesion interface formation between copper and poly(ethylene terephthalate)(PET), poly(methyl methacrylate)(PMMA) and Polyimide films was treated using Ion assisted reaction system to sequential sputter deposition by High-Frequency ion source. The ion beam modification system used a new type of low power HF ion thruster for space application as new low thruster electric propulsion system. Low power HF ion thruster with diameter 100mm gives the opportunity to obtain beams of Ar+ with currents 20~150 mA (current density 0.5~3.5 mA/cm2) and energy 200~2500eV at HF power level 10~150 W. Using Ar as a working gas it is possible to obtain thrust within 3~8 mN. Contact angles for untreated films were over 95$^{\circ}$ and 80 for Pet, 10o for PMMA and 12o for PI samples as a condition of ion assisted reaction at the ion dose of 10$\times$1016 ions/cm2, the ion beam potential of 1.2 keV and 4 ml/min for environmental gas flow rate. 900o peel tests yielded values of 15 to 35 for PET, 18 to 40 and 12 to 36 g/min. respectively. High resolution X-ray photoelectron spectrocopy is the Cls region for Cu metal on these polymer substrates showed increases in C=O-O groups for polymide, whereas PET and PMMA treated samples showed only C=O groups with increase the ion dose. Finally, unstable polymer surface can be changed from hydrophobic to hydrophilic formation such as C-O and C=O that were confirmed by the XPS analysis, conclusionally, the ion assisted reaction is very effective tools to attach reactive ion species to form functional groups on C-C bond chains of PET, PMMA and PI.

• 한국재료학회지
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• 제9권6호
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• pp.551-555
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• 1999

The deposition condition to obtain stoichiometric $Ta_2$O\ulcorner films, which is still controversial, using magnetron reactive sputtering was studied. The films were deposited by varying $O_2$gas flow rate with sputtering power and Ar gas flow rate of 200W and 60 sccm fixed. At the conditions of $O_2$ gas flow rate over 20 sccm, amorphous Tantalum oxide films with the refractive index of 2.1 and dielectric constant of 25 were deposited. Among those films, the capacitors dielectric properties of the film deposited at the condition of $O_2$ gas flow rate 50 sccm was best, the leakage current was 1$\times$10\ulcornerA/$\textrm{cm}^2$ at the electric field strength of 0.5 MC/cm and the breakdown field strength was over 2.0 MV/cm. This result could be explained from the analysis comparing with a standard sample using RBS because the composition of the film deposited at this condition was closest to the stoichiometric $Ta_2$O\ulcorner. The result of XPS analysis convinced that this film was stoichiometric $Ta_2$O\ulcorner film. A maximum cathode voltage was observed when $O_2$gas flow rate was 30 sccm. This shows that the Schiller's proposition that one can obtain stoichiometric films at the condition of maximum cathode voltage is not correct and more oxygen than that of the maximum voltage condition is necessary to deposit the stoichiometric Ta$_2$O\ulcorner films.

• 한국화재소방학회논문지
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• 제18권1호
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• pp.18-23
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• 2004

본 논문은 IEC형 불꽃점화 시험장치를 이용하여 저압 유도회로의 최소 점화한계를 프로판-공기 5.25 Vol.%의 혼합 가스에 대하여 실험적으로 구하였으며, 또한 유도회로의 인덕턴스 L에 안전소자로서 저항을 병렬접속 하였을 경우 프로판-공기 5.25 Vol.%의 혼합 가스에 대한 점화한계 개선효과를 고찰하였다. 그 결과, 최소 점화한계는 전류의 크기에 따라 좌우되었다. 또한, 전원으로부터 공급되는 에너지는 인덕턴스에 우선 축적되고, 그 초과분의 에너지가 폭발성 가스의 점화원으로 작용하였다. 점화한계 개선효과는 인덕턴스가 300mH일 때, 최고 330%의 개선효과가 나타났으며 인덕턴스가 클수록 점화한계 개선효과가 크게 나타났다. 또한 병렬로 접속한 저항의 크기가 적을수록 점화한계 개선 효과가 크다. 본 연구결과는 본질안전 방폭형 전기기기의 연구개발을 위한 기본자료로 활용할 수 있을 뿐만 아니라 이들 기기의 방폭 성능에 대한 시험자료로도 활용이 가능할 것으로 사료된다.

• 대한의용생체공학회:의공학회지
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• 제26권1호
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• pp.43-47
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• 2005

We have developed a small bore x-ray CT for small animal imaging with a linear x-ray detector array and small-scale slip rings. The linear x-ray detector array consists of 1024 elements of 400□m×400□m with a gadolinium oxysulfide (GOS) scintillator on top of them. To avoid use of expensive large diameter slip rings for projection data transmission from the X­ray detector to the image reconstruction system, we used the wireless LAN technology. The projection data are temporally stored in the data acquisition system residing on the rotating gantry during the scan and they are transmitted to the image reconstruction system after the scan. With the wireless LAN technology, we only needed to use small-scale slip rings to deliver the AC electric power to the X-ray generator and the power supply on the rotating gantry. The performances of the small animal CT system, such as SNR, contrast, and spatial resolution, have been evaluated through experiments using various phantoms. It has been experimentally found that the SNR is almost linearly proportional to the tube current and tube voltage, and the minimum resolvable contrast is less than 30 CT numbers at 40kVp/3.0㎃. The spatial resolution of the small animal CT system has been found to be about 0.9Ip/㎜. Postmortem images of a piglet is also presented.

