• Proceedings of the Materials Research Society of Korea Conference
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• 2002.05a
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• pp.63-63
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• 2002

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11b
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• pp.390-393
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• 2001

This study demonstrated the feasibility of tape casting method to fabricate soda borosilicate glass-coated stainless steel electrostatic chucks(ESC) for low temperature semiconductor processes. The glass coatings on the stainless steel substrates ranged from $100{\mu}m$ to $150{\mu}m$ thick. The adhesion of the glass coatings was found to be excellent such that it was able to withstand moderate impact tests and temperature cycling to over $300^{\circ}C$ without cracking and delamination. The electrostatic clamping pressure generally followed the theoretical voltage-squared curve except at elevated temperatures and higher applied voltages when deviations were observed to occur. The deviation is due to increased leakage current at higher temperature and applied voltage as the electrical resistivity drops.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.2 s.95
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• pp.199-205
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• 2005

The governing equations of micro double cantilever beam structures interacted by electrostatic forces are obtained employing Galerkin's method based on Euler beam theory. Variations of static and dynamic responses as well as natural frequencies are estimated for applied voltages. In particular, it is investigated how the variations of beam properties resulted by manufacturing process influence the deflections and the modal characteristics. This study can help to design MEMS structures and to predict the performances with respect to manufacturing tolerances.

• 한국연소학회:학술대회논문집
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• 2015.12a
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• pp.79-81
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• 2015

The experimental study on gasesous laminar free-jet flow was investigated by applying high voltage alternating current (AC) to the nozzle. The jet flows were affedcted significatly by AC electric fields particularly at high voltages for applied frequencies less than 80 Hz, while those were not responded to further increased frequencies. Under certain AC conditions of applied voltgae and frequency, the laminar gaseous fuel stem was broken down at an axial distance and subsequently separtaed into some parts. The velocity fields in jet flows interactiong with applied electric fields were compared with those without having electric field. Interaction of applying electric fields with laminar free jet flow was discussed in detail, and the possible mechanism was also explained.