• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.229-229
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• 2010

With the scaling down of ultra large integrated circuits (ULSI) to the sub-50 nm technology node, the need for an ultra-thin, continuous and conformal diffusion barrier and Cu seed layer is increasing. However, diffusion barrier and Cu seed layer formation with a physical vapor deposition (PVD) method has become difficult as the technology node is reduced to 30 nm and beyond. Recent work on self-forming barrier processes using PVD Cu alloys have attracted great attention due to the capability of conformal ultra-thin barrier formation using a simple technique. However, as in the case of the conventional barrier and Cu seed layer, PVD of the Cu alloy seed layer will eventually encounter the difficulty in conformal deposition in narrow line trenches and via holes. Atomic layer deposition (ALD) has been known for its good step coverage and precise thickness control, and is a candidate technique for the formation of a thin conformal barrier layer and Cu seed layer. Conformal Cu-Mn seed layers were deposited by plasma enhanced atomic layer deposition (PEALD) at low temperature ($120^{\circ}C$), and the Mn content in the Cu-Mn alloys were controlled form 0 to approximately 10 atomic percent with various Mn precursor feeding times. Resistivity of the Cu-Mn alloy films decreased by annealing due to out-diffusion of Mn atoms. Out-diffused Mn atoms were segregated to the surface of the film and interface between a Cu-Mn alloy and $SiO_2$, resulting in self-formed $MnO_x$ and $MnSi_xO_y$, respectively. No inter-diffusion was observed between Cu and $SiO_2$ after annealing at $500^{\circ}C$ for 12 h, indicating an excellent diffusion barrier property of the $MnSi_xO_y$. The adhesion between Cu and $SiO_2$ was enhanced by the formation of $MnSi_xO_y$. Continuous and conductive Cu-Mn seed layers were deposited with PEALD into 32 nm $SiO_2$ trench, enabling a low temperature process, and the trench was perfectly filled using electrochemical plating (ECD) under conventional conditions. Thus, it is the resultant self-forming barrier process with PEALD Cu-Mn alloy film as a seed layer for plating Cu that has further potential to meet the requirement of the smaller than 30 nm node.

• 한국식품과학회지
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• 제34권6호
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• pp.998-1001
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• 2002

신속하고 정확한 식품 중 과산화수소 분석방법을 확립하고자 물을 이동상으로 양이온수지칼럼에서 과산화수소를 분리한 후 전기화학검출기로 검출하는 Mico-LC법을 사용하였으며 여기에 사용한 전해질용액인 무수황산나트륨의 최적농도 및 검출기의 최적전압은 각각 50 mM, 0.6 V이었다. 본 Mico-LC 방법을 적용하여 국내 식품 중 토마토와 레몬에 대한 회수율을 검토한 결과 각각 98.3 및 97.4%이었으며, 국내유통식품 중 채소류 및 과실류 총 28종에 대하여 과산화 수소를 분석한 결과, 과실류인 바나나, 복숭아, 오렌지 및 딸기에서 각각 0.6, 0.5, 1.9 및 0.9 ppm, 채소류인 피망, 양파, 오이, 우엉 및 가지에서 각각 0.5, 0.6, 0.9, 0.8 및 0.4 ppm이 검출되었으며 나머지 19종은 모두 불검출이었다.

• 한국임상약학회지
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• 제9권1호
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• pp.49-54
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• 1999