• 한국산학기술학회논문지
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• 제6권4호
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• pp.325-330
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• 2005

대기중의 일산화탄소 가스 농도를 측정하기 위한 마이크로 가스센서를 MEMS 공정을 이용하여 제작하였다. $SnO_2$ 가스 감응물질을 작동온도까지 가열하기 위하여 마이크로 히터를 설치하였다. 마이크로 히터에서 발생한 열이 효율적으로 감응물질에만 전달되고 실리콘 베이스로 누설되는 것을 최소화하기 위하여 마이크로 히터와 전극을 레버형으로 만들어 다리처럼 공중에 뜨게 하였으며, 이 위에 감응물질을 올려놓았다. 마이크로 가스센서의 열전달 현상을 상용 열유동 해석 전용 프로그램인 FLUENT를 이용하여 해석하였다. 해석 결과 실리콘웨이퍼 베이스의 온도가 거의 상온에 가까워 마이크로 히터에서 발생한 열이 가스 감응물질을 효과적으로 가열하여서 가스 감응물질의 열적 고립상태를 유지하고 있는 것을 알 수 있었다. 또한 감응물질을 작동온도까지 가열하기 위하여 마이크로 히터에 가하여야 하는 전류의 양을 예측할 수 있었다.

• Journal of Power Electronics
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• 제17권4호
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• pp.849-859
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• 2017

This paper illustrates the analysis and design of a multi-resonant converter applied to an electric vehicle (EV) charger. Thanks to the notch resonant characteristic, the multi-resonant converter achieve soft switching and operate with a narrowed switching frequency range even with a wide output voltage range. These advantages make it suitable for battery charging applications. With two more resonant elements, the design of the chosen converter is more complex than the conventional LLC resonant converter. However, there is not a distinct design outline for the multi-resonant converters in existing articles. According to the analysis in this paper, the normalized notch frequency $f_{r2n}$ and the second series resonant frequency $f_{r3n}$ are more sensitive to the notch capacitor ratio q than the notch inductor ratio k. Then resonant capacitors should be well-designed before the other resonant elements. The peak gain of the converter depends mainly on the magnetizing inductor ratio $L_n$ and the normalized load Q. And it requires a smaller $L_n$ and Q to provide a sufficient voltage gain $M_{max}$ at ($V_{o\_max}$, $P_{o\_max}$). However, the primary current increases with $(L_nQ)^{-1}$, and results in a low efficiency. Then a detailed design procedure for the multi-resonant converter has been provided. A 3.3kW prototype with an output voltage range of 50V to 500V dc and a peak efficiency of 97.3 % is built to verify the design and effectiveness of the converter.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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• pp.817-820
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• 2004

The $Sr_{0.7}Bi_{2.6}Ta_2O_9$(SBT) thin films are deposited on Pt-coated electrode($Pt/TiO_2/SiO_2/Si$) using a RF magnetron sputtering method. The ferroelectric properties of SBT capacitors with annealing time were studied. In the SEM images, Bi-layered perovskite phase was crystallized at 10min and grains largely grew with annealing tune. SBT thin films are transformed from initial amorphous phase to the fully formed layer-structured perovskite. During the annealing process at $750^{\circ}C$, we found that an fluorite-like stage is formed after 3min. In the XRD pattern, the SBT thin films after 3min annealing time had (105) orientation. The ferroelectric properties of SBT capacitor with annealing time represent a favorable properties at 60 min. The maximum remanent polarization and the coercive electric field with 60 min are $12.40C/cm^2$ and 30kV/cm, respectively. The leakage current density with 60min is $6.81{\times}10^{-10}A/cm^2$.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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• pp.1158-1161
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• 2004

This paper presents structural characteristics of station class lightning arresters and electrical characteristics of manufactured ZnO varistor blocks which are usable in those arresters. Three types of station class lightning arresters were investigated and those are a ceramic arrester, a FRP tube type polymer arrester, and a FRP rod type polymer arrester. Each arrester has merits and demerits with structural characteristics. In general, polymer arresters were made of silicon rubber for housing materials, FRP tube or rod for mechanical strength, ZnO blocks for electrical characteristics, and metal parts for electrical contact and the silicon rubber, the housing materials, was directly injected to the arrester module which was assembly composed of electrodes, ZnO blocks and FRP tube or rod, and to prevent the nonlinear electric fields distribution on upper parts of arresters, the grade ring was adopted to the upper electrodes. The reference voltage, nonlinear coefficient, residual voltage, and voltage ratio of manufactured ZnO varistors are 4.90kV, 50, 9.54kV, 1.94, respectively. Compared to designed electrical characteristics, the reference voltage was low for 600v and the voltage ratio was slightly high. However, the characteristics of discharge withstand was so excellent that the mechanical destruction does not occur at the impulse current of $8/20{\mu}s$ 10kA for 100 times.

• Journal of Power Electronics
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• 제19권6호
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• pp.1366-1379
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• 2019

High-gain DC/DC converters have become one of the key technologies for the grid-connected operation of new energy power generation, and its research provides a significant impetus for the rapid development of new energy power generation. Inspired by the transformer effect and the ripple-suppressed ability of a coupled inductor, a double-coupled inductor high gain DC/DC converter with a ripple absorption circuit is proposed in this paper. By integrating the diode-capacitor voltage multiplying unit into the quadratic Boost converter and assembling the independent inductor into the magnetic core of structure coupled inductors, the adjustable range of the voltage gain can be effectively extended and the limit on duty ratio can be avoided. In addition, the volume of the magnetic element can be reduced. Very small ripples of input current can be obtained by the ripple absorption circuit, which is composed of an auxiliary inductor and a capacitor. The leakage inductance loss can be recovered to the load in a switching period, and the switching-off voltage spikes caused by leakage inductance can be suppressed by absorption in the diode-capacitor voltage multiplying unit. On the basis of the theoretical analysis, the feasibility of the proposed converter is verified by test results obtained by simulations and an experimental prototype.