• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.274-274
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• 2012

We have researched on controlling an electron temperature and a plasma collision frequency to study the effect of collisions on helicon plasmas. So, we have designed and constructed an electron cyclotron resonance (ECR) heating system in the helicon device as an auxiliary heating source. Since then, we have tried to optimize experimental designs such as a magnetic field configuration for ECR heating and 2.45GHz microwave launching system for its power transfer to the plasma effectively, and have characterized plasma parameters using a Langmuir probe. For improving an efficiency of the ECR heating with R-wave in the helicon plasma, we would understand an effect of R-wave propagation with ECR heating in the helicon plasma, because the efficiency of ECR heating with R-wave depends on some factors such as electron temperature, electron density, and magnetic field gradient. Firstly, we calculate the effect of R-wave propagation into the ECR zone in the plasma with those factors. We modify the magnetic field configuration and this system for the effective ECR heating in the plasma. Finally, after optimizing this system, the plasma parameters such as electron temperature and electron density are characterized by a RF compensated Langmuir probe.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.501-501
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• 2012

A 2.45 GHz electron cyclotron resonance (ECR) plasma source with a belt magnet assembly configuration (BMC) was developed for hyperthermal neutral beam (HNB) generation. A plasma source for high flux HNB generation should be satisfied with the requirements: low pressure operation, high density, and thin plasma. The ECR plasma source with BMC achieved high density at low operation pressure due to electron confinement enhancement caused by high mirror ratio and drifts in toroidal direction. The 2.45 GHz microwave launcher had a circularly bended WR340 waveguide with slits. The microwave E-field profile induced by the microwave launcher was studied in this paper. The E-field profile was a cups field perpendicular to B-filed at ECR zone. The optimized E-field profile and B-field were found for effective ECR heating.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2002년도 하계학술대회 논문집 C
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• pp.1671-1673
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• 2002

자장 크기 변화에 따른 마이크로파를 발생시켜 출력 크기를 측정함에 있어 축 방향 자장의 크기를 두가지 크기로 변화시켜 결과 자장크기 부근에서 출력증대가 일어났다. 이는 전자 사이크로트론 공명에 의한 출력증대로 볼 수 있으며 수직방향의 크기로 간주된다. 본 실험에서는 원래 수평방향의 자계에 대하여 출력발생 및 출력증대가 이루어지는 후진파 발진기를 이용한 실험을 하였다. 주파수 18${\sim}$21GHz대를 이용하여 측정한 결과 0.3T와 0.7T부근에서 출력증대 및 효율증대가 이루어 지는 것을 관찰하였다.

• 한국표면공학회지
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• 제23권4호
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• pp.218-224
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• 1990

Silicon nitride thin(SiNx) is deposited onto 3 inch silicon wafor using ECR plasma apparatus. For the two different plasma extraction windows size, the thin films which were deposited by changing the SiH4/N2 gas fole at at 1.5mTorr without substrate heating are analyzed through the XPS and wlliposometer measurements. The very uniform and good quality silicon nitride thin film were obtained with the analyzed results of the deposited films, and particularly, ion temperature perpendicular to the magnetic filed was nearly same as the neutral gas temperature. The large amount of plasma loss in the transport process following magnetic field lines could be seen from the plasma emission intensity measurements.

• 한국표면공학회지
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• 제25권6호
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• pp.287-292
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• 1992

Silicon nitride thin film (SiNx) was deposited onto the 3inch silicon wafer using an electron cyclotron resonance (ECR) plasma apparatus. The thin films which were deposited by changing the SiH4N2 gas flow rate ratio at 1.5mTorr without substrate heating were analyzed through the x-ray photo spectroscopy (XPS) and ellipsometer measurements, etc. Silicon nitride thin films prepared by the electron cyclotron resonance plasma chemical vapor deposition method at low substrate temperature (<10$0^{\circ}C$) exhibited excellent physical and electrical properties. The very uniform and good quality silicon nitride thin films were obtained. The characteristics of electron cyclotron resonance plasma were inferred from the analyzed results of the deposited films.

• 한국농촌건축학회논문집
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• 제24권3호
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• pp.23-30
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• 2022

In this study, in order to grasp the current situation of indoor environmental pollution and indoor ventilation in one-room around the university in the post-corona era, we analyzed the experimental data and conducted a questionnaire survey on university students. By analyzing the content, the effects of formaldehyde, dust and other pollution on the human body, which are usually not easily detectable, are digitized and more easily taken into account. Among the experimental results, the concentration of VOC and HCHO, gas pollutants among indoor pollutants, exceeded the recommended criteria of the Ministry of Environment in most studio apartments. Overall, the average CO₂ concentration was lower than the Ministry of Environment's maintenance standard (1000ppm), but it was relatively high in summer and winter, and it is believed to be caused by cooling and heating in an enclosed space. The levels of PM2.5 and PM10, particulate pollutants, increased in November and December, and it is believed that ventilation defects due to degradation in external temperature. There was no clear difference between the two types, and there was a very high correlation between PM2.5 and PM10, HCHO and VOC. It was found that temperature was closely correlated with all sources except CO₂, and humidity was closely correlated with all sources except PM2.5 and PM10. Health risk assessment was conducted for formaldehyde. The average ECR of studio R2 in May was 3.91E^-4, and the ECR figure in September was 3.65E^-4, which was very high compared to other residential spaces. The R2 level was calculated as 4 people per 10,000 people in the lifetime risk of cancer of residents, exceeding the allowable risk. R8 also showed higher ECR results than other spaces after R2, especially in October, 2.01E^-4, six times higher than R7 measured in October, and 1.87E^-4 in July, four times higher than R9.

• Journal of Advanced Marine Engineering and Technology
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• 제32권5호
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• pp.717-723
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• 2008

The purpose of this study is to measure and analyze the indoor thermal conditions of a 8,500GT class chemical carrier which was launched on July 2007. The measurement was operated from 4th June to 4th June 2007, just before handing over to Owner. Followings are the results of this study. (1)The temperature variations of supply air were related to the outdoor temperature variations, but the humidity was stable at $65{\sim}80%$. (2)The temperature variations at the representative position of bridge, restaurant, crew's cabin showed gentle slopes. but that of conference room was very steepy. The humidities of bridge and restaurant were unstable because of outdoor-contact and cooking, respectively. (4)The temperature and humidity of ECR(Engine Control Room) which was designed to supply heating and cooling by PAC(Package Air Conditioner) were directly affected by the operating conditions of PAC. (5)The measured supply air volume from dampers of bridge, crew's cabin and conference room were satisfied with the design supply air volume. (5)For the improvement of the indoor thermal conditions, the temperature of crew's cabin and restaurant and the humidity of conference room, and the temperature and humidity of bridge should be controlled, respectively.