This study was carried out to compare the bioavailability of Hanmi clarithromycin (250 mg/tablet) with that of $Klaricid^{(R)}$ The bioavailability was examined on 20 volunteers who received a single dose (500 mg) of each drug in the fasting state in a randomized balanced 2-way crossover design. After dosing, blood samples were collected for a period of 12 hours. Plasma samples were analyzed for clarithromycin and roxithromycin(internal standard) by HPLC/Coulometric BCD. The pharmaco-kinetic parameters ($AUC_{0-l2hr}$, Cmax, Tmax, $AUC_{inf}$, Ka, Kel, $t_{1/2}$, Vd/F and Cl/F) were calculated from the plasma clarithromycin concentration-time data of each volunteer. The computer program 'WinNonlin' was used for compartmental analysis. One compartment model with first-order input, from order output with lag time, weighting factor $l/y^2$ was chosen as the appropriate pharmacokinetic model. The major pharmacokinetic parameters ($AUC_{0-l2hr},\;AUC_{inf}$, Cmax and Tmax) of Hanmi clarithromycin were $10.7\pm0.5\;{\mu}g{\cdot}hr{\cdot}ml^{-1},\;12.7\pm0.7\;{\mu}g{\cdot}hr{\cdot}ml^{-1},\;1.7\pm0.1\;{\mu}g/ml\;and\;2.0\pm0.2\;hr$, respectively, and those of $Klaricid^{(R)}\;were\;9.8\pm0.5\;{\mu}g{\cdot}hr{\cdot}ml^{-1},\;11.7\pm0.6\;{\mu}g{\cdot}hr{\cdot}ml^{-1},\;1.6\pm0.1\;{\mu}g/ml\;and\;2.1\pm0.1\;hr$, respectively. The differences in mean values of $AUC_{0-l2hr},\;AUC_{inf}$ and Cmax between two products were $9.88\%,\;8.94%\;and\;6.59\%$, respectively. The least significant differences at $\alpha=0.05$ for $AUC_{0-l2hr},\;AUC_{inf}$ and Cmax were $16.08\%,\;17.81\%\;and\;18.94\%$, respectively. Though the plasma clarithromycin concentrations of Hanmi clarithromycin were higher than those of $Klaricid^{(R)}$ at all observed times, the bioavailability of Hanmi clarithromycin appeared to be bioequivalent with that of $Klaricid^{(R)}$. The Ka, Kel, $t_{1/2}$, Vd/F and Cl/F of the Hanmi clarithromycin were $2.69\pm0.53\;hr^{-1},\;0.18\pm0.01 hr^{-1},\;3.9\;hr,\;248.8\pm11.4\;L\;and\;43.7\pm2.6\;L/hr$, respectively, and those of $Klaricid^{(R)} were 2.19\pm0.51\;hr^{-1},\;0.18\pm0.02\;hr^{-1},\;3.7\;hr,\;266.7\pm22.4\;L\;and\;45.3\pm2.8L/hr$, respectively. There were no statistically significant differences between two drugs in all pharmacokinetic parameters.

• 농업생명과학연구
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• 제45권5호
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• pp.73-80
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• 2011

국내의 친환경농산물과 토양에서 자주 검출되는 농약 50성분을 선정하고, 경남지역의 친환경농산물 재배농지의 토양시료 40점을 대상으로, 가속용매추출법(accelerated solvent extraction)과 고상추출법(solid-phase extraction)의 복합처리법으로 정제하고 GC/ECD/NPD, HPLC/UV/FL, GC/MSD 및 HPLC/MSD를 이용한 분석법을 적용하여 잔류농약의 잔류실태를 조사하였다. 적용한 분석법에 의한 농약 회수율은 72~118%의 범위로 평균 95.5%이었고, CV(%)값 평균은 3.0%로 나타났다. 토양 40점 중 잔류농약 검출은 21점에서 20성분이 검출되었으며 검출토양의 농약별평균 검출량은 endosulfan 0.035, ethoprophos 0.043, chlorpyrifos 0.020, chlorfenapyr 0.023, flufenoxuron 0.047, fenvalerate 0.070, cypermethrin 0.266, lufenuron 0.016, bifenthrin 0.022, fenobucarb/BPMC 0.025, difenoconazole 0.043, fenarimol 0.059, kresoxim-methyl 0.020, tetraconazole 0.026, isoprothiolane 0.039, iprobenfos 0.017, nuarimol 0.014, fluquinconazole 0.156, tebuconazole 0.047 및 oxadiazon이 0.045 mg/kg으로 나타나서 친환경재배농지의 토양환경기준에 잔류농약의 설정이 시급하다고 판단되었다.

• 한국환경농학회지
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• 제38권3호
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• pp.205-212
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• 2019

BACKGROUND: This survey conducted on agricultural products in Incheon for the past three years from 2016 to 2018 to detect residual pesticides and to monitor the use of pesticides. METHODS AND RESULTS: Residual pesticides were analyzed for a total of 5,937 agricultural products in Samsan wholesale market, traditional market and large retailers in Incheon. Samples were analyzed by multi class pesticide method using GC-MS/MS, LC-MS/MS, GC-ECD/NPD, and UHPLC. In 59 cases (1.0%) residual pesticides were detected improperly and these cases exceeded maximum residue limits (MRLs). CONCLUSION: The ratios of violative agricultural products were similar each year at approximately 1.0% per year, but the residual pesticide detection rates with the limit included in the samples were shown to be gradually decreasing to 17.9%, 12.6%, and 11.2% annually. The frequency of violative residual pesticides was high in order of Diazinon, Chlorpyrifos, Iprodione, etc. Residual pesticide monitoring might be needed in the future continuously, as violations in agricultural products distributed in Incheon are shown at a similar level every year.

• 한국도시환경학회지
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• 제18권4호
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• pp.523-530
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• 2018

오존층의 파괴물질인 CFCs의 대체물로써 $SF_6$의 사용량이 늘어나면서 대기 중의 $SF_6$의 농도가 높아지고 있다. $SF_6$은 지구온난화가스중의 하나로써 대기 중에서 3,200년 이상 머무를 뿐만 아니라 온난화지수도 매우 높아 무려 22,800이나 된다. 그러나, 대기 중에서의 $SF_6$ 농도는 낮은 수준이어서 검출한계이하인 경우가 많다. 본 연구에서는 이러한 극미량 $SF_6$ 농도를 정확하게 분석하기 위해서 $GC-{\mu}ECD$를 이용한 12가지 분석방법을 실험적으로 고찰하였다. 극미량 $SF_6$ 농도를 가장 정확하게 분석할 수 있는 방법은 Carboxen-1000 물질을 사용한 흡착관과 저온농축 고온탈착 방식의 농축장치에 역추출방식의 분석법을 사용할 경우가 최상의 효율을 나타냈다.

• 한국버섯학회지
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• 제18권4호
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• pp.380-386
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• 2020

전국 12개 지역에서 수집된 표고 768건, 표고배지 143건의 시료를 대상으로 다종다성분 320종 및 단성분 mepiquat chloride에 대해 분석한 결과, 표고 4건, 표고배지 3건으로 총 7건에서 잔류농약이 검출되었으며, 검출된 성분은 carbendazim, diflubenzuron, fluopyram, dinotefuran 이었다. 본 연구에서는 표고 3건, 배지 1건으로 총 4건의 시료에서 carbendazim이 검출되었으나 각각의 검출량은 0.056 mg/kg, 0.17 mg/kg, 0.043 mg/kg, 0.09 mg/kg으로 MRL인 0.7 mg/kg에 비해 소량으로 나타났다. Fluopyram은 0.068 mg/kg, dinotefuran은 0.06 mg/kg으로 모두 배지에서 각각 1건씩 검출되었다. 식물생장조절제로 사용되는 mepiquat chloride는 본 연구에서는 검출되지 않았다. 전체 수집표고 중 소수의 시료에서 잔류농약이 검출되었나, 등록되지 않은 농약은 PLS에 의하면 0.01 ppm이 최대허용치로 구분되어 있어, 후속 연구를 통하여 표고를 비롯한 버섯류의 안전성의 기준 작성에 필수적인 자료를 확보하고자 한다.

• 한국식품위생안전성학회지
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• 제37권4호
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• pp.238-248
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• 2022

본 연구에서는 울산지역에서 유통되는 건조농산물의 잔류농약 실태를 조사하기 위해 150건을 수거하여 잔류농약 분석을 실시하였다. 잔류농약 208항목을 식품공전 다성분 분석법을 이용하여 실시하였으며 29건(19.3%)에서 잔류농약이 검출되었다. 품목별로 분류하면 고추 품목에서 7건, 취나물에서 4건, 곤드레에서 3건, 대추, 무(잎), 가지에서 각 2건, 귤, 부지깽이, 고구마줄기, 여주, 고사리, 무(뿌리), 사과, 감잎차, 고추잎에서 각 1건씩 검출되었다. 검출된 잔류농약을 성분별로 분류하면 살균제성분이 60%, 살충제성분이 23.8%, 살충제, 살비제로 작용하는 성분이 16.3% 검출되어 살균제가 가장 많이 검출되었다. 가장 많이 검출된 잔류농약은 Tebuconazole, Pyraclostrobin, Difenoconazole, Azoxystrobin이다. 분석결과 2건에서 3항목의 잔류농약이 잔류허용기준을 초과하여 부적합으로 판정되었으나, 위해도 평가결과 0.00002-0.3140%범위로 나타나 모두 안전한 것으로 판단되었다.

• 대한본초학회지
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• 제24권2호
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• pp.13-20
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• 2009

Objectives: To compare the contents of hazardous substances before/after a decoction. Methods : The heavy metal contents before/after a decoction were measured by Inductively Coupled Plasma Atomic Emission Spectrometer (ICP-AES) and mercury analyzer. In order to analyze pesticides in 6 samples we used simultaneous multi-residue analysis of pesticides by GC/ECD, which was followed by GC/MSD analysis to confirm the identity of the detected pesticide in each sample. In addition, the contents of sulfur dioxide (S02) were performed by Monier-Williams distillation method. Results : 1. The mean values of heavy metal contents (mg/kg) for the samples were as follows: Socheongryong-tang (before decoction - Pb; 1.115, Cd; 0.179, As; 0.069 and Hg; 0.028, after decoction - Pb; 0.110, Cd; 0.011, As; 0.005 and Hg; 0.002), Insampaedok-san (before decoction - Pb; 1.207, Cd; 0.148, As; 0.171 and Hg; 0.026, after decoction - Pb; 0.075, Cd; 0.006, As; not detected and Hg; O.OOD, Oryung-san (before decoction - Pb; 1.955, Cd; 0.430, As; 0.063 and Hg; 0.027, after decoction - Pb; 0.083, Cd; 0.013, As; 0.006 and Hg; 0.002), Hwangryunhaedok-tang (before decoction - Pb; 1.825, Cd; 0.210, As; 0.050 and Hg; 0.009, after decoction - Pb; 0.107, Cd; 0.010, As; 0.005 and Hg; O.OOD, Bangpungtongseong-san (before decoction - Pb; 1.740, Cd; 0.162, As; 0.585 and Hg; 0.018, after decoction - Pb; 0.041, Cd; 0.006, As; 0.022 and Hg; not detected) and Oyaksungi-san (before decoction - Pb; 1.199, Cd; 0.183, As; 0.321 and Hg; 0.031, after decoction - Pb; 0.096, Cd; 0.008, As; 0.021 and Hg; 0.0004). 2. Contents (mg/kg) of sulfur dioxide (S0$_2$) before a decoction in Socheongryong-tang, Insampaedok-san, Oryung-san, Hwangryunhaedok-tang, Bangpungtongseong-san and Oyaksungi-san exhibited 3.2, 5.7, 4.5, 49.8, 7.8 and 22.4, respectively. However, contents of sulfur dioxide after a decoction in all samples were not detected. 3. Contents (mg/kg) of residual pesticides before/after a decoction in all samples were not detected. Conclusions : These results will be used to establish a criterion of heavy metals, residual pesticides and sulfur dioxide.

• 대한본초학회지
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• 제24권1호
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• pp.111-119
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• 2009

Objectives : To compare the contents of hazardous substances before/after a decoction. Methods : The heavy metal contents before/after a decoction were measured by Inductively Coupled Plasma Atomic Emission Spectrometer (ICP-AES) and mercury analyzer. In order to analyze pesticides in 6 samples we used simultaneous multi-residue analysis of pesticides by GC/ECD, which was followed by GC/MSD analysis to confirm the identity of the detected pesticide in each sample. In addition, the contents of sulfur dioxide (SO2) were performed by Monier-Williams distillation method. Results : 1. The mean values of heavy metal contents (mg/kg) for the samples were as follows: Samchulkunbi-tang (before decoction - Pb; 1.592, Cd; 0.155, As; 0.055 and Hg; 0.014, after decoction - Pb; 0.036, Cd; 0.002, As; not detected and Hg; 0.001), Yijin-tang (before decoction - Pb; 0.830, Cd; 0.077, As; 0.045 and Hg; 0.015, after decoction - Pb; 0.193, Cd; 0.010, As; not detected and Hg; 0.002), Banhabaikchulcheunma-tang (before decoction - Pb; 0.976, Cd; 0.164, As; 0.167 and Hg; 0.019, after decoction - Pb; 0.031, Cd; 0.003, As; 0.006 and Hg; 0.005), Pyungwi-san (before decoction - Pb; 2.162, Cd; 0.128, As; 0.061 and Hg; 0.018, after decoction - Pb; 0.080, Cd; 0.006, As; not detected and Hg; 0.005), Leejung-tang (before decoction - Pb; 1.480, Cd; 0.294, As; 0.034 and Hg; 0.012, after decoction - Pb; 0.064, Cd; 0.007, As; 0.007 and Hg; 0.002) and Kwibi-tang (before decoction - Pb; 0.907, Cd; 0.193, As; 0.085 and Hg; 0.020, after decoction - Pb; 0.072, Cd; 0.006, As; 0.004 and Hg; 0.002). 2. Contents (mg/kg) of sulfur dioxide ($SO_2$) before a decoction in Banhabaikchulcheunma-tang, Pyungwi-san, Leejung-tang and Kwibi-tang exhibited 3.5, 3.4, 3.8 and 12.4, respectively. However, contents of sulfur dioxide after a decoction in all samples were not detected. 3. Contents (mg/kg) of residual pesticides before/after a decoction in all samples were not detected. Conclusions : These results will be used to establish a criterion of heavy metals, residual pesticides and sulfur dioxide.