• Title/Summary/Keyword: Effective Reflectivity

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A Study on the Measurement Method of the Spectral Emissivity by Using Hemispherical Mirror (반구면경을 이용한 스펙트럼 방사율 측정법 연구)

  • Oh, K.S.;Bae, S.C.
    • Proceedings of the KSME Conference
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    • 2001.11b
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    • pp.54-58
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    • 2001
  • The measurement method of the spectral emissivity by using hemispherical mirror which has an inclined observation hole is studied. This method is useful in measuring the spectral emissivity of the solid material both conductor and non-conductor. In this study, the effective reflectivity of the hemispherical mirror is also measured for calculating the spectral emissivity of materials. The effective reflectivity measured is 0.9.

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Effective measurement of high facet reflectivity using the variation longitudinal modes spacing of semiconductor external cavity ring lasers (반도체 외부 공진기 링 레이저의 종 모드 간격 변화를 이용한 고반사율을 갖는 Etalon Coating Reflectivity의 정밀 측정)

  • 엄진섭;안상호
    • Korean Journal of Optics and Photonics
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    • v.10 no.6
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    • pp.524-526
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    • 1999
  • It is observed that the mode spacing of an cxternal cavity semiconducror laser can be altered dramatically by the insertion of an intracavity etalon. 111e mode spacing is decreased as a function of etalon's reflectivity and this effect is quantitatively explained by an analysis of resonant modes. We abo show that this effect provides a precise and convenient alternative for determining the coating reflectivity of a high reflectivity etalon. talon.

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Facet Reflectivities as a Function of Waveguide width of Buried Channel Waveguides using the Field Profiles Obtained by the Variational Method (Variational 방법으로 구한 필드 분포를 이용한 도파로 폭에 따른 Buried Channel Waveguides의 단면 반사율)

  • Kim, Sang-Taek;Kim, Dong-Hoo;Kim, Boo-Gyoun
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.37 no.11
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    • pp.36-42
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    • 2000
  • We calculate the facet reflectivity as a function of the waveguide width of buried channel waveguides using the angular spectrum method and the field profiles obtained by the effective index method, the variational method and the modified variational method, respectively and discuss the results. As the waveguide width increases, the facet reflectivity of buried channel waveguides approaches to that of slab waveguides. As the waveguide width decreases, the facet reflectivity of quasi-TE mode decreases from that of slab waveguides, while that of quasi-TE mode increases from that of slab waveguides. The variation of the facet reflectivity of quasi-TE mode as a function of waveguide width is much larger than that of quasi-TM mode. When the aspect ratio is one, the difference between the facet reflectivity of quasi-TE mode and that of quasi-TM mode using the variational method and the modified variational method is negligible, while the difference between the facet reflectivity of quasi-TE mode and that of quasi-TM mode using the effective index method is large. In the case of quasi-TE mode, the facet reflectivity using the angular spectrum method and the field profiles obtained by the modified variational method could be more accurate than that obtained by the effective method. In the case of quasi-TM mode, the facet reflectivities obtained by the various methods are almost the same.

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EUVL Mask Defect Isolation and Repair using Focused Ion Beam (Focused Ion Beam을 이용한 EUVL Mask Defect Isolation 및 Repair)

  • 김석구;백운규;박재근
    • Journal of the Semiconductor & Display Technology
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    • v.3 no.2
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    • pp.5-9
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    • 2004
  • Microcircuit fabrication requires precise control of impurities in tiny regions of the silicon. These regions must be interconnected to create components and VLSI circuits. The patterns to define such regions are created by lithographic processes. In order to image features smaller than 70 nm, it is necessary to employ non-optical technology (or next generation lithography: NGL). One such NGL is extreme ultra-violet lithography (EUVL). EUVL transmits the pattern on the wafer surface after reflecting ultra-violet through mask pattern. If particles exist on the blank mask, it can't transmit the accurate pattern on the wafer and decrease the reflectivity. It is important to care the blank mask. We removed the particles on the wafer using focused ion beam (FIB). During removal, FIB beam caused damage the multi layer mask and it decreased the reflectivity. The relationship between particle removal and reflectivity is examined: i) transmission electron microscope (TEM) observation after particle removal, ii) reflectivity simulation. It is found that the image mode of FIB is more effective for particle removal than spot and bar mode.

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Measurement Method of the Spectral Emissivity by Using Hemispherical Mirror (반구면경을 이용한 스펙트럼 방사율 측정법)

  • Bae, Sin-Chul;Oh, Ki-Soo
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.27 no.6
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    • pp.789-795
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    • 2003
  • It is studied that the measuring method of the spectral emissivity by using hemispherical mirror with an inclined observation hole. The in-service calibration method of mirror reflectivity is also dealed with. It is possible to apply this method on measuring emissivity of conductor or non-conductor.

Efficient Approach to Measure Crystallization Temperature in Amorphous Thin Film by Infrared Reflectivity

  • Wang, Wenxiu;Saito, Shin;Yakabe, Hidetaka;Takahashi, Migaku
    • Journal of Magnetics
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    • v.18 no.2
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    • pp.86-89
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    • 2013
  • This paper shows a new effective approach to measure crystallization temperature of soft magnetic underlayer (SUL) for next generation of heat assisted perpendicular recording media. This approach uses temperature dependent reflectivity, which shows a clear jump when samples are crystallized. To achieve this measurement, an optical system is set up using hot plate and infrared laser. Reflectivity of SUL $(Co_{70}Fe_{30})_{92}Ta_3Zr_5$ shows a clear jump at its amorphous-crystalline transition temperature. Experiment results show this effect is clear in infrared region, and is weak for visible light.

Comparison Between the Facet Reflectivities of Buried Channel Waveguides and Those of Ridge Waveguides Using the Angular Spectrum Method (Angular spectrum 방법을 사용하여 구한 buried channel 도파로와 ridge 도파로의 단면 반사율 비교)

  • Kim, Sang-Taek;Kim, Dong-Hu;Kim, Bu-Gyun;Yu, Myeong-Sik
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.38 no.9
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    • pp.634-642
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    • 2001
  • We calculate the facet reflectivity of buried channel waveguides and ridge waveguides as a function of the waveguide width for various thicknesses using the angular spectrum method and the two dimensional field profiles obtained by the variational method (VM) and the effective index method (EIM). The variation of the reflectivity of buried channel waveguides as a function of the waveguide width is large, while that of ridge waveguides is very small. The accuracy of the field profiles necessary for the calculation of the facet reflectivity using the angular spectrum method greatly affects that of the facet reflectivity. The difference between the exact reflectivity and that using EIM increases as the waveguide width and thickness decreases due to the inaccuracy of the field profiles obtained by EIM. However, the difference between the exact reflectivity and that using VM is smaller than that using EIM regardless of waveguide width and thickness. The difference between the facet reflectivities u sing EIM and VM is small in the area where the EIM works very well.

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THE EFFECT OF AN APPLIED BIAS UPON THE REFLECTANCE AND ADHESION OF SILVER FILMS BEING SPUTTER-DEPOSITED ON POLYESTER SUBSTRATE

  • Ri, Eui-Jae;Hoang, Tae-Su
    • Journal of the Korean institute of surface engineering
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    • v.32 no.3
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    • pp.257-264
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    • 1999
  • Thin reflective films are synthesized by using PVD methods with a bright metal of Al or Ag. For purposes of improving the reflectance and adhesion of such films particularly, substrate bias was applied during sputtering (namely, ion-plating) to enhance the deposition process with higher energy. And we succeeded in fabricating a quality silver film which possesses an adhesion of $85{\;}Kg/\textrm{cm}^2$ and a high reflectivity of more than 96%. Both of reflectivity and adhesion are better in case of bias sputtering as controlled than nonbias sputtering, particularly the bias of 50-100 V showed most effective. The microstructures of sample films were examined by using various equipments and the XRD spectrum in particular showed that <111> direction is the preferred growth orientation.

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Structural dependence of the effective facet reflectivity in spot-size-converter integrated semiconductor optical amplifiers (모드변환기가 집적된 반도체 광증폭기에서의 유효단면반사율의 구조 의존성)

  • 심종인
    • Korean Journal of Optics and Photonics
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    • v.11 no.5
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    • pp.340-346
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    • 2000
  • Traveling wave type semiconductor optical amplifiers integrated with spot-size-converter (SSC-TW-SOA) have been extensively studied for the improvement of coupling effiClency With single-mode fiber and fO! the cost reducClon 111 a packaging In tlIis paper the slructural dependence of the spot-slZe-converter on the effective facet reflectlvllY $R_{eff}$ was experimentally as well as thcoretienlly mvestlgated. It was shown that not only a sufficient mode-conversion in a sse region along the latersl and tran~verse directions but also an introductIOn of angled-facet were very essential in order to reduce $R_{eff}$ Very small ripple less than 0.1 dB in an amplified spontaneous emission spectrum was observed with the fabncated SSC-lW-SOA which consists of the wrndow length of $20\mu\textrm{m}$, facet angle of $7^{\circ}$, and antlrelleetioll-coated facet of ] % reflectivity.tivity.

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Evaluation of Effective Soil Moisture From Natural Soil Surfaces (지표면 토양의 유효 수분함유량 산출에 관한 연구)

  • 오이석
    • Korean Journal of Remote Sensing
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    • v.11 no.3
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    • pp.117-127
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    • 1995
  • In this paper several methods for retriving appropriate values of effective soil moisture contents from natural soil surfaces are introduced and compared each other. The soil medium has usually a nonuniform moisture profile; i.e., relatively dry at the top layer and relatively wet at the bottom layer. The effective soil moisture represents the quantitative value of soil moisture of the inhomogeneous soil medium in an average sense. A simple method is an arithmetic averaging of soil moisture values obtained from several layers of a soil surface. Otherwise, the penetration depths can be computed from a homogeneous and an inhomogeneous soil surfaces and compared in order to obtain the effective soil mosture. The other method is to obtain the effective soil moisture by comparing the reflectivities from both of a homogeneous and an inhomogeneous surfaces. Those methods are compared and the reflectivity technique is examined in more detail since the rader scattering is dominated by the reflectivity instead of the penetration.