• Applied Microscopy
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• 제47권1호
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• pp.43-49
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• 2017

A new method was introduced to distinguish the ferrite, bainite and martensite in transformation induced plasticity (TRIP) steel by using electron backscatter diffraction (EBSD) and transmission electron microscopy (TEM). EBSD is a very powerful microstructure analysis technique at the length scales ranging from tens of nanometers to millimeters. However, iron BCC phases such as ferrite, bainite and martensite cannot be easily distinguished by EBSD due to their similar surface morphology and crystallographic structure. Among the various EBSD-based methodology, image quality (IQ) values, which present the perfection of a crystal lattice, was used to distinguish the iron BCC phases. IQ values are very useful tools to discern the iron BCC phases because of their different density of crystal defect and lattice distortion. However, there are still remaining problems that make the separation of bainite and martensite difficult. For instance, these phases have very similar IQ values in many cases, especially in deformed region; therefore, even though the IQ value was used, it has been difficult to distinguish the bainite and martensite. For more precise separation of bainite and martensite, IQ threshold values were determined by a correlative TEM analysis. By determining the threshold values, iron BCC phases were successfully separated.

• 한국결정성장학회지
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• 제25권4호
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• pp.127-134
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• 2015

AlN 단결정은 넓은 밴드갭(6.2 eV), 높은 열 전도도($285W/m{\cdot}K$), 높은 비저항(${\geq}10^{14}{\Omega}{\cdot}cm$), 그리고 높은 기계적 강도와 같은 장점들 때문에 차세대 반도체 적용을 위한 많은 흥미를 끈다. 벌크 AlN 단결정 또는 박막 템플릿(template)들은 주로 PVT(Physical vapor transport)법, 플럭스(flux)법, 용액 성장(solution growth)법, 그리고 증기 액상 증착(HVPE)법에 의해 성장된다. 단결정이 성장하는 동안에 발생하는 결함들 때문에 상업적으로 어려움을 갖게 된 이후로 결함들 분석을 통한 결정 품질 향상은 필수적이다. 격자결함 밀도(EPD)분석은 AlN 표면에 입자간 방위차와 결함이 존재하고 있는 것을 보여준다. 투과전자현미경(TEM)과 전자후방산란회절(EBSD)분석은 전체적인 결정 퀄리티와 다양한 결함의 종류들을 연구하는데 사용된다. 투과전자현미경(TEM)관찰로 AlN의 형태가 적층 결함, 전위, 이차상 등에 의해 크게 영향을 받는 것을 알 수 있었다. 또한 전자후방산란회절(EBSD)분석은 전위의 생성을 유도하는 성장 결함으로서 AlN의 zinc blende 폴리모프(polymorph)가 존재하고 있는 것을 나타내고 있었다.

• Corrosion Science and Technology
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• 제7권3호
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• pp.182-186
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• 2008

The microstructures of the oxide scale developed at high temperature on steels are very complex and their development depends on many factors including time, temperature, oxidation conditions and alloying elements. The classical model of an oxide scale on steel consisting of wüstite, magnetite and haematite layers, is more complicated in reality and its properties change with the factors that affect their development. An understanding of the oxide scale formation and its properties can only be achieved by careful examination of the scale microstructure. The oxide scale microstructure may be difficult to characterise by conventional techniques such as optical or standard scanning electron microscopy. An unambiguous characterisation of the scale and the correct identification of the phases within the scale are difficult unless the crystallographic structure for each phase in the scale is considered and a simultaneous microstructure-microtexture analysis is carried out. In the current study Electron Backscatter Diffraction (EBSD) has been used to investigate the microstructure of iron oxide layers grown on low carbon steels at different times and temperatures. EBSD has proved to be a powerful technique for identifying the individual phases in the oxide scale accurately. The results show that different grain shapes and sizes develop for each phase in the scale depending on time and temperature.

• Applied Microscopy
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• 제43권2호
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• pp.88-97
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• 2013

Technical investigation to figure out the problems arising during in-situ heating electron backscatter diffraction (EBSD) analysis inside scanning electron microscopy (SEM) was carried out. EBSD patterns were successfully acquired up to $830^{\circ}C$ without degradation of EBSD pattern quality in steels. Several technical problems such as image drift and surface microstructure pinning were taking place during in-situ experiments. Image drift problem was successfully prevented in constant current supplying mode. It was revealed that the surface pinning problem was resulted from the $TiO_2$ oxide particle formation during heating inside SEM chamber. Surface pinning phenomenon was fairly reduced by additional platinum and carbon multi-layer coating before in-situ heating experiment, furthermore was perfectly prevented by improvement of vacuum level of SEM chamber via leakage control. Plane view in-situ observation provides better understanding on the overall feature of recrystallization phenomena and cross sectional in-situ observation provides clearer understanding on the recrystallization mechanism.

• Applied Microscopy
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• 제45권3호
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• pp.131-134
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• 2015

Here we show how by processing energy dispersive X-ray spectrometry (EDS) data obtained using highly sensitive, new generation EDS detectors in the AZtec LayerProbe software we can obtain data of sufficiently high quality to non-destructively measure the number of layers in two-dimensional (2D) $MoS_2$ and $MoS_2/WSe_2$ and thereby enable the characterization of working devices based on 2D materials. We compare the thickness measurements with EDS to results from atomic force microscopy measurements. We also show how we can use electron backscatter diffraction (EBSD) to address fabrication challenges of 2D materials. Results from EBSD analysis of individual flakes of exfoliated $MoS_2$ obtained using the Nordlys Nano detector are shown to aid a better understanding of the exfoliation process which is still widely used to produce 2D materials for research purposes.

• 한국결정성장학회지
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• 제28권4호
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• pp.152-158
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• 2018

PVT(Physical vapor transport)법은 고품질의 대면적 웨이퍼를 생산하기에 이점을 가져 질화물계 반도체의 상용화를 위해 많은 연구가 진행되고 있는 단결정 성장 방법이다. 하지만 복잡한 공정 변수들로 인하여 비평형적인 성장 조건을 갖게 될 경우 수많은 결함들이 발생하게 된다. 결정성장 후 어닐링 공정은 결정성 개선을 위해 널리 사용된다. 효과적인 결정성 개선을 위해서는 적절한 온도, 압력과 시간을 설정하는 게 중요하다. 본 연구에서는 PVT법으로 성장된 AlN 단결정 및 어닐링 조건에 따른 단결정의 결정 미세구조 변화를 X-ray topography, Electron Backscattered Diffraction(EBSD), Rietveld refinement를 통해 분석하였다. Synchrotron Whitebeam X-ray topography 분석 결과 어닐링을 진행하지 않은 단결정에 2차상 및 sub grain, impurity가 존재하였으며 이로 인해 결정성이 저하되는 것을 확인 할 수 있었다. EBSD 결과 어닐링을 진행한 시편의 경우 결정립수가 증가함과 동시에 basal plane의 뒤틀림이 일어나는 것을 관찰할 수 있었다. Rietveld refinement 결과 일부 격자들이 a, b, c축 방향으로 응력을 받아 변형된 것으로 분석되었다. 이는 어닐링 과정 중 hot zone 내의 상하 온도구배에 의해 발생한 응력으로 결정립 방향의 뒤틀림이 일어날 뿐만 아니라 격자 상수가 달라진 것으로 분석된다.

• Applied Microscopy
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• 제45권3호
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• pp.183-188
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• 2015

Due to the miniaturization of semiconductor devices, their crystal structure on the nanoscale must be analyzed. However, scanning electron microscope-electron backscatter diffraction (EBSD) has a limitation of resolution in nanoscale and high-resolution electron microscopy (HREM) can be used to analyze restrictive local structural information. In this study, three-dimensional (3D) automated crystal orientation and phase mapping using transmission electron microscopy (TEM) (3D TEM-EBSD) was used to identify the crystal structure relationship between an epitaxially grown CdS interfacial layer and a $Cu(In_xGa_{x-1})Se_2$ (CIGS) solar cell layer. The 3D TEM-EBSD technique clearly defined the crystal orientation and phase of the epitaxially grown layers, making it useful for establishing the growth mechanism of functional nano-materials.

• 한국재료학회지
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• 제24권11호
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• pp.585-590
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• 2014

Microstructural evolution in the thickness direction of an oxygen free copper processed by accumulative rollbonding (ARB) is investigated by electron back scatter diffraction (EBSD) measurement. For the ARB, two copper alloy sheets 1 mm thick, 30 mm wide and 300 mm long are first degreased and wire-brushed for sound bonding. The sheets are then stacked and roll-bonded by about 50% reduction rolling without lubrication at an ambient temperature. The bonded sheet is then cut to the two pieces of the same dimensions and the same procedure was repeated on the sheets up to eight cycles. The specimen after 1 cycle showed inhomogeneous microstructure in the thickness direction so that the grains near the surface were finer than those near the center. This inhomogeneity decreased with an increasing number of ARB cycles, and the grain sizes of the specimens after 3 cycles were almost identical. In addition, the aspect ratio of the grains decreased with an increasing number of ARB cycles due to the subdivision of the grains by shear deformation. The fraction of grains with high angle grain boundaries also increased with continuing process of the ARB so that it was higher than that of the low angle grain boundaries in specimens after 3 cycles. A discontinuous dynamic recrystallization occurred partially in specimens after 5 cycles.

• 한국주조공학회지
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• 제26권3호
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• pp.140-145
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• 2006

Sr, added in the hypereutectic Al-Si alloys, is absorbed on the surfaces of primary Si as well as eutectic Si, and can change the growth mode of primary Si from non-faceted to faceted mode, as the amount of Sr increases larger than 0.04 wt.%, even though it cannot affect the grain size of primary Si, significantly. The EBSD analysis shows that the traction of ${\Sigma}3$ boundary(twin boundary) increases as the amount of Sr in the hypereutectic Al-Si alloys increase until the over-modification occurs at 1.6 wt.%Sr and proves that the change in growth mode of primary Si results from the change of TPRE growth to IIT growth.

• 대한금속재료학회지
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• 제48권9호
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• pp.847-855
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• 2010

The grain size of a cross-section of $8{\mu}m$-thick copper film was determined by electron backscatter diffraction analysis. Grain size distribution histogram showed the presence of a large fraction of small-sized grains, and the mean grain size was significantly affected by handling of them. A cut-off grain size, below which all grains are ignored as noise and eliminated for the calculation of the mean value, should be three or four times as large as the step size. Due to the presence of small grains, the linear intercept method derived larger mean grain size, which depends less sensitively on the cut-off grain size than the equivalent circle diameter method.