• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.371-376
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• 1997

A 100*100.mu.m$^{2}$ aluminum micro mirror is designed and fabricated using a thick photoresist as a sacrificial layer andas a mold for nickel electroplating. The micro mirror is composed of aluminum mirror plate, two nickel support posts, two aluminum hinges, two address eletrodes, and two landing electrodes. The aluminum mirror plate,which is supported by two nickel support posts, is overhung about 10.mu.m from the silicon substrate. THe aluminum mirror plate is actuated like a seesaw by electrostatic force generated by electic potential difference applied between the mirror plate and the address electrode. This paper presents some methods to measure the optical and the dynamic characteristics of the fabricated micro mirror.

• Journal of the Korean Ceramic Society
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• v.33 no.7
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• pp.823-831
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• 1996

Due to the intrinsic low surface activation of ${\gamma}$-alumina it has been used limitely in practice. Accordingly forward enhancing its utility ${\gamma}$-alumina surface was treated with slfuricf aicd nitric acid and chloric acid respec-tively. Subsequently the effects of surface activity on the surface electrical characteristics were investigated. The ${\gamma}$-alumina was prepared by the precipitation of aluminium nitrate [Al(NO3)3.9H2O] using ammonia water as a precipitator and it was chemically treated with such acids mentioned above. The surface and morphology of the acid-treated ${\gamma}$-alumina were analysed by XRD, BET and the surface activities were measured by the amine titration methods. The interfacial properties of the ${\gamma}$-alumina dispersed in electrolyte solution were esti-mated by the surface charge density measured using potentiometric tiration. Based on the relation between surface charge density and the acid amount the following results were drawn for the surface and interfacial electrical properties ; Acidic properties of surface-treated alumina increase with anion load on alumina surface. P. Z. C decreases with acid amount on alumina surface. The surface charge densities were apart from electrolyte ionic strength. The acidity of ${\gamma}$-alumina is linearly dependent on the P. Z,.C when the ${\gamma}$-alumina was dispersed in aqueous electrolyte solution